JP7269885B2 - Electrical connector manufacturing method - Google Patents

Description

The present invention relates to electrical connectors and methods of making same. This application claims priority based on Japanese Patent Application No. 2017-245575 filed in Japan on December 21, 2017, the content of which is incorporated herein.

For the connection between display devices such as liquid crystal displays and circuit boards, and for the connection between electronic circuit boards, a conductive elastomer layer and an insulating elastomer layer that use a conductive material containing silver have a zebra pattern (vertical stripe pattern). An anisotropically conductive connector is known (see, for example, Patent Document 1). This anisotropically conductive connector is formed by laminating conductive elastomer layers and insulating elastomer layers alternately and in multiple layers so that their joining surfaces are parallel to each other.

In addition, thin metal wires having a wire diameter of 5 μm to 100 μm are embedded at the same interval as the electrode pitch of the member to be connected, and are embedded only in the portion facing the electrode portion of the member to be connected. An anisotropic conductive connector arranged along the extending direction of is known (see, for example, Patent Document 2).

JP-A-2000-251980 Japanese Utility Model Laid-Open No. 7-014570

In the anisotropically conductive connector described in Patent Literature 1, a short circuit due to migration is prevented by surface-treating the connection surface with the electrode with a mercapto-based compound. However, there is a problem that it is not easy to completely prevent the occurrence of migration in a severe use environment.
In addition, in the anisotropically conductive connector described in Patent Document 2, relatively inexpensive brass wires, gold-plated phosphor bronze wires, etc. are used as thin metal wires. There is a problem that the electrodes of the connection member are easily damaged.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an anisotropically conductive connector that prevents short circuits caused by migration and prevents damage to electrodes to be inspected, and a method of manufacturing the same. With the goal.

[1] An electrical connector disposed between a connection terminal of a first device and a connection terminal of a second device to electrically connect them, wherein resin layers and thin metal layers are alternately formed in multiple layers A laminated rectangular parallelepiped multi-layer body is provided, and the thin metal layer penetrates the multi-layer body in the thickness direction and the depth direction, and the exposed surface of the thin metal layer at the connection surface of the multi-layer body to be connected to the connection terminal. An electrical connector having a rectangular shape, wherein the thin metal layer is made of a noble metal or a noble metal alloy, and the length of the short side of the rectangle is 0.01 μm or more and 10 μm or less.
[2] The electrical connector according to [1], wherein the pitch of the thin metal layers in the short side direction of the rectangle is 4 μm or more and 600 μm or less.
[3] The electrical connector according to [1] or [2], in which a coating layer is provided on the side surface along the thickness direction of the multilayer body where a part of the thin metal layer is exposed.
[4] Forming a plated layer on one surface of a base material, bonding one surface of a first uncured rubber sheet to the plated layer formed on one surface of the base material, and then applying the first vulcanizing an uncured rubber sheet to form a first rubber sheet; removing the base material to leave the plated layer on one surface of the first rubber sheet; After bonding a second uncured rubber sheet to one surface of the sheet so as to cover the plating layer, the second uncured rubber sheet is vulcanized to form a second rubber sheet, forming an elastic body composed of the first rubber sheet, the plated layer and the second rubber sheet; and cutting the laminate perpendicularly to the extending direction of the plating layer in the laminate.
[5] Applying a metal nanopaste to one surface of a base material, firing the metal nanopaste applied to one surface of the base material to form a thin metal layer, and forming a thin metal layer on one surface of the base material. After bonding one surface of a first uncured rubber sheet to the metal thin layer, vulcanizing the first uncured rubber sheet to form a first rubber sheet; removing the material to leave the thin metal layer on one side of the first rubber sheet; and covering one side of the first rubber sheet with a second uncured rubber sheet covering the thin metal layer. and vulcanizing the second uncured rubber sheet to form a second rubber sheet, and an elastic sheet comprising the first rubber sheet, the thin metal layer and the second rubber sheet. forming a body; laminating a plurality of the elastic bodies so that the metal thin layers are parallel to each other to form a laminate; and cutting perpendicular to the extending direction of the electrical connector.

According to the present invention, it is possible to provide an anisotropically conductive connector and a method of manufacturing the same that prevent short circuits caused by migration and damage to electrodes to be inspected.

1 is a cross-sectional view showing a schematic configuration of an electrical connector according to a first embodiment; FIG. 4A to 4C are cross-sectional views schematically showing a method for manufacturing the electrical connector of the first embodiment; 4A to 4C are cross-sectional views schematically showing a method for manufacturing the electrical connector of the first embodiment; FIG. 10 is a cross-sectional view schematically showing a method of manufacturing the electrical connector of the second embodiment; FIG. 10 is a cross-sectional view schematically showing a method of manufacturing the electrical connector of the second embodiment; FIG. 5 is a diagram showing the relationship between the amount of displacement (amount of compression) of a laminate and the load applied to the electrical connector when using the electrical connector of the example. FIG. 5 is a diagram showing the relationship between the amount of displacement (amount of compression) of a laminate and the load applied to an electrical connector when using an electrical connector of a comparative example. FIG. 5 is a diagram showing the relationship between the amount of displacement (amount of compression) of a laminated body and the resistance value between a probe and a connection terminal when an electrical connector of Example or Comparative Example is used. It is an image captured by a scanning electron microscope in an example. It is an image captured by a scanning electron microscope in a comparative example.

