JP2003529788A - 多層ミラー - Google Patents
多層ミラーInfo
- Publication number
- JP2003529788A JP2003529788A JP2001544058A JP2001544058A JP2003529788A JP 2003529788 A JP2003529788 A JP 2003529788A JP 2001544058 A JP2001544058 A JP 2001544058A JP 2001544058 A JP2001544058 A JP 2001544058A JP 2003529788 A JP2003529788 A JP 2003529788A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- mirror according
- front surface
- layer
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000006185 dispersion Substances 0.000 claims abstract description 44
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 37
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 33
- 238000000576 coating method Methods 0.000 claims description 16
- 239000011521 glass Substances 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000004568 cement Substances 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 230000003595 spectral effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000002310 reflectometry Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000006117 anti-reflective coating Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000012071 phase Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000000528 statistical test Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0883—Mirrors with a refractive index gradient
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
- G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
- H01S3/08063—Graded reflectivity, e.g. variable reflectivity mirror
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/08—Generation of pulses with special temporal shape or frequency spectrum
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Optical Elements Other Than Lenses (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT2066/99 | 1999-12-09 | ||
| AT0206699A AT409905B (de) | 1999-12-09 | 1999-12-09 | Mehrschichtiger spiegel zur herbeiführung einer vorgegebenen gruppenverzögerungsdispersion |
| PCT/AT2000/000183 WO2001042821A1 (de) | 1999-12-09 | 2000-07-05 | Mehrschichtiger spiegel |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011058296A Division JP2011154387A (ja) | 1999-12-09 | 2011-03-16 | 多層ミラー |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003529788A true JP2003529788A (ja) | 2003-10-07 |
| JP2003529788A5 JP2003529788A5 (https=) | 2011-05-19 |
Family
ID=3527051
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001544058A Withdrawn JP2003529788A (ja) | 1999-12-09 | 2000-07-05 | 多層ミラー |
| JP2011058296A Pending JP2011154387A (ja) | 1999-12-09 | 2011-03-16 | 多層ミラー |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011058296A Pending JP2011154387A (ja) | 1999-12-09 | 2011-03-16 | 多層ミラー |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US6873464B1 (https=) |
| EP (1) | EP1236058B1 (https=) |
| JP (2) | JP2003529788A (https=) |
| CN (1) | CN1189766C (https=) |
| AT (1) | AT409905B (https=) |
| AU (1) | AU5795200A (https=) |
| BR (1) | BR0016191A (https=) |
| DE (1) | DE50011081D1 (https=) |
| HK (1) | HK1054082B (https=) |
| WO (1) | WO2001042821A1 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009271439A (ja) * | 2008-05-09 | 2009-11-19 | Mitsubishi Cable Ind Ltd | 反射防止膜を備えた光学部品 |
| JP2010281955A (ja) * | 2009-06-03 | 2010-12-16 | Japan Aviation Electronics Industry Ltd | 可視光ミラー、可視光発振ガスレーザ、及びリングレーザジャイロ |
| JP2021179634A (ja) * | 2017-07-20 | 2021-11-18 | 東海光学株式会社 | チャープミラー及びチャープミラーユニット |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1041981A (en) * | 1975-12-05 | 1978-11-07 | Ron Woronowicz | Valve |
| AT410721B (de) * | 2001-02-26 | 2003-07-25 | Femtolasers Produktions Gmbh | Dispersiver mehrschicht-spiegel |
| WO2008074057A1 (en) * | 2006-12-19 | 2008-06-26 | Ellex Medical Pty Ltd | Beam blocking and combining optic |
| JP2009032916A (ja) * | 2007-07-27 | 2009-02-12 | Fujifilm Corp | 分散補償器およびそれを用いた固体レーザ装置並びに分散補償方法 |
| CN103698829B (zh) * | 2013-11-22 | 2017-03-15 | 中国科学院上海光学精密机械研究所 | 多层介质膜截止滤光片组合器件 |
| AT516080B1 (de) | 2014-07-28 | 2016-04-15 | Zizala Lichtsysteme Gmbh | Abdeckung für eine Leuchteneinrichtung |
| CN108572408B (zh) * | 2017-03-09 | 2021-09-17 | 台湾超微光学股份有限公司 | 光源装置及其光滤波组件 |
| CN110165533B (zh) * | 2019-05-06 | 2021-02-23 | 北京图湃影像科技有限公司 | 一种扫频激光器及其实现方法 |
| CN110542541B (zh) * | 2019-08-08 | 2021-04-09 | 歌尔光学科技有限公司 | 一种镜片反射率测量方法及测量装置 |
| CN112666641B (zh) * | 2021-01-18 | 2022-06-28 | 中国科学院上海光学精密机械研究所 | 宽带低色散啁啾镜的设计方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03504771A (ja) * | 1989-02-03 | 1991-10-17 | トムスキ ゴスダルストベンニ ウニベルシテト イメニ ベー.ベー.クイビシェバ | 選択的干渉フィルター及びそれを有する光学器械 |
| JPH08508137A (ja) * | 1994-01-20 | 1996-08-27 | セイコーエプソン株式会社 | 面発光型半導体レーザ装置およびその製造方法ならびに製造装置 |
