JP2003344818A - Method and apparatus for calibration in temporary mounting of component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize highly accurate positioning corresponding to deviation in a position due to a partial temperature rise or some other reasons. <P>SOLUTION: On the basis of information obtained by recognizing the position of a component 1 at a specified position B, a carrying position of the component 1 to a temporary mounting position C determined by the position relation with the temporary mounting position is initially corrected, and the quantity of a deviation of the initially positioned component 1 from the temporary mounting position is judged from information obtained by carrying the component 1 to the carrying position and initially positioning it and information obtained by recognizing the temporary mounting position C to determine the deviation quantity as a calibration quantity; when subsequent mounting is carried out, the component 1 is carried, positioned, and temporarily mounted at a calibration position corrected by the initial correction quantity and the calibration quantity for each carrying position of the component 1 from a specified position B to the temporary mounting position C. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is mainly applied to a so-called liquid crystal mounting apparatus for manufacturing a liquid crystal device system component or a product by temporarily mounting the component on a liquid crystal device system base material and then completely mounting the component. The present invention relates to a calibration method and an apparatus for temporarily mounting a component to be mounted.

[0002]

2. Description of the Related Art An outline of a liquid crystal mounting apparatus for performing such temporary mounting and permanent mounting will be described with reference to a mounting apparatus 11 according to one embodiment of the present invention shown in FIG. The display substrate 12 includes a temporary mounting portion 13 that is temporarily mounted, and a main mounting portion 14. Further, it is provided with a component supply unit 15 for supplying the component 1, a loading unit 16 for loading the liquid crystal display substrate 12, and an unloading unit 17 for unloading the liquid crystal display panel 10 after component mounting.
Since the liquid crystal display substrate 12 is small and thin, it is adsorbed and held on a plurality of pallets 21 for handling. The pallet 21 has the temporary mounting part 13 and the main mounting part 14 as the final stage from the position where the liquid crystal display substrate 12 supplied through the loading part 16 is received by the transport mechanism 23 having a plurality of transfer parts 22 at each position of the outward path 23a. The liquid crystal display panel 10 is manufactured by being sequentially delivered to each section, and after the component 1 is temporarily mounted and finally mounted. The manufactured liquid crystal display panel 10 reaches the unloading section 17 and the liquid crystal display panel 10 after the main mounting is carried out.

The component supply unit 15 supplies the components 1 in a state in which they are housed in a pallet 31 side by side vertically and horizontally. The supplied component 1 is picked up by the component extraction tool 3 and picked up and carried to the temporary mounting portion 13 in the X direction. Temporary mounting part 13
The component 1 that has been carried is sucked and held by the temporary mounting tool 2, and then carried in the Y direction to the temporary mounting position C through the predetermined position B where the camera 5 is provided and temporarily mounted on the liquid crystal display substrate 12.

Here, a conventional temporary mounting method of parts will be described with reference to FIG. 1 showing a temporary mounting procedure of the present embodiment. Component 1 supplied at component supply position A
Is equipped with a camera 4 which is integrated in the X direction with the tool 3 for taking out the same in the X direction. As a result, the position in the X direction between the position of the component 1 captured by the camera 4 and the component extracting tool 3 is uniquely determined, and the component 1 whose position is recognized by the camera 4 can be held and picked up in the correct positional relationship. The position recognition using the camera 4 is also performed for the rotation angle around the recognition position of the component 1, and if the orientation is not proper, the temporary mounting tool 2 or the component removal tool 3 picking up the component 1 is rotated around its axis. Correct the direction by doing so.

Next, the temporary mounting tool 2 receives the component 1 in the proper orientation held by the component take-out tool 3 at the receiving position D.
Then, it is carried in the Y direction through the predetermined position B to the temporary mounting position C and temporarily mounted. In the carrying process, based on the position recognition information of the component 1 whose position is recognized by the camera 5 at the predetermined position B, a known Y-direction distance from the predetermined position B to the temporary mounting position C is located at a constant distance. By correcting the carrying position to the determined temporary mounting position C and carrying the component 1 to the corrected carrying position C1, the proper temporary mounting position is obtained.