An embodiment of an electrical connector and a manufacturing method thereof according to the present invention will be described.
It should be noted that the present embodiment is specifically described for better understanding of the gist of the invention, and does not limit the invention unless otherwise specified.

(First embodiment)
[Electrical connector]
FIG. 1 shows a schematic configuration of an electrical connector of this embodiment, (a) being a plan view and (b) being a front view.
As shown in FIG. 1, the electrical connector 10 of this embodiment includes a multi-layer body 20 in the shape of a rectangular parallelepiped in which resin layers 21 and thin metal layers 22 are alternately laminated in multiple layers.
The thin metal layer 22 penetrates the multilayer body 20 in the thickness direction (the Z direction in FIG. 1(b)) and the depth direction (the Y direction in FIG. 1(a)). In addition, the thin metal layer 22 has a shape of a surface (exposed surface) where a part of the thin metal layer 22 is exposed in the first connection surface (one main surface of the multilayer body 20) 20a with the connection terminal of the multilayer body 20. is a rectangle. Similarly, the shape of the exposed surface of the thin metal layer 22 on the second connection surface (the other main surface of the multilayer body 20) 20b with the connection terminal of the multilayer body 20 is also rectangular.
Here, regarding the multilayer body 20, the thickness direction (the Z direction in FIG. 1(b)), the width direction (the X direction in FIG. 1(a)), and the depth direction (the Y direction in FIG. 1(a)) are It is the orthogonal direction.
In the present invention, the four interior angles of the "rectangle" do not need to be strictly 90 degrees, and the "rectangle" may be regarded as a line with thickness. In this case, the length of the long side of the rectangle corresponds to the length of the line, and the length of the short side of the rectangle corresponds to the thickness of the line.
Also, the thin metal layer 22 is made of a noble metal or a noble metal alloy.
Furthermore, the length of the rectangular short side of the thin metal layer 22 is 0.01 μm or more and 10 μm or less.
The electrical connector 10 is arranged between a connection terminal of a first device (not shown) and a connection terminal of a second device (not shown) to electrically connect them. In the electrical connector 10, the thin metal layer 22 is a member that provides electrical connection between the connection terminals of the first device and the connection terminals of the second device. Devices include, for example, semiconductor packages, circuit boards, silicon wafers, passive components, liquid crystal modules and sensors.

A resin layer 21 , a thin metal layer 22 and a resin layer 21 are laminated in this order to form an elastic body 23 .
In the multilayer body 20, a plurality of elastic bodies 23 are laminated (continuously connected) in the long side direction (the X direction shown in FIG. 1(a)) of one main surface 20a of the multilayer body 20 via an adhesive layer 40. ) becomes. The number of elastic bodies 23 to be laminated, that is, the length of the long side of the multilayer body 20 (the length in the X direction shown in FIG. 1A) is not particularly limited, and the number and size of electrodes to be inspected ( area), pitch, and the like. In addition, the length of the short side of one main surface 20a of the multilayer body 20 (the length in the Y direction shown in FIG. 1A) is not particularly limited, and the number and size (area) of the electrodes to be inspected are , pitch and the like.
The elastic body 23 does not need to be laminated via the adhesive layer 40, and the electrical connector 10 without the adhesive layer 40 can be manufactured by the electrical connector manufacturing method described later. Alternatively, the elastic body 23 may be a laminate composed of one resin layer 21 and one thin metal layer 22 .

The thin metal layer 22 is arranged on the center line of the elastic body 23 in the long side direction (the Y direction shown in FIG. 1A).

The plurality of elastic bodies 23 are continuously connected (laminated) so that the respective thin metal layers 22 are parallel to each other.

The thickness of the multilayer body 20 (the length in the Z direction shown in FIG. 1(b)), that is, the distance between one main surface 20a and the other main surface 20b is preferably 0.03 mm or more and 25 mm or less.
For example, the length of the multilayer main body 20 in the long side direction is 0.05 mm to 300 mm.

The length of the rectangular long side of the thin metal layer 22 on one main surface 20a and the other main surface 20b of the multilayer body 20 (the length in the Y direction shown in FIG. 1(a)) _L1 is 0.03 mm or more and 10 mm. It is preferably 0.3 mm to 5 mm, more preferably 0.3 mm to 5 mm.
If the length _L1 of the rectangular long side of the thin metal layer 22 is within the above range, the electrical connection between the connecting terminal of the first device and the connecting terminal of the second device can be stably maintained for a long period of time. can be done.

