JP2004055514A5 - - Google Patents

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JP2004055514A5
JP2004055514A5 JP2003030784A JP2003030784A JP2004055514A5 JP 2004055514 A5 JP2004055514 A5 JP 2004055514A5 JP 2003030784 A JP2003030784 A JP 2003030784A JP 2003030784 A JP2003030784 A JP 2003030784A JP 2004055514 A5 JP2004055514 A5 JP 2004055514A5
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anisotropic conductive
conductive connector
inspected
connector according
conductive film
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JP2003030784A
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JP2004055514A (en
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Priority to JP2003030784A priority Critical patent/JP2004055514A/en
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Claims (18)

各々厚み方向に伸びる複数の導電路形成部が絶縁部によって相互に絶縁された状態で配設されてなる異方導電膜を有する異方導電性コネクターであって、
前記異方導電膜は、それぞれ絶縁性の弾性高分子物質により形成された、少なくとも2つの弾性層が一体的に積層されてなり、これらの弾性層の各々における導電路形成部を形成する部分には、磁性を示す導電性粒子が含有されており、当該異方導電膜の表面を形成する弾性層のうち一方の弾性層を構成する弾性高分子物質のデュロメータ硬さをH1 とし、他方の弾性層を構成する弾性高分子物質のデュロメータ硬さをH2 としたとき、下記の条件(1)および条件(2)を満足することを特徴とする異方導電性コネクター。
条件(1):H1 ≧30
条件(2):H1 /H2 ≧1.1
An anisotropic conductive connector having an anisotropic conductive film in which a plurality of conductive path forming portions each extending in the thickness direction are arranged in a state of being insulated from each other by an insulating portion,
The anisotropic conductive film is formed by integrally laminating at least two elastic layers, each of which is formed of an insulating elastic polymer material. Contains conductive particles exhibiting magnetism, and the durometer hardness of the elastic polymer material constituting one elastic layer among the elastic layers forming the surface of the anisotropic conductive film is H 1 , An anisotropic conductive connector characterized by satisfying the following condition (1) and condition (2) when the durometer hardness of the elastic polymer material constituting the elastic layer is H 2 .
Condition (1): H 1 ≧ 30
Condition (2): H 1 / H 2 ≧ 1.1
下記条件(3)を満足することを特徴とする請求項1に記載の異方導電性コネクター。
条件(3):15≦H2 ≦55
The anisotropic conductive connector according to claim 1, wherein the following condition (3) is satisfied.
Condition (3): 15 ≦ H 2 ≦ 55
異方導電膜の周縁部を支持する支持体が設けられていることを特徴とする請求項1または請求項2に記載の異方導電性コネクター。  The anisotropic conductive connector according to claim 1, wherein a support body that supports a peripheral portion of the anisotropic conductive film is provided. 検査対象である回路装置と、検査用回路基板との間に介在されて当該回路装置の被検査電極と当該回路基板の検査電極との電気的接続を行なうための異方導電性コネクターであって、
異方導電膜における回路装置に接触する弾性層を形成する弾性高分子物質は、そのデュロメータ硬さが条件(1)および条件(2)におけるH1 を満足するものであることを特徴とする請求項1乃至請求項3のいずれかに記載の異方導電性コネクター。
An anisotropic conductive connector interposed between a circuit device to be inspected and a circuit board for inspection for electrically connecting an electrode to be inspected of the circuit device and an inspection electrode of the circuit board. ,
The elastic polymer material forming the elastic layer in contact with the circuit device in the anisotropic conductive film has a durometer hardness satisfying H 1 in the conditions (1) and (2). The anisotropically conductive connector according to any one of claims 1 to 3.
異方導電膜における被検査電極に接触する弾性層には、導電性および磁性を示さない粒子が含有されていることを特徴とする請求項4に記載の異方導電性コネクター。  5. The anisotropic conductive connector according to claim 4, wherein the elastic layer in contact with the electrode to be inspected in the anisotropic conductive film contains particles that do not exhibit conductivity and magnetism. 導電性および磁性を示さない粒子が、ダイヤモンドパウダーであることを特徴とする請求項5に記載の異方導電性コネクター。  6. The anisotropic conductive connector according to claim 5, wherein the particles that do not exhibit conductivity and magnetism are diamond powder. 異方導電膜には、検査対象である回路装置の被検査電極に電気的に接続される導電路形成部の他に、被検査電極に電気的に接続されない導電路形成部が形成されていることを特徴とする請求項3乃至請求項6のいずれかに記載の異方導電性コネクター。  The anisotropic conductive film has a conductive path forming portion that is not electrically connected to the electrode to be inspected, in addition to a conductive path forming portion that is electrically connected to the electrode to be inspected of the circuit device to be inspected. The anisotropic conductive connector according to claim 3, wherein the anisotropic conductive connector is provided. 検査対象である回路装置の被検査電極に電気的に接続されない導電路形成部が,少なくとも支持体によって支持された異方導電膜の周縁部に形成されていることを特徴とする請求項7に記載の異方導電性コネクター。  8. The conductive path forming portion that is not electrically connected to the electrode to be inspected of the circuit device to be inspected is formed at least at the peripheral portion of the anisotropic conductive film supported by the support. Anisotropic conductive connector as described. 導電路形成部が、一定のピッチで配置されていることを特徴とする請求項7または請求項8に記載の異方導電性コネクター。  The anisotropic conductive connector according to claim 7 or 8, wherein the conductive path forming portions are arranged at a constant pitch. 