JP2004200302A5 - - Google Patents

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Publication number
JP2004200302A5
JP2004200302A5 JP2002365336A JP2002365336A JP2004200302A5 JP 2004200302 A5 JP2004200302 A5 JP 2004200302A5 JP 2002365336 A JP2002365336 A JP 2002365336A JP 2002365336 A JP2002365336 A JP 2002365336A JP 2004200302 A5 JP2004200302 A5 JP 2004200302A5
Authority
JP
Japan
Prior art keywords
avalanche photodiode
conductivity type
layer
light absorption
thermal diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002365336A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004200302A (ja
JP4166560B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002365336A priority Critical patent/JP4166560B2/ja
Priority claimed from JP2002365336A external-priority patent/JP4166560B2/ja
Publication of JP2004200302A publication Critical patent/JP2004200302A/ja
Publication of JP2004200302A5 publication Critical patent/JP2004200302A5/ja
Application granted granted Critical
Publication of JP4166560B2 publication Critical patent/JP4166560B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2002365336A 2002-12-17 2002-12-17 アバランシェフォトダイオード及びその製造方法 Expired - Lifetime JP4166560B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002365336A JP4166560B2 (ja) 2002-12-17 2002-12-17 アバランシェフォトダイオード及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002365336A JP4166560B2 (ja) 2002-12-17 2002-12-17 アバランシェフォトダイオード及びその製造方法

Publications (3)

Publication Number Publication Date
JP2004200302A JP2004200302A (ja) 2004-07-15
JP2004200302A5 true JP2004200302A5 (enExample) 2005-08-25
JP4166560B2 JP4166560B2 (ja) 2008-10-15

Family

ID=32762917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002365336A Expired - Lifetime JP4166560B2 (ja) 2002-12-17 2002-12-17 アバランシェフォトダイオード及びその製造方法

Country Status (1)

Country Link
JP (1) JP4166560B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4609430B2 (ja) * 2004-10-25 2011-01-12 三菱電機株式会社 アバランシェフォトダイオード
JP5045436B2 (ja) 2005-05-18 2012-10-10 三菱電機株式会社 アバランシェフォトダイオード
JP4956944B2 (ja) * 2005-09-12 2012-06-20 三菱電機株式会社 アバランシェフォトダイオード
JP4985298B2 (ja) * 2007-10-10 2012-07-25 三菱電機株式会社 アバランシェフォトダイオード
JP2010135360A (ja) * 2008-12-02 2010-06-17 Mitsubishi Electric Corp アバランシェフォトダイオード
WO2020202557A1 (ja) 2019-04-05 2020-10-08 三菱電機株式会社 半導体受光素子及び半導体受光素子製造方法
JP7602346B2 (ja) * 2020-10-14 2024-12-18 浜松ホトニクス株式会社 光センサ

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