The length of the rectangular short side of the thin metal layer 22 on one main surface 20a and the other main surface 20b of the multilayer body 20 (the length in the X direction shown in FIG. 1(a)) _L2 is 0.01 μm or more and 10 μm. It is preferably 0.05 μm or more and 5 μm or less, more preferably 0.1 μm or more and 2 μm or less.
If the length _L2 of the rectangular short side of the thin metal layer 22 is within the above range, the electrodes to be inspected will not be damaged. Also, the electrical connection between the connection terminals of the first device and the connection terminals of the second device can be stably maintained over a long period of time.

On one main surface 20a and the other main surface 20b of the multilayer body 20, the pitch _P1 of the thin metal layers 22 in the direction of the short side of the rectangle (X direction shown in FIG. 1(a)) is 1 μm or more and 600 μm or less. , more preferably 1 μm or more and 200 μm or less, even more preferably 1 μm or more and 50 μm or less.
If the pitch _P1 of the thin metal layer 22 in the direction of the short side of the rectangle is 0.2 mm or less, it is possible to establish an electrical connection with narrow-pitch electrodes. Also, the electrical connection between the connection terminals of the first device and the connection terminals of the second device can be stably maintained over a long period of time.

In the electrical connector 10 of this embodiment, the coating layer 50 may be provided on the side surface 20c along the thickness direction of the multi-layer body 20 where a portion of the thin metal layer 22 is exposed.
The thickness of the coating layer 50 is not particularly limited, and can be, for example, 1 μm to 5 mm.

The material (material) of the resin layer 21 forming the multilayer main body 20 is not particularly limited as long as it has insulation and elasticity. Examples include silicone rubber, fluororubber, polybutadiene rubber, polyisoprene rubber, polyurethane rubber, Examples include chloroprene rubber, polyester rubber, styrene-butadiene copolymer rubber, natural rubber, and the like. Among these, silicone rubber is preferable from the viewpoint of high elasticity and excellent heat resistance.

The material (material) of the thin metal layer 22 is preferably a metal that is less susceptible to migration than silver. alloys. In addition to noble metals, tin, copper, lead, nickel, and alloys thereof can also be used. Among these materials, noble metals such as gold and platinum are preferable, and gold and platinum are particularly preferable, in consideration of conductivity and corrosion resistance.

The adhesive constituting the adhesive layer 40 is not particularly limited, but may be of the same material as the resin layer 21 or of a material different from that of the resin layer 21 . Examples of the adhesive include silicone-based adhesives, modified silicone-based adhesives, natural rubber latex adhesives, urethane resin-based adhesives, urethane resin-based adhesives, vinyl chloride resin-based adhesives, chloroprene rubber-based adhesives, Examples include nitrile rubber adhesives, nitrocellulose adhesives, phenolic resin adhesives, polyimide adhesives, polyurethane resin adhesives, polyvinyl alcohol adhesives, and the like. Among these, liquid silicone rubber is preferable because it can be easily made into a thin film. Here, the liquid silicone rubber is a liquid at the time of coating, but becomes a solid silicone rubber with low fluidity when cured.

The material (material) of the coating layer 50 is not particularly limited as long as it has insulating properties and elasticity.

The electrical connector 10 of this embodiment includes a rectangular parallelepiped multilayer body 20 in which resin layers 21 and metal thin layers 22 are alternately laminated in multiple layers. 1(b) in the Z direction) and in the depth direction (the Y direction in FIG. 1(a)), and the shape of the exposed surface of the thin metal layer 22 on the connection surface 20a with the connection terminal of the multilayer body 20 is rectangular. , The thin metal layer 22 is made of a noble metal or a noble metal alloy, and the length of the short side of the rectangle is 0.01 μm or more and 10 μm or less. Therefore, short circuits caused by migration can be prevented. Also, when the connection terminal of the device connected to the electrical connector 10 is connected to the thin metal layer 22, excessive force is not applied from the thin metal layer 22 to the connection terminal of the device, and the connection terminal is damaged. can be prevented. Furthermore, the electrical connector 10 of the present embodiment includes the thin metal layer 22 having a rectangular short side length of 0.01 μm or more and 10 μm or less. It can be carried out.

An end portion of the thin metal layer 22 of the electrical connector 10 may protrude from at least one of the one major surface 20a and the other major surface 20b. The term "end portion of the thin metal layer" means a range from the end surface (edge) of the thin metal layer to a quarter of the length of the thin metal layer in the Z direction. When the end of the thin metal layer 22 protrudes from the main surface, the amount of protrusion is not particularly limited, and can be adjusted as appropriate according to the shape, arrangement, etc. of the connection terminals of the two devices electrically connected by the electrical connector 10. be done.

