JP2001313335A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2001313335A5 JP2001313335A5 JP2000278617A JP2000278617A JP2001313335A5 JP 2001313335 A5 JP2001313335 A5 JP 2001313335A5 JP 2000278617 A JP2000278617 A JP 2000278617A JP 2000278617 A JP2000278617 A JP 2000278617A JP 2001313335 A5 JP2001313335 A5 JP 2001313335A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000278617A JP4574821B2 (ja) | 2000-02-25 | 2000-09-13 | 半導体装置及び薄膜 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000049291 | 2000-02-25 | ||
| JP2000-49291 | 2000-02-25 | ||
| JP2000278617A JP4574821B2 (ja) | 2000-02-25 | 2000-09-13 | 半導体装置及び薄膜 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001313335A JP2001313335A (ja) | 2001-11-09 |
| JP2001313335A5 true JP2001313335A5 (enExample) | 2008-05-29 |
| JP4574821B2 JP4574821B2 (ja) | 2010-11-04 |
Family
ID=26586100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000278617A Expired - Fee Related JP4574821B2 (ja) | 2000-02-25 | 2000-09-13 | 半導体装置及び薄膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4574821B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4497323B2 (ja) * | 2006-03-29 | 2010-07-07 | 三菱電機株式会社 | プラズマｃｖｄ装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6337637A (ja) * | 1986-08-01 | 1988-02-18 | Fujitsu Ltd | 多層配線構造の半導体装置および製法 |
| JPH0499049A (ja) * | 1990-08-06 | 1992-03-31 | Kawasaki Steel Corp | 半導体装置 |
| JP2001015595A (ja) * | 1999-06-29 | 2001-01-19 | Mitsubishi Electric Corp | 半導体装置 |
-
2000
- 2000-09-13 JP JP2000278617A patent/JP4574821B2/ja not_active Expired - Fee Related