TW201935782A - Electrical connector and manufacturing method thereof - Google Patents

Abstract

The present invention provides an electrical connector (10) that is disposed between a connecting terminal of a first device and a connecting terminal of a second device and electrically connects therebetween, includes a rectangular solid shape multi-layer main body (20) in which a resin layer (21) and a metallic thin layer (22) are alternately and multiply layered, wherein the metallic thin layer (22) penetrates the multi-layer main body (20) in the thickness direction and the depth direction of the multi-layer main body (20), an exposure surface of the metallic thin layer (22) in a connection surface (20a) that connects with the connecting terminal of the multi-layer main body (20) has a rectangle shape, the metallic thin layer (22) is composed of a precious metal or a precious metal alloy, and the short length of the rectangular shape is 0.01 [mu]m or more and 10 [mu]m or less.

Description

Electric connector and manufacturing method thereof

The invention relates to an electrical connector and a method for manufacturing the same. This case claims priority based on Japanese Patent Application No. 2017-245575 filed on December 21, 2017, and its contents are incorporated herein.

In a connection between a display device such as a liquid crystal display and a circuit board, or a connection between electronic circuit boards, a zebra-like (vertical stripe) structure is used in which a conductive elastomer layer containing a conductive substance containing silver and an insulating elastomer layer are used. Anisotropic conductive connectors are known (for example, refer to Patent Document 1). This anisotropic conductive connector is formed by alternately and multi-layering a conductive elastomer layer and an insulating elastomer layer so that their joint surfaces become parallel to each other.

In addition, an anisotropic conductive connector is known in which thin metal wires having a wire diameter of 5 μm to 100 μm are buried at the same interval as the electrode pitch of the connected members, and are buried only opposite to the electrode portions of the connected members. In this part, the thin metal wires are arranged along the extending direction of each electrode (for example, refer to Patent Document 2).

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2000-251980

[Patent Document 2] Japanese Shikaihei 7-014570

The anisotropic conductive connector described in Patent Document 1 is surface-treated with a thiol-based compound on the connection surface to which the electrode is connected to prevent a short circuit due to migration. However, in severe use environments, it is not easy to completely prevent migration from occurring.

In addition, the anisotropic conductive connector described in Patent Document 2 is susceptible to damage due to the thin metal wire because it uses a relatively inexpensive brass wire or a phosphor bronze wire coated with gold. To the electrode of the connected member.

The present invention has been made in view of the above circumstances, and an object thereof is to provide an anisotropic conductive connector that prevents short circuits due to migration and at the same time prevents damage to an electrode to be inspected, and a method for manufacturing the same.

[1] An electrical connector is arranged between the connection terminal of the first device and the connection terminal of the second device, and for those who are electrically connected, the electrical connector is provided with a multilayer body, and the multilayer system is composed of In the case of a rectangular parallelepiped shape in which a resin layer and a metal thin layer are alternately multiple laminated, the metal thin layer penetrates the multilayer body in a thickness direction and a depth direction, and the metal thin portion in a connection surface of the multilayer body connected to the connection terminal The shape of the exposed surface of the layer is rectangular, the thin metal layer is made of a precious metal or a precious metal alloy, and the length of the short side of the rectangle is 0.01 μm or more and 10 μm or less.

[2] The electrical connector according to item [1], wherein a distance between the thin metal layers in a short-side direction of the rectangle is 4 μm or more and 600 μm or less.

[3] The electrical connector according to [1] or [2], wherein a part of the metal thin layer is provided with a covering layer on a side surface exposed in a thickness direction of the multilayer body.

[4] A method for manufacturing an electrical connector, comprising the steps of: forming a plating layer on one surface of a substrate; and adhering one surface of a first unhardened rubber sheet to the plating layer formed on one surface of the substrate. Then, the first uncured rubber sheet is vulcanized to form a first rubber sheet; the substrate is removed, and the plating layer is left on one surface of the first rubber sheet; on one surface of the first rubber sheet After the second uncured rubber sheet is bonded to cover the plating layer, the second uncured rubber sheet is vulcanized to form a second rubber sheet, and the first rubber sheet, the plating layer, and An elastic body composed of the second rubber sheet; a plurality of the elastic bodies are laminated so that the plating layers become parallel to each other to form a laminated body; and an elastic body perpendicular to an extension direction of the plating layers in the laminated body Way to cut the aforementioned laminated body.

[5] A method for manufacturing an electrical connector, comprising the steps of: coating a metal nano paste on one surface of a substrate; firing the metal nano paste applied on one surface of the substrate to form a thin metal layer; The thin metal layer formed on one side of the base material is bonded to one side of the first unhardened rubber sheet, and the first unhardened rubber sheet is vulcanized to form a first rubber sheet; the base material is removed, and the first A thin metal layer remains on one side of the first rubber sheet; a second unhardened rubber sheet is bonded to one side of the first rubber sheet to cover the metal thin layer, and then the second unhardened rubber sheet is bonded. A second rubber sheet is formed by vulcanization, and an elastic body composed of the first rubber sheet, the metal thin layer, and the second rubber sheet is formed; a plurality of the elastic bodies are laminated so that the metal thin layers become parallel to each other. Forming a laminated body; and cutting the laminated body so as to be perpendicular to the extending direction of the thin metal layer in the laminated body.