[0006]

However, due to the miniaturization of liquid crystal devices, the miniaturization of components, and the high density of their mounting, the positional accuracy required for mounting the components is accelerating to about ± 5 μm. In the above-mentioned conventional positioning method, mounting defects sometimes occur due to displacement of mounted components. The present inventors have conducted various experiments and studied on such problems. Fig. 11 shows the result of such a study.
Two experimental data are shown. 11A shows the amount of positional deviation of the temporarily mounted component 1 due to operating time, and FIG. 11B shows the amount of positional displacement of the temporarily mounted component 1 due to the ambient temperature around the apparatus.

In FIG. 11 (a), a positional deviation of 2.4 μm occurs in the Y direction after a lapse of 3 hours from the initial operation. Further, in FIG. 11 (b), when the temperature changes to 23 ° C. when the temperature is 18 ° C., the positional deviation is 7.7 μm in the Y direction.
When the temperature further rises to 28 ° C, 15.6 µm is generated, far exceeding the allowable value.

It is considered that such a result is caused by the fact that each part of the apparatus is individually heated in proportion to the elapsed operating time and the change of the ambient temperature around the apparatus. In particular, since the ball screw 6 is long in the Y direction for carrying the component 1, the length change due to temperature change becomes large, and the predetermined position B of the component 1
It also affects the carrying position from. This is consistent with the fact that the amount of displacement in the Y direction is significantly larger than the amount of displacement in the X direction.

Since the above-mentioned conventional positioning method cannot absorb the change in length of the ball screw 6 and the like due to the temperature, a deviation amount occurs even if the position correction is performed by software control. The temperature change is such that the operation is continued, the operating speed is high or low, the presence or absence of cooling, the operation status such as operation interruption, the ambient temperature of the surroundings, and the like.

The positional deviation occurring in the X direction in FIG. 11 is also caused by the expansion and contraction of members other than the ball screw 6 due to temperature changes, and the positional deviation in the Y direction other than the ball screw 6 is also caused. It seems that the effects of expansion and contraction due to the temperature change of the member are compounded. It is difficult to measure these things, and the amount of displacement cannot be predicted in both the XY directions. Therefore, the inventors of the present invention determine such a position shift amount of the component 1 with respect to the temporary mounting position C each time it is necessary, and reflect this in subsequent position correction to perform temporary mounting with high precision positioning. I realized what I could do.

An object of the present invention is to provide a calibration method at the time of temporary mounting of a component which can be positioned with high accuracy in response to a partial temperature rise or a positional deviation caused by some other reason, based on such new knowledge. To provide a device.

[0012]

In order to achieve the above-mentioned object, a calibration method for temporarily mounting a component according to the present invention is designed to hold a supplied component by a temporary mounting tool and temporarily mount a temporary mounting portion. A predetermined position based on the position information of the parts held in the temporary mounting tool at the predetermined position for carrying to the mounting position, temporarily mounting it on the liquid crystal device base material located there, and providing it for the actual mounting. In carrying out the initial positioning by carrying the part to the initial correction position, which is the initial correction of the carrying position of the part to the temporary mounting position determined from the positional relationship with the temporary mounting position in
Position information that recognizes the position of this initially positioned component,
From the position information that the position of the temporary mounting position is recognized in the temporary mounting unit, the amount of deviation from the temporary mounting position of the initially positioned component is determined, and the amount of deviation at that time is set as the calibration amount. At the time of temporary mounting, the component is carried from the predetermined position to the temporary mounting position, and the component is carried and positioned at the calibration position corrected by the initial correction amount and the set calibration amount, and is used for the temporary mounting. This is one of the features.

