CA2381271A1 - Microsensor housing - Google Patents
Microsensor housing Download PDFInfo
- Publication number
- CA2381271A1 CA2381271A1 CA002381271A CA2381271A CA2381271A1 CA 2381271 A1 CA2381271 A1 CA 2381271A1 CA 002381271 A CA002381271 A CA 002381271A CA 2381271 A CA2381271 A CA 2381271A CA 2381271 A1 CA2381271 A1 CA 2381271A1
- Authority
- CA
- Canada
- Prior art keywords
- sensor
- flow
- insulating material
- fluid
- baffle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000012530 fluid Substances 0.000 claims abstract description 35
- 239000012528 membrane Substances 0.000 claims description 15
- 239000011810 insulating material Substances 0.000 claims description 12
- 239000004593 Epoxy Substances 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 claims description 2
- 239000005297 pyrex Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 2
- 230000004044 response Effects 0.000 abstract description 37
- 238000013461 design Methods 0.000 abstract description 17
- 238000009792 diffusion process Methods 0.000 abstract description 11
- 230000007613 environmental effect Effects 0.000 abstract description 4
- 230000004888 barrier function Effects 0.000 description 21
- 239000007789 gas Substances 0.000 description 17
- 238000009833 condensation Methods 0.000 description 16
- 230000005494 condensation Effects 0.000 description 16
- 239000007788 liquid Substances 0.000 description 14
- 230000035945 sensitivity Effects 0.000 description 14
- 238000012360 testing method Methods 0.000 description 13
- 230000032258 transport Effects 0.000 description 12
- 239000000428 dust Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 8
- 238000013459 approach Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 8
- 230000004907 flux Effects 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 239000000443 aerosol Substances 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000011343 solid material Substances 0.000 description 2
- 230000005653 Brownian motion process Effects 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000005537 brownian motion Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0014—Sample conditioning by eliminating a gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2247—Sampling from a flowing stream of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/18—Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4873—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation for a flowing, e.g. gas sample
- G01N25/488—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N2001/2285—Details of probe structures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Combustion & Propulsion (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/368,621 | 1999-08-05 | ||
| US09/368,621 US6322247B1 (en) | 1999-01-28 | 1999-08-05 | Microsensor housing |
| PCT/US2000/020480 WO2001011322A1 (en) | 1999-08-05 | 2000-07-27 | Microsensor housing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2381271A1 true CA2381271A1 (en) | 2001-02-15 |
Family
ID=23452020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002381271A Abandoned CA2381271A1 (en) | 1999-08-05 | 2000-07-27 | Microsensor housing |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6322247B1 (enExample) |
| EP (1) | EP1200805B1 (enExample) |
| JP (1) | JP2003506703A (enExample) |
| CA (1) | CA2381271A1 (enExample) |
| WO (1) | WO2001011322A1 (enExample) |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7258003B2 (en) | 1998-12-07 | 2007-08-21 | Honeywell International Inc. | Flow sensor with self-aligned flow channel |
| US6911894B2 (en) * | 1998-12-07 | 2005-06-28 | Honeywell International Inc. | Sensor package for harsh environments |
| US6655207B1 (en) | 2000-02-16 | 2003-12-02 | Honeywell International Inc. | Flow rate module and integrated flow restrictor |
| EP1412722A2 (en) * | 2001-03-23 | 2004-04-28 | Services Petroliers Schlumberger | Fluid property sensors |
| US6681623B2 (en) | 2001-10-30 | 2004-01-27 | Honeywell International Inc. | Flow and pressure sensor for harsh fluids |