According to the present invention, it is possible to provide an anisotropic conductive connector that prevents a short circuit due to migration and at the same time prevents damage to an electrode to be inspected, and a method for manufacturing the same.

10‧‧‧electrical connector

20‧‧‧Multi-layer Ontology

20a‧‧‧Main face

20b‧‧‧ main face

20c‧‧‧side

21‧‧‧resin layer

22‧‧‧Thin metal layer

23‧‧‧ Elastomer

40‧‧‧ Adjacent layer

50‧‧‧ Coating

60‧‧‧ substrate

61‧‧‧ Level 1

62‧‧‧ Level 2

70‧‧‧Plating

81‧‧‧The first clay-like rubber sheet

81A‧‧‧The first rubber sheet

82‧‧‧ 2nd clay-like rubber sheet

82A‧‧‧Second rubber sheet

90‧‧‧ laminated body

100‧‧‧ Adhesive

110‧‧‧ Metal Nano Plaster

120‧‧‧Thin metal layer

L ₁ ‧‧‧ length

L ₂ ‧‧‧ length

P ₁ ‧‧‧ pitch

FIG. 1 is a cross-sectional view showing a schematic configuration of the electrical connector according to the first embodiment.

Fig. 2 is a schematic sectional view showing a method of manufacturing the electrical connector according to the first embodiment.

Fig. 3 is a schematic sectional view showing a method of manufacturing the electrical connector according to the first embodiment.

Fig. 4 is a schematic cross-sectional view showing a method of manufacturing the electrical connector according to the second embodiment.

Fig. 5 is a schematic cross-sectional view showing a method of manufacturing the electrical connector according to the second embodiment.

Fig. 6 is a diagram showing the relationship between the displacement (compression) of the laminated body and the load applied to the electrical connector when the electrical connector of the embodiment is used.

Fig. 7 is a graph showing the relationship between the displacement (compression) of the laminated body and the load applied to the electrical connector when the electrical connector of the comparative example is used.

FIG. 8 is a diagram showing the relationship between the displacement (compression) of the laminated body and the resistance value between the probe and the connection terminal when the electrical connector of the embodiment or the comparative example is used.

FIG. 9 shows an image taken by a scanning electron microscope in the example.

Fig. 10 shows an image photographed with a scanning electron microscope in a comparative example.

Embodiments of the electrical connector and the method for manufacturing the same according to the present invention will be described.

In addition, the present embodiment is specifically described in order to fully understand the meaning of the invention. In particular, the invention is not limited as long as it is not specified.

(First Embodiment) [Electric connector]

Fig. 1 shows a schematic configuration of the electrical connector according to this embodiment. (A) is a plan view and (b) is a front view.

As shown in FIG. 1, the electrical connector 10 according to this embodiment is provided with a multilayer body 20, which is a rectangular parallelepiped shape formed by alternately laminating a resin layer 21 and a thin metal layer 22.

The thin metal layer 22 penetrates the multilayer body 20 in a thickness direction (Z direction in FIG. 1 (b)) and a depth direction (Y direction in FIG. 1 (a)). In addition, the thin metal layer 22 has a shape where a part of the thin metal layer 22 is exposed (exposed surface) in the first connection surface (a main surface of the multilayer body 20) 20a of the multilayer body 20 that is connected to the connection terminal. Is rectangular. Similarly, the shape of the exposed surface of the thin metal layer 22 in the second connection surface (the other main surface of the multilayer body 20) 20b connected to the connection terminal of the multilayer body 20 is also rectangular.

Here, regarding the multilayer body 20, the thickness direction (Z direction in Fig. 1 (b)), the width direction (X direction in Fig. 1 (a)), and the depth direction (Y direction in Fig. 1 (a)) are Orthogonal directions.

In the present invention, the four inner corners of the "rectangular" need not be exactly 90 degrees, and the "rectangular" can be regarded as a linear shape having a thickness. At this time, the length of the long side of the rectangle is the length of the line, and the length of the short side of the rectangle is equivalent to the thickness of the line.

The thin metal layer 22 is made of a noble metal or a noble metal alloy.

The length of the rectangular short side of the thin metal layer 22 is 0.01 μm or more and 10 μm or less.

The electrical connector 10 is disposed between a connection terminal of a first device (not shown) and a connection terminal of a second device (not shown), and is used to electrically connect these. In the electrical connector 10, the thin metal layer 22 is a member for electrically connecting the connection terminal of the first device and the connection terminal of the second device. The device may be, for example, a semiconductor package or a circuit substrate, a silicon wafer, a passive part, a liquid crystal module, and a sensor.

The resin layer 21, the thin metal layer 22, and the resin layer 21 are sequentially laminated to form an elastic body 23.

The multilayer body 20 is formed by laminating a plurality of elastic bodies 23 on the long side direction (the X direction shown in FIG. 1 (a)) of one of the main surfaces 20a of the multilayer body 20 via an adhesive layer 40 (continuous connection). . The number of laminated elastic bodies 23, that is, the length of the long side of the multilayer body 20 (the length in the X direction shown in FIG. 1 (a)) is not particularly limited, and it can be according to the number and size of the electrodes to be inspected ( Area), pitch, etc. The length of the short side of the main surface 20a of the multilayer body 20 (the length in the Y direction shown in FIG. 1 (a)) is not particularly limited, and it depends on the number, size (area), and pitch of the electrodes to be inspected. Wait and adjust appropriately.

