JP2004111847A - Substrate for mounting electronic component - Google Patents

Substrate for mounting electronic component Download PDF

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Publication number
JP2004111847A
JP2004111847A JP2002275703A JP2002275703A JP2004111847A JP 2004111847 A JP2004111847 A JP 2004111847A JP 2002275703 A JP2002275703 A JP 2002275703A JP 2002275703 A JP2002275703 A JP 2002275703A JP 2004111847 A JP2004111847 A JP 2004111847A
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Japan
Prior art keywords
brazing
electronic component
metal frame
mounting
layer
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Pending
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JP2002275703A
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Japanese (ja)
Inventor
Naoto Shibuichi
澁市 直人
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Kyocera Corp
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Kyocera Corp
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Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2002275703A priority Critical patent/JP2004111847A/en
Publication of JP2004111847A publication Critical patent/JP2004111847A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate for mounting electronic component which can obtain an electronic device of high airtight reliability. <P>SOLUTION: The substrate for mounting electronic component has a mount part 4 for mounting an electronic component 7 in the central part of the upper surface of a substantially square insulating substrate 1 and a substantially square frame-like brazing metallized layer 2 in an outer circumferential part, and is formed by bonding a metallic frame body 6 to the brazing metallized layer 2 by a brazing material. In the substrate for mounting an electronic component, the central part of a pair of facing inner circumferential sides of the brazing metallized layer 2 projects toward the mount part 4 and the projecting portion 5 is covered with the brazing material. It is possible to form a fillet 10 of the brazing material sufficiently between the projecting portion 5 and the metallic frame body 6 for reinforcing junction between the brazing metallized layer 2 and the metallic frame body 6, so that the metallic frame body 6 can be prevented from peeling due to the stress in seam weld. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、内部に電子部品を収容するための電子部品収納用パッケージに用いられる小型の電子部品搭載用基板に関するものである。
【0002】
【従来の技術】
従来、半導体素子や圧電振動子等の電子部品を収容するための電子部品収納用パッケージに用いられる小型の電子部品搭載用基板は、酸化アルミニウム質焼結体や窒化アルミニウム質焼結体,ムライト質焼結体,ガラスセラミックス等のセラミックス材料から成り、その上面中央部に電子部品を収容するための凹状の搭載部を有するとともにこの搭載部内から下面外周部にかけて導出する複数のメタライズ配線導体および上面に搭載部を取り囲むように被着された四角枠状のろう付け用メタライズ層を有する絶縁基板と、この絶縁基板のろう付け用メタライズ層に搭載部を取り囲むようにして銀ろう等のろう材を介してろう付けされた鉄−ニッケル−コバルト合金等の金属から成る略四角枠状の封止用金属枠体とから構成されている。
【0003】
そして、この従来の電子部品搭載用基板によれば、絶縁基体の搭載部の底面に電子部品を搭載するとともにこの電子部品の電極を搭載部内のメタライズ配線導体に例えばワイヤボンディング等の電気的接続手段を介して電気的に接続し、しかる後、封止用金属枠体の上面に金属蓋体をシームウエルド法により溶接することによって絶縁基体と封止用金属枠体と金属蓋体とから成る容器の内部に電子部品が気密に封止され、それにより製品としての電子装置となる。