In such a structure, before carrying the component held by the temporary mounting tool from the predetermined position to the temporary mounting position of the temporary mounting portion and temporarily mounting the component, the component is held between the predetermined position and the temporary mounting position. By carrying the part to the initial correction position, which is initially corrected based on the positional relationship information and the amount of deviation of the part at the specified position, and performing initial positioning, the amount of deviation of the part at the specified position is reduced to the temporary mounting position. It is possible to cancel out the influence on the positioning accuracy in the initial positioning, and the temporary mounting of the parts positioned at the initial correction position based on the position information of the positions of the initially positioned parts and the position information of the temporary mounting positions. The amount of deviation from the position is determined, and the amount of deviation at that time is set as a calibration amount, and thereafter, when the component is temporarily mounted, the calibration set in addition to the initial correction is performed. By performing the partial correction, on carrying parts the temporary attachment position from the predetermined position, it is possible to offset the change in any position shift occurring for any reason, including change in temperature. As a result, the component can be positioned at the temporary mounting position with high accuracy and used for temporary mounting.

As an apparatus for achieving such a method,
A component temporary mounting means for holding the supplied component in the temporary mounting tool, carrying it to the temporary mounting position of the temporary mounting portion, temporarily mounting it on the liquid crystal device system base material, and providing it for the next main mounting, Position recognition means for recognizing the position of the component held by the temporary mounting tool at a predetermined position in the carrying path of the component from the receiving position of the temporary mounting position to the temporary mounting position, and the position recognition of the temporary mounting position by the temporary mounting portion. Position recognizing means for recognizing the position of the component carried by the mounting head at the temporary mounting position, and position information for recognizing the position of the component at the predetermined position on the basis of the position information for the temporary mounting at the predetermined position. Initial positioning control means for initially correcting the carrying position of the component to the temporary mounting position determined by the positional relationship with the mounting position, and carrying the component to this initial correction position for positioning, and positioning the initially positioned component. Recognized A calibration amount setting that determines the amount of deviation from the temporary mounting position of the initially positioned component based on the placement information and the position information obtained by recognizing the temporary mounting position of the temporary mounting portion, and sets the displacement amount at that time as the calibration amount. And the component temporary mounting means carries the component from a predetermined position to the temporary mounting position and temporarily mounts the component on the calibration position corrected by the initial correction amount and the set calibration amount. It is sufficient to have a calibration control means for carrying, positioning and provisionally mounting, and the above-mentioned method can be automatically and quickly and for a long time according to a preset program. It can be achieved stably.

According to the calibration method for temporarily mounting a component according to the present invention, the supplied component is held by the temporary mounting tool and carried to the temporary mounting position of the temporary mounting portion, and the liquid crystal device base material located there. When the temporary mounting of the parts to be temporarily mounted and used for the actual mounting is performed, the parts held by the temporary mounting tool at the predetermined positions which are set in the route for carrying the parts and recognize the position of the parts are set at the predetermined position and the temporary mounting position. The temporary positioning is performed by carrying the temporary positioning by carrying to the carrying position to the temporary mounting position determined by the positional relationship between and, and the position information for recognizing the position of the temporarily positioned component and the position information for recognizing the position of the temporary mounting position. After determining the displacement position of the mounted component from the temporary mounting position and setting the displacement position at that time as the calibration reference position, the position of the component held in the temporary mounting tool at the predetermined position is recognized. Based on the information, the carrying position of the component from the predetermined position determined by the positional relationship with the temporary mounting position to the temporary mounting position is initially corrected, the component is carried to this initial corrected position for initial positioning, and this initial positioning is performed. Based on the position information for recognizing the position of the component, the amount of displacement of the initially positioned component from the calibration reference position is determined, and the amount of displacement at that time is set as the calibration amount. With regard to the carrying position of the component from the position to the temporary mounting position, it is still another object to carry and position the component at the calibration position where the initial correction amount and the set calibration amount have been corrected for the temporary mounting. It has a feature.