| US6672152B2 (en) | 2001-12-21 | 2004-01-06 | Honeywell International Inc. | Flush surface air data sensor |
| WO2003100358A1 (en) * | 2002-05-29 | 2003-12-04 | Ckd Corporation | Thermal flowmeter |
| DE20208716U1 (de) * | 2002-06-05 | 2002-08-22 | FESTO AG & Co, 73734 Esslingen | Durchfluß-Messvorrichtung |
| US6916664B2 (en) * | 2002-06-14 | 2005-07-12 | Honeywell International Inc. | Flammable vapor sensor |
| US6845664B1 (en) | 2002-10-03 | 2005-01-25 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | MEMS direct chip attach packaging methodologies and apparatuses for harsh environments |
| US7021821B2 (en) * | 2004-05-28 | 2006-04-04 | Honeywell International Inc. | Differential thermal sensors |
| JP2007523355A (ja) * | 2004-08-21 | 2007-08-16 | エルジー・ライフ・サイエンシズ・リミテッド | 微細流体素子及びそれを備えた診断及び分析装置 |
| US7331224B2 (en) * | 2004-12-07 | 2008-02-19 | Honeywell International Inc. | Tilt-insensitive flow sensor |
| US20060203886A1 (en) * | 2005-03-10 | 2006-09-14 | Aai Corporation | Simplified thermal isolator for temperature sensor |
| US7703313B2 (en) * | 2007-02-14 | 2010-04-27 | Honeywell International Inc. | Conformal film micro-channels for a fluidic micro analyzer |
| EP1959242A3 (en) * | 2007-02-19 | 2009-01-07 | Yamatake Corporation | Flowmeter and flow control device |
| WO2008113015A1 (en) * | 2007-03-14 | 2008-09-18 | Entegris, Inc. | System and method for non-intrusive thermal monitor |
| JP4892511B2 (ja) * | 2008-04-15 | 2012-03-07 | 本田技研工業株式会社 | ガスセンサ |
| US8113046B2 (en) | 2010-03-22 | 2012-02-14 | Honeywell International Inc. | Sensor assembly with hydrophobic filter |
| US8656772B2 (en) | 2010-03-22 | 2014-02-25 | Honeywell International Inc. | Flow sensor with pressure output signal |
| US8397586B2 (en) | 2010-03-22 | 2013-03-19 | Honeywell International Inc. | Flow sensor assembly with porous insert |
| US8756990B2 (en) | 2010-04-09 | 2014-06-24 | Honeywell International Inc. | Molded flow restrictor |
| US9003877B2 (en) | 2010-06-15 | 2015-04-14 | Honeywell International Inc. | Flow sensor assembly |
| US8418549B2 (en) * | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
| US8695417B2 (en) | 2011-01-31 | 2014-04-15 | Honeywell International Inc. | Flow sensor with enhanced flow range capability |
| US9052217B2 (en) | 2012-11-09 | 2015-06-09 | Honeywell International Inc. | Variable scale sensor |
| US9176089B2 (en) | 2013-03-29 | 2015-11-03 | Stmicroelectronics Pte Ltd. | Integrated multi-sensor module |
| US9618653B2 (en) * | 2013-03-29 | 2017-04-11 | Stmicroelectronics Pte Ltd. | Microelectronic environmental sensing module |
| US9347307B2 (en) * | 2013-10-08 | 2016-05-24 | Halliburton Energy Services, Inc. | Assembly for measuring temperature of materials flowing through tubing in a well system |
| US9976409B2 (en) | 2013-10-08 | 2018-05-22 | Halliburton Energy Services, Inc. | Assembly for measuring temperature of materials flowing through tubing in a well system |
| WO2016150373A1 (zh) * | 2015-03-24 | 2016-09-29 | 湖南明康中锦医疗科技发展有限公司 | 一种便携式呼吸机 |
| US10869985B2 (en) * | 2015-03-31 | 2020-12-22 | Koninklijke Philips N.V. | Flow member |
| US9952079B2 (en) | 2015-07-15 | 2018-04-24 | Honeywell International Inc. | Flow sensor |
| JP6722989B2 (ja) * | 2015-08-31 | 2020-07-15 | 日立オートモティブシステムズ株式会社 | 気体センサ装置 |
| DE102017002308A1 (de) * | 2016-03-25 | 2017-09-28 | Ngk Insulators, Ltd. | Sensorelement, herstellungsverfahren dafür und gassensor |
| CN109073582B (zh) * | 2016-05-23 | 2020-10-27 | 日立汽车系统株式会社 | 湿度测量装置 |
| US10429330B2 (en) | 2016-07-18 | 2019-10-01 | Stmicroelectronics Pte Ltd | Gas analyzer that detects gases, humidity, and temperature |
| US10254261B2 (en) | 2016-07-18 | 2019-04-09 | Stmicroelectronics Pte Ltd | Integrated air quality sensor that detects multiple gas species |
| US10274195B2 (en) | 2016-08-31 | 2019-04-30 | Honeywell International Inc. | Air/gas admittance device for a combustion appliance |
| US10557812B2 (en) | 2016-12-01 | 2020-02-11 | Stmicroelectronics Pte Ltd | Gas sensors |