The elastic body 23 does not need to be laminated with the adhesive layer 40 interposed therebetween, and the electrical connector 10 in which the adhesive layer 40 is omitted may be manufactured by a method of manufacturing an electrical connector described later. The elastic body 23 may be a laminated body composed of one resin layer 21 and one metal thin layer 22.

The thin metal layer 22 is arranged on the center line of the longitudinal direction of the elastic body 23 (the Y direction shown in FIG. 1 (a)).

The plurality of elastic bodies 23 are continuously connected (laminated) such that the thin metal layers 22 become parallel to each other.

The thickness of the multilayer body 20 (the length in the Z direction shown in FIG. 1 (b)), that is, the distance between one main surface 20a and the other main surface 20b is preferably 0.03 mm or more and 25 mm or less.

The length in the longitudinal direction of the multilayer body 20 may be, for example, 0.05 mm to 300 mm.

The length of the rectangular long side of the metal thin layer 22 in one of the main surface 20a and the other main surface 20b of the multilayer body 20 (the length in the Y direction shown in FIG. 1 (a)) L _{1 is} preferably 0.03 mm or more and 10 mm or less. Hereinafter, it is more preferably 0.3 mm to 5 mm.

If the length L ₁ of the rectangular long side of the thin metal layer 22 is within the above range, the electrical connection between the connection terminal of the first device and the connection terminal of the second device can be kept stable for a long period of time.

The length of the rectangular short side of the thin metal layer 22 in one of the main surfaces 20a and the other main surface 20b of the multilayer body 20 (the length in the X direction shown in FIG. 1 (a)) L ₂ is 0.01 μm or more and 10 μm or less, It is preferably 0.05 μm or more and 5 μm or less, and more preferably 0.1 μm or more and 2 μm or less.

If the length L ₂ of the rectangular short side of the thin metal layer 22 is within the above range, the electrode to be inspected will not be damaged. In addition, the electrical connection between the connection terminal of the first device and the connection terminal of the second device can be kept stable for a long period of time.

In the main surface 20a and the other main surface 20b of the multilayer body 20 in one of the short sides of the rectangular-based preferred direction of the metal sheet (first shown in FIG. 1 (a) of FIG X direction) of the pitch P ₁ is 22 or more 1μm 600 μm or less, more preferably 1 μm or more and 200 μm or less, and even more preferably 1 μm or more and 50 μm or less.

If the pitch of the metal thin layer of the short side direction of the rectangular shape of 22 P ₁ is 0.2mm or less, may be electrically connected to the electrode of a narrow pitch. In addition, the electrical connection between the connection terminal of the first device and the connection terminal of the second device can be maintained stable for a long period of time.

In the electrical connector 10 according to this embodiment, a covering layer 50 may be provided on a side surface 20c of a part of the thin metal layer 22 along the side surface in the thickness direction of the multilayer body 20.

The thickness of the coating layer 50 is not particularly limited, and may be, for example, 1 μm to 5 mm.

The material (material) of the resin layer 21 forming the multilayer body 20 is not particularly limited as long as it has insulation and elasticity, but examples thereof include silicone rubber, fluorine rubber, polybutadiene rubber, and polyisoprene. Rubber, polyurethane rubber, chloroprene rubber, polyester rubber, styrene-butadiene copolymer rubber, natural rubber, etc. Among these, from the viewpoint of high elasticity and excellent heat resistance, silicone rubber is preferred.

The material (material) of the thin metal layer 22 is preferably a metal which is more difficult to migrate than silver. Excluding silver, precious metals such as gold, platinum, palladium, rhodium, indium, ruthenium, or the precious metal alloys can be mentioned. In addition to the noble metals, tin, copper, lead, nickel, or alloys thereof can be exemplified. Among these materials, in consideration of conductivity and corrosion resistance, noble metals such as gold and platinum are preferred, and gold and platinum are particularly preferred.

The adhesive constituting the adhesive layer 40 is not particularly limited, but the same material as the resin layer 21 may be used, or a material different from the material of the resin layer 21 may be used. Examples of the adhesive include a silicone rubber-based adhesive, a modified silicone rubber-based adhesive, a natural rubber latex adhesive, a urethane resin-based adhesive, a urethane resin-based adhesive, Chlorinated vinyl resin adhesive, chloroprene rubber adhesive, nitrile rubber adhesive, nitrocellulose adhesive, phenol resin adhesive, polyimide adhesive, polyurethane Resin-based adhesives, polyvinyl alcohol-based adhesives, and the like. Among these, liquid silicone rubber which is easy to form a thin film is preferable. Here, the liquid silicone rubber is a liquid at the time of coating, but is hardened to become a silicone rubber having low fluidity or a solid shape.

The material (material) of the coating layer 50 is not particularly limited as long as it has insulation and elasticity, and examples thereof include the same material as the resin layer 21.