In such a structure, the parts held by the temporary mounting tool at the predetermined position are carried to the temporary mounting position determined by the positional relationship between the predetermined position and the temporary mounting position, and temporarily positioned. As a result, the total displacement between the control side that moved the temporary mounting tool from the predetermined position to the carrying position to the temporary mounting position and the mechanism side that is moved to the position of the component at that time, specifically the control The habits of the mechanism side that cannot be set on the side, such as the inclination of the temporary mounting tool and the component mounting head that holds it, and the habits affected by wear and deformation over time, are reflected as the amount of deviation from the temporary mounting position. To be made. As a result, it is possible to determine such a shift amount and a shift position as a result of each mechanism, based on the position information obtained by recognizing the position of the temporarily positioned component and the position information obtained by recognizing the position of the temporary mounting position. The determined displacement position is set as the calibration reference position, and after that, the cause of the displacement that occurs for each mechanism in the calibration when carrying and positioning the component at the predetermined position to the temporary mounting position for provisional mounting Can be reflected without distinction.

Therefore, the amount of deviation of the initially positioned component from the calibration reference position is determined based on the position information obtained by recognizing the position of the initially positioned component, and the amount of deviation at that time is set as the calibration amount. By carrying out position correction afterwards, when carrying a part from a predetermined position to a temporary mounting position, it will continue for some reason including temperature change, but it will continue to offset the change in position deviation, for example. In addition, it is also possible to cancel out the positional deviation tendency of each mechanism side that occurs from the beginning for some reason or that occurs over time, so it is possible to position the components with even higher precision for temporary mounting. it can.

As an apparatus for achieving such a method,
A component temporary mounting means for holding the supplied component in the temporary mounting tool, carrying it to the temporary mounting position of the temporary mounting portion, temporarily mounting it on the liquid crystal device system base material, and providing it for the next main mounting, Position recognition means for recognizing the position of the component held by the temporary mounting tool at the predetermined position set in the carrying path of the component from the receiving position to the temporary mounting position, and the temporary mounting position A position recognizing means for recognizing the position, a position recognizing means for recognizing the position of the component carried by the component mounting head at the temporary mounting position, and a temporary mounting position determined by the positional relationship between the component at a predetermined position and the temporary mounting position. Temporary positioning control means for carrying to a carrying position for temporary positioning, position information for recognizing the position of the temporarily positioned component,
Calibration reference position setting means for determining the amount of deviation of the temporarily positioned component from the temporary mounting position based on the position information obtained by recognizing the position of the temporary mounting position, and setting the displacement position at this time as the calibration reference position; When the temporary mounting means carries the component from the predetermined position to the temporary mounting position and temporarily mounts the component, the temporary mounting is performed from the predetermined position determined from the positional relationship with the temporary mounting position based on the position information of the position recognition of the component at the predetermined position. Based on the initial positioning control means for initially correcting the carrying position of the part to the landing position and carrying and positioning the part at this initial corrected position, and the position information of the position of the initially positioned part, the position of the initially positioned part is determined. Calibration that determines the amount of deviation from the calibration reference position and sets the amount of deviation at that time as the amount of calibration And a calibration control unit configured to carry the part to a calibration position where the initial correction amount and the set calibration amount have been corrected so that the component is positioned and provided for temporary mounting. It is sufficient that one of the features is that the calibration method corresponding to the peculiarities that occur individually on the mechanism side in the initial stage and over time is automatically and rapidly according to a preset program. It can be achieved stably in the long term.

Further, in this method and apparatus, the calibration reference position is set at least at one timing when the reference position is arbitrarily measured in addition to the initial operation of the mechanism, the start of each operation, and the operation operation. Is more effective, and the more chances to set the calibration reference position, the more finely the individual mechanism side can cope with the habit of positional deviation that occurs for some reason.

Therefore, in the apparatus, it is preferable that the calibration control means sets the calibration reference position at a predetermined timing so that it can be executed at any timing set in advance or later. .

Further, in any method and apparatus, the calibration amount is set at the start of each operation of the temporary component mounting means. It is possible to deal with the positional deviation that may occur from the beginning.