If the end of the thin metal layer 22 of the electrical connector 10 protrudes from one main surface 20a or the other main surface 20b, the protruding end is plated to be different from the thin metal layer 22. Another plated layer may be formed. The material of the other plated layer is not particularly limited, and is appropriately selected according to the material of the thin metal layer 22 . The additional plating layer increases the surface area (cross-sectional area) of the ends of the thin metal layer 22, increases the contact area between the ends of the thin metal layer 22 and the connection terminals of the device to be connected, and increases the electrical The connection state can be kept more stable.

[Method for manufacturing electrical connector]
The method of manufacturing the electrical connector of the present embodiment includes a step of forming a plated layer on one surface of the base material (hereinafter referred to as "step A1"), and a first step on the plated layer formed on one surface of the base material. A step of vulcanizing the first clay-like rubber sheet to form a first rubber sheet after laminating one surface of the clay-like rubber sheet (hereinafter referred to as “step B1”); a step of removing by etching to leave the plated layer on one surface of the first rubber sheet (hereinafter referred to as “step C1”); After bonding the clay-like rubber sheets together, the second clay-like rubber sheet is vulcanized to form a second rubber sheet, and an elastic body composed of the first rubber sheet, the plated layer and the second rubber sheet is formed. A step of forming (hereinafter referred to as “step D1”) and a step of forming a laminate by laminating a plurality of elastic bodies so that the plated layers are parallel to each other (hereinafter referred to as “step E1”). ), and a step of cutting the laminate perpendicularly to the direction in which the plated layers of the laminate extend (hereinafter referred to as “step F1”).
Here, the first and second clay-like rubber sheets are examples of the first and second uncured rubber sheets.
A rubber sheet made of liquid silicone may be used instead of the first and second clay-like rubber sheets. When a rubber sheet made of liquid silicone is used, it is preferable to use a semi-cured liquid silicone sheet or a relatively low fluidity liquid silicone formed into a sheet.

A method for manufacturing the electrical connector of this embodiment will be described below with reference to FIGS. 2(a) to 2(c) and FIGS. 3(a) to 3(c).
2(a) to 2(c) and 3(a) to 3(c) are cross-sectional views schematically showing the method of manufacturing the electrical connector of this embodiment. 2 and 3, the same components as those of the electrical connector of the present embodiment shown in FIG. 1 are denoted by the same reference numerals, and overlapping descriptions are omitted.

As shown in FIG. 2A, a plated layer 70 is formed on one surface 60a of a substrate 60 (step A1).

In step A1, a plated layer 70 is formed on one surface 60a of the base material 60 by electrolytic plating or electroless plating.

The base material 60 is not particularly limited as long as the plated layer 70 can be formed by electrolytic plating or electroless plating. As the substrate 60, for example, as shown in FIG. 2A, a first layer 61 made of a copper alloy such as copper, brass, phosphor bronze, nickel silver, etc., and a second layer 62 made of nickel or zinc. or a water-soluble film having a gold plating layer, a platinum plating layer, a copper plating layer or a nickel plating layer formed on one surface thereof. Moreover, as a water-soluble film, polyvinyl alcohol etc. are mentioned, for example.

Examples of materials for the plated layer 70 include noble metals other than silver, such as gold and platinum, and alloys of these noble metals.

Next, as shown in FIG. 2(b), after bonding one surface 81a of the first clay-like rubber sheet 81 to the plated layer 70 formed on the one surface 60a of the substrate 60, the first clay-like rubber The sheet 81 is vulcanized to form a first rubber sheet (step B1).

Examples of the first clay-like rubber sheet 81 include, but are not particularly limited to, clay-like silicone rubber, clay-like fluorine rubber, clay-like polybutadiene rubber, clay-like poly Examples include isoprene rubber, clay-like polyurethane rubber, clay-like chloroprene rubber, clay-like polyester rubber, clay-like styrene-butadiene copolymer rubber, and clay-like natural rubber.
These clay-like rubber sheets are produced by kneading a millable compound with a vulcanizing agent and optional additives.
Specific examples of clay-like silicone rubber include so-called rubber compounds such as KE-174-U manufactured by Shin-Etsu Chemical Co., Ltd.
The hardness (durometer A) of the clay-like silicone rubber after curing is preferably 20 or more, more preferably 30 or more. The upper limit of this hardness is preferably 90 or less. When the hardness is within the above range, it is possible to impart appropriate rigidity to the electrical connector.
The hardness is measured according to JIS K 6249:2003.

Further, specific examples of the liquid silicone rubber that may be used in place of the clay-like silicone rubber include, for example, KE-1935-A and KE-1935-B manufactured by Shin-Etsu Chemical Co., Ltd., which are heated by an addition reaction. Those that harden are included.
The viscosity of the liquid silicone rubber before curing is much lower than that of the clay-like silicone compound. The lower limit of this viscosity is preferably 10 Pa·s or more.
The density (23° C., unit: g/cm ³ ) of the liquid silicone rubber before curing is preferably lower than that of the clay-like silicone rubber. 03 or less is more preferable. The lower limit of this density is usually 1.00 or more. When the density is within the above range, it becomes easy to apply the liquid silicone rubber.
The hardness (durometer A) of the liquid silicone rubber after curing is preferably 20 or more, more preferably 30 or more. The upper limit of this hardness is preferably 90 or less. When the hardness is within the above range, it is possible to impart appropriate rigidity to the electrical connector.
The viscosity, density and hardness are measured according to JIS K 6249:2003.

