JP2003509832A5 - - Google Patents
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- Publication number
- JP2003509832A5 JP2003509832A5 JP2001524184A JP2001524184A JP2003509832A5 JP 2003509832 A5 JP2003509832 A5 JP 2003509832A5 JP 2001524184 A JP2001524184 A JP 2001524184A JP 2001524184 A JP2001524184 A JP 2001524184A JP 2003509832 A5 JP2003509832 A5 JP 2003509832A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR99/11422 | 1999-09-13 | ||
| FR9911422A FR2798552B1 (fr) | 1999-09-13 | 1999-09-13 | Dispositif assurant une division de puissance micro-onde predeterminee sur une pluralite de charges, notamment pour la production de plasma |
| PCT/FR2000/002507 WO2001020710A1 (fr) | 1999-09-13 | 2000-09-12 | Diviseur de puissance pour dispositif a plasma |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003509832A JP2003509832A (ja) | 2003-03-11 |
| JP2003509832A5 true JP2003509832A5 (enExample) | 2010-11-25 |
| JP4982022B2 JP4982022B2 (ja) | 2012-07-25 |
Family
ID=9549779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001524184A Expired - Lifetime JP4982022B2 (ja) | 1999-09-13 | 2000-09-12 | マイクロ波システム |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6727656B1 (enExample) |
| EP (1) | EP1216493B1 (enExample) |
| JP (1) | JP4982022B2 (enExample) |
| AT (1) | ATE245855T1 (enExample) |
| DE (1) | DE60004073T2 (enExample) |
| FR (1) | FR2798552B1 (enExample) |
| WO (1) | WO2001020710A1 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4150621B2 (ja) * | 2002-09-20 | 2008-09-17 | 富士通株式会社 | 折り畳み式携帯型無線機および当該無線機のシャーシ |
| US7445690B2 (en) * | 2002-10-07 | 2008-11-04 | Tokyo Electron Limited | Plasma processing apparatus |
| US7806077B2 (en) * | 2004-07-30 | 2010-10-05 | Amarante Technologies, Inc. | Plasma nozzle array for providing uniform scalable microwave plasma generation |
| US20070095281A1 (en) * | 2005-11-01 | 2007-05-03 | Stowell Michael W | System and method for power function ramping of microwave liner discharge sources |
| JP4862375B2 (ja) * | 2005-12-06 | 2012-01-25 | 株式会社エーイーティー | 進行波形マイクロ波プラズマ発生装置 |
| EP2316148A1 (en) * | 2008-08-20 | 2011-05-04 | Koninklijke Philips Electronics N.V. | Rf power splitter for magnetic resonance system |
| US20110094830A1 (en) * | 2009-10-26 | 2011-04-28 | Lund Kurt O'ferrall | Vehicle and object portable lift |
| GB201021855D0 (en) * | 2010-12-23 | 2011-02-02 | Element Six Ltd | Microwave power delivery system for plasma reactors |
| GB201021913D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | Microwave plasma reactors and substrates for synthetic diamond manufacture |
| GB2497880B (en) | 2010-12-23 | 2015-05-27 | Element Six Ltd | Controlling doping of synthetic diamond material |
| GB201021865D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for manufacturing synthetic diamond material |
| GB201021853D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for manufacturing synthetic diamond material |
| GB201021870D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for manufacturing synthetic diamond material |
| GB201021860D0 (en) | 2010-12-23 | 2011-02-02 | Element Six Ltd | A microwave plasma reactor for diamond synthesis |
