JP2004091243A - 窒化珪素質焼結体の製造方法および窒化珪素質焼結体 - Google Patents

窒化珪素質焼結体の製造方法および窒化珪素質焼結体 Download PDF

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Publication number
JP2004091243A
JP2004091243A JP2002252787A JP2002252787A JP2004091243A JP 2004091243 A JP2004091243 A JP 2004091243A JP 2002252787 A JP2002252787 A JP 2002252787A JP 2002252787 A JP2002252787 A JP 2002252787A JP 2004091243 A JP2004091243 A JP 2004091243A
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Japan
Prior art keywords
silicon nitride
silicon
sintered body
powder
ratio
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JP2002252787A
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Japanese (ja)
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JP2004091243A5 (enExample
Inventor
Kazuaki Takigawa
瀧川　和明
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Kyocera Corp
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Kyocera Corp
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Priority to JP2002252787A priority Critical patent/JP2004091243A/ja
Publication of JP2004091243A publication Critical patent/JP2004091243A/ja
Publication of JP2004091243A5 publication Critical patent/JP2004091243A5/ja
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JP2002252787A 2002-08-30 2002-08-30 窒化珪素質焼結体の製造方法および窒化珪素質焼結体 Pending JP2004091243A (ja)

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JP2002252787A JP2004091243A (ja) 2002-08-30 2002-08-30 窒化珪素質焼結体の製造方法および窒化珪素質焼結体

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JP2002252787A JP2004091243A (ja) 2002-08-30 2002-08-30 窒化珪素質焼結体の製造方法および窒化珪素質焼結体

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JP2004091243A true JP2004091243A (ja) 2004-03-25
JP2004091243A5 JP2004091243A5 (enExample) 2005-10-20

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130264460A1 (en) * 2010-12-28 2013-10-10 Ube Industries, Ltd. Polycrystalline silicon ingot casting mold and method for producing same, and silicon nitride powder for mold release material for polycrystalline silicon ingot casting mold and slurry containing same
JP2013229371A (ja) * 2012-04-24 2013-11-07 Japan Display Inc 薄膜トランジスタ及びそれを用いた表示装置
JP2014073945A (ja) * 2012-10-05 2014-04-24 Hitachi Metals Ltd 窒化珪素質焼結体およびそれを用いた摺動部材
US20140158858A1 (en) * 2010-12-28 2014-06-12 Ube Industries, Ltd. Polycrystalline Silicon Ingot Casting Mold and Method for Producing Same, and Silicon Nitride Powder for Mold Release Material for Polycrystalline Silicon Ingot Casting Mold and Slurry Containing Same

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130264460A1 (en) * 2010-12-28 2013-10-10 Ube Industries, Ltd. Polycrystalline silicon ingot casting mold and method for producing same, and silicon nitride powder for mold release material for polycrystalline silicon ingot casting mold and slurry containing same
US20140158858A1 (en) * 2010-12-28 2014-06-12 Ube Industries, Ltd. Polycrystalline Silicon Ingot Casting Mold and Method for Producing Same, and Silicon Nitride Powder for Mold Release Material for Polycrystalline Silicon Ingot Casting Mold and Slurry Containing Same
US8973888B2 (en) * 2010-12-28 2015-03-10 Ube Industries, Ltd. Polycrystalline silicon ingot casting mold and method for producing same, and silicon nitride powder for mold release material for polycrystalline silicon ingot casting mold and slurry containing same
US9022343B2 (en) * 2010-12-28 2015-05-05 Ube Industries, Ltd. Polycrystalline silicon ingot casting mold and method for producing same, and silicon nitride powder for mold release material for polycrystalline silicon ingot casting mold and slurry containing same
JP2013229371A (ja) * 2012-04-24 2013-11-07 Japan Display Inc 薄膜トランジスタ及びそれを用いた表示装置
US9209306B2 (en) 2012-04-24 2015-12-08 Japan Display Inc. Thin film transistor and display device using the same
US9812578B2 (en) 2012-04-24 2017-11-07 Japan Display Inc. Thin film transistor and display device using the same
JP2014073945A (ja) * 2012-10-05 2014-04-24 Hitachi Metals Ltd 窒化珪素質焼結体およびそれを用いた摺動部材

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