The thickness of the first clay-like rubber sheet 81 is not particularly limited. adjusted accordingly. For example, it may have a thickness of 0.0005 mm to 0.5 mm. A sheet may also be called a film.

In step B1, the first clay-like rubber sheet 81 is heated and vulcanized to form the first rubber sheet 81A.

Next, as shown in FIG. 2C, the base material 60 is removed by wet etching, leaving the plated layer 70 on the one surface 81a of the first rubber sheet 81A (step C1).

When copper is used as the base material 60, the base material 60 having the plating layer 70 formed thereon and the first rubber sheet 81A laminated thereon is immersed in the iron chloride solution. When a water-soluble film is used as the base material 60, the base material 60 having the plated layer 70 formed thereon and the first rubber sheet 81A laminated thereon is immersed in water. Thereby, the base material 60 is dissolved and removed.

In step C1, the plated layer 70 is transferred onto the one surface 81a of the first rubber sheet 81A by removing the base material 60 by wet etching.

Next, as shown in FIG. 3(a), a second clay-like rubber sheet 82 is attached to one surface 81a of the first rubber sheet 81A so as to cover the plated layer 70, and then a second clay-like rubber sheet 82 is applied. The rubber sheet 82 is vulcanized to form a second rubber sheet, and the elastic body 23 composed of the first rubber sheet 81A, the plated layer 70 and the second rubber sheet 82A is molded (step D1).

As the second clay-like rubber sheet 82, the same material as the first clay-like rubber sheet 81 is used.

The thickness of the second clay-like rubber sheet 82 is made equal to the thickness of the first clay-like rubber sheet 81 .

In step D1, the second clay-like rubber sheet 82 is heated and vulcanized to form the second rubber sheet 82A.

Next, as shown in FIG. 3(b), a plurality of elastic bodies 23 obtained in steps A1 to D1 are laminated such that the plated layers 70 are parallel to each other, and the elastic bodies 23 are laminated as shown in FIG. 3(c). A laminate 90 is molded (step E1).

Examples of a method of laminating the elastic body 23 include a method using an adhesive 100 and a method of chemically bonding the resin layers 21 by activating the resin layers 21 by surface treatment such as corona discharge and vacuum infrared rays.

As the adhesive 100, the same adhesive as that constituting the adhesive layer 40 is used.

Next, the laminate 90 obtained in step E1 is cut perpendicular to the extending direction of the plated layer 70 in the laminate 90 (step G1). Since the direction in which the plated layer 70 extends in FIG. 3(c) is the horizontal direction of the paper, for example, it is cut along the depth of the paper of FIG. 3(c) or cut in the vertical direction of the paper. be able to.
Thus, an electrical connector 10 as shown in FIGS. 1(a) and 1(b) is obtained. The plated layer 70 is cut into a predetermined length to form the thin metal layer 22 .

According to the method of manufacturing the electrical connector of this embodiment, it is possible to prevent short circuits caused by migration, and to apply excessive force from the thin metal layer 22 to the connection terminals of the device connected to the electrical connector 10. Thus, an electrical connector 10 can be obtained that can prevent the connection terminals of the device from being damaged. Moreover, according to the method for manufacturing the electrical connector of the present embodiment, the electrical connector 10 can be easily manufactured by simplifying the manufacturing process.

(Second embodiment)
[Method for manufacturing electrical connector]
The method for manufacturing an electrical connector of the present embodiment includes a step of applying a metal nanopaste to one surface of a substrate (hereinafter referred to as “step A2”), and firing the metal nanopaste applied to one surface of the substrate. , a step of forming a thin metal layer (hereinafter referred to as “step B2”); a step of vulcanizing the clay-like rubber sheet 1 to form a first rubber sheet (hereinafter referred to as “step C2”); A step of leaving one surface of the sheet (hereinafter referred to as “step D2”); A step of vulcanizing the clay-like rubber sheet of 2 to form a second rubber sheet and forming an elastic body composed of the first rubber sheet, the thin metal layer and the second rubber sheet (hereinafter referred to as "step E2" ), a step of forming a laminate by laminating a plurality of elastic bodies so that the metal thin layers are parallel to each other (hereinafter referred to as “step F2”), and a step of laminating the laminate. and a step of cutting perpendicular to the extending direction of the thin metal layer in the body (hereinafter referred to as “step G2”).
Also in this embodiment, rubber sheets made of liquid silicone may be used in place of the first and second clay-like rubber sheets, as in the first embodiment.

