JP2004193598A5 - - Google Patents

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Publication number
JP2004193598A5
JP2004193598A5 JP2003397651A JP2003397651A JP2004193598A5 JP 2004193598 A5 JP2004193598 A5 JP 2004193598A5 JP 2003397651 A JP2003397651 A JP 2003397651A JP 2003397651 A JP2003397651 A JP 2003397651A JP 2004193598 A5 JP2004193598 A5 JP 2004193598A5
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JP
Japan
Prior art keywords
pattern
gate
region
insulating film
memory device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003397651A
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English (en)
Japanese (ja)
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JP2004193598A (ja
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Publication date
Application filed filed Critical
Priority to JP2003397651A priority Critical patent/JP2004193598A/ja
Priority claimed from JP2003397651A external-priority patent/JP2004193598A/ja
Publication of JP2004193598A publication Critical patent/JP2004193598A/ja
Publication of JP2004193598A5 publication Critical patent/JP2004193598A5/ja
Withdrawn legal-status Critical Current

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JP2003397651A 2002-11-28 2003-11-27 不揮発性半導体記憶装置及びその製造方法 Withdrawn JP2004193598A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003397651A JP2004193598A (ja) 2002-11-28 2003-11-27 不揮発性半導体記憶装置及びその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002345456 2002-11-28
JP2003397651A JP2004193598A (ja) 2002-11-28 2003-11-27 不揮発性半導体記憶装置及びその製造方法

Publications (2)

Publication Number Publication Date
JP2004193598A JP2004193598A (ja) 2004-07-08
JP2004193598A5 true JP2004193598A5 (enExample) 2007-01-18

Family

ID=32774851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003397651A Withdrawn JP2004193598A (ja) 2002-11-28 2003-11-27 不揮発性半導体記憶装置及びその製造方法

Country Status (1)

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JP (1) JP2004193598A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006066702A (ja) * 2004-08-27 2006-03-09 Renesas Technology Corp 半導体装置の製造方法
JP2006121009A (ja) * 2004-10-25 2006-05-11 Renesas Technology Corp 半導体記憶装置およびその製造方法
JP5623849B2 (ja) * 2010-09-24 2014-11-12 ラピスセミコンダクタ株式会社 半導体集積回路装置の製造方法
WO2019036525A2 (en) * 2017-08-14 2019-02-21 Component Re-Engineering Company, Inc. METHOD FOR ASSEMBLING QUARTZ PARTS AND QUARTZ ELECTRODES AND OTHER ASSEMBLED QUARTZ DEVICES

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