| JPH09107143A (ja) * | 1995-09-06 | 1997-04-22 | Hewlett Packard Co <Hp> | 青色アップコンバージョン・レーザ |
| WO1999060675A1 (en) * | 1998-05-18 | 1999-11-25 | Spectra-Physics Lasers, Inc. | Double chirped mirror |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT116099B (de) | 1928-09-21 | 1930-01-25 | Caecilie Springinklee | Verfahren zur Herstellung von Plastiken aus Bast. |
| US3965439A (en) * | 1974-12-03 | 1976-06-22 | The United States Of America As Represented By The Secretary Of The Army | Electrooptic-Q-switching system for a laser |
| JPS5635109A (en) * | 1979-07-11 | 1981-04-07 | Aga Ab | Mirror |
| JPS5842002A (ja) * | 1981-09-05 | 1983-03-11 | Nippon Telegr & Teleph Corp <Ntt> | 多層誘電体膜フイルタ装置 |
| US4969175A (en) * | 1986-08-15 | 1990-11-06 | Nelson Robert S | Apparatus for narrow bandwidth and multiple energy x-ray imaging |
| US5045397A (en) | 1987-02-13 | 1991-09-03 | Hughes Aircraft Company | Optical adhesive system having low refractive index |
| JP2754214B2 (ja) * | 1988-07-12 | 1998-05-20 | 工業技術院長 | 光パルスの周波数チャープ補償が出来る誘電体多層膜 |
| US5226054A (en) * | 1991-09-18 | 1993-07-06 | Coherent, Inc. | Cavity mirror for suppressing high gain laser wavelengths |
| HU214659B (hu) * | 1993-08-23 | 1998-04-28 | Szilárdtestfizikai Kutatóintézet | Diszperzív dielektrikumtükör és eljárás annak tervezésére |
| JP2000505595A (ja) * | 1996-02-13 | 2000-05-09 | オプティカル コーポレーション オブ アメリカ | モノリシックプリズムアセンブリを有する外部キャビティ半導体レーザ |
| AT405992B (de) | 1996-09-06 | 2000-01-25 | Stingl Andreas Dipl Ing | Kurzpuls-laservorrichtung mit passiver modenverkopplung |
| US5912915A (en) * | 1997-05-19 | 1999-06-15 | Coherent, Inc. | Ultrafast laser with multiply-folded resonant cavity |
| US6222673B1 (en) * | 1998-08-18 | 2001-04-24 | Coherent, Inc. | Group-delay-dispersive multilayer-mirror structures and method for designing same |
| US6282215B1 (en) * | 1998-10-16 | 2001-08-28 | New Focus, Inc. | Continuously-tunable external cavity laser |
| US6256434B1 (en) * | 1999-07-13 | 2001-07-03 | Time-Bandwidth Products Ag | Method and dielectric and/or semiconductor device for influencing the dispersion of electromagnetic radiation |
-
1999
- 1999-12-09 AT AT0206699A patent/AT409905B/de not_active IP Right Cessation
-
2000
- 2000-07-05 DE DE50011081T patent/DE50011081D1/de not_active Expired - Lifetime
- 2000-07-05 CN CNB008168210A patent/CN1189766C/zh not_active Expired - Fee Related
- 2000-07-05 AU AU57952/00A patent/AU5795200A/en not_active Abandoned
- 2000-07-05 JP JP2001544058A patent/JP2003529788A/ja not_active Withdrawn
- 2000-07-05 WO PCT/AT2000/000183 patent/WO2001042821A1/de not_active Ceased
- 2000-07-05 HK HK03106356.2A patent/HK1054082B/zh not_active IP Right Cessation
- 2000-07-05 US US10/149,337 patent/US6873464B1/en not_active Expired - Lifetime
- 2000-07-05 EP EP00943458A patent/EP1236058B1/de not_active Expired - Lifetime
- 2000-07-05 BR BR0016191-8A patent/BR0016191A/pt not_active IP Right Cessation
-
2011
- 2011-03-16 JP JP2011058296A patent/JP2011154387A/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03504771A (ja) * | 1989-02-03 | 1991-10-17 | トムスキ ゴスダルストベンニ ウニベルシテト イメニ ベー.ベー.クイビシェバ | 選択的干渉フィルター及びそれを有する光学器械 |
| JPH08508137A (ja) * | 1994-01-20 | 1996-08-27 | セイコーエプソン株式会社 | 面発光型半導体レーザ装置およびその製造方法ならびに製造装置 |
| JPH09107143A (ja) * | 1995-09-06 | 1997-04-22 | Hewlett Packard Co <Hp> | 青色アップコンバージョン・レーザ |
| WO1999060675A1 (en) * | 1998-05-18 | 1999-11-25 | Spectra-Physics Lasers, Inc. | Double chirped mirror |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009271439A (ja) * | 2008-05-09 | 2009-11-19 | Mitsubishi Cable Ind Ltd | 反射防止膜を備えた光学部品 |
| JP2010281955A (ja) * | 2009-06-03 | 2010-12-16 | Japan Aviation Electronics Industry Ltd | 可視光ミラー、可視光発振ガスレーザ、及びリングレーザジャイロ |
| JP2021179634A (ja) * | 2017-07-20 | 2021-11-18 | 東海光学株式会社 | チャープミラー及びチャープミラーユニット |
| JP7195022B2 (ja) | 2017-07-20 | 2022-12-23 | 東海光学株式会社 | チャープミラー及びチャープミラーユニット |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001042821A1 (de) | 2001-06-14 |
| CN1189766C (zh) | 2005-02-16 |
| AT409905B (de) | 2002-12-27 |
| EP1236058A1 (de) | 2002-09-04 |
| CN1408068A (zh) | 2003-04-02 |
| EP1236058B1 (de) | 2005-08-31 |
| AU5795200A (en) | 2001-06-18 |
| HK1054082B (zh) | 2005-04-22 |
| DE50011081D1 (de) | 2005-10-06 |
| HK1054082A1 (en) | 2003-11-14 |
| ATA206699A (de) | 2002-04-15 |
| JP2011154387A (ja) | 2011-08-11 |
| BR0016191A (pt) | 2002-08-13 |
| US6873464B1 (en) | 2005-03-29 |
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| Date | Code | Title | Description |
|---|---|---|---|
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