The electrical connector 10 of this embodiment is provided with a rectangular parallelepiped-shaped multilayer body 20 formed by alternately stacking a resin layer 21 and a thin metal layer 22, and the thin metal layer 22 faces the thickness direction (Z in FIG. 1 (b)). Direction) and depth direction (Y direction in FIG. 1 (a)) penetrate the multilayer body 20, and the shape of the exposed surface of the metal thin layer 22 in the connection surface 20a of the multilayer body 20 connected to the connection terminal is rectangular, and the metal thin The layer 22 is composed of a noble metal or a noble metal alloy, and the length of the short rectangular side is 0.01 μm or more and 10 μm or less. Therefore, a short circuit due to migration can be prevented. In addition, when the connection terminals of the device to be connected to the electrical connector 10 are connected to the thin metal layer 22, an excessive force from the thin metal layer 22 is not applied to the connection terminals of the device, and damage to the connection terminals can be prevented. In addition, the electrical connector 10 of this embodiment is provided with a rectangular shape. The thin metal layer 22 having a short side length of 0.01 μm to 10 μm is excellent in high-frequency characteristics and can be electrically connected to narrow-pitch electrodes.

The ends of the thin metal layer 22 included in the electrical connector 10 may protrude from at least one of the main surface 20 a and the other main surface 20 b. The "end portion of the thin metal layer" means a range from an end surface (end edge) of the thin metal layer to a quarter length of the length in the Z direction of the thin metal layer. The amount of protrusion when the end portion of the thin metal layer 22 protrudes from the main surface is not particularly limited, and is appropriately adjusted in accordance with the shape and arrangement of the connection terminals of the two devices electrically connected by the electrical connector 10.

When the end portion of the thin metal layer 22 included in the electrical connector 10 protrudes from the one main surface 20a or the other main surface 20b, the protruding end portion may be plated to form a difference from the thin metal layer 22 Other plating. The material of the other plating layers is not particularly limited, and is appropriately selected in accordance with the material of the thin metal layer 22. The surface area (cross-sectional area) of the end portion of the thin metal layer 22 will be increased by other plating layers, and the contact area between the end portion of the thin metal layer 22 and the connection terminals of the device to be connected will be increased, so that it can be more stable. Maintain these electrical connections.

[Manufacturing method of electric connector]

The method for manufacturing an electrical connector according to this embodiment includes a step of forming a plating layer on one surface of a base material (hereinafter referred to as "step A1"); and attaching a plating layer to the plating layer formed on one surface of the base material. (1) A step of vulcanizing the first clay-shaped rubber sheet to form the first rubber sheet after one surface of the clay-shaped rubber sheet (hereinafter referred to as "step B1"); removing the base material by wet etching, and plating A step in which a layer is left on one surface of the first rubber sheet (hereinafter, referred to as "step C1"); after a second clay-like rubber sheet is bonded to one surface of the first rubber sheet so as to be covered with a plating layer, the first 2Clay-like rubber sheet is vulcanized to form a second rubber sheet, and a step of forming an elastomer composed of a first rubber sheet, a plating layer, and a second rubber sheet (hereinafter referred to as "step D1"); and plating The layers become parallel to each other, and a plurality of elastic bodies are laminated to form the laminated body. Step (hereinafter, referred to as "step E1"); and a step of cutting the multilayer body perpendicular to the extension direction of the plating layer in the multilayer body (hereinafter, referred to as "step F1").

Here, the first and second clay-like rubber sheets are examples of the first and second unhardened rubber sheets.

The rubber sheet made of liquid silicone rubber may be used in place of the first and second clay rubber sheets. When a rubber sheet made of liquid silicone rubber is used, it is preferable to use a sheet which is a semi-hardened liquid silicone rubber or a liquid silicone rubber having a relatively low fluidity formed into a sheet.

Hereinafter, a method for manufacturing the electrical connector according to this embodiment will be described with reference to FIGS. 2 (a) to 2 (c) and FIGS. 3 (a) to 3 (c).

Figures 2 (a) to 2 (c) and 3 (a) to 3 (c) are schematic cross-sectional views showing a method of manufacturing the electrical connector of this embodiment. In Figs. 2 and 3, the same reference numerals are given to the same configuration of the electrical connector in this embodiment shown in Fig. 1, and redundant descriptions are omitted.

As shown in FIG. 2 (a), a plating layer 70 is formed on one surface 60a of the substrate 60 (step A1).

In step A1, a plating layer 70 is formed on one surface 60a of the substrate 60 by electrolytic plating or electroless plating.

The base material 60 is not particularly limited as long as it can form the plating layer 70 by electrolytic plating or electroless plating. The substrate 60 is, for example, as shown in FIG. 2 (a), a first layer 61 made of a copper alloy such as copper or brass, phosphor bronze, or nickel silver, and a layer made of nickel or zinc can be used. An alloy formed by laminating the second layer 62, or forming a gold plating layer, a platinum plating layer, a copper plating layer, or a nickel plating layer on one side of the water-soluble film. Examples of the water-soluble film include polyvinyl alcohol.

The material of the plating layer 70 excludes silver, and examples thereof include precious metals such as gold and platinum, or alloys of these precious metals.

Then, as shown in FIG. 2 (b), the first clay rubber sheet 81 is bonded to the plating layer 70 formed on the first surface 60a of the substrate 60, and then the first clay rubber sheet 81 is vulcanized. Thus, a first rubber sheet is formed (step B1).

The first clay-like rubber sheet 81 is not particularly limited, and examples thereof include clay-like silicone rubber, clay-like fluorine rubber, clay-like polybutadiene rubber, and clay-like shape that are vulcanized and hardened by heating or light or electromagnetic wave irradiation. Polyisoprene rubber, clay-like polyurethane rubber, clay-like chloroprene rubber, clay-like polyester-based rubber, clay-like styrene-butadiene copolymer rubber, clay-like natural rubber, etc.

