JP2003346629A - 液体金属マイクロスイッチを利用した高周波リレー - Google Patents

液体金属マイクロスイッチを利用した高周波リレー

Info

Publication number
JP2003346629A
JP2003346629A JP2003071926A JP2003071926A JP2003346629A JP 2003346629 A JP2003346629 A JP 2003346629A JP 2003071926 A JP2003071926 A JP 2003071926A JP 2003071926 A JP2003071926 A JP 2003071926A JP 2003346629 A JP2003346629 A JP 2003346629A
Authority
JP
Japan
Prior art keywords
liquid metal
input
microswitch
substrate
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003071926A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003346629A5 (enExample
Inventor
Lewis R Dove
ルイス・アール・ドーブ
John R Lindsey
ジョン・アール・リンドセイ
David J Dascher
デビット・ジェイ・ダスチャー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2003346629A publication Critical patent/JP2003346629A/ja
Publication of JP2003346629A5 publication Critical patent/JP2003346629A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/22—Attenuating devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure

Landscapes

  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Attenuators (AREA)
  • Non-Reversible Transmitting Devices (AREA)
  • Micromachines (AREA)
  • Thermally Actuated Switches (AREA)
JP2003071926A 2002-04-30 2003-03-17 液体金属マイクロスイッチを利用した高周波リレー Pending JP2003346629A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/136,147 US6646527B1 (en) 2002-04-30 2002-04-30 High frequency attenuator using liquid metal micro switches
US136147 2002-04-30

Publications (2)

Publication Number Publication Date
JP2003346629A true JP2003346629A (ja) 2003-12-05
JP2003346629A5 JP2003346629A5 (enExample) 2006-05-11

Family

ID=22471522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003071926A Pending JP2003346629A (ja) 2002-04-30 2003-03-17 液体金属マイクロスイッチを利用した高周波リレー

Country Status (5)

Country Link
US (1) US6646527B1 (enExample)
JP (1) JP2003346629A (enExample)
DE (1) DE10308530A1 (enExample)
GB (1) GB2388253B (enExample)
TW (1) TWI258782B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009040990A1 (ja) * 2007-09-28 2009-04-02 Advantest Corporation 減衰装置および試験装置

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6689976B1 (en) * 2002-10-08 2004-02-10 Agilent Technologies, Inc. Electrically isolated liquid metal micro-switches for integrally shielded microcircuits
US6774324B2 (en) * 2002-12-12 2004-08-10 Agilent Technologies, Inc. Switch and production thereof
US6855898B2 (en) * 2002-12-12 2005-02-15 Agilent Technologies, Inc. Ceramic channel plate for a switch
US6743990B1 (en) * 2002-12-12 2004-06-01 Agilent Technologies, Inc. Volume adjustment apparatus and method for use
US7022926B2 (en) * 2002-12-12 2006-04-04 Agilent Technologies, Inc. Ultrasonically milled channel plate for a switch
US7019235B2 (en) * 2003-01-13 2006-03-28 Agilent Technologies, Inc. Photoimaged channel plate for a switch
US6825429B2 (en) * 2003-03-31 2004-11-30 Agilent Technologies, Inc. Hermetic seal and controlled impedance RF connections for a liquid metal micro switch
US6841746B2 (en) * 2003-04-14 2005-01-11 Agilent Technologies, Inc. Bent switching fluid cavity
US6768068B1 (en) * 2003-04-14 2004-07-27 Agilent Technologies, Inc. Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch
US6774325B1 (en) * 2003-04-14 2004-08-10 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6770827B1 (en) * 2003-04-14 2004-08-03 Agilent Technologies, Inc. Electrical isolation of fluid-based switches
US6818844B2 (en) * 2003-04-14 2004-11-16 Agilent Technologies, Inc. Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch
US6891116B2 (en) * 2003-04-14 2005-05-10 Agilent Technologies, Inc. Substrate with liquid electrode
US6906271B2 (en) * 2003-04-14 2005-06-14 Agilent Technologies, Inc. Fluid-based switch
US6794591B1 (en) * 2003-04-14 2004-09-21 Agilent Technologies, Inc. Fluid-based switches
US6750413B1 (en) * 2003-04-25 2004-06-15 Agilent Technologies, Inc. Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate
US6777630B1 (en) * 2003-04-30 2004-08-17 Agilent Technologies, Inc. Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates
US6759610B1 (en) * 2003-06-05 2004-07-06 Agilent Technologies, Inc. Multi-layer assembly of stacked LIMMS devices with liquid metal vias
US6759611B1 (en) * 2003-06-16 2004-07-06 Agilent Technologies, Inc. Fluid-based switches and methods for producing the same
US6781074B1 (en) * 2003-07-30 2004-08-24 Agilent Technologies, Inc. Preventing corrosion degradation in a fluid-based switch
US6787720B1 (en) * 2003-07-31 2004-09-07 Agilent Technologies, Inc. Gettering agent and method to prevent corrosion in a fluid switch
US6774327B1 (en) * 2003-09-24 2004-08-10 Agilent Technologies, Inc. Hermetic seals for electronic components
US6884951B1 (en) * 2003-10-29 2005-04-26 Agilent Technologies, Inc. Fluid-based switches and methods for manufacturing and sealing fluid-based switches
US8172375B2 (en) * 2004-12-17 2012-05-08 Brother Kogyo Kabushiki Kaisha Valve and actuator employing capillary electrowetting phenomenon
KR101237474B1 (ko) 2007-01-10 2013-02-26 에어로플렉스 리미티드 스펙트럼 분석기의 감쇄기
DE112009000842T5 (de) * 2008-04-15 2011-05-19 Coto Technology, Inc. Verbessertes Relais der Form C und Baustein unter Verwendung desselben
US9673867B2 (en) * 2012-03-14 2017-06-06 Semiconductor Energy Laboratory Co., Ltd. Power transmission device and power feeding system
DE102013221442B4 (de) * 2013-10-22 2021-06-24 Sts Spezial-Transformatoren-Stockach Gmbh & Co. Kg Induktives Bauteil mit reduziertem Leerraum
CN115084811B (zh) * 2022-08-03 2023-07-21 成都威频科技有限公司 一种超宽带悬置薄膜衰减器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3600537A (en) * 1969-04-15 1971-08-17 Mechanical Enterprises Inc Switch
US6323447B1 (en) * 1998-12-30 2001-11-27 Agilent Technologies, Inc. Electrical contact breaker switch, integrated electrical contact breaker switch, and electrical contact switching method
US6373356B1 (en) * 1999-05-21 2002-04-16 Interscience, Inc. Microelectromechanical liquid metal current carrying system, apparatus and method
EP1254474B1 (en) * 2000-02-02 2004-03-24 Raytheon Company Microelectromechanical micro-relay with liquid metal contacts

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009040990A1 (ja) * 2007-09-28 2009-04-02 Advantest Corporation 減衰装置および試験装置

Also Published As

Publication number Publication date
TWI258782B (en) 2006-07-21
GB2388253B (en) 2005-08-10
US6646527B1 (en) 2003-11-11
TW200305905A (en) 2003-11-01
DE10308530A1 (de) 2003-11-20
GB0309227D0 (en) 2003-06-04
GB2388253A (en) 2003-11-05
US20030201854A1 (en) 2003-10-30

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