JP2003504800A5 - - Google Patents

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Publication number
JP2003504800A5
JP2003504800A5 JP2001508469A JP2001508469A JP2003504800A5 JP 2003504800 A5 JP2003504800 A5 JP 2003504800A5 JP 2001508469 A JP2001508469 A JP 2001508469A JP 2001508469 A JP2001508469 A JP 2001508469A JP 2003504800 A5 JP2003504800 A5 JP 2003504800A5
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JP
Japan
Prior art keywords
contact
substrate
mems device
movable
contacts
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Granted
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JP2001508469A
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English (en)
Japanese (ja)
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JP4030760B2 (ja
JP2003504800A (ja
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Priority claimed from US09/345,300 external-priority patent/US6057520A/en
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Publication of JP2003504800A publication Critical patent/JP2003504800A/ja
Publication of JP2003504800A5 publication Critical patent/JP2003504800A5/ja
Application granted granted Critical
Publication of JP4030760B2 publication Critical patent/JP4030760B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001508469A 1999-06-30 2000-05-04 耐アーク性高電圧静電スイッチ Expired - Fee Related JP4030760B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/345,300 1999-06-30
US09/345,300 US6057520A (en) 1999-06-30 1999-06-30 Arc resistant high voltage micromachined electrostatic switch
PCT/US2000/012142 WO2001003152A1 (en) 1999-06-30 2000-05-04 Arc resistant high voltage micromachined electrostatic switch

Publications (3)

Publication Number Publication Date
JP2003504800A JP2003504800A (ja) 2003-02-04
JP2003504800A5 true JP2003504800A5 (enExample) 2005-06-23
JP4030760B2 JP4030760B2 (ja) 2008-01-09

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001508469A Expired - Fee Related JP4030760B2 (ja) 1999-06-30 2000-05-04 耐アーク性高電圧静電スイッチ

Country Status (6)

Country Link
US (1) US6057520A (enExample)
EP (1) EP1196932A1 (enExample)
JP (1) JP4030760B2 (enExample)
AU (1) AU4819100A (enExample)
TW (1) TW449762B (enExample)
WO (1) WO2001003152A1 (enExample)

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