These clay-like rubber sheets are obtained by adding a vulcanizing agent and additives as needed to a millable compound and kneading them.

Specific examples of the clay-like silicone rubber include a so-called rubber compound such as KE-174-U manufactured by Shin-Etsu Chemical Industry Co., Ltd.

The hardness (Durometer A) of the clay-like silicone rubber after hardening is preferably 20 or more, and more preferably 30 or more. The upper limit of the hardness is preferably 90 or less. When the hardness is in the above range, moderate rigidity can be imparted to the electrical connector.

The hardness is measured in accordance with the method of JIS K 6249: 2003.

Specific examples of the liquid silicone rubber that can be used in place of the clay silicone rubber include, for example, KE-1935-A, KE-1935-B, and the like manufactured by Shin-Etsu Chemical Industry Co., Ltd. Reaction and heat hardening.

The viscosity of the liquid silicone rubber before curing is lower than that of the clay-like silicone composite system. For example, it is preferably below 500Pa‧s, preferably below 200Pa‧s, and more preferably below 100Pa‧s. good. The lower limit of the viscosity is preferably 10 Pa · s or more.

The density (23 ° C, unit: g / cm ³ ) of the liquid silicone rubber before curing is preferably lower than that of the clay silicone rubber. For example, it is preferably less than 1.10, and preferably less than 1.06. Below 1.03 is more preferred. The lower limit of the density is usually 1.00 or more. When the density is in the above range, application of the liquid silicone rubber becomes easy.

The hardness (Durometer A) of the liquid silicone rubber after hardening is preferably 20 or more, and more preferably 30 or more. The upper limit of the hardness is preferably 90 or less. When the hardness is in the above range, moderate rigidity can be imparted to the electrical connector.

The viscosity, density and hardness are measured in accordance with the method of JIS K 6249: 2003.

The thickness of the first clay-like rubber sheet 81 is not particularly limited, and can be appropriately adjusted in accordance with the thickness required for the multilayer body 20 formed by connecting the elastic body 23 formed by the first clay-like rubber sheet 81. For example, a thickness of 0.0005 mm to 0.5 mm can be mentioned. The sheet system may also be referred to as a film.

In step B1, the first clay rubber sheet 81 is heated and vulcanized to form a first rubber sheet 81A.

Then, as shown in FIG. 2 (c), the base material 60 is removed by wet etching to leave the plating layer 70 on one surface 81a of the first rubber sheet 81A (step C1).

When copper is used as the base material 60, the first rubber sheet 81A bonded to the base material 60 on which the plating layer 70 is formed is immersed in a solution of ferric chloride. When a water-soluble film is used as the base material 60, the first rubber sheet 81A bonded to the base material 60 on which the plating layer 70 is formed is immersed in water. Thereby, the base material 60 is dissolved and removed.

In step C1, the base material 60 is removed by wet etching, and the plating layer 70 is transferred to one surface 81a of the first rubber sheet 81A.

Then, as shown in FIG. 3 (a), the second clay rubber sheet 82 is bonded to the first surface 81a of the first rubber sheet 81A so as to cover the plating layer 70, and then the second clay rubber sheet 82 is vulcanized to A second rubber sheet is formed, and an elastic body 23 composed of the first rubber sheet 81A, the plating layer 70, and the second rubber sheet 82A is formed (step D1).

The second clay rubber sheet 82 is the same as the first clay rubber sheet 81.

The thickness of the second clay rubber sheet 82 is equal to the thickness of the first clay rubber sheet 81.

In step D1, the second clay rubber sheet 82 is heated and vulcanized to form a second rubber sheet 82A.

Next, as shown in FIG. 3 (b), the elastic bodies 23 obtained in steps A1 to D1 are laminated in a manner that the plating layers 70 become parallel to each other, and formed into a laminate as shown in FIG. 3 (c). Body 90 (step E1).

The method of laminating the elastic body 23 may be, for example, a method using an adhesive 100; a method of activating the resin layer 21 by surface treatment such as corona discharge or vacuum infrared rays, and a method of chemically bonding the resin layers 21 to each other.

The adhesive 100 is the same as the adhesive constituting the adhesive layer 40.

Then, the laminated body 90 obtained in step E1 is cut so as to be perpendicular to the extending direction of the plating layer 70 in the laminated body 90 (step G1). The extending direction of the plating layer 70 in FIG. 3 (c) is the left-right direction of the paper surface. Therefore, for example, cutting can be performed along the depth direction of the paper surface in FIG.

Thereby, the electrical connector 10 shown in FIG. 1 (a) and FIG. 1 (b) is obtained. The plated layer 70 is cut into a predetermined length to form a thin metal layer 22.

According to the manufacturing method of the electrical connector according to this embodiment, the electrical connector 10 can be obtained, and the electrical connector 10 can prevent short circuit due to migration, and for the connection terminals of the device connected to the electrical connector 10, Excessive force from the thin metal layer 22 is not applied, and the connection terminals of the device can be prevented from being damaged. In addition, according to the method for manufacturing an electrical connector according to this embodiment, the manufacturing steps can be simplified, and the electrical connector 10 can be easily manufactured.

