JP2004061825A5 - - Google Patents

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Publication number
JP2004061825A5
JP2004061825A5 JP2002219577A JP2002219577A JP2004061825A5 JP 2004061825 A5 JP2004061825 A5 JP 2004061825A5 JP 2002219577 A JP2002219577 A JP 2002219577A JP 2002219577 A JP2002219577 A JP 2002219577A JP 2004061825 A5 JP2004061825 A5 JP 2004061825A5
Authority
JP
Japan
Prior art keywords
insulating film
metal wiring
forming
manufacturing
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002219577A
Other languages
English (en)
Japanese (ja)
Other versions
JP3980960B2 (ja
JP2004061825A (ja
JP2004061825A6 (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2004061825A publication Critical patent/JP2004061825A/ja
Publication of JP2004061825A5 publication Critical patent/JP2004061825A5/ja
Publication of JP2004061825A6 publication Critical patent/JP2004061825A6/ja
Application granted granted Critical
Publication of JP3980960B2 publication Critical patent/JP3980960B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002219577A 2001-07-27 2002-07-29 半導体装置及び発光装置の作製方法 Expired - Fee Related JP3980960B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001228164 2001-07-27
JP2001228164 2001-07-27

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002219269A Division JP3792621B2 (ja) 2001-07-27 2002-07-29 半導体装置及び発光装置

Publications (4)

Publication Number Publication Date
JP2004061825A JP2004061825A (ja) 2004-02-26
JP2004061825A5 true JP2004061825A5 (enExample) 2005-10-27
JP2004061825A6 JP2004061825A6 (ja) 2006-10-26
JP3980960B2 JP3980960B2 (ja) 2007-09-26

Family

ID=19060711

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2002219269A Expired - Fee Related JP3792621B2 (ja) 2001-07-27 2002-07-29 半導体装置及び発光装置
JP2002219577A Expired - Fee Related JP3980960B2 (ja) 2001-07-27 2002-07-29 半導体装置及び発光装置の作製方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2002219269A Expired - Fee Related JP3792621B2 (ja) 2001-07-27 2002-07-29 半導体装置及び発光装置

Country Status (2)

Country Link
US (2) US6686605B2 (enExample)
JP (2) JP3792621B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3904512B2 (ja) * 2002-12-24 2007-04-11 シャープ株式会社 半導体装置およびその製造方法、並びに半導体装置を備えた電子機器
US20050074914A1 (en) * 2003-10-06 2005-04-07 Toppoly Optoelectronics Corp. Semiconductor device and method of fabrication the same
KR100699998B1 (ko) * 2004-09-23 2007-03-26 삼성에스디아이 주식회사 유기 전계 발광 소자 및 그의 제조 방법
US8148895B2 (en) 2004-10-01 2012-04-03 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method of the same
JP6818514B2 (ja) * 2016-11-01 2021-01-20 株式会社ジャパンディスプレイ 表示装置および表示装置の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05210116A (ja) * 1992-01-31 1993-08-20 Canon Inc 液晶表示装置
EP0554060A3 (en) 1992-01-31 1993-12-01 Canon Kk Liquid crystal display apparatus
JPH06230425A (ja) * 1993-02-03 1994-08-19 Sanyo Electric Co Ltd 液晶表示装置及びその製造方法
JPH0896959A (ja) 1994-09-27 1996-04-12 Sumitomo Electric Ind Ltd 有機エレクトロルミネッセンス素子
KR100359795B1 (ko) * 1995-08-22 2003-01-14 엘지.필립스 엘시디 주식회사 액정표시장치및그제조방법
JPH0963770A (ja) 1995-08-24 1997-03-07 Kemipuro Kasei Kk 単層型白色発光有機ｅｌ素子
JPH1138439A (ja) * 1997-07-16 1999-02-12 Toshiba Corp アクティブマトリクス基板及びその製造方法並びにアクティブマトリクス型液晶表示装置
JPH1138440A (ja) * 1997-07-17 1999-02-12 Sharp Corp アクティブマトリクス型液晶表示装置およびその製造方法
JP2000002889A (ja) * 1998-06-16 2000-01-07 Mitsubishi Electric Corp 液晶表示装置
JP4718677B2 (ja) * 2000-12-06 2011-07-06 株式会社半導体エネルギー研究所 半導体装置及びその作製方法

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