【0004】
ろう付け用メタライズ層と金属枠体とのろう付けは、ろう付け用メタライズ層上に金属枠体を、銀ろう等のろう材のプリフォームを介して位置決めセットし、ろう付け用の炉中で加熱し、ろう材をろう付け用メタライズ層と金属枠体との間に濡れ広がらせるとともにろう材の一定量が金属枠体の側面にフィレットを形成するように這い上がらせることにより行なわれる。
【0005】
【特許文献1】
特開2001−291796号公報
【0006】
【発明が解決しようとする課題】しかしながら、このような電子部品搭載用基板においては、電子装置の小型化の要求に伴い、その大きさが数mm角程度の極めて小さなものとなってきており、そのろう付け用メタライズ層の幅も300μm以下と極めて狭くなってきている。また、この電子部品搭載用基板の外形寸法と比較して、収納する電子部品の寸法を大きくできるように、そのろう付け用メタライズ層の幅を極めて狭くとるようになってきている。
【0007】
そして、このように幅が0.2〜0.5mm程度の幅の狭いろう付け用メタライズ層に幅が0.15〜0.45mm程度の封止用金属枠体をろう付けして成る電子部品搭載用基板においては、ろう付け用メタライズ層と金属枠体との接合面の幅が狭いこと、およびろう付け用メタライズ層の縁辺部と金属枠体の縁辺部との間の距離が0.05mm〜0.35mmと非常に狭く、この狭い領域にろう材のフィレットが十分に形成され難いこと等から、封止用金属枠体上に金属蓋体をシームウエルド法により溶接すると、溶接後に封止用金属枠体および金属蓋体が大きく熱収縮することによって発生する応力がろう付け用メタライズ層に大きく印加され、この応力によってろう付け用メタライズ層から金属枠体が剥離してしまい、この電子部品搭載用基板を使用した電子装置の気密信頼性が著しく低下してしまうことがあるという問題点を有していた。
【0008】
なお、通常は、絶縁基板の小型化を図るため、および収納する電子部品に対する収納容量を極力大きく確保するために、ろう付け用メタライズ層と金属枠体とは、少なくともその二辺の内周壁面が上下に同一面になるように形成されているので、この内周壁面側において特にロウ材のフィレットが形成されにくくなっており、金属枠体のろう付け用メタライズ層との接合は、この内周壁面側が弱いものとなっている。
【0009】
本発明は、かかる問題点に鑑み案出されたものであり、その目的は、金属蓋体を封止用金属枠体にシームウエルド法等により溶接した後、封止用金属枠体および金属蓋体が大きく熱収縮することによってろう付け用メタライズ金属層に大きな応力が印加されたとしても、封止用金属枠体と絶縁基板が剥離することがなく、得られる電子装置の気密封止を完全とし、内部に収容する電子部品を長期間にわたり正常、かつ安定に作動させることを可能とした気密信頼性の高い電子装置を得ることができる、電子部品収納用パッケージに好適な電子部品搭載用基板を提供することにある。
【0010】
【課題を解決するための手段】
本発明の電子部品搭載用基板は、略四角形状の絶縁基板の上面の中央部に電子部品を搭載するための搭載部を有するとともに外周部に略四角枠状のろう付け用メタライズ層を有し、このろう付け用メタライズ層に金属枠体をろう材により接合して成る電子部品搭載用基板であって、前記ろう付け用メタライズ層の向かい合った一対の内周辺の中央部が前記搭載部に向かって突出しており、これら突出した部位が前記ろう材により覆われていることを特徴とするものである。
【0011】
本発明の電子部品搭載用基板によれば、金属枠体をろう付けするためのろう付け用メタライズ層の向かい合った一対の内周辺の中央部に、互いに向かい合うように搭載部に向かって突出した部位を設けており、その突出した部位がろう材により覆われていることから、その突出した部位と金属枠体とは、ろう付け用メタライズ層の外周部と同様にろう材のフィレットを形成して接合されることとなるので、封止用金属枠体にシームウエルド法により金属蓋体を接合した後、封止用金属枠体および金属蓋体が熱収縮することにより発生する応力が、ろう付け用メタライズ層に印加されたとしても、その応力はろう付け用メタライズ層の突出した部位および外周部のろう材のフィレットに良好に分散され、その結果、封止用金属枠体が絶縁基板から剥離することを有効に防止できるとともに、ろう付け用メタライズ層が絶縁基板から剥離することも有効に防止することができる。
【0012】
【発明の実施の形態】
次に、本発明の電子部品搭載用基板を添付の図面を基に説明する。
【0013】
図1(a)は本発明の電子部品搭載用基板の実施の形態の一例を示した上面図であり、図1(b)はその断面図である。これらの図において、1は絶縁基板、2はろう付け用メタライズ層、3はメタライズ配線導体、4は電子部品7を搭載するための搭載部、5はろう付け用メタライズ層2のうち搭載部4に向かって突出した部位、6は金属枠体である。
【0014】
絶縁基板1は、酸化アルミニウム質焼結体や窒化アルミニウム質焼結体,ムライト質焼結体,ガラスセラミックス等のセラミックス材料から成る3層のセラミック層を積層して成り、例えば一辺の長さが2〜20mm程度で厚みが0.5〜3mm程度の略四角形状である。そして、その上面中央部に電子部品を搭載・収容するための略四角形の凹状の搭載部4が設けてあり、この搭載部4から側面を介して下面にかけては、タングステンやモリブデン,銅,銀等の金属粉末メタライズから成る複数のメタライズ配線導体3が被着形成されている。
【0015】
また、絶縁基体1の上面には、凹状の搭載部4を取り囲むようにして、タングステンやモリブデン,銅,銀等の金属粉末メタライズから成る略四角枠状のろう付け用メタライズ層2が、絶縁基板1の外周から0.05〜0.2mm程度離間して被着形成されている。なお、この例では、絶縁基板1は3層のセラミック層を積層することにより形成されているが、絶縁基板1は4層以上のセラミック層を積層することにより形成されていてもよい。
【0016】
このような絶縁基板1は、セラミック層が酸化アルミニウム質焼結体から成りかつメタライズ配線導体5およびろう付け用メタライズ層6がタングステンメタライズから成る場合であれば、酸化アルミニウム,酸化珪素,酸化マグネシウム,酸化カルシウム等の原料粉末に適当な有機バインダ,溶剤,可塑剤等を添加混合して泥漿状となすとともに、これを例えばドクターブレード法等のシート成形法によりシート状となすことにより複数枚のセラミックグリーンシートを得て、次にそれらのセラミックグリーンシートに適当な打ち抜き加工を施すとともにメタライズ配線導体3やろう付け用メタライズ層2となる金属ペーストを印刷塗布し、しかる後、それらのセラミックグリーンシートを上下に積層するとともにその積層体を焼成することにより製作される。
【0017】