異方導電膜を形成する各弾性層のうち少なくとも1層に補強材が含有されていることを特徴とする請求項1乃至請求項9のいずれかに記載の異方導電性コネクター。The anisotropic conductive connector according to claim 1, wherein a reinforcing material is contained in at least one of the elastic layers forming the anisotropic conductive film. 異方導電膜には、それぞれ表面を形成する一方の弾性層と他方の弾性層との間に中間弾性層が形成されており、前記一方の弾性層、前記他方の弾性層および前記中間弾性層のいずれか1層に補強材が含有されていることを特徴とする請求項1乃至請求項9のいずれかに記載の異方導電性コネクター。In the anisotropic conductive film, an intermediate elastic layer is formed between one elastic layer and the other elastic layer, each of which forms a surface. The one elastic layer, the other elastic layer, and the intermediate elastic layer The anisotropic conductive connector according to claim 1, wherein a reinforcing material is contained in any one of the layers. 補強材はメッシュまたは不織布よりなるものであることを特徴とする請求項10または請求項11に記載の異方導電性コネクター。The anisotropic conductive connector according to claim 10 or 11, wherein the reinforcing material is made of mesh or non-woven fabric. メッシュ若しくは不織布は、有機繊維によって形成されていることを特徴とする請求項12に記載の異方導電性コネクター。The anisotropic conductive connector according to claim 12, wherein the mesh or the nonwoven fabric is formed of an organic fiber. 有機繊維の線熱膨張係数が30×10Organic fiber has a linear thermal expansion coefficient of 30 × 10 -6-6 〜−5×10~ -5x10 -6-6 /Kであることを特徴とする請求項13に記載の異方導電性コネクター。The anisotropic conductive connector according to claim 13, which is / K. 各々厚み方向に伸びる複数の導電路形成部が絶縁部によって相互にA plurality of conductive path forming portions extending in the thickness direction are mutually connected by an insulating portion. 絶縁された状態で配設されてなる異方導電膜を有する異方導電性コネクターを製造する方法であって、A method of manufacturing an anisotropic conductive connector having an anisotropic conductive film disposed in an insulated state,
一対の型によって成形空間が形成される異方導電膜成形用の金型を用意し、Prepare a mold for forming an anisotropic conductive film in which a molding space is formed by a pair of molds,
一方の型の成形面上に、高分子物質形成材料中に磁性を示す導電性粒子が含有されてなるペースト状の成形材料層を形成すると共に、他方の型の成形面上に、高分子物質形成材料中に導電性粒子が含有されてなる、少なくとも一層以上のペースト状の成形材料層を形成し、A paste-like molding material layer is formed on the molding surface of one mold, and the polymer substance-forming material contains conductive particles exhibiting magnetism, and the polymer substance is formed on the molding surface of the other mold. Forming at least one paste-form molding material layer containing conductive particles in the forming material;
前記一方の型の成形面に形成された成形材料層と、前記他方の型の成形面に形成された成形材料層とを積重し、その後、各成形材料層の厚み方向に、強度分布を有する磁場を作用させると共に、各成形材料層を硬化処理することにより、異方導電膜を形成する工程を有し、The molding material layer formed on the molding surface of the one mold and the molding material layer formed on the molding surface of the other mold are stacked, and then the strength distribution is increased in the thickness direction of each molding material layer. A step of forming an anisotropic conductive film by applying a magnetic field and curing each molding material layer,
前記一方の型の成形面に形成された成形材料層における高分子物質形成材料を硬化して得られる弾性高分子物質のデュロメータ硬さをHThe durometer hardness of the elastic polymer material obtained by curing the polymer material forming material in the molding material layer formed on the molding surface of the one mold is H 1 1 とし、前記他方の型の成形面上に形成された成形材料層における高分子物質形成材料を硬化して得られる弾性高分子物質のデュロメータ硬さをHAnd the durometer hardness of the elastic polymer material obtained by curing the polymer material forming material in the molding material layer formed on the molding surface of the other mold is H 2 2 としたとき、下記の条件(1)および条件(2)を満足することを特徴とする異方導電性コネクターの製造方法。The following method (1) and condition (2) are satisfied:
条件(1):HCondition (1): H 1 1 ≧30≧ 30
条件(2):HCondition (2): H 1 1 /H/ H 2 2 ≧1.1≧ 1.1
検査対象である回路装置の被検査電極に対応して配置された検査用電極を有する検査用回路基板と、An inspection circuit board having inspection electrodes arranged corresponding to the electrodes to be inspected of the circuit device to be inspected;
この検査用回路基板上に配置された請求項3乃至請求項14のいずれかに記載の異方導電性コネクターとThe anisotropic conductive connector according to claim 3, wherein the anisotropic conductive connector is disposed on the circuit board for inspection.
を具えてなることを特徴とする回路装置の検査装置。An inspection apparatus for circuit devices, comprising:
異方導電性コネクターの異方導電膜に対する被検査電極の加圧力を緩和する加圧力緩和フレームが、検査対象である回路装置と異方導電性コネクターとの間に配置されていることを特徴とする請求項16に記載の回路装置の検査装置。A pressure relief frame that relaxes the pressure of the electrode to be inspected on the anisotropic conductive film of the anisotropic conductive connector is disposed between the circuit device to be inspected and the anisotropic conductive connector. The circuit device inspection device according to claim 16. 加圧力緩和フレームが、バネ弾性またはゴム弾性を有するものであることを特徴とする請求項17に記載の回路装置の検査装置。18. The circuit device inspection apparatus according to claim 17, wherein the pressure relief frame has spring elasticity or rubber elasticity.
JP2003030784A 2002-03-07 2003-02-07 Anisotropic conductivity connector, method for manufacturing the same, and inspection device for circuit device Pending JP2004055514A (en)