| FR2974701B1 (fr) | 2011-04-27 | 2014-03-21 | Sairem Soc Pour L Applic Ind De La Rech En Electronique Et Micro Ondes | Installation de production d'un plasma micro-onde |
| JP6179004B2 (ja) * | 2011-05-24 | 2017-08-16 | イマジニアリング株式会社 | 電磁波放射装置 |
| KR102007230B1 (ko) * | 2018-01-26 | 2019-08-06 | 한국원자력연구원 | 대전력 가변 고주파 전력 분배기 |
| WO2023162695A1 (ja) * | 2022-02-25 | 2023-08-31 | パナソニックＩｐマネジメント株式会社 | 電力合成器および電力分配器 |
| JP2024178971A (ja) * | 2023-06-14 | 2024-12-26 | 古野電気株式会社 | 導波管型電力分配器、導波管型電力合成器、アンテナ装置、及びレーダー |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5946553A (ja) * | 1982-09-08 | 1984-03-15 | Sumitomo Chem Co Ltd | 超音波による斜角探傷方法 |
| JPS5946553U (ja) * | 1982-09-20 | 1984-03-28 | オージー技研株式会社 | マイクロ波治療装置 |
| JPS61290722A (ja) * | 1985-06-19 | 1986-12-20 | Tokuda Seisakusho Ltd | プラズマ発生装置 |
| DE3711184A1 (de) * | 1987-04-02 | 1988-10-20 | Leybold Ag | Vorrichtung zur einbringung von mikrowellenenergie mit einem offenen mikrowellenleiter |
| JPH01132236A (ja) * | 1987-11-18 | 1989-05-24 | Matsushita Electric Ind Co Ltd | 部品固定法 |
| JPH0623569Y2 (ja) * | 1988-03-02 | 1994-06-22 | 新日本無線株式会社 | プラズマ発生反応装置 |
| US5153406A (en) * | 1989-05-31 | 1992-10-06 | Applied Science And Technology, Inc. | Microwave source |
| JPH0339480A (ja) * | 1989-07-05 | 1991-02-20 | Sony Corp | Ｅｃｒプラズマ装置 |
| JPH0441675A (ja) * | 1990-06-07 | 1992-02-12 | Matsushita Electric Ind Co Ltd | マイクロ波プラズマ装置 |
| DE4235914A1 (de) * | 1992-10-23 | 1994-04-28 | Juergen Prof Dr Engemann | Vorrichtung zur Erzeugung von Mikrowellenplasmen |
| US5714009A (en) * | 1995-01-11 | 1998-02-03 | Deposition Sciences, Inc. | Apparatus for generating large distributed plasmas by means of plasma-guided microwave power |
| US5796080A (en) * | 1995-10-03 | 1998-08-18 | Cem Corporation | Microwave apparatus for controlling power levels in individual multiple cells |
| KR970071945A (ko) * | 1996-02-20 | 1997-11-07 | 가나이 쯔도무 | 플라즈마처리방법 및 장치 |
| US5869817A (en) * | 1997-03-06 | 1999-02-09 | General Mills, Inc. | Tunable cavity microwave applicator |
| JP2925535B2 (ja) * | 1997-05-22 | 1999-07-28 | キヤノン株式会社 | 環状導波路を有するマイクロ波供給器及びそれを備えたプラズマ処理装置及び処理方法 |
| JPH1167492A (ja) * | 1997-05-29 | 1999-03-09 | Sumitomo Metal Ind Ltd | プラズマ処理装置及びプラズマ処理方法 |
| JPH11195924A (ja) * | 1997-12-26 | 1999-07-21 | New Japan Radio Co Ltd | マイクロストリップアレーアンテナ |
| US6258329B1 (en) * | 1998-04-20 | 2001-07-10 | Cem Corporation | Microwave transparent vessel for microwave assisted chemical processes |
| US6084226A (en) * | 1998-04-21 | 2000-07-04 | Cem Corporation | Use of continuously variable power in microwave assisted chemistry |
-
1999
- 1999-09-13 FR FR9911422A patent/FR2798552B1/fr not_active Expired - Lifetime
-
2000
- 2000-09-12 US US10/088,326 patent/US6727656B1/en not_active Expired - Lifetime
- 2000-09-12 EP EP00962606A patent/EP1216493B1/fr not_active Expired - Lifetime
- 2000-09-12 JP JP2001524184A patent/JP4982022B2/ja not_active Expired - Lifetime
- 2000-09-12 AT AT00962606T patent/ATE245855T1/de not_active IP Right Cessation
- 2000-09-12 WO PCT/FR2000/002507 patent/WO2001020710A1/fr not_active Ceased
- 2000-09-12 DE DE60004073T patent/DE60004073T2/de not_active Expired - Lifetime