また、絶縁基板1の搭載部4の底面から側面を介して下面にかけて被着形成されたメタライズ配線導体3は、搭載部4に搭載される電子部品7の各電極を外部の電気回路に電気的に接続するための導電路として機能し、その搭載部4の底面部位には電子部品7の各電極が例えばワイヤボンディング等の電気的接続手段を介して電気的に接続され、絶縁基体1の下面に導出した部位は図示しない外部電気回路基板に半田等を介して電気的に接続される。
【0018】
なお、メタライズ配線導体3の露出表面には、メタライズ配線導体3の酸化腐食を防止するとともにメタライズ配線導体3と電子部品7の各電極との接続および外部電気回路基板との接続を強固なものとするために、通常であれば、1〜10μm程度の厚みのニッケルめっき層と0.1〜3μm程度の厚みの金めっき層とが順次被着されている。
【0019】
さらに、絶縁基板1の上面に凹状の搭載部4を取り囲むようにして設けられたろう付け用メタライズ層2は、絶縁基板1に金属枠体6を接合するための下地金属として機能する。このろう付け用メタライズ層2は、厚みが10〜30μm程度、各辺の幅が0.2〜0.5mm程度であり、その上面には、搭載部4を取り囲む略四角枠状の金属枠体6が銀ろう等のろう材を介してろう付けされている。
【0020】
また、ろう付け用メタライズ層2に銀ろう等のろう材を介してろう付けされた封止用金属枠体6は、例えば鉄−ニッケル合金や鉄−ニッケル−コバルト合金等の金属から成り、金属蓋体8を絶縁基板1に接合するための下地金属部材として機能する。この封止用金属枠体6は、その内周が搭載部4の開口と略同じ大きさであり、厚みが0.1〜0.5mm程度、各辺の幅が0.15〜0.45mm程度である。
【0021】
本発明の電子部品搭載用基板においては、ろう付け用メタライズ層2の向かい合った一対の内周辺の中央部が搭載部4に向かって突出している。このようにのろう付け用メタライズ層2の向かい合った一対の内周辺の中央部が搭載部4に向かって突出していることから、金属枠体6をろう付け用メタライズ層2にろう付けする際に、この突出した部位5もろう材で覆われることになるとともに、この突出した部位5から金属枠体6にかけて十分な幅でろう材のフィレット10を形成させることができる。
【0022】
よって、ろう付け用メタライズ層2と金属枠体6とは、ろう付け用メタライズ層2の外周部におけるフィレット9と同様に、その突出した部位5によってろう材のフィレット10を形成して接合していることから、金属枠体6にシームウエルド法により金属蓋体8を溶接した後、金属枠体6および金属蓋体8が熱収縮することにより発生する応力が、ろう付け用メタライズ層2に印加されたとしても、その応力はろう付け用メタライズ層2の突出した部位5に形成されるフィレット10および金属枠体6の外周部のフィレット9に良好に分散されることとなり、その結果、金属枠体6が絶縁基板1から剥離することが有効に防止される。
【0023】
このような突出した部位5は、ろう付け用メタライズ層2の向かい合った一対の内周辺の中央部に、互いに向かい合うように設けておくことにより、この向かい合った一対の内周辺に平行な方向および直交する方向の両方で、ろう付け用メタライズ層2と金属枠体6との接合を効果的に補強することができ、金属蓋体8を溶接したときの応力で金属枠体6がろう付け用メタライズ層2(および絶縁基板1)から剥がれることを防止することができる。
【0024】
この場合、突出した部位5がろう付け用メタライズ層2の内周辺の1辺のみに設けられていたのでは、突出した部位5を設けた辺と設けていない辺との間で金属枠体5のろう付け強度が大きく異なってしまうため、突出した部位5を設けていない辺から金属枠体5の剥がれが生じてしまう。したがって、ろう付け用メタライズ層2の突出した部位5は、向かい合う一対の内周辺に設ける必要がある。また、ろう付け用メタライズ層2と金属枠体5との間の剥がれは、幅の狭い接合領域が続く辺の中央部の内周側で特に生じやすいことから、突出した部位5はろう付け用メタライズ層5の内周辺の中央部に設ける必要がある。
【0025】
なお、ろう付け用メタライズ層2の形状が長方形の枠状であるものについては、長辺側の向かい合う一対の内周辺の中央部に突出した部位5を形成することにより、金属枠体6とろう付け用メタライズ層2との接合強度が比較的弱い長辺側において、金属枠体6の剥がれの防止に特に有効となる。したがって、ろう付け用メタライズ層2は、その形状が長方形の枠状であるものについては、長辺側の一対の内周辺の中央部に、突出した部位5を形成することが好ましい。
【0026】
なお、この突出した部位5は、電子部品7との電気的接続を行なうメタライズ配線導体3を形成していない領域に形成することが好ましい。このように、メタライズ配線導体3が形成されていない領域に形成することにより、この突出した部位5がメタライズ配線導体3と電子部品7との効率的な電気的接続を阻害することを有効に防止することができる。
【0027】
なお、ろう付け用メタライズ層2の表面には、ろう付け用メタライズ層2とろう材との濡れ性を良好とするために、通常であれば、厚みが0.5〜5μm程度のニッケルめっき層が、ろう付けの前に予め被着されている。
【0028】
かくして、以上のような本発明の電子部品搭載用基板によれば、絶縁基板1の搭載部4内に電子部品7を搭載するとともに電子部品7の電極とメタライズ配線導体3とをボンディングワイヤ等を介して電気的に接続した後、封止用の金属枠体6に金属蓋体8をシーム溶接により接合して絶縁基板1と金属枠体6と金属蓋体8とから成る容器の内部に電子部品7を気密に封止することにより、気密信頼性に優れた電子装置となる。
【0029】
なお、本発明は以上の実施の形態の例に限定されるものではなく、本発明の要旨を逸脱しない範囲であれば種々の変更を加えることは何ら差し支えない。例えば、絶縁基板およびろう付け用メタライズ層の形状を長方形型ではなく正方形型とし、そのろう付け用メタライズ層の向かい合った一対の内周辺の中央部に、互いに向かい合うように一対の突出した部位を設けたものとしてもよい。
【0030】
【発明の効果】
本発明の電子部品搭載用基板によれば、略四角形状の絶縁基板の上面の中央部に電子部品を搭載するための搭載部を有するとともに外周部に略四角枠状のろう付け用メタライズ層を有し、このろう付け用メタライズ層に金属枠体をろう材により接合して成る電子部品搭載用基板であって、ろう付け用メタライズ層の向かい合った一対の内周辺の中央部が搭載部に向かって突出しており、これら突出した部位がろう材により覆われていることから、その突出した部位と金属枠体とは、ろう付け用メタライズ層の外周部と同様にろう材のフィレットを形成して接合されることとなるので、封止用金属枠体にシームウエルド法により金属蓋体を接合した後、封止用金属枠体および金属蓋体が熱収縮することにより発生する応力が、ろう付け用メタライズ層に印加されたとしても、その応力はろう付け用メタライズ層の突出した部位に形成されるフィレットおよび封止用金属枠体の外周部のろう材のフィレットに良好に分散され、その結果、封止用金属枠体が絶縁基板から剥離することを有効に防止できるとともに、ろう付け用メタライズ層が絶縁基板から剥離することも有効に防止することができる。