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JP2002062666 2002-03-07
JP2002152316 2002-05-27
JP2003030784A JP2004055514A (en) 2002-03-07 2003-02-07 Anisotropic conductivity connector, method for manufacturing the same, and inspection device for circuit device

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WO2007043350A1 (en) * 2005-10-11 2007-04-19 Jsr Corporation Anisotropic conductive connector and inspection equipment of circuit device
JP2009115579A (en) * 2007-11-06 2009-05-28 Jsr Corp Probe member, probe card using the probe member and wafer inspection system using the same
JP5018612B2 (en) * 2008-04-11 2012-09-05 Jsr株式会社 Anisotropic conductive sheet and method for producing anisotropic conductive sheet
JP5195456B2 (en) * 2009-01-23 2013-05-08 富士通株式会社 Socket, semiconductor device, and socket reliability evaluation method
KR102545904B1 (en) * 2017-05-18 2023-06-20 신에츠 폴리머 가부시키가이샤 Electrical connector and its manufacturing method
KR102220172B1 (en) * 2020-03-03 2021-02-25 (주)티에스이 Data signal transmission connector

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JPH0730019A (en) * 1993-07-13 1995-01-31 Seiko Epson Corp Ic socket
JP3256175B2 (en) * 1997-12-22 2002-02-12 株式会社ヨコオ Socket for IC package measurement
JP4290236B2 (en) * 1998-01-12 2009-07-01 Jsr株式会社 Method for producing conductive rubber sheet
JP2001185260A (en) * 1999-12-28 2001-07-06 Jsr Corp Anisotropic electrical conductive sheet, testing device and connector using the same
JP2001283996A (en) * 2000-04-03 2001-10-12 Jsr Corp Sheet-like connector and its manufacturing method, electrical equipment connecting device and inspection equipment

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