JP2003506703A - マイクロセンサハウジング - Google Patents
マイクロセンサハウジングInfo
- Publication number
- JP2003506703A JP2003506703A JP2001515931A JP2001515931A JP2003506703A JP 2003506703 A JP2003506703 A JP 2003506703A JP 2001515931 A JP2001515931 A JP 2001515931A JP 2001515931 A JP2001515931 A JP 2001515931A JP 2003506703 A JP2003506703 A JP 2003506703A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- flow
- fluid
- shows
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims abstract description 34
- 238000001514 detection method Methods 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 4
- 230000000717 retained effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 230000002411 adverse Effects 0.000 claims 1
- 230000004044 response Effects 0.000 abstract description 35
- 230000002829 reductive effect Effects 0.000 abstract description 11
- 238000009792 diffusion process Methods 0.000 abstract description 10
- 230000007613 environmental effect Effects 0.000 abstract description 6
- 238000011049 filling Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 18
- 230000004888 barrier function Effects 0.000 description 16
- 239000007788 liquid Substances 0.000 description 15
- 230000035945 sensitivity Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- 238000009833 condensation Methods 0.000 description 12
- 230000005494 condensation Effects 0.000 description 12
- 238000012360 testing method Methods 0.000 description 12
- 238000012546 transfer Methods 0.000 description 12
- 239000000428 dust Substances 0.000 description 11
- 239000002245 particle Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 239000010409 thin film Substances 0.000 description 9
- 238000013459 approach Methods 0.000 description 7
- 230000004907 flux Effects 0.000 description 7
- 239000012528 membrane Substances 0.000 description 7
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- 241000264877 Hippospongia communis Species 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 239000000443 aerosol Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- 238000005070 sampling Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- 230000015271 coagulation Effects 0.000 description 2
- 238000005345 coagulation Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000005189 flocculation Methods 0.000 description 2
- 230000016615 flocculation Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 230000005653 Brownian motion process Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000005537 brownian motion Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0014—Sample conditioning by eliminating a gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4873—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation for a flowing, e.g. gas sample
- G01N25/488—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N2001/2285—Details of probe structures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Combustion & Propulsion (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/368,621 | 1999-08-05 | ||
| US09/368,621 US6322247B1 (en) | 1999-01-28 | 1999-08-05 | Microsensor housing |
| PCT/US2000/020480 WO2001011322A1 (en) | 1999-08-05 | 2000-07-27 | Microsensor housing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003506703A true JP2003506703A (ja) | 2003-02-18 |
| JP2003506703A5 JP2003506703A5 (enExample) | 2009-08-27 |
Family