【0031】
よって、絶縁基板と封止用の金属枠体と金属蓋体とから成る容器の内部に電子部品を封止した場合において、内部に収容する電子部品を長期間にわたり正常、かつ安定に作動させることが可能となる。
【図面の簡単な説明】
【図1】(a)および(b)は、それぞれ本発明の電子部品搭載用基板の実施の形態の一例を示す上面図および断面図である。
【符号の説明】
1・・・・・絶縁基板
2・・・・・ろう付け用メタライズ層
3・・・・・メタライズ配線導体
4・・・・・搭載部
5・・・・・突出した部位
6・・・・・金属枠体
7・・・・・電子部品
8・・・・・金属蓋体
9・・・・・フィレット(外周部)
10・・・・・フィレット(突出した部位)
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a small electronic component mounting board used for an electronic component storage package for storing electronic components therein.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, small electronic component mounting substrates used for electronic component housing packages for housing electronic components such as semiconductor elements and piezoelectric vibrators are made of aluminum oxide-based sintered bodies, aluminum nitride-based sintered bodies, and mullite-based materials. It is made of a ceramic material such as a sintered body or glass ceramic, and has a concave mounting portion for accommodating electronic components in the center of the upper surface, and a plurality of metallized wiring conductors extending from the inside of the mounting portion to the outer periphery of the lower surface. An insulating substrate having a square frame-shaped brazing metallization layer attached so as to surround the mounting portion, and a brazing material such as silver brazing surrounding the mounting portion in the brazing metallization layer of the insulating substrate. And a substantially square frame-shaped metal frame for sealing made of a metal such as an iron-nickel-cobalt alloy brazed.
[0003]
According to the conventional electronic component mounting board, the electronic component is mounted on the bottom surface of the mounting portion of the insulating base, and the electrodes of the electronic component are electrically connected to the metallized wiring conductor in the mounting portion by, for example, wire bonding. , And then a metal lid is welded to the upper surface of the metal frame for sealing by a seam welding method, thereby forming a container comprising the insulating base, the metal frame for sealing, and the metal lid. An electronic component is hermetically sealed inside the device, thereby forming an electronic device as a product.
[0004]
Brazing between the metallizing layer for brazing and the metal frame is performed by positioning and setting the metal frame on the brazing metallizing layer via a preform of a brazing material such as silver brazing, and in a furnace for brazing. Heating is performed by spreading the brazing material between the brazing metallization layer and the metal frame and spreading a certain amount of the brazing material so as to form a fillet on the side surface of the metal frame.
[0005]
[Patent Document 1]
JP 2001-291796 A