Further, the calibration amount is set when it corresponds to a predetermined condition. In a further configuration, by setting the condition that the positional displacement amount is expected to change continuously for a certain period of time, Simply reset the calibration amount at the timing that matches the conditions,
It is possible to cope with such a change in the position shift amount.

The preset conditions include a temperature change above a predetermined level, an elapsed time from the start of each operation, a cycle or number of times set corresponding to these, and a subtraction of an elapsed time commensurate with an intermediate stop time during each operation. It is effective that at least one of the above is effective, and the more the setting conditions are, the more the change in the positional deviation amount can be dealt with in detail without waste.

To satisfy these requirements, it is preferable that the calibration control means sets the calibration amount at a predetermined timing so that the calibration control means can perform the calibration amount at any timing set in advance or later. Is.

Further objects and features of the present invention will become apparent from the following detailed description and drawings. In addition, each feature of the present invention, as far as possible, by itself,
Alternatively, they can be combined and employed in various combinations.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a calibration method and apparatus for temporarily mounting a component according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 9 to provide an understanding of the present invention. . The following description is a specific example of the present invention,
It does not limit the scope of the claims.

The present embodiment is an example of application to a mounting apparatus 11 for a component for a liquid crystal device base material as shown in FIG. However, the present invention can be effectively applied to any temporary mounting in which the component 1 is mounted by temporary mounting and main mounting. The temporary mounting and the permanent mounting can be performed by sharing the same mounting tool and stage, but in the present embodiment, both of them are independently performed in individual stages. This mounting apparatus 11 temporarily mounts a component 1 such as a semiconductor chip or a semiconductor device on a liquid crystal display substrate 12 and then permanently mounts it, and in this embodiment, an anisotropic conductive tape (ACF tape) not shown is used. After pasting, the liquid crystal display panel 10 is manufactured by performing temporary mounting and actual mounting of the component 1. For this reason, the mounting apparatus 11 includes a loading section 16 for loading the liquid crystal display substrate 12 and an unloading section 17 for unloading the liquid crystal display panel 10 after component mounting.
Between them, the ACF tape attaching section 20, the temporary mounting section 13, and the main mounting section 14 are sequentially located. In addition, the component supply unit 15 that supplies the component 1 for the temporary mounting includes the temporary mounting unit 14
It is attached to the. Although the loading of the liquid crystal display substrate 12 and the unloading of the liquid crystal display panel 10 can be performed manually, the loading robot 1
8 and the unloading robot 19 automatically.

On the other hand, since the liquid crystal display substrate 12 is small and thin, it is held by suction on a plurality of pallets 21 and handled. The pallet 21 is moved from the position where the pallet 21 receives the liquid crystal display substrate 12 supplied through the loading unit 16 by the transfer mechanism 23 provided on the outward path 23a to the AC
F-tape attaching section 20, temporary mounting section 13, permanent mounting section 14
AF in each section while sequentially transporting to
The liquid crystal display panel 10 is manufactured by sequentially applying the C-tape, temporarily mounting the component 1, and finally mounting the liquid crystal display panel 10, and finally reaches the unloading section 17 to carry out the liquid crystal display panel 10 after the main mounting. To do so.

To this end, the transport mechanism 23 includes a first intermediate section 110A between the ACF tape attaching section 20 and the temporary mounting section 13 and a second intermediate station 110B between the temporary mounting section 13 and the main mounting section 14. The first to third delivery parts 2 are provided as the delivery part 22 which has the pallet 21 by suction and holds it at various places on the outward path 23a, specifically, at three places.
I have a plurality of 2A to 22C, and they are raised and lowered respectively. The first transfer unit 22A conveys the pallet 21 from the stage of the loading unit 16 to the first intermediate stage 110A via the ACF attaching unit 20. The second transfer portion 22B is connected to the second intermediate portion 110A through the temporary pressure-bonding portion 13 and the second intermediate portion 110A.
The pallet 21 is transported to the intermediate stage 110B. The third transfer section 22C is from the second intermediate stage 110B to the unloading section 17 through the main pressure bonding section 14 to the pallet 2
1 is conveyed.