(Second Embodiment) [Manufacturing method of electric connector]

The manufacturing method of the electrical connector according to the embodiment includes a step of applying a metal nano paste on one surface of a base material (hereinafter referred to as "step A2"); and firing the metal nano-coating material applied on one surface of the base material. Paste (hereinafter referred to as "step B2"); forming a thin metal layer on one surface of the base material and bonding the first clay-shaped rubber sheet to the first clay-shaped rubber sheet; A step of vulcanizing the sheet to form a first rubber sheet (hereinafter, referred to as "step C2"); a step of removing the base material by wet etching, and leaving a thin metal layer on one surface of the first rubber sheet (hereinafter, referred to as It is "step D2".); After the second clay-like rubber sheet is bonded to one surface of the first rubber sheet by coating a thin metal layer, the second clay-like rubber sheet is vulcanized to form a second rubber sheet. Step of elastic body composed of first rubber sheet, metal thin layer and second rubber sheet (hereinafter, referred to as "step E2"); a plurality of elastic bodies are laminated so that the metal thin layers become parallel to each other, so that the layers are laminated A step of forming a body (hereinafter, referred to as "step F2"); and A step (hereinafter, referred to as "step G2") of cutting the laminated body such that the extension direction of the metal thin layer in the body is perpendicular.

In this embodiment, as in the first embodiment, a rubber sheet composed of a liquid silicone rubber may be used instead of the first and second clay rubber sheets.

Hereinafter, a method of manufacturing the electrical connector according to this embodiment will be described with reference to FIGS. 4 (a) to 4 (c) and FIGS. 5 (a) to 5 (c).

Figures 4 (a) to 4 (c) and 5 (a) to 5 (c) are schematic cross-sectional views showing a method of manufacturing the electrical connector of this embodiment. 4 and 5 are the electrical connector of the first embodiment shown in Fig. 1 and Figs. 2 (a) to 2 (c) and 3 (a). In the same configuration of the method of manufacturing the electrical connector according to the first embodiment shown in FIG. 3 (c), the same reference numerals are given, and redundant descriptions are omitted.

As shown in FIG. 4 (a), the metal nanopaste 110 is applied to one surface 60a of the substrate 60 (step A2).

The method for applying the metal nano paste 110 to one surface 60 a of the substrate 60 is not particularly limited, and examples thereof include an inkjet method, a gravure printing method, an electrostatic coating method, a spin coating method, and a die coating method.

The metal nanopaste is, for example, excluding silver, and dispersing metal particles of nano size (average particle diameter of 1 nm to less than 1 μm) of precious metals such as gold and platinum or alloys of these precious metals in the binder resin.

Then, the metal nano paste 110 applied on one surface 60a of the base material 60 is fired to form a thin metal layer 120 (step B2).

In step B2, the metal nano paste 110 is fired.

Next, as shown in FIG. 4 (b), the first clay-like rubber sheet 81 is adhered to the thin metal layer 120 formed on the first surface 60a of the substrate 60, and the first clay-like rubber sheet 81 is vulcanized Thus, a first rubber sheet 81A is formed (step C2).

In step C2, similarly to the above-mentioned step B1, the first clay rubber sheet 81 is vulcanized to form a first rubber sheet 81A.

Then, as shown in FIG. 4 (c), the base material 60 is removed by wet etching, so that the thin metal layer 120 remains on one surface 81a of the first rubber sheet 81A (step D2).

In step D2, similar to step C1 described above, the substrate 60 is removed by wet etching.

In step D2, the base material 60 is removed by wet etching, and the thin metal layer 120 is transferred onto one surface 81a of the first rubber sheet 81A.

Next, as shown in FIG. 5 (a), the second clay-like rubber sheet 82 is bonded to the first surface 81 a of the first rubber sheet 81A so as to cover the thin metal layer 120, and then the second clay-like rubber sheet 82 is bonded. The second rubber sheet 82A is formed by vulcanization, and the elastic body 23 composed of the first rubber sheet 81A, the thin metal layer 120, and the second rubber sheet 82A is formed (step E2).

In step E2, the elastic body 23 is formed in the same manner as in step D1 described above.

Then, as shown in FIG. 5 (b), a plurality of elastomers 23 obtained in steps A2 to E2 are laminated so that the thin metal layers 120 become parallel to each other to form a laminate as shown in FIG. 5 (c). Body 90 (step F2).

In step F2, the laminated body 90 is shape | molded similarly to the said step E1.

Then, the laminated body 90 obtained in step F2 is cut perpendicular to the extending direction of the thin metal layer 120 in the laminated body 90 (step G2).

Thereby, the electrical connector 10 shown in FIG. 1 (a) and FIG. 1 (b) is obtained. The thin metal layer 120 is cut into a predetermined length to form the thin metal layer 22.

According to the manufacturing method of the electrical connector according to this embodiment, the electrical connector 10 can be obtained, and the electrical connector 10 can prevent short circuit due to migration, and for the connection terminals of the device connected to the electrical connector 10, Excessive force from the thin metal layer 22 is not applied, and the connection terminals of the device can be prevented from being damaged. In addition, according to the method for manufacturing an electrical connector according to this embodiment, the manufacturing steps are simplified, and the electrical connector 10 can be easily manufactured.

