JP4166560B2 - アバランシェフォトダイオード及びその製造方法 - Google Patents

アバランシェフォトダイオード及びその製造方法 Download PDF

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Publication number
JP4166560B2
JP4166560B2 JP2002365336A JP2002365336A JP4166560B2 JP 4166560 B2 JP4166560 B2 JP 4166560B2 JP 2002365336 A JP2002365336 A JP 2002365336A JP 2002365336 A JP2002365336 A JP 2002365336A JP 4166560 B2 JP4166560 B2 JP 4166560B2
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layer
conductivity type
type
electric field
avalanche photodiode
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JP2002365336A
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JP2004200302A (ja
JP2004200302A5 (enExample
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栄治 柳生
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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JP2002365336A 2002-12-17 2002-12-17 アバランシェフォトダイオード及びその製造方法 Expired - Lifetime JP4166560B2 (ja)

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JP2002365336A JP4166560B2 (ja) 2002-12-17 2002-12-17 アバランシェフォトダイオード及びその製造方法

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JP2002365336A JP4166560B2 (ja) 2002-12-17 2002-12-17 アバランシェフォトダイオード及びその製造方法

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JP2004200302A JP2004200302A (ja) 2004-07-15
JP2004200302A5 JP2004200302A5 (enExample) 2005-08-25
JP4166560B2 true JP4166560B2 (ja) 2008-10-15

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11862747B2 (en) 2019-04-05 2024-01-02 Mitsubishi Electric Corporation Semiconductor light-receiving element and method of manufacturing semiconductor light-receiving element

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4609430B2 (ja) * 2004-10-25 2011-01-12 三菱電機株式会社 アバランシェフォトダイオード
JP5045436B2 (ja) 2005-05-18 2012-10-10 三菱電機株式会社 アバランシェフォトダイオード
JP4956944B2 (ja) * 2005-09-12 2012-06-20 三菱電機株式会社 アバランシェフォトダイオード
JP4985298B2 (ja) * 2007-10-10 2012-07-25 三菱電機株式会社 アバランシェフォトダイオード
JP2010135360A (ja) * 2008-12-02 2010-06-17 Mitsubishi Electric Corp アバランシェフォトダイオード
JP7602346B2 (ja) * 2020-10-14 2024-12-18 浜松ホトニクス株式会社 光センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11862747B2 (en) 2019-04-05 2024-01-02 Mitsubishi Electric Corporation Semiconductor light-receiving element and method of manufacturing semiconductor light-receiving element

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JP2004200302A (ja) 2004-07-15

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