The first intermediate station 110A opposes the first and second sides, leaving the approach path 111A of the transfer section 22A.
It has the mounting portions 110A1 and 110A2, and the pallets 21 are sucked and held by the respective mounting portions 110A1 and 110A2 and are moved up and down in synchronization with each other so as to maintain the level thereof. The structure of the second intermediate stage 110B is the same as that of the first intermediate stage 110A, only the installation position is different, and the description thereof is omitted. Correspondingly, the loading unit 16 holds the pallet 21 by suction, receives the liquid crystal display substrate 12 in the correct posture and position based on the position recognition by the camera, and also sucks and holds the liquid crystal display substrate 12. It has a stage 112, and this loading stage 112 is also moved up and down, and has an approach path 112A for receiving the first transfer section 22A.

The first transfer section 22A adsorbs and holds the pallet 21 and the liquid crystal display substrate 12 on the pallet 21 and goes under the loading stage 112 in the raised position, and the entrance path 112 is provided.
Move through A. At this time, the loading stage 112 descends to transfer the pallet 21 to the first transfer section 22A.
To be placed on. Therefore, the suction holding of the pallet 21 and the liquid crystal display substrate 12 by the loading stage 112 is switched to the suction holding by the first transfer section 22A. In this state, the loading stage 112 is further lowered and separated from the pallet 21. As a result, the pallet 21 is transferred between the loading stage 112 and the first transfer section 22A.

Next, the first transfer section 22A conveys the pallet 21 from the loading section 16 to the ACF sticking section 20 and uses it for the ACF sticking. After that, the first transfer unit 22A moves to the approach path 111 of the first intermediate stage 110A.
The pallet 21 after the ACF is attached is conveyed to the first intermediate stage 110A along with the entry into A. First at this transport position
The transfer unit 22A descends to place the pallet 21 on the first intermediate stage 110A. In this state, the suction state of the pallet 21 and the first transfer section 22A of the liquid crystal display substrate 12 is switched to the suction holding state of the first intermediate stage 110A.

Subsequently, the first transfer section 22A further descends and separates from the pallet 21. As a result, the pallet 21 is transferred between the first transfer section 22A and the first intermediate stage 110A. After the delivery, the first delivery unit 22A returns to the loading unit 16 and repeats the same operation.

The second transfer portion 22B is in the lowered state,
Enter the approach path 111A of the first intermediate stage 110A,
It is located below the pallet 21 after the ACF is attached, which is held by the first intermediate stage 110A. In this state, the second transfer section 22B is raised to put the pallet 21 into the receiving state, and the suction holding state by the first intermediate stage 110A of the pallet 21 and the liquid crystal display substrate 12 is switched to the suction holding state by the second transfer section 22B. . Next, the second transfer section 22B is raised to lift the pallet 21 from the first intermediate stage 110A, and the transfer of the pallet 21 between the first intermediate stage 110A and the second transfer section 22B is completed.

After the transfer, the second transfer section 22B moves to the temporary mounting section 13 and descends from the position shown by the solid line in FIG. 9 to the position shown by the virtual line, and the liquid crystal display substrate 12 on the pallet 21 backs up the backup body 43. Then, the component 1 is temporarily mounted as shown in FIG. Then, the second transfer unit 22B
The first and second placement parts 110B1 and 1 of the intermediate stage 110B
The pallet 21 after the temporary installation is conveyed to the second intermediate stage 110B by entering the approach path 111B (FIG. 9) between 10B2,
Similarly to the transfer between the first transfer section 22A and the first intermediate stage 110A, the second transfer section 22B and the second transfer section 22B
The pallet 21 is transferred to and from the intermediate stage 110B, and the second transfer unit 22B after the transfer returns to the first intermediate stage 110A and then repeats the same operation.

