JP2004214654A - 二重キャッピング膜を有する半導体素子の配線及びその形成方法 - Google Patents
二重キャッピング膜を有する半導体素子の配線及びその形成方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 42
- 239000004065 semiconductor Substances 0.000 title claims abstract description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 33
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 28
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 28
- 238000005530 etching Methods 0.000 claims abstract description 12
- 229910052751 metal Inorganic materials 0.000 claims description 42
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- 229910000881 Cu alloy Inorganic materials 0.000 claims description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 238000011065 in-situ storage Methods 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 230000009467 reduction Effects 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000005121 nitriding Methods 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
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- 229910052709 silver Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
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- 239000006185 dispersion Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
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- 229910052749 magnesium Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
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- 238000012545 processing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004200 TaSiN Inorganic materials 0.000 description 1
- 229910008482 TiSiN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910008807 WSiN Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
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- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Abstract
【解決手段】 Cuダマシン配線としてCMPされたCu上にシリコンナイトライド/シリコンカーバイドの二重膜がキャッピング膜として形成された半導体素子の配線である。本発明によれば、シリコンカーバイドの長所である高いエッチング選択比と低い誘電率とを保持しつつシリコンナイトライドの長所である良好な漏れ抑制特性を同時に確保できる。
【選択図】 図5
Description
105 層間絶縁膜
110,115,120,125 絶縁膜
130 ビアトレンチ
135 導線トレンチ
140 溝
150 バリアメタル膜
160 金属層
170 配線
175 プラズマ処理
180 シリコンナイトライド
185 シリコンカーバイド
190 キャッピング膜
Claims (16)
- 内部に配線形態の溝を有する層間絶縁膜と、
前記溝内壁上のバリアメタル膜と、
前記バリアメタル膜上に前記溝を埋め込みつつ前記層間絶縁膜の上面と平行した上面を有して配線をなす金属層と、
前記層間絶縁膜と金属層上面とを被覆するキャッピング膜であり、シリコンナイトライドとシリコンカーバイドとが順次積層された二重膜からなるキャッピング膜とを含むことを特徴とする半導体素子の配線。 - 前記金属層はCuまたはCu合金であることを特徴とする請求項1に記載の半導体素子の配線。
- 前記バリアメタル膜はチタン、タンタル、タングステンまたはそれらの窒化物であることを特徴とする請求項1に記載の半導体素子の配線。
- 前記配線はビアまたは導線からなるダマシン配線であることを特徴とする請求項1に記載の半導体素子の配線。
- 前記配線はビアとその上に重畳された導線からなるダマシン配線であることを特徴とする請求項1に記載の半導体素子の配線。
- 前記シリコンナイトライドとシリコンカーバイドとはそれぞれ10〜1000Åの厚さを有することを特徴とする請求項1に記載の半導体素子の配線。
- (a)基板上に層間絶縁膜を形成する段階と、
(b)前記層間絶縁膜をエッチングして配線形態の溝を形成する段階と、
(c)前記溝が形成された結果物上にバリアメタル膜を形成する段階と、
(d)前記バリアメタル膜上に金属層を形成して前記溝を埋め込む段階と、
(e)前記層間絶縁膜が露出されるまで前記金属層が形成された結果物の上面を平坦化させる段階と、
(f)前記平坦化された結果物上にシリコンナイトライドとシリコンカーバイドとを順に積層してキャッピング膜を形成する段階とを含むことを特徴とする半導体素子の配線形成方法。 - 前記段階(e)と(f)間に前記平坦化された結果物の表面をプラズマ処理する段階をさらに含むことを特徴とする請求項7に記載の半導体素子の配線形成方法。
- 前記プラズマ処理は前記金属層の還元のために水素系プラズマを使用することを特徴とする請求項8に記載の半導体素子の配線形成方法。
- 前記プラズマ処理は前記金属層の還元及び表面窒化のためにNH3を含んだプラズマを使用することを特徴とする請求項8に記載の半導体素子の配線形成方法。
- 前記金属層としてCuまたはCu合金をCVD、スパッタリングまたはメッキ法で形成することを特徴とする請求項7に記載の半導体素子の配線形成方法。
- 前記シリコンナイトライドはPECVD法で形成し、10〜1000Åの厚さを有するように形成することを特徴とする請求項7に記載の半導体素子の配線形成方法。
- 前記シリコンカーバイドはPECVD法で形成し、10〜1000Åの厚さを有するように形成することを特徴とする請求項7に記載の半導体素子の配線形成方法。
- 前記溝はビアトレンチまたは導線トレンチからなるように形成することを特徴とする請求項7に記載の半導体素子の配線形成方法。
- 前記溝はビアトレンチとその上に重畳された導線トレンチからなるように形成することを特徴とする請求項7に記載の半導体素子の配線形成方法。
- 前記段階(e)と(f)間に前記金属層の還元及び表面窒化のためにNH3を含むプラズマを使用してプラズマ処理する段階をさらに含み、前記プラズマ処理する段階と前記段階(f)とはインサイチュで行うことを特徴とする請求項7に記載の半導体素子の配線形成方法。
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US7205666B2 (en) | 2007-04-17 |
US20040135261A1 (en) | 2004-07-15 |
CN100350604C (zh) | 2007-11-21 |
US20070138642A1 (en) | 2007-06-21 |
CN1516276A (zh) | 2004-07-28 |
KR20040060447A (ko) | 2004-07-06 |
KR100459733B1 (ko) | 2004-12-03 |
US20060163736A1 (en) | 2006-07-27 |
US7037835B2 (en) | 2006-05-02 |
US7605472B2 (en) | 2009-10-20 |
US7951712B2 (en) | 2011-05-31 |
US20100003814A1 (en) | 2010-01-07 |
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