ID=23452020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001515931A Pending JP2003506703A (ja) | 1999-08-05 | 2000-07-27 | マイクロセンサハウジング |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6322247B1 (enExample) |
| EP (1) | EP1200805B1 (enExample) |
| JP (1) | JP2003506703A (enExample) |
| CA (1) | CA2381271A1 (enExample) |
| WO (1) | WO2001011322A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017038313A1 (ja) * | 2015-08-31 | 2017-03-09 | 日立オートモティブシステムズ株式会社 | 気体センサ装置 |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6911894B2 (en) * | 1998-12-07 | 2005-06-28 | Honeywell International Inc. | Sensor package for harsh environments |
| US7258003B2 (en) * | 1998-12-07 | 2007-08-21 | Honeywell International Inc. | Flow sensor with self-aligned flow channel |
| US6655207B1 (en) | 2000-02-16 | 2003-12-02 | Honeywell International Inc. | Flow rate module and integrated flow restrictor |
| EP1412722A2 (en) * | 2001-03-23 | 2004-04-28 | Services Petroliers Schlumberger | Fluid property sensors |
| US6681623B2 (en) | 2001-10-30 | 2004-01-27 | Honeywell International Inc. | Flow and pressure sensor for harsh fluids |
| US6672152B2 (en) | 2001-12-21 | 2004-01-06 | Honeywell International Inc. | Flush surface air data sensor |
| JP4076992B2 (ja) * | 2002-05-29 | 2008-04-16 | シーケーディ株式会社 | 熱式流量計 |
| DE20208716U1 (de) * | 2002-06-05 | 2002-08-22 | FESTO AG & Co, 73734 Esslingen | Durchfluß-Messvorrichtung |
| US6916664B2 (en) * | 2002-06-14 | 2005-07-12 | Honeywell International Inc. | Flammable vapor sensor |
| US6845664B1 (en) | 2002-10-03 | 2005-01-25 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | MEMS direct chip attach packaging methodologies and apparatuses for harsh environments |
| US7021821B2 (en) * | 2004-05-28 | 2006-04-04 | Honeywell International Inc. | Differential thermal sensors |
| WO2006022487A1 (en) * | 2004-08-21 | 2006-03-02 | Lg Chem. Ltd. | Microfluidic device, and diagnostic and analytical apparatus using the same |
| US7331224B2 (en) * | 2004-12-07 | 2008-02-19 | Honeywell International Inc. | Tilt-insensitive flow sensor |
| US20060203886A1 (en) * | 2005-03-10 | 2006-09-14 | Aai Corporation | Simplified thermal isolator for temperature sensor |
| US7703313B2 (en) * | 2007-02-14 | 2010-04-27 | Honeywell International Inc. | Conformal film micro-channels for a fluidic micro analyzer |
| EP1959242A3 (en) * | 2007-02-19 | 2009-01-07 | Yamatake Corporation | Flowmeter and flow control device |
| TW200846639A (en) * | 2007-03-14 | 2008-12-01 | Entegris Inc | System and method for non-intrusive thermal monitor |
| JP4892511B2 (ja) * | 2008-04-15 | 2012-03-07 | 本田技研工業株式会社 | ガスセンサ |
| US8113046B2 (en) | 2010-03-22 | 2012-02-14 | Honeywell International Inc. | Sensor assembly with hydrophobic filter |
| US8397586B2 (en) | 2010-03-22 | 2013-03-19 | Honeywell International Inc. | Flow sensor assembly with porous insert |
| US8656772B2 (en) | 2010-03-22 | 2014-02-25 | Honeywell International Inc. | Flow sensor with pressure output signal |
| US8756990B2 (en) | 2010-04-09 | 2014-06-24 | Honeywell International Inc. | Molded flow restrictor |
| US8418549B2 (en) | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
| US9003877B2 (en) | 2010-06-15 | 2015-04-14 | Honeywell International Inc. | Flow sensor assembly |
| US8695417B2 (en) | 2011-01-31 | 2014-04-15 | Honeywell International Inc. | Flow sensor with enhanced flow range capability |