Here, the third transfer section 22C moves to the second intermediate stage 110B, and the first intermediate stage 110A.
Similarly to the delivery between the second transfer unit 22B and the second delivery unit 22B, the pallet 21 is delivered between the second intermediate stage 110B and the third delivery unit 22C, and the pallet 21 and the liquid crystal display substrate 12 after the temporary mounting are It is adsorbed and held by the third transfer portion 22C. In this state, the third transfer portion 22C moves to the main mounting portion 14 and puts the liquid crystal display substrate 12 into a backup state for the main mounting of the component 1. The third transfer section 22C after the main mounting moves to the unloading section 17, and the pallet 21 is moved between the unloading stage 113 and the unloading stage 113 in an approximately reverse operation relationship between the loading stage 112 and the first transfer section 22A. Is carried out so that the liquid crystal display panel 10 after the main mounting on the pallet 21 is carried out.

After carrying out the liquid crystal display panel 10, the pallet 21 is transferred from the unloading stage 113 on the outward path 23a to the carrying section 25 of the carrying mechanism 24 on the return path 24a parallel to the outgoing path 23a, and then carried. It is returned to the loading unit 16 by the unit 25, and the above operation is repeated thereafter. The pallet 21 is not limited to such a circulating transfer system, but the liquid crystal display substrate 12 can be transferred even if it is reciprocally transferred on a straight line.
The liquid crystal display panel 10 can be manufactured by sequentially carrying the above from the loading unit 16 to the unloading unit 17. However, in the present invention, how to handle and convey the liquid crystal device base material such as the liquid crystal display substrate 12 for the temporary mounting and the permanent mounting of the component 1 is not particularly limited. Can be transported to the required work station.

The component supply section 15 shows an example in which the components 1 are supplied in a state where they are stored in a pallet 31 side by side in a vertical and horizontal direction. The component supply unit 15 pulls out the pallet 31 from the storage unit 32 to the component supply position A shown in FIG. By the way, it picks up by picking up with the parts take-out tool 3 already mentioned,
It is supplied to the temporary mounting unit 13. The temporary mounting unit 13 sucks and holds the supplied component 1 by the above-described temporary mounting tool 2, carries it to the temporary mounting position C, and temporarily mounts it on the liquid crystal display substrate 12.

More specifically, the component take-out tool 3
As shown in FIG. 8, the component pick-up head 34 is mounted together with the camera 4 so that they have a fixed positional relationship in the X direction. The component take-out head 34 reciprocates in the X direction in FIG. 7, and the component supply position shown in FIG.
After moving to A and picking up the necessary component 1 with the component take-out tool 3, it moves to the receiving position D of the component 1 on the temporary mounting portion 13 side shown in FIG. 1B and supplies it to the temporary mounting portion 13. . Along with this, the component 1 is mounted on the pallet 3 with the mounting surface facing up.
Corresponding to the fact that the component 1 is stored in 1, the component take-out tool 3 reverses the picked-up position of the component 1 from the downward position shown by the broken line to the upward position shown by the solid line at the receiving position D. As a result, the component 1 picked up by the component take-out tool 3 can be supplied to the downward temporary mounting tool 2 at the receiving position D in a state in which the mounting surface is turned upside down.

On the other hand, the temporary mounting tool 2 of the temporary mounting portion 13 is moved by the ball screw 6 as shown in FIG. 7 and FIG.
The temporary mounting head 36, which is reciprocally moved in the direction and is moved in the X direction by the X-direction table 35, is mounted downward. The temporary mounting head 36 adsorbs and picks up the component 1, which is directed upward at the component receiving position D shown in FIG. 1C, by the downward temporary mounting tool 2. Therefore, the temporary mounting head 36 moves in the Y direction to carry the picked-up component 1 to the temporary mounting position C as shown in FIG. As described above, the camera 5 is provided at a predetermined position B on the route where the temporary mounting head 36 carries the component 1 from the transfer position D to the temporary mounting position C, which is a predetermined position B slightly before the temporary mounting position C in the illustrated example. ing.