However, in such electronic component mounting substrates, the size of the electronic devices has become extremely small, on the order of several mm square, in accordance with the demand for miniaturization of electronic devices. The width of the brazing metallization layer has become extremely narrow at 300 μm or less. Also, the width of the brazing metallization layer has become extremely narrow so that the dimensions of the electronic components to be housed can be made larger than the external dimensions of the electronic component mounting board.
[0007]
An electronic component formed by brazing a metal frame for sealing having a width of about 0.15 to 0.45 mm to the brazing metallization layer having a width of about 0.2 to 0.5 mm as described above. In the mounting substrate, the width of the joining surface between the brazing metallization layer and the metal frame is narrow, and the distance between the edge of the brazing metallization layer and the edge of the metal frame is 0.05 mm. When the metal lid is welded on the metal frame for sealing by the seam welding method, the sealing is performed after welding, because the filler is very narrow, such as 0.35 mm, and the fillet of the brazing material is not sufficiently formed in this narrow area. A large stress is applied to the metallizing layer for brazing due to a large thermal contraction of the metal frame for metal and the metal lid, and the metal frame is peeled off from the metallizing layer for brazing due to this stress. Tower Airtightness reliability of the electronic device using the use substrate had a problem that may be significantly lowered.
[0008]
Normally, in order to reduce the size of the insulating substrate and to secure as large a storage capacity as possible for the electronic components to be stored, the brazing metallization layer and the metal frame are provided on at least two inner peripheral wall surfaces thereof. Are formed so as to be flush with each other on the upper and lower surfaces, so that a fillet of a brazing material is particularly difficult to be formed on the inner peripheral wall surface side. The peripheral wall side is weak.
[0009]
The present invention has been devised in view of such a problem, and an object thereof is to weld a metal lid to a metal frame for sealing by a seam welding method or the like, and then form a metal frame for sealing and a metal lid. Even if a large stress is applied to the brazing metallized metal layer due to a large thermal contraction of the body, the sealing metal frame and the insulating substrate do not peel off, and the hermetic sealing of the obtained electronic device is completely completed. An electronic component mounting board suitable for an electronic component storage package capable of obtaining an electronic device with high hermetic reliability that enables normal and stable operation of electronic components housed therein for a long period of time. Is to provide.