Hereinafter, a method for manufacturing the electrical connector of this embodiment will be described with reference to FIGS. 4(a) to 4(c) and FIGS. 5(a) to 5(c).
4(a) to 4(c) and 5(a) to 5(c) are cross-sectional views schematically showing the method of manufacturing the electrical connector of this embodiment. 4 and 5, the electrical connector in the first embodiment shown in FIG. 1 and the electrical connector shown in FIGS. 2(a) to 2(c) and 3(a) to 3(c) The same reference numerals are assigned to the same components as in the method of manufacturing the electrical connector in the first embodiment, and duplicate descriptions are omitted.

As shown in FIG. 4A, the metal nanopaste 110 is applied to one surface 60a of the base material 60 (step A2).

The method of applying the metal nanopaste 110 to the one surface 60a of the base material 60 is not particularly limited, but examples thereof include an inkjet method, a gravure printing method, an electrostatic coating method, a spin coat method, and a die coater.

As the metal nanopaste, for example, nano-sized (average particle size 1 nm to less than 1 μm) metal particles such as noble metals other than silver such as gold and platinum, and alloys of these noble metals are dispersed in a binder resin. be.

Next, the metal nanopaste 110 applied to the one surface 60a of the base material 60 is fired to form the thin metal layer 120 (step B2).

In step B2, metal nanopaste 110 is fired.

Next, as shown in FIG. 4(b), one surface 81a of the first clay-like rubber sheet 81 is attached to the thin metal layer 120 formed on the one surface 60a of the base material 60, and then the first clay-like rubber sheet 81 is applied. The rubber sheet 81 is vulcanized to form a first rubber sheet 81A (step C2).

In step C2, the first rubber sheet 81A is formed by vulcanizing the first clay-like rubber sheet 81 in the same manner as in step B1 described above.

Next, as shown in FIG. 4(c), the base material 60 is removed by wet etching, leaving the thin metal layer 120 on the one surface 81a of the first rubber sheet 81A (step D2).

In step D2, the base material 60 is removed by wet etching in the same manner as in step C1 described above.

In step D2, the thin metal layer 120 is transferred onto the one surface 81a of the first rubber sheet 81A by removing the base material 60 by wet etching.

Next, as shown in FIG. 5(a), a second clay-like rubber sheet 82 is attached to one surface 81a of the first rubber sheet 81A so as to cover the metal thin layer 120, and then a second clay-like rubber sheet 82 is applied. The shaped rubber sheet 82 is vulcanized to form a second rubber sheet 82A, and the elastic body 23 comprising the first rubber sheet 81A, the thin metal layer 120 and the second rubber sheet 82A is formed (step E2).

In step E2, the elastic body 23 is molded in the same manner as in step D1 described above.

Next, as shown in FIG. 5(b), a plurality of elastic bodies 23 obtained in steps A2 to E2 are laminated such that the thin metal layers 120 are parallel to each other, and the elastic body 23 is laminated as shown in FIG. 5(c). A laminated body 90 is molded (step F2).

In step F2, the laminate 90 is molded in the same manner as in step E1 described above.

Next, the laminate 90 obtained in step F2 is cut perpendicular to the extending direction of the thin metal layer 120 in the laminate 90 (step G2).
Thus, an electrical connector 10 as shown in FIGS. 1(a) and 1(b) is obtained. The thin metal layer 120 is cut into a predetermined length to form the thin metal layer 22 .

According to the method of manufacturing the electrical connector of this embodiment, it is possible to prevent short circuits caused by migration, and to apply excessive force from the thin metal layer 22 to the connection terminals of the device connected to the electrical connector 10. Thus, an electrical connector 10 can be obtained that can prevent the connection terminals of the device from being damaged. Moreover, according to the method for manufacturing the electrical connector of the present embodiment, the electrical connector 10 can be easily manufactured by simplifying the manufacturing process.

In addition, the manufacturing method of the electrical connector of each of the present embodiments includes a step of projecting end portions of the plurality of thin metal layers 22 from at least one of the one main surface 20a and the other main surface 20b of the electrical connector 10 (projecting step ).
As a method for making the end of the thin metal layer 22 protrude from the main surface, for example, there is a method of scraping off a part of the resin layer constituting the main surface of the electrical connector 10 by mechanical processing such as laser etching, chemical etching, and cutting. mentioned.
When forming a plated layer on the edge of the projecting thin metal layer 22, a known electroplating or electroless plating method can be applied.

EXAMPLES The present invention will be described in more detail with reference to examples and comparative examples below, but the present invention is not limited to the following examples.