| US9052217B2 (en) | 2012-11-09 | 2015-06-09 | Honeywell International Inc. | Variable scale sensor |
| US9618653B2 (en) * | 2013-03-29 | 2017-04-11 | Stmicroelectronics Pte Ltd. | Microelectronic environmental sensing module |
| US9176089B2 (en) | 2013-03-29 | 2015-11-03 | Stmicroelectronics Pte Ltd. | Integrated multi-sensor module |
| US9347307B2 (en) * | 2013-10-08 | 2016-05-24 | Halliburton Energy Services, Inc. | Assembly for measuring temperature of materials flowing through tubing in a well system |
| US9976409B2 (en) | 2013-10-08 | 2018-05-22 | Halliburton Energy Services, Inc. | Assembly for measuring temperature of materials flowing through tubing in a well system |
| WO2016150373A1 (zh) * | 2015-03-24 | 2016-09-29 | 湖南明康中锦医疗科技发展有限公司 | 一种便携式呼吸机 |
| EP3277354B1 (en) * | 2015-03-31 | 2020-01-01 | Koninklijke Philips N.V. | Flow member |
| US9952079B2 (en) | 2015-07-15 | 2018-04-24 | Honeywell International Inc. | Flow sensor |
| US10775341B2 (en) * | 2016-03-25 | 2020-09-15 | Ngk Insulators, Ltd. | Sensor element, manufacturing method therefor, and gas sensor |
| WO2017203860A1 (ja) * | 2016-05-23 | 2017-11-30 | 日立オートモティブシステムズ株式会社 | 湿度測定装置 |
| US10429330B2 (en) | 2016-07-18 | 2019-10-01 | Stmicroelectronics Pte Ltd | Gas analyzer that detects gases, humidity, and temperature |
| US10254261B2 (en) | 2016-07-18 | 2019-04-09 | Stmicroelectronics Pte Ltd | Integrated air quality sensor that detects multiple gas species |
| US10274195B2 (en) | 2016-08-31 | 2019-04-30 | Honeywell International Inc. | Air/gas admittance device for a combustion appliance |
| US10557812B2 (en) | 2016-12-01 | 2020-02-11 | Stmicroelectronics Pte Ltd | Gas sensors |
| US10971427B2 (en) * | 2019-02-04 | 2021-04-06 | Dell Products L.P. | Heatsink for information handling system |
| EP4493919A1 (en) * | 2022-03-18 | 2025-01-22 | ABB Schweiz AG | A device for detecting thermal conductivity of a fluid |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5539100A (en) * | 1978-09-13 | 1980-03-18 | Bendix Corp | Sensor element protection shield and fluid sensor equipped with same |
| US4208266A (en) * | 1978-10-27 | 1980-06-17 | General Motors Corporation | Exhaust gas oxygen sensor |
| JPH02141649A (ja) * | 1988-11-22 | 1990-05-31 | Snow Brand Milk Prod Co Ltd | 粘度計センサー |
| JPH04332857A (ja) * | 1991-05-07 | 1992-11-19 | Mitsubishi Materials Corp | 酵素センサ |
| JPH05240814A (ja) * | 1990-03-09 | 1993-09-21 | Babcock & Wilcox Co:The | ガス流の湿度測定方法およびその装置 |
| JPH06109674A (ja) * | 1992-09-24 | 1994-04-22 | Snow Brand Milk Prod Co Ltd | 流体の熱伝導率の測定装置及びこれを用いた熱伝導率の測定方法 |
| JPH1130602A (ja) * | 1997-07-11 | 1999-02-02 | Tadahiro Omi | ガス検出センサー及びその防爆取付構造 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5710413A (en) * | 1980-06-23 | 1982-01-20 | Toshiba Corp | Thermal type flow meter |
| US4744246A (en) * | 1986-05-01 | 1988-05-17 | Busta Heinz H | Flow sensor on insulator |
| JPH0643907B2 (ja) * | 1988-12-15 | 1994-06-08 | 山武ハネウエル株式会社 | 流量計 |
| US5060514A (en) * | 1989-11-30 | 1991-10-29 | Puritan-Bennett Corporate | Ultrasonic gas measuring device |
| US5187674A (en) * | 1989-12-28 | 1993-02-16 | Honeywell Inc. | Versatile, overpressure proof, absolute pressure sensor |
| US5081866A (en) * | 1990-05-30 | 1992-01-21 | Yamatake-Honeywell Co., Ltd. | Respiratory air flowmeter |
| US5056362A (en) * | 1990-07-25 | 1991-10-15 | Siemens Automotive L.P. | Strengthening a silicon micromachined mass air flow sensor in the region of its hot element |