[0010]
[Means for Solving the Problems]
The electronic component mounting substrate of the present invention has a mounting portion for mounting an electronic component at the center of the upper surface of the substantially square insulating substrate, and has a substantially square frame-shaped brazing metallizing layer on the outer peripheral portion. An electronic component mounting substrate formed by joining a metal frame to the metallizing layer for brazing with a brazing material, wherein a central portion of a pair of inner peripheries of the metalizing layer for brazing faces the mounting portion. And these projecting portions are covered with the brazing material.
[0011]
According to the electronic component mounting board of the present invention, a portion protruding toward the mounting portion so as to face each other is provided at a central portion of a pair of opposed inner peripheral sides of a brazing metallization layer for brazing a metal frame. Since the protruding portion is covered with the brazing material, the protruding portion and the metal frame form a fillet of the brazing material similarly to the outer peripheral portion of the brazing metallization layer. After joining the metal lid to the metal frame for sealing by the seam welding method, the stress generated by the thermal contraction of the metal frame for sealing and the metal lid is brazed. Even if the stress is applied to the metallization layer, the stress is well dispersed in the protruding portion of the brazing metallization layer and the fillet of the brazing material on the outer peripheral portion. It is possible to effectively prevent the peeling, brazing metallized layer can also be effectively prevented from being separated from the insulating substrate.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, an electronic component mounting board of the present invention will be described with reference to the accompanying drawings.
[0013]
FIG. 1A is a top view showing an example of an embodiment of an electronic component mounting board according to the present invention, and FIG. 1B is a sectional view thereof. In these figures, 1 is an insulating substrate, 2 is a metallized layer for brazing, 3 is a metallized wiring conductor, 4 is a mounting portion for mounting an electronic component 7, and 5 is a mounting portion 4 of the metallized layer 2 for brazing. A portion 6 protruding toward is a metal frame.
[0014]
The insulating substrate 1 is formed by laminating three ceramic layers made of a ceramic material such as an aluminum oxide sintered body, an aluminum nitride sintered body, a mullite sintered body, and a glass ceramic. It has a substantially square shape with a thickness of about 2 to 20 mm and a thickness of about 0.5 to 3 mm. A substantially rectangular concave mounting portion 4 for mounting and housing electronic components is provided at the center of the upper surface, and tungsten, molybdenum, copper, silver, or the like extends from the mounting portion 4 to the lower surface via the side surface. A plurality of metallized wiring conductors 3 made of metallized metal powder are deposited.
[0015]
On the upper surface of the insulating substrate 1, a substantially square frame-shaped brazing metallization layer 2 made of metal powder of metal such as tungsten, molybdenum, copper, silver or the like is provided so as to surround the concave mounting portion 4. 1 is formed so as to be separated from the outer periphery by about 0.05 to 0.2 mm. In this example, the insulating substrate 1 is formed by laminating three ceramic layers, but the insulating substrate 1 may be formed by laminating four or more ceramic layers.
[0016]
In such an insulating substrate 1, if the ceramic layer is made of an aluminum oxide sintered body and the metallized wiring conductor 5 and the brazing metallized layer 6 are made of tungsten metallized, aluminum oxide, silicon oxide, magnesium oxide, An appropriate organic binder, a solvent, a plasticizer, and the like are added to and mixed with a raw material powder such as calcium oxide to form a slurry, and this is formed into a sheet by a sheet forming method such as a doctor blade method, thereby forming a plurality of ceramics. Green sheets are obtained, and then the ceramic green sheets are subjected to appropriate punching, and a metal paste to be the metallized wiring conductor 3 and the metallized layer 2 for brazing is applied by printing. Laminate up and down and fire the laminate It is manufactured by.
[0017]
Further, the metallized wiring conductor 3 attached and formed from the bottom surface of the mounting portion 4 to the lower surface via the side surface of the insulating substrate 1 electrically connects each electrode of the electronic component 7 mounted on the mounting portion 4 to an external electric circuit. Each electrode of the electronic component 7 is electrically connected to a bottom portion of the mounting portion 4 through an electrical connection means such as wire bonding, for example. Are electrically connected to an external electric circuit board (not shown) via solder or the like.