[Example]
An embodiment of the present invention will be described with reference to FIGS. 1, 2(a) to 2(c) and 3(a) to 3(c).
A substrate having a 0.5 μm thick nickel plating layer on both sides of a 50 μm thick copper plate and a gold plated plate having a 0.5 μm thick gold plating layer laminated on the surface of the nickel plating layer of the substrate were prepared. .
Millable compound (product number: KE-174-U, manufactured by Shin-Etsu Chemical Co., Ltd.) 100 parts by mass, vulcanizing agent (product number: C-19A, manufactured by Shin-Etsu Chemical Co., Ltd.) 0.6 parts by mass and vulcanizing agent (product number: C-19B, manufactured by Shin-Etsu Chemical Co., Ltd.) 2.5 parts by mass and 1 part by mass of a silane coupling agent (product number: KBM-403, manufactured by Shin-Etsu Chemical Co., Ltd.) are added and kneaded to form a first clay-like silicone rubber. was made.
This first clay-like silicone rubber was molded to a thickness of 85 µm.
Next, after bonding one surface of the first clay-like rubber sheet to the gold-plated layer of the gold-plated plate, the first clay-like rubber sheet was heated at 135° C. for 40 minutes to form the first clay-like rubber sheet. It was vulcanized and cured to form a first rubber sheet made of silicone rubber.
Next, the gold-plated plate and the first rubber sheet bonded together were immersed in an iron chloride solution to remove the nickel silver and nickel plating layers. As a result, the gold plating layer was transferred onto one surface of the first rubber sheet.
Next, a second clay-like rubber sheet having the same structure and thickness as the first clay-like rubber sheet is attached to one surface of the first rubber sheet so as to cover the gold-plated layer. The second clay-like rubber sheet was heated at 135° C. for 40 minutes to vulcanize and harden the second clay-like rubber sheet to obtain a second rubber sheet made of silicone rubber. As a result, an elastic body composed of the first rubber sheet, the second rubber sheet, and the gold-plated layer sandwiched between them was molded.
Next, a laminate was formed by laminating a plurality of elastic bodies via liquid silicone rubber such that the gold-plated layers were superimposed in parallel with each other. Here, a liquid silicone rubber was applied to the adhesive surface of the elastic body by screen printing so as to have a thickness of 30 μm. Moreover, after laminating the elastic body via the liquid silicone rubber, the laminated body was heated at 135° C. for 40 minutes to vulcanize and harden the liquid silicone rubber.
Next, the obtained laminate was cut perpendicularly to the extending direction of the gold plating layer in the laminate to obtain an electrical connector as shown in FIG.
In the electrical connector of the example, the length of the rectangular gold plating layer on the joint surface was 5 mm, the length of the short side of the rectangle of the gold plating layer on the joint surface was 0.5 μm, and the length of the short side of the rectangle on the joint surface was 0.5 mm. The pitch of the gold plating layer was 200 μm.

[Comparative example]
On one surface of a first resin layer having a thickness of 110 μm and made of silicone rubber formed on a polyethylene terephthalate base material, a large number of conductive members were arranged in parallel at intervals of 200 μm in the same direction.
As the conductive member, a cylindrical core material made of brass and having a diameter of 39.6 μm, and a nickel plating layer having a thickness of 0.1 μm and a gold plating layer having a thickness of 0.1 μm formed on the outer peripheral surface of the core material. I used what I had.
Next, a second resin layer made of silicone rubber and having a thickness of 110 μm is formed on one surface of the first resin layer on which a large number of conductive members are arranged. and a conductive member was fixed between the first resin layer and the second resin layer to form a conductive member-containing sheet.
Next, a plurality of conductive member-containing sheets were laminated with the directions of the conductive members aligned with each other to form a laminate of conductive member-containing sheets.
Next, the laminate was cut by cutting perpendicularly to the direction in which the conductive member extends so as to have a thickness of 300 μm, thereby obtaining an electrical connector having a through-hole to which the sliced conductive member was joined. .
In the electrical connector of the comparative example, the diameter of the conductive members on the joint surface was 40 μm, and the pitch of the conductive members in the horizontal direction on the joint surface was 250 μm.

[Evaluation 1]
The electrical connectors of Examples and Comparative Examples were placed between a probe with a diameter of 1.0 mm, the copper surface of which was nickel-plated and gold-plated, and a substrate having gold-plated connection terminals, and a laminate (test device).
In addition, in order to measure the resistance value between the probe and the connection terminal on the substrate, a resistance measuring device (trade name: RM3545-01, manufactured by Hioki Electric Co., Ltd.) was connected to the probe and the connection terminal.
In this state, while compressing the laminate in its thickness direction, the resistance value between the probe and the connection terminal is measured, and the amount of displacement of the laminate (the amount by which the laminate is compressed in the thickness direction) and The relationship between the resistance value between the probe and the connection terminal was investigated. The amount of displacement of the laminate is equal to the amount of displacement of the electrical connector.
In addition, when compressing the laminate, the load applied to the laminate was measured by an automatic load tester (trade name: MAX-1KN-S-1, manufactured by Nippon Keisoku System Co., Ltd.), and the displacement of the laminate ( The relationship between the amount of compression) and the load was investigated.

