JP2004046248A5 - - Google Patents

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Publication number
JP2004046248A5
JP2004046248A5 JP2003350798A JP2003350798A JP2004046248A5 JP 2004046248 A5 JP2004046248 A5 JP 2004046248A5 JP 2003350798 A JP2003350798 A JP 2003350798A JP 2003350798 A JP2003350798 A JP 2003350798A JP 2004046248 A5 JP2004046248 A5 JP 2004046248A5
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JP
Japan
Prior art keywords
rubbing
substrate
fluid
suction port
spraying
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JP2003350798A
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English (en)
Japanese (ja)
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JP2004046248A (ja
JP3966267B2 (ja
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Priority to JP2003350798A priority Critical patent/JP3966267B2/ja
Priority claimed from JP2003350798A external-priority patent/JP3966267B2/ja
Publication of JP2004046248A publication Critical patent/JP2004046248A/ja
Publication of JP2004046248A5 publication Critical patent/JP2004046248A5/ja
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Publication of JP3966267B2 publication Critical patent/JP3966267B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003350798A 1997-01-08 2003-10-09 基板のラビング方法及びラビング装置 Expired - Fee Related JP3966267B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003350798A JP3966267B2 (ja) 1997-01-08 2003-10-09 基板のラビング方法及びラビング装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP157797 1997-01-08
JP2003350798A JP3966267B2 (ja) 1997-01-08 2003-10-09 基板のラビング方法及びラビング装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP189498A Division JP3792384B2 (ja) 1997-01-08 1998-01-07 基板のラビング方法、液晶電気光学素子の製造方法及び基板のラビング装置

Publications (3)

Publication Number Publication Date
JP2004046248A JP2004046248A (ja) 2004-02-12
JP2004046248A5 true JP2004046248A5 (https=) 2005-07-07
JP3966267B2 JP3966267B2 (ja) 2007-08-29

Family

ID=31716993

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003350798A Expired - Fee Related JP3966267B2 (ja) 1997-01-08 2003-10-09 基板のラビング方法及びラビング装置

Country Status (1)

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JP (1) JP3966267B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5322909B2 (ja) * 2009-12-08 2013-10-23 富士フイルム株式会社 ラビング処理方法、光学補償フィルムの製造方法
KR101382723B1 (ko) * 2012-06-15 2014-04-08 하이디스 테크놀로지 주식회사 액정표시장치의 배향막 러빙장치

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