TW449762B - Arc resistant high voltage micromachined electrostatic switch - Google Patents

Arc resistant high voltage micromachined electrostatic switch Download PDF

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Publication number
TW449762B
TW449762B TW089109155A TW89109155A TW449762B TW 449762 B TW449762 B TW 449762B TW 089109155 A TW089109155 A TW 089109155A TW 89109155 A TW89109155 A TW 89109155A TW 449762 B TW449762 B TW 449762B
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TW
Taiwan
Prior art keywords
substrate
patent application
contactor
item
composite
Prior art date
Application number
TW089109155A
Other languages
English (en)
Chinese (zh)
Inventor
Scott Halden Goodwin-Johansson
Original Assignee
Mcnc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mcnc filed Critical Mcnc
Application granted granted Critical
Publication of TW449762B publication Critical patent/TW449762B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H2037/008—Micromechanical switches operated thermally
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0081—Electrostatic relays; Electro-adhesion relays making use of micromechanics with a tapered air-gap between fixed and movable electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/30—Means for extinguishing or preventing arc between current-carrying parts
    • H01H9/40—Multiple main contacts for the purpose of dividing the current through, or potential drop along, the arc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/30—Means for extinguishing or preventing arc between current-carrying parts
    • H01H9/42—Impedances connected with contacts

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  • Micromachines (AREA)
TW089109155A 1999-06-30 2000-05-12 Arc resistant high voltage micromachined electrostatic switch TW449762B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/345,300 US6057520A (en) 1999-06-30 1999-06-30 Arc resistant high voltage micromachined electrostatic switch

Publications (1)

Publication Number Publication Date
TW449762B true TW449762B (en) 2001-08-11

Family

ID=23354460

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089109155A TW449762B (en) 1999-06-30 2000-05-12 Arc resistant high voltage micromachined electrostatic switch

Country Status (6)

Country Link
US (1) US6057520A (enExample)
EP (1) EP1196932A1 (enExample)
JP (1) JP4030760B2 (enExample)
AU (1) AU4819100A (enExample)
TW (1) TW449762B (enExample)
WO (1) WO2001003152A1 (enExample)

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JP4030760B2 (ja) 2008-01-09
EP1196932A1 (en) 2002-04-17
US6057520A (en) 2000-05-02
WO2001003152A1 (en) 2001-01-11
JP2003504800A (ja) 2003-02-04
AU4819100A (en) 2001-01-22

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