Based on the above results, the relationship between the resistance value between the probe and the substrate and the load applied to the electrical connector was investigated. FIG. 6 shows the results of the relationship between the amount of displacement of the laminate and the load when using the electrical connector of the example. FIG. 7 shows the results of the relationship between the amount of displacement of the laminate and the load when using the electrical connector of the comparative example. FIG. 8 shows the results of the relationship between the amount of displacement of the laminate and the resistance value between the probe and the connection terminal when the electrical connector of Example or Comparative Example was used.
From the results of FIGS. 6 to 8, the amount of compression at which the resistance value is stabilized was 0.015 mm in the example and 0.02 mm in the comparative example. In the comparative example, the amount of compression when the resistance value was stabilized was about twice that of the example. The load at that time was 0.58 N in the example and 4.76 N in the comparative example. That is, in the comparative example, the load at which the resistance value was stabilized was about eight times that of the example. Therefore, in the embodiment, the load applied to the electrode to be inspected can be reduced, and damage to the electrode can be suppressed.

[Evaluation 2]
The electrical connectors of Examples and Comparative Examples were composed of a probe with a diameter of 1.0 mm, the surface of which was made of lead plated with nickel and gold, and a copper foil consisting of a copper layer with a thickness of 35 μm and a conductive adhesive with a thickness of 25 μm. A laminate (test device) was formed toward the copper layer by placing it between the glass substrate to which the tape was attached.
In this state, the laminate was compressed in its thickness direction.
In the examples and comparative examples, the contact surface between the electrical connector and the copper foil tape was observed with a scanning electron microscope when a load of 8 N was applied. An image captured by a scanning electron microscope in the example is shown in FIG. FIG. 10 shows an image taken with a scanning electron microscope in the comparative example.
From the results of FIG. 9, in the example, the copper foil tape did not show any scratches caused by the thin metal layer of the electrical connector. On the other hand, from the results of FIG. 10, in the comparative example, the copper foil tape was found to have scratches caused by the conductive member of the electrical connector.

10 Electrical connector 20 Multilayer main body 21 Resin layer 22 Metal thin layer 23 Elastic body 40 Adhesive layer 50 Coating layer 60 Base material 61 First layer 62 Second layer 70 Plated layer 81 First clay-like rubber sheet 81A First layer Rubber sheet 82 Second clay-like rubber sheet 82A Second rubber sheet 90 Laminate 100 Adhesive 110 Metal nanopaste 120 Metal thin layer

Claims (4)

Forming a plated layer on one surface of the base material;
After bonding one surface of the first uncured rubber sheet to the plated layer formed on one surface of the base material, the first uncured rubber sheet is vulcanized to form the first rubber sheet. forming;
removing the base material by wet etching to leave the plated layer on one surface of the first rubber sheet;
After bonding a second uncured rubber sheet to one surface of the first rubber sheet so as to cover the plating layer, the second uncured rubber sheet is vulcanized to form a second rubber. Forming a sheet and molding an elastic body comprising the first rubber sheet, the plated layer and the second rubber sheet;
forming a laminate by laminating a plurality of the elastic bodies so that the plated layers are parallel to each other;
A method of manufacturing an electrical connector, comprising: cutting the laminate perpendicular to the extending direction of the plated layers in the laminate. Applying a metal nanopaste to one surface of a substrate;
Baking the metal nanopaste applied to one surface of the base material to form a thin metal layer;
After bonding one surface of a first uncured rubber sheet to the thin metal layer formed on one surface of the base material, the first uncured rubber sheet is vulcanized to form a first rubber sheet. forming a
removing the substrate by wet etching to leave the thin metal layer on one side of the first rubber sheet;
After bonding a second uncured rubber sheet to one surface of the first rubber sheet so as to cover the thin metal layer, the second uncured rubber sheet is vulcanized to form a second rubber sheet. forming a rubber sheet and forming an elastic body comprising the first rubber sheet, the thin metal layer and the second rubber sheet;
forming a laminate by laminating a plurality of the elastic bodies so that the metal thin layers are parallel to each other;
A method of manufacturing an electrical connector, comprising: cutting the laminate perpendicular to the extending direction of the thin metal layers in the laminate. The electrical connector formed by the cutting comprises a rectangular parallelepiped multi-layer body in which resin layers and thin metal layers are alternately laminated in multiple layers,
The thin metal layer penetrates the multilayer body in the thickness direction and the depth direction, the shape of the exposed surface of the thin metal layer on the connection surface of the multilayer body to the connection terminal is rectangular, and the thin metal layer is 3. The method of manufacturing an electrical connector according to claim 1, wherein the short side of the rectangular shape is 0.01 .mu.m or more and 10 .mu.m or less. 4. The method of manufacturing an electrical connector according to claim 3, wherein the pitch of said thin metal layers in the short side direction of said rectangle is 4 [mu]m or more and 600 [mu]m or less.

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