[0018]
The exposed surface of the metallized wiring conductor 3 is provided with a material that prevents the metallized wiring conductor 3 from being oxidized and corroded and has a strong connection between the metallized wiring conductor 3 and each electrode of the electronic component 7 and a connection with the external electric circuit board. In order to do so, a nickel plating layer having a thickness of about 1 to 10 μm and a gold plating layer having a thickness of about 0.1 to 3 μm are usually sequentially applied.
[0019]
Further, the brazing metallization layer 2 provided on the upper surface of the insulating substrate 1 so as to surround the concave mounting portion 4 functions as a base metal for joining the metal frame 6 to the insulating substrate 1. The metallized layer 2 for brazing has a thickness of about 10 to 30 μm, a width of each side of about 0.2 to 0.5 mm, and has a substantially square frame-shaped metal frame surrounding the mounting portion 4 on its upper surface. 6 is brazed via a brazing material such as silver brazing.
[0020]
The sealing metal frame 6 brazed to the brazing metallization layer 2 via a brazing material such as silver brazing is made of a metal such as an iron-nickel alloy or an iron-nickel-cobalt alloy. The cover 8 functions as a base metal member for bonding the cover 8 to the insulating substrate 1. The metal frame 6 for sealing has an inner circumference substantially the same size as the opening of the mounting portion 4, a thickness of about 0.1 to 0.5 mm, and a width of each side of 0.15 to 0.45 mm. It is about.
[0021]
In the electronic component mounting board of the present invention, a pair of inner peripheral central portions of the brazing metallization layer 2 facing each other project toward the mounting portion 4. Since the central portions of a pair of inner peripheries of the brazing metallization layer 2 facing each other protrude toward the mounting portion 4, when the metal frame 6 is brazed to the brazing metallization layer 2, The projecting portion 5 is also covered with the brazing material, and the fillet 10 of the brazing material can be formed with a sufficient width from the projecting portion 5 to the metal frame 6.
[0022]
Therefore, similarly to the fillet 9 on the outer peripheral portion of the brazing metallization layer 2, the brazing metallization layer 2 and the metal frame 6 are formed by joining the brazing material fillet 10 with the protruding portions 5. Therefore, after the metal lid 8 is welded to the metal frame 6 by the seam welding method, the stress generated by the thermal contraction of the metal frame 6 and the metal lid 8 is applied to the brazing metallization layer 2. Even if the stress is applied, the stress is well dispersed in the fillet 10 formed at the protruding portion 5 of the brazing metallization layer 2 and the fillet 9 on the outer peripheral portion of the metal frame 6, and as a result, the metal frame Separation of the body 6 from the insulating substrate 1 is effectively prevented.
[0023]
By providing such protruding portions 5 at the central portions of a pair of inner peripheral surfaces of the brazing metallization layer 2 so as to face each other, a direction parallel to and perpendicular to the pair of inner peripheral surfaces facing each other. In both directions, the joining between the brazing metallization layer 2 and the metal frame 6 can be effectively reinforced, and the metal frame 6 is brazed by the stress when the metal lid 8 is welded. Peeling from the layer 2 (and the insulating substrate 1) can be prevented.
[0024]
In this case, since the protruding portion 5 is provided only on one side of the inner periphery of the brazing metallization layer 2, the metal frame 5 is provided between the side where the protruding portion 5 is provided and the side where the protruding portion 5 is not provided. Since the brazing strength of the metal frame 5 greatly differs, the metal frame 5 peels off from the side where the protruding portion 5 is not provided. Therefore, the protruding portion 5 of the brazing metallization layer 2 needs to be provided on a pair of opposed inner peripheries. Moreover, since the peeling between the metallizing layer 2 for brazing and the metal frame 5 is particularly likely to occur on the inner peripheral side of the center of the side where the narrow bonding region continues, the projecting portion 5 is used for brazing. It is necessary to provide the metallized layer 5 at the central portion of the inner periphery.
[0025]
In the case where the shape of the brazing metallization layer 2 is a rectangular frame, the metal frame 6 is formed by forming a protruding portion 5 at the center of a pair of inner peripheries facing each other on the long side. This is particularly effective for preventing peeling of the metal frame 6 on the long side where the bonding strength with the attachment metallized layer 2 is relatively weak. Therefore, when the brazing metallization layer 2 has a rectangular frame shape, it is preferable to form the protruding portion 5 at the center of the pair of inner peripheries on the long side.