In addition, the method for manufacturing an electrical connector of each embodiment may include a step of protruding the ends of the plurality of metal thin layers 22 from at least one of the main surface 20 a and the other main surface 20 b of the electrical connector 10. (Highlight step).

As a method of protruding the end portion of the thin metal layer 22 from the main surface, a method such as laser etching, chemical etching, cutting, etc. may be used to cut off a part of the resin layer constituting the main surface of the electrical connector 10.

When a plating layer is formed on the end of the protruding metal thin layer 22, a known method such as electrolytic plating or electroless plating can be applied.

[Example]

Hereinafter, the present invention will be described more specifically with reference to examples and comparative examples, but the present invention is not limited to the following examples.

[Example]

An embodiment of the present invention will be described with reference to Figs. 1, 2 (a) to 2 (c), and 3 (a) to 3 (c).

A gold-plated plate was prepared. The gold-plated plate had a base material having a nickel plating layer having a thickness of 0.5 μm on both sides of a copper plate having a thickness of 50 μm, and a gold plating layer having a surface area layer having a thickness of 0.5 μm on the nickel plating layer of the base material. Floor.

To 100 parts by mass of the kneadable compound (product number: KE-174-U, manufactured by Shin-Etsu Chemical Industry Co., Ltd.) was added 0.6 parts by mass of curing agent (Product No .: C-19A, manufactured by Shin-Etsu Chemical Co., Ltd.) and curing agent (Product No. : C-19B, 2.5 parts by mass of Shin-Etsu Chemical Industry Co., Ltd., and 1 part by mass of silane coupling agent (article number: KBM-403, manufactured by Shin-Etsu Chemical Co., Ltd.) and kneaded to produce the first clay-like silicone rubber.

This 1st clay-like silicone rubber was shape | molded to 85 micrometers in thickness.

Then, after the gold plating layer of the gold plating plate was bonded to one side of the first clay-like rubber sheet, the first clay-like rubber sheet was heated at 135 ° C for 40 minutes, and the first clay-like rubber sheet was vulcanized and hardened. It is the first rubber sheet made of silicone rubber.

Next, the one having the first rubber sheet bonded to the gold plating plate was immersed in a solution of ferric chloride to remove the copper and nickel plating layers. Thereby, a gold plating layer is transferred on one surface of the first rubber sheet.

Then, on one surface of the first rubber sheet, the second clay-shaped rubber sheet having the same structure and thickness as the first clay-shaped rubber sheet was laminated with a gold plating layer. It heated at 40 degreeC for 40 minutes, vulcanized and hardened the 2nd clay-like rubber sheet, and it was set as the 2nd rubber sheet | seat which consists of silicone rubber. Thereby, the elastic body which consists of a 1st rubber sheet and a 2nd rubber sheet, and these gold plating layers is shape | molded.

In addition, the gold plating layers are stacked in parallel with each other, and the liquid silicone rubber is used to laminate a plurality of elastomers to form a laminated body. Here, a liquid silicone rubber was coated on the contact surface of the elastomer by screen printing so as to have a thickness of 30 μm. In addition, after the elastomer was laminated through the liquid silicone rubber, the laminate was heated at 135 ° C for 40 minutes, and the liquid silicone rubber was vulcanized to harden.

Then, the obtained laminated body was cut in a manner perpendicular to the extending direction of the gold plating layer in the laminated body to obtain an electrical connector as shown in FIG. 1.

In the electrical connector of the embodiment, the length of the rectangular long side of the gold plating layer on the joint surface is 5 mm, the length of the rectangular short side of the gold plating layer on the joint surface is 0.5 μm, and the length of the rectangle on the joint surface is short. The pitch of the gold plating layers in the side direction was 200 μm.

[Comparative example]

On one side of the 110 μm-thick first resin layer made of silicone rubber formed on a polyethylene terephthalate substrate, most of the conductive members are arranged in a uniform direction at intervals of 200 μm.

As the conductive member, a cylindrical core material having a diameter of 39.6 μm made of brass, a nickel plating layer having a thickness of 0.1 μm, and a gold plating layer having a thickness of 0.1 μm formed on the outer peripheral surface of the core material were used.

Then, a second resin layer made of silicone rubber and having a thickness of 110 μm is formed on one side of the first resin layer on which a plurality of conductive members are arranged. The second resin layer and the first resin layer are integrated, and simultaneously A conductive member is fixed between the first resin layer and the second resin layer to form a sheet containing the conductive member.

Then, the directions of the conductive members are aligned with each other, and a plurality of sheets containing the conductive member are laminated to form a laminated body including the sheets containing the conductive member.

Then, the laminated body was cut so as to have a thickness of 300 μm so as to be perpendicular to the extending direction of the conductive member by cutting, to obtain an electrical connector having a through-hole through which the conductive member was cut in a circle.

In the electrical connector of the comparative example, the diameter of the conductive member on the bonding surface was 40 μm, and the distance between the conductive members in the lateral direction of the bonding surface was 250 μm.

[Evaluation 1]

The electrical connectors of the examples and comparative examples were arranged between a 1.0 mm diameter probe having nickel plating and gold plating applied to the surface of copper, and a substrate having a gold-plated connection terminal to form a laminate. (Testing device).

In addition, in order to measure the resistance value between the probe and the connection terminal on the substrate, a resistance measuring device (trade name: RM3545-01, manufactured by Hitachi Electric Corporation) was connected to the probe and the connection terminal.