| US10971427B2 (en) * | 2019-02-04 | 2021-04-06 | Dell Products L.P. | Heatsink for information handling system |
| WO2023175417A1 (en) * | 2022-03-18 | 2023-09-21 | Abb Schweiz Ag | A device for detecting thermal conductivity of a fluid |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4184934A (en) | 1978-09-13 | 1980-01-22 | The Bendix Corporation | Protective shield having omni-directional diverter for sensing means |
| US4208266A (en) | 1978-10-27 | 1980-06-17 | General Motors Corporation | Exhaust gas oxygen sensor |
| JPS5710413A (en) * | 1980-06-23 | 1982-01-20 | Toshiba Corp | Thermal type flow meter |
| US4744246A (en) * | 1986-05-01 | 1988-05-17 | Busta Heinz H | Flow sensor on insulator |
| JPH0625726B2 (ja) * | 1988-11-22 | 1994-04-06 | 雪印乳業株式会社 | 粘度計センサー |
| JPH0643907B2 (ja) * | 1988-12-15 | 1994-06-08 | 山武ハネウエル株式会社 | 流量計 |
| US5060514A (en) * | 1989-11-30 | 1991-10-29 | Puritan-Bennett Corporate | Ultrasonic gas measuring device |
| US5187674A (en) * | 1989-12-28 | 1993-02-16 | Honeywell Inc. | Versatile, overpressure proof, absolute pressure sensor |
| US5016472A (en) * | 1990-03-09 | 1991-05-21 | The Babcock & Wilcox Company | Dusty environment wet bulb indicator |
| US5081866A (en) * | 1990-05-30 | 1992-01-21 | Yamatake-Honeywell Co., Ltd. | Respiratory air flowmeter |
| US5056362A (en) * | 1990-07-25 | 1991-10-15 | Siemens Automotive L.P. | Strengthening a silicon micromachined mass air flow sensor in the region of its hot element |
| US5303167A (en) * | 1991-03-08 | 1994-04-12 | Honeywell Inc. | Absolute pressure sensor and method |
| JPH04332857A (ja) * | 1991-05-07 | 1992-11-19 | Mitsubishi Materials Corp | 酵素センサ |
| US5249462A (en) * | 1991-07-09 | 1993-10-05 | Honeywell Inc. | Safe channel design for flow sensor chip microbridges |
| US5220830A (en) * | 1991-07-09 | 1993-06-22 | Honeywell Inc. | Compact gas flow meter using electronic microsensors |
| US5311477A (en) * | 1991-07-17 | 1994-05-10 | Sgs-Thomson Microelectronics, Inc. | Integrated circuit memory device having flash clear |
| JP2594867B2 (ja) * | 1992-09-24 | 1997-03-26 | 雪印乳業株式会社 | 流体の熱伝導率の測定装置 |
| US5279155A (en) * | 1993-02-04 | 1994-01-18 | Honeywell, Inc. | Mass airflow sensor |
| DE4324659C1 (de) * | 1993-07-22 | 1995-04-06 | Siemens Ag | Sensor mit einem in einem Gehäuse angeordneten Sensorelement |
| US5581038A (en) * | 1994-04-04 | 1996-12-03 | Sentir, Inc. | Pressure measurement apparatus having a reverse mounted transducer and overpressure guard |
| US5511428A (en) * | 1994-06-10 | 1996-04-30 | Massachusetts Institute Of Technology | Backside contact of sensor microstructures |
| US5599584A (en) * | 1994-12-16 | 1997-02-04 | Mine Safety Appliances Company | Microminiature combustible gas sensor and method of fabricating a microminiature combustible gas sensor |
| JPH1130602A (ja) * | 1997-07-11 | 1999-02-02 | Tadahiro Omi | ガス検出センサー及びその防爆取付構造 |
| US6169965B1 (en) * | 1997-12-31 | 2001-01-02 | Honeywell International Inc. | Fluid property and flow sensing via a common frequency generator and FFT |
| US6184773B1 (en) * | 1998-12-07 | 2001-02-06 | Honeywell Inc. | Rugged fluid flow and property microsensor |
| US6361206B1 (en) * | 1999-01-28 | 2002-03-26 | Honeywell International Inc. | Microsensor housing |
| US6178811B1 (en) * | 1999-03-11 | 2001-01-30 | Honeywell International Inc. | Quasi-static viscometer |
-
1999
- 1999-08-05 US US09/368,621 patent/US6322247B1/en not_active Expired - Lifetime
-
2000
- 2000-07-27 CA CA002381271A patent/CA2381271A1/en not_active Abandoned
- 2000-07-27 JP JP2001515931A patent/JP2003506703A/ja active Pending
- 2000-07-27 WO PCT/US2000/020480 patent/WO2001011322A1/en not_active Ceased
- 2000-07-27 EP EP00952232.7A patent/EP1200805B1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US6322247B1 (en) | 2001-11-27 |
| EP1200805A1 (en) | 2002-05-02 |
| EP1200805B1 (en) | 2019-05-08 |
| JP2003506703A (ja) | 2003-02-18 |
| WO2001011322A1 (en) | 2001-02-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |