JP2004128500A - 集積回路用のシリコンリッチ低熱収支窒化ケイ素 - Google Patents
集積回路用のシリコンリッチ低熱収支窒化ケイ素 Download PDFInfo
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- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 116
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 94
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract description 41
- 229910052710 silicon Inorganic materials 0.000 title abstract description 41
- 239000010703 silicon Substances 0.000 title abstract description 41
- 238000000034 method Methods 0.000 claims abstract description 64
- 239000001257 hydrogen Substances 0.000 claims abstract description 60
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 60
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 52
- 229910052796 boron Inorganic materials 0.000 claims abstract description 52
- 230000008569 process Effects 0.000 claims abstract description 46
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 33
- 229920005591 polysilicon Polymers 0.000 claims description 32
- 239000004065 semiconductor Substances 0.000 claims description 27
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 22
- 238000012545 processing Methods 0.000 claims description 17
- 229910052757 nitrogen Inorganic materials 0.000 claims description 15
- 238000005516 engineering process Methods 0.000 claims description 10
- 239000002019 doping agent Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 7
- 238000001289 rapid thermal chemical vapour deposition Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 3
- UMVBXBACMIOFDO-UHFFFAOYSA-N [N].[Si] Chemical group [N].[Si] UMVBXBACMIOFDO-UHFFFAOYSA-N 0.000 claims 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 23
- 125000006850 spacer group Chemical group 0.000 abstract description 19
- 238000009792 diffusion process Methods 0.000 abstract description 17
- 150000004767 nitrides Chemical class 0.000 abstract description 11
- 230000002829 reductive effect Effects 0.000 description 20
- 230000035515 penetration Effects 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 10
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 9
- 230000002411 adverse Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000000873 masking effect Effects 0.000 description 4
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 238000009877 rendering Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
【解決手段】 低熱収支シリコンリッチ窒化ケイ素膜は、N−H結合の水素濃度の少なくとも1.5倍であるSi−H結合の水素濃度を含むことが可能である。窒化ケイ素膜は、ホウ素拡散を通例促進する高温処理作業を使用してホウ素ドープ装置を処理するとき、そのような装置におけるホウ素拡散を抑制する。低熱収支シリコンリッチ窒化ケイ素膜は、CMOS装置にスペーサを形成するために使用することが可能であり、密に実装されたSRAMアレイにおける短絡を防止するために、誘電体スタックの一部として使用することが可能であり、ベースをエミッタから絶縁するベース窒化物層および/または窒化物スペーサを形成するために、BiCMO処理において使用することが可能である。
【選択図】図1
Description
Claims (23)
- 窒素−水素結合のN−H濃度の少なくとも1.5倍であるケイ素−水素結合のSi−H濃度を有することを特徴とするSiN材料を含む半導体製品。
- 半導体製品が、ポリシリコン・ゲートを含むゲート構造と、前記ゲート構造に隣接して形成された窒化ケイ素スペーサとを有する半導体MOSトランジスタを備え、前記窒化ケイ素スペーサが、窒素−ケイ素結合のN−H濃度の少なくとも1.5倍である窒素−水素結合のSi−H濃度を有することを特徴とする前記SiN材料で形成される、請求項1に記載の半導体製品。
- 前記ポリシリコン・ゲートが、内部にドーパント不純物としてホウ素を含む、請求項2に記載の半導体製品。
- 前記ポリシリコン・ゲートが、少なくとも1e19原子/cm3であるホウ素ドーパント不純物濃度を含む、請求項2に記載の半導体製品。
- 前記Si−H濃度が、1e20〜5e20原子/cm3の範囲内にあり、前記N−H濃度が、5e19〜8e19原子/cm3の範囲内にある、請求項2に記載の半導体製品。
- ベースと、エミッタと、前記ベースを前記エミッタから絶縁するSiN材料とを備えるバイポーラ・トランジスタであって、前記SiN材料が、窒素−水素結合のN−H濃度の少なくとも1.5倍である窒素−水素結合のSi−H濃度を内部に有することを特徴とする、バイポーラ・トランジスタ。
- 前記ベースが、ホウ素ドープ・ポリシリコン・セクションとSiGeセクションとで形成され、前記エミッタが、ポリシリコン材料で形成される、請求項6に記載のバイポーラ・トランジスタ。
- 前記ベースが、開口を内部に有するホウ素ドープ・ポリシリコン膜を含み、前記開口が、側壁を含み、前記SiN材料が、前記側壁に沿って形成された少なくとも1つの窒化ケイ素スペーサを備え、前記エミッタが、前記開口内において延びる半導体材料で形成され、かつ少なくとも前記少なくとも1つの窒化ケイ素スペーサによって前記ベースから絶縁される、請求項6に記載のバイポーラ・トランジスタ。
- 前記エミッタが、前記ベースと重なるセクションを含むポリシリコン材料で形成され、前記ベースが、ホウ素ドープ・ポリシリコンで形成され、前記SiN材料が、前記エミッタの前記セクションと前記ベースの間に垂直に挿入された窒化ケイ素膜を備える、請求項6に記載のバイポーラ・トランジスタ。
- 前記SiN材料が、1e20〜5e20原子/cm3の範囲内の前記SiH濃度と、5e19〜8e19原子/cm3の範囲内の前記N−H濃度とを含む、請求項6に記載のバイポーラ・トランジスタ。
- 前記バイポーラ・トランジスタが、集積回路の一部として基板の上に形成され、かつ前記集積回路の前記基板の上に形成された少なくとも1つのMOSトランジスタをさらに備え、前記SiN材料が、前記少なくとも1つのMOSトランジスタの上に延びる膜を形成する、請求項6に記載のバイポーラ・トランジスタ。
- 基板の上に形成されたCMOSトランジスタと、
前記CMOSトランジスタの上に形成され、かつ窒素−水素結合のN−H濃度の少なくとも1.5倍である窒素−水素結合のSiH濃度を内部に有することを特徴とするSiN膜を含む誘電体膜スタックであって、前記SiN膜が前記SiN膜の膜厚さより厚い前記ゲートに隣接する垂直寸法を含むように、共形であり、かつ前記CMOSトランジスタのゲートの上に延びる誘電体膜スタックとを備える半導体製品。 - 前記誘電体膜スタックが、10000オングストローム程度の厚さを有する上方酸化物膜と、下方TEOS膜と、その間に挿入された前記SiN膜とを含む、請求項12に記載の半導体製品。
- 前記誘電体膜スタックが、上方酸化物膜と、下方TEOS膜と、その間に挿入された前記SiN膜とを含み、前記上方酸化物膜を通過して延び、かつ前記SiN膜に接する接触開口をさらに備える、請求項12に記載の半導体製品。
- BiCMOS処理技術を使用して、半導体装置を製造する方法であって、
少なくとも1つのCMOSトランジスタを基板の第1領域の上に提供すること、
SiN膜を前記第1領域の前記少なくとも1つのCMOSトランジスタの上に形成し、前記SiN膜が、窒素−水素結合のN−H濃度の少なくとも1.5倍であるケイ素−水素結合のSi−H濃度を内部に有することを特徴とすること、
バイポーラ・トランジスタを前記基板の第2領域において形成することを備える方法。 - SiN膜を前記形成することが、750℃より高くない温度と、約1分の時間とを含むRTCVDプロセスを備える、請求項15に記載の方法。
- 前記提供することが、ポリシリコン・ゲートを形成すること、前記ポリシリコン・ゲートにホウ素をドープすることを含む、請求項15に記載の方法。
- 前記SiN膜が、1e20〜5e20原子/cm3の範囲内の前記Si−H濃度と、5e19〜8e19原子/cm3の範囲内の前記N−H濃度とを含む、請求項15に記載の方法。
- バイポーラ・トランジスタを前記形成することが、約800℃の温度でSiGe膜をエピタキシャルに形成することを含む、請求項15に記載の方法。
- バイポーラ・トランジスタを前記形成することが、750℃を超えない温度で約1分間、RTCVDプロセスを使用して、少なくとも1つの他のSiN膜を形成することを含み、前記他のSiN膜が、窒素−水素結合のN−H濃度の少なくとも1.5倍であるケイ素−水素結合のSi−H濃度を内部に有する、請求項15に記載の方法。
- SiN膜を前記形成することが、前記SiN膜を前記第2領域に形成すること、前記バイポーラ・トランジスタを形成するために、前記第2領域の前記SiN膜を使用することを含む、請求項15に記載の方法。
- バイポーラ・トランジスタを前記形成することが、ホウ素ドープ・ポリシリコンのベース層を形成すること、SiGeのベース部分を形成すること、前記SiN膜を前記ベース層の上に形成すること、エミッタ層を前記SiN膜の上に形成することを含む、請求項15に記載の方法。
- バイポーラ・トランジスタを前記形成することが、前記エミッタ層を前記形成することの前に、前記SiN膜および前記ベース層を通過して延び、側壁を含む開口を形成すること、前記側壁に沿って少なくとも1つの窒化ケイ素スペーサを形成することをさらに備え、前記少なくとも1つの窒化ケイ素スペーサが、窒素−水素結合のN−H濃度の少なくとも1.5倍であるケイ素−水素結合のSi−H濃度を内部に有することを特徴とする、請求項22に記載の方法。
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US10/261,463 US6940151B2 (en) | 2002-09-30 | 2002-09-30 | Silicon-rich low thermal budget silicon nitride for integrated circuits |
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JP2008166518A (ja) * | 2006-12-28 | 2008-07-17 | Toshiba Corp | 不揮発性半導体記憶装置 |
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JP4186725B2 (ja) * | 2003-06-24 | 2008-11-26 | トヨタ自動車株式会社 | 光電変換素子 |
US7397073B2 (en) * | 2004-11-22 | 2008-07-08 | International Business Machines Corporation | Barrier dielectric stack for seam protection |
US20060138604A1 (en) * | 2004-12-27 | 2006-06-29 | Northrop Grumman Corporation | Low charging dielectric for capacitive MEMS devices and method of making same |
US20070111403A1 (en) * | 2005-11-15 | 2007-05-17 | Chun Jiang | Polycide fuse with reduced programming time |
US7755197B2 (en) * | 2006-02-10 | 2010-07-13 | Macronix International Co., Ltd. | UV blocking and crack protecting passivation layer |
US7662712B2 (en) * | 2006-02-10 | 2010-02-16 | Macronix International Co., Ltd. | UV blocking and crack protecting passivation layer fabricating method |
US7943452B2 (en) * | 2006-12-12 | 2011-05-17 | International Business Machines Corporation | Gate conductor structure |
US7456061B2 (en) * | 2007-03-30 | 2008-11-25 | Agere Systems Inc. | Method to reduce boron penetration in a SiGe bipolar device |
US8129234B2 (en) * | 2009-09-09 | 2012-03-06 | International Business Machines Corporation | Method of forming bipolar transistor integrated with metal gate CMOS devices |
US8951853B1 (en) * | 2010-03-10 | 2015-02-10 | Samsung Electronics Co., Ltd. | Method of forming semiconductor device using Si-H rich silicon nitride layer |
CN115000225B (zh) * | 2022-07-29 | 2022-11-04 | 中国华能集团清洁能源技术研究院有限公司 | 隔离型内串联式异质结电池及其制作方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63209130A (ja) * | 1987-02-25 | 1988-08-30 | Nec Corp | 半導体装置 |
JPH08264555A (ja) * | 1995-03-28 | 1996-10-11 | Nec Corp | 半導体装置及びその製造方法 |
JPH0969580A (ja) * | 1995-08-30 | 1997-03-11 | Nec Corp | Bi−CMOS半導体装置およびその製造方法 |
JP2002009278A (ja) * | 2000-06-21 | 2002-01-11 | Toshiba Corp | 半導体装置及びその製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5107323A (en) * | 1988-12-22 | 1992-04-21 | At&T Bell Laboratories | Protective layer for high voltage devices |
US4962065A (en) * | 1989-02-13 | 1990-10-09 | The University Of Arkansas | Annealing process to stabilize PECVD silicon nitride for application as the gate dielectric in MOS devices |
FR2756101B1 (fr) * | 1996-11-19 | 1999-02-12 | Sgs Thomson Microelectronics | Procede de fabrication d'un transistor npn dans une technologie bicmos |
JPH1174485A (ja) * | 1997-06-30 | 1999-03-16 | Toshiba Corp | 半導体装置およびその製造方法 |
EP0928015A3 (en) | 1997-12-31 | 2003-07-02 | Texas Instruments Incorporated | Method of preventing boron penetration |
US6630413B2 (en) | 2000-04-28 | 2003-10-07 | Asm Japan K.K. | CVD syntheses of silicon nitride materials |
JP2002198526A (ja) * | 2000-12-27 | 2002-07-12 | Fujitsu Ltd | 半導体装置の製造方法 |
-
2002
- 2002-09-30 US US10/261,463 patent/US6940151B2/en not_active Expired - Lifetime
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2003
- 2003-09-17 GB GB0321799A patent/GB2395359B/en not_active Expired - Fee Related
- 2003-09-24 TW TW092126350A patent/TWI315909B/zh not_active IP Right Cessation
- 2003-09-26 JP JP2003334760A patent/JP2004128500A/ja active Pending
- 2003-09-30 KR KR1020030067962A patent/KR20040029285A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63209130A (ja) * | 1987-02-25 | 1988-08-30 | Nec Corp | 半導体装置 |
JPH08264555A (ja) * | 1995-03-28 | 1996-10-11 | Nec Corp | 半導体装置及びその製造方法 |
JPH0969580A (ja) * | 1995-08-30 | 1997-03-11 | Nec Corp | Bi−CMOS半導体装置およびその製造方法 |
JP2002009278A (ja) * | 2000-06-21 | 2002-01-11 | Toshiba Corp | 半導体装置及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008166518A (ja) * | 2006-12-28 | 2008-07-17 | Toshiba Corp | 不揮発性半導体記憶装置 |
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US20040061179A1 (en) | 2004-04-01 |
GB2395359B (en) | 2006-01-04 |
GB0321799D0 (en) | 2003-10-15 |
TWI315909B (en) | 2009-10-11 |
KR20040029285A (ko) | 2004-04-06 |
TW200417014A (en) | 2004-09-01 |
US6940151B2 (en) | 2005-09-06 |
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