In this state, while compressing the multilayer body in the thickness direction, measure the resistance value between the probe and the connection terminal, and study the displacement of the multilayer body (the amount by which the multilayer body is compressed in the thickness direction), and the probe and connection The relationship between the resistance values of the terminals. In addition, the displacement of the laminated body is equal to the displacement of the electrical connector.

When the laminated body is compressed, an automatic load tester (trade name: MAX-1KN-S-1, manufactured by Japan Measurement System Corporation) is used to measure the load applied to the laminated body, and the displacement (compression amount) of the laminated body is studied. Relationship to load.

From the above results, the relationship between the resistance value between the probe and the substrate and the load applied to the electrical connector was studied. The result of the relationship between the displacement of the laminated body and the load when the electrical connector of the example is used is shown in FIG. 6. The result of the relationship between the displacement of the laminated body and the load when the electrical connector of the comparative example is used is shown in FIG. 7. The results of the relationship between the amount of displacement of the laminated body and the resistance value between the probe and the connection terminal when the electrical connectors of the examples or comparative examples are used are shown in FIG. 8.

From the results of FIGS. 6 to 8, the resistance value is a stable amount of compression, which is 0.015 mm in the embodiment and 0.02 mm in the comparative example. In the comparative example, the amount of compression of the resistance value is about two times that of the embodiment. The load at that time was 0.58 N in the examples and 4.76 N in the comparative examples. That is, in the comparative example, the load of the resistance value is about 8 times that of the example. Therefore, in the embodiment, the load applied to the electrode to be inspected can be reduced, and damage to the electrode can be suppressed.

[Assessment 2]

The electrical connectors of the examples and the comparative examples were arranged on a lead having a diameter of 1.0 mm, and nickel plating and gold plating were applied to the surface of lead, and a 35 μm-thick copper layer and a 25 μm-thick conductive adhesive were attached. A laminated body (testing device) was formed between the glass substrates of the copper foil tape composed of the adhesive toward the copper layer.

In this state, the laminated body is compressed in the thickness direction.

In the examples and comparative examples, when an 8N load was applied, the contact surface between the electrical connector and the copper foil tape was observed with a scanning electron microscope. An image taken by a scanning electron microscope in the example is shown in FIG. 9. An image taken by a scanning electron microscope in a comparative example is shown in FIG. 10.

From the results of FIG. 9, in the embodiment, no damage caused by the thin metal layer of the electrical connector was observed in the copper foil tape. On the other hand, from the results of FIG. 10, in the comparative example, damage to the conductive member due to the electrical connector can be seen in the copper foil tape.

Claims (5)

An electrical connector is arranged between a connection terminal of a first device and a connection terminal of a second device, and for those who are electrically connected, the electrical connector is provided with: a multi-layer body, the multi-layer system is made of a resin layer In the case of a rectangular parallelepiped formed by multiple lamination with a metal thin layer, the metal thin layer penetrates the multilayer body in a thickness direction and a depth direction, and the metal thin layer in a connection surface of the multilayer body and the connection terminal is connected to the metal thin layer. The shape of the exposed surface is rectangular, the thin metal layer is made of a precious metal or a precious metal alloy, and the length of the short side of the rectangular is 0.01 μm or more and 10 μm or less. The electrical connector according to item 1 of the scope of patent application, wherein the distance between the thin metal layers in the short side direction of the rectangle is 4 μm or more and 600 μm or less. The electrical connector according to item 1 or 2 of the scope of patent application, wherein a covering layer is provided on a side of a part of the metal thin layer that is exposed along the thickness direction of the multilayer body. An electrical connector manufacturing method includes the following steps: forming a plating layer on one side of a base material; and after the plating layer formed on one side of the base material is bonded to one side of a first unhardened rubber sheet, The first unhardened rubber sheet is vulcanized to form a first rubber sheet; the base material is removed to leave the plating layer on one surface of the first rubber sheet; the one surface of the first rubber sheet is coated with the plating layer In the method, after the second uncured rubber sheet is bonded, the second uncured rubber sheet is vulcanized to form a second rubber sheet, and the first rubber sheet, the plating layer, and the second rubber sheet are formed. Constitutive elastomer A plurality of the elastic bodies are laminated so that the plating layers become parallel to each other to form a laminated body; and the laminated body is cut so as to be perpendicular to the extending direction of the plating layer in the laminated body. An electrical connector manufacturing method includes the following steps: coating a metal nano paste on one surface of a substrate; firing the metal nano paste applied on one surface of the substrate to form a thin metal layer; The thin metal layer on one side of the base material is bonded to one side of the first unhardened rubber sheet, and then the first unhardened rubber sheet is vulcanized to form a first rubber sheet; the base material is removed to make the thin metal layer It remains on one surface of the first rubber sheet; on the one surface of the first rubber sheet, the second uncured rubber sheet is bonded to the one surface of the first rubber sheet, and then the second uncured rubber sheet is vulcanized to form A second rubber sheet forms an elastic body composed of the first rubber sheet, the metal thin layer, and the second rubber sheet; a plurality of the elastic bodies are laminated so that the metal thin layers become parallel to each other to form a laminated body. And cutting the laminated body so as to be perpendicular to the extending direction of the thin metal layer in the laminated body.