[0026]
The projecting portion 5 is preferably formed in a region where the metallized wiring conductor 3 for making an electrical connection with the electronic component 7 is not formed. By forming the metallized wiring conductor 3 in a region where the metallized wiring conductor 3 is not formed, the projecting portion 5 effectively prevents the efficient electrical connection between the metallized wiring conductor 3 and the electronic component 7 from being hindered. can do.
[0027]
In order to improve the wettability between the metallizing layer 2 for brazing and the brazing material, a nickel plating layer having a thickness of about 0.5 to 5 μm is usually provided on the surface of the metallizing layer 2 for brazing. Are pre-applied before brazing.
[0028]
Thus, according to the electronic component mounting board of the present invention as described above, the electronic component 7 is mounted in the mounting portion 4 of the insulating substrate 1 and the electrodes of the electronic component 7 and the metallized wiring conductors 3 are bonded with bonding wires or the like. After being electrically connected to the metal frame 6 for sealing, the metal cover 8 is joined to the metal frame 6 for sealing by seam welding, so that the inside of the container including the insulating substrate 1, the metal frame 6 and the metal lid 8 is placed inside. By hermetically sealing the component 7, an electronic device having excellent airtight reliability can be obtained.
[0029]
It should be noted that the present invention is not limited to the above-described embodiment, and various changes may be made without departing from the scope of the present invention. For example, the shape of the insulating substrate and the brazing metallization layer is not a rectangular shape but a square shape, and a pair of protruding portions are provided at the center of a pair of inner peripheries of the brazing metallization layer so as to face each other. May be used.
[0030]
【The invention's effect】
According to the electronic component mounting board of the present invention, a substantially square frame-shaped brazing metallization layer having a mounting portion for mounting an electronic component is provided at the center of the upper surface of the substantially square insulating substrate and the outer peripheral portion is provided. An electronic component mounting board formed by joining a metal frame to the metallizing layer for brazing with a brazing material, wherein a pair of inner peripheral central portions of the brazing metallizing layer facing each other face a mounting portion. Since these protruding portions are covered with the brazing material, the protruding portions and the metal frame form a fillet of the brazing material in the same manner as the outer peripheral portion of the brazing metallization layer. After joining the metal lid to the metal frame for sealing by the seam welding method, the stress generated by the thermal contraction of the metal frame for sealing and the metal lid is brazed. For metalla Even if the stress is applied to the brazing layer, the stress is well dispersed in the fillet formed at the protruding portion of the brazing metallization layer and the fillet of the brazing material on the outer peripheral portion of the metal frame for sealing. Separation of the metal frame for sealing from the insulating substrate can be effectively prevented, and separation of the metallized layer for brazing from the insulating substrate can also be effectively prevented.
[0031]
Therefore, when the electronic component is sealed inside the container including the insulating substrate, the sealing metal frame, and the metal lid, the electronic component housed therein can operate normally and stably for a long period of time. Becomes possible.
[Brief description of the drawings]
FIGS. 1A and 1B are a top view and a cross-sectional view, respectively, showing an example of an embodiment of an electronic component mounting board according to the present invention.
[Explanation of symbols]
1. Insulating substrate 2 Brazing metallization layer 3 Metallization wiring conductor 4 Mounting part 5 Projecting part 6 -Metal frame 7-Electronic components 8-Metal cover 9-Fillet (outer periphery)
10 Fillet (projected part)

Claims (1)

略四角形状の絶縁基板の上面の中央部に電子部品を搭載するための搭載部を有するとともに外周部に略四角枠状のろう付け用メタライズ層を有し、該ろう付け用メタライズ層に金属枠体をろう材により接合して成る電子部品搭載用基板であって、前記ろう付け用メタライズ層の向かい合った一対の内周辺の中央部が前記搭載部に向かって突出しており、これら突出した部位が前記ろう材により覆われていることを特徴とする電子部品搭載用基板。A mounting portion for mounting an electronic component is provided at the center of the upper surface of the substantially square insulating substrate, and a substantially square frame-shaped metallizing layer for brazing is provided on the outer peripheral portion. An electronic component mounting board formed by joining bodies with a brazing material, wherein a central portion of a pair of inner peripheries of the brazing metallization layer facing each other protrudes toward the mounting portion, and these protruding portions are An electronic component mounting board, which is covered with the brazing material.
JP2002275703A 2002-09-20 2002-09-20 Substrate for mounting electronic component Pending JP2004111847A (en)

Priority Applications (1)

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Applications Claiming Priority (1)

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Publications (1)

Publication Number Publication Date
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Family

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Country Status (1)

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