| US5303167A (en) * | 1991-03-08 | 1994-04-12 | Honeywell Inc. | Absolute pressure sensor and method |
| US5249462A (en) * | 1991-07-09 | 1993-10-05 | Honeywell Inc. | Safe channel design for flow sensor chip microbridges |
| US5220830A (en) * | 1991-07-09 | 1993-06-22 | Honeywell Inc. | Compact gas flow meter using electronic microsensors |
| US5311477A (en) * | 1991-07-17 | 1994-05-10 | Sgs-Thomson Microelectronics, Inc. | Integrated circuit memory device having flash clear |
| US5279155A (en) * | 1993-02-04 | 1994-01-18 | Honeywell, Inc. | Mass airflow sensor |
| DE4324659C1 (de) * | 1993-07-22 | 1995-04-06 | Siemens Ag | Sensor mit einem in einem Gehäuse angeordneten Sensorelement |
| US5581038A (en) * | 1994-04-04 | 1996-12-03 | Sentir, Inc. | Pressure measurement apparatus having a reverse mounted transducer and overpressure guard |
| US5511428A (en) * | 1994-06-10 | 1996-04-30 | Massachusetts Institute Of Technology | Backside contact of sensor microstructures |
| US5599584A (en) * | 1994-12-16 | 1997-02-04 | Mine Safety Appliances Company | Microminiature combustible gas sensor and method of fabricating a microminiature combustible gas sensor |
| US6169965B1 (en) * | 1997-12-31 | 2001-01-02 | Honeywell International Inc. | Fluid property and flow sensing via a common frequency generator and FFT |
| US6361206B1 (en) * | 1999-01-28 | 2002-03-26 | Honeywell International Inc. | Microsensor housing |
| US6184773B1 (en) * | 1998-12-07 | 2001-02-06 | Honeywell Inc. | Rugged fluid flow and property microsensor |
| US6178811B1 (en) * | 1999-03-11 | 2001-01-30 | Honeywell International Inc. | Quasi-static viscometer |
-
1999
- 1999-08-05 US US09/368,621 patent/US6322247B1/en not_active Expired - Lifetime
-
2000
- 2000-07-27 CA CA002381271A patent/CA2381271A1/en not_active Abandoned
- 2000-07-27 EP EP00952232.7A patent/EP1200805B1/en not_active Expired - Lifetime
- 2000-07-27 WO PCT/US2000/020480 patent/WO2001011322A1/en not_active Ceased
- 2000-07-27 JP JP2001515931A patent/JP2003506703A/ja active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5539100A (en) * | 1978-09-13 | 1980-03-18 | Bendix Corp | Sensor element protection shield and fluid sensor equipped with same |
| US4208266A (en) * | 1978-10-27 | 1980-06-17 | General Motors Corporation | Exhaust gas oxygen sensor |
| JPH02141649A (ja) * | 1988-11-22 | 1990-05-31 | Snow Brand Milk Prod Co Ltd | 粘度計センサー |
| JPH05240814A (ja) * | 1990-03-09 | 1993-09-21 | Babcock & Wilcox Co:The | ガス流の湿度測定方法およびその装置 |
| JPH04332857A (ja) * | 1991-05-07 | 1992-11-19 | Mitsubishi Materials Corp | 酵素センサ |
| JPH06109674A (ja) * | 1992-09-24 | 1994-04-22 | Snow Brand Milk Prod Co Ltd | 流体の熱伝導率の測定装置及びこれを用いた熱伝導率の測定方法 |
| JPH1130602A (ja) * | 1997-07-11 | 1999-02-02 | Tadahiro Omi | ガス検出センサー及びその防爆取付構造 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017038313A1 (ja) * | 2015-08-31 | 2017-03-09 | 日立オートモティブシステムズ株式会社 | 気体センサ装置 |
| JP2017049011A (ja) * | 2015-08-31 | 2017-03-09 | 日立オートモティブシステムズ株式会社 | 気体センサ装置 |
| US10907999B2 (en) | 2015-08-31 | 2021-02-02 | Hitachi Automotive Systems, Ltd. | Gas sensor device |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2381271A1 (en) | 2001-02-15 |
| EP1200805B1 (en) | 2019-05-08 |
| US6322247B1 (en) | 2001-11-27 |
| WO2001011322A1 (en) | 2001-02-15 |
| EP1200805A1 (en) | 2002-05-02 |
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