JP2004025427A - ワーク搬送装置 - Google Patents

ワーク搬送装置 Download PDF

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Publication number
JP2004025427A
JP2004025427A JP2003029940A JP2003029940A JP2004025427A JP 2004025427 A JP2004025427 A JP 2004025427A JP 2003029940 A JP2003029940 A JP 2003029940A JP 2003029940 A JP2003029940 A JP 2003029940A JP 2004025427 A JP2004025427 A JP 2004025427A
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Japan
Prior art keywords
work
work holding
transfer device
holding means
unit
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JP2003029940A
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Japanese (ja)
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JP2004025427A5 (enExample
Inventor
Takashi Iseri
井芹　隆史
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Hirata Corp
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Hirata Corp
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Priority to JP2003029940A priority Critical patent/JP2004025427A/ja
Publication of JP2004025427A publication Critical patent/JP2004025427A/ja
Publication of JP2004025427A5 publication Critical patent/JP2004025427A5/ja
Pending legal-status Critical Current

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2003029940A 2002-02-27 2003-02-06 ワーク搬送装置 Pending JP2004025427A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003029940A JP2004025427A (ja) 2002-02-27 2003-02-06 ワーク搬送装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002050796 2002-02-27
JP2003029940A JP2004025427A (ja) 2002-02-27 2003-02-06 ワーク搬送装置

Publications (2)

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JP2004025427A true JP2004025427A (ja) 2004-01-29
JP2004025427A5 JP2004025427A5 (enExample) 2006-03-23

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ID=31189889

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JP2003029940A Pending JP2004025427A (ja) 2002-02-27 2003-02-06 ワーク搬送装置

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JP (1) JP2004025427A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007039238A (ja) * 2005-08-03 2007-02-15 Koide Engineering:Kk バランサ装置とバランサ装置による配管系部品の交換方法
JP2011035022A (ja) * 2009-07-30 2011-02-17 Murata Machinery Ltd 天井搬送車
KR20150135066A (ko) 2014-05-22 2015-12-02 가부시키가이샤 다이후쿠 반송장치
KR20150135067A (ko) 2014-05-22 2015-12-02 가부시키가이샤 다이후쿠 반송장치
CN111300001A (zh) * 2020-03-17 2020-06-19 杨发会 一种自动化汽配车间装配机械臂多自由度驱动调整支撑架构
US20220262656A1 (en) * 2018-07-31 2022-08-18 Taiwan Semiconductor Manufacturing Co., Ltd. Systems and methods for die container warehousing
WO2022193347A1 (zh) * 2021-03-19 2022-09-22 台湾积体电路制造股份有限公司 晶圆载具的夹取装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007039238A (ja) * 2005-08-03 2007-02-15 Koide Engineering:Kk バランサ装置とバランサ装置による配管系部品の交換方法
JP2011035022A (ja) * 2009-07-30 2011-02-17 Murata Machinery Ltd 天井搬送車
KR20150135066A (ko) 2014-05-22 2015-12-02 가부시키가이샤 다이후쿠 반송장치
KR20150135067A (ko) 2014-05-22 2015-12-02 가부시키가이샤 다이후쿠 반송장치
US9457479B2 (en) 2014-05-22 2016-10-04 Daifuku Co., Ltd. Transport device
US9457480B2 (en) 2014-05-22 2016-10-04 Daifuku Co., Ltd. Transport device
US20220262656A1 (en) * 2018-07-31 2022-08-18 Taiwan Semiconductor Manufacturing Co., Ltd. Systems and methods for die container warehousing
CN111300001A (zh) * 2020-03-17 2020-06-19 杨发会 一种自动化汽配车间装配机械臂多自由度驱动调整支撑架构
WO2022193347A1 (zh) * 2021-03-19 2022-09-22 台湾积体电路制造股份有限公司 晶圆载具的夹取装置

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