As shown in FIG. 9, the second transfer portion 22B for conveying the pallet 21 to the temporary mounting portion 13 for temporary mounting includes a support mechanism 41 and a liquid crystal display substrate on the pallet 21 supported by the support mechanism 41. Parts 1 by pressing and heating 12
And a backup mechanism 42 for backing up when temporarily used. The backup mechanism 42 has a transparent backup body 43 made of quartz glass in the shape of a truncated cone as shown in FIGS. 1 and 9 for the liquid crystal display substrate 12 sucked and held together with the pallet 21 as the support mechanism 41 descends. Then, at the temporary mounting position C, the liquid crystal display substrate 1
The backup body 43 receives the portion of the second component 1 to be temporarily mounted from below and sandwiches the liquid crystal display substrate 12 and the component 1 with the temporary mounting tool, so that the component 1 is reliably pressed and heated. , So that the temporary mounting of the component 1 can be stably and favorably achieved. Here again, the cameras 45, 46 are provided above or below the backup body 43.

Each of the cameras 4, 5, 45, and 46 is used to perform image processing on the captured image data to recognize the position, and it is preferable that the image data can be taken out as an electric signal. In addition, the image pickup and the image pickup signal may be converted into an electric signal at any time. Therefore, various types having different conversion points and conversion methods can be adopted.

The mounting device 11 having the above-described configuration copes with the positional expansion that occurs when the component 1 is temporarily mounted due to thermal expansion of the ball screw 6 or some other reason. The calibration method of time is adopted. This will be described with reference to FIGS. The calibration method of this example has the basic steps of the schematic steps shown in FIGS. In FIG. 1A, the position of the temporary mounting position C is recognized on the temporary mounting portion 13 side. In FIG. 1 (b), the position of the component 1 is recognized at a predetermined position B during carrying to the temporary mounting position C. Then, the carrying position to the temporary mounting position C is corrected by ΔL0 based on the position information P2 at this time. In Fig. 1 (c), the carrying position C1 corrected by ΔL0
The component 1 is carried and initially positioned, and the position of the initially positioned component 1 is recognized. Here, as shown in FIG. 3, the deviation amount of the position information P1 for recognizing the position of the initially positioned component 1 with respect to the reference position information P0 for recognizing the temporary mounting position C is determined and is set as the calibration amount ΔL. .

More specifically, for example, the component 1 supplied to the receiving position D by the component take-out tool 3 is held by the temporary mounting tool 2 and carried to the temporary mounting position C of the temporary mounting portion 13, and the liquid crystal positioned there. The liquid crystal display substrate 12, which is an example of the equipment base material, is temporarily attached to the liquid crystal display substrate 12 and is subsequently attached to the main attachment portion 14 for actual attachment. Prior to this temporary mounting, the position of the component 1 held in the temporary mounting tool 2 is recognized at a predetermined position B as shown in FIG. 1B, and the predetermined position B is determined based on the position information P2. The carrying position of the component 1 to the temporary mounting position C, that is, the carrying target position, which is determined by the known positional relationship between the temporary mounting position C and the temporary mounting position C, is initially corrected. Then, FIG.
As shown in (c), the initial corrected position after the initial correction of ΔL0
The component 1 is carried to C1 and initially positioned on the temporary mounting portion 13, and the position of the initially positioned component 1 is recognized to obtain position information P1 on the image data schematically shown in FIG. Along with this, or in advance, the position of the temporary mounting position C in the temporary mounting portion 13 is recognized in the state as shown in FIG. 1A to obtain the position information P0 shown in FIG.

From the position information P1 obtained by recognizing the position of the initially positioned component 1 and the position information P0 obtained by recognizing the temporary mounting position C, the temporary mounting position C of the initially positioned component 1 is obtained.
The deviation amount ΔL from is determined, and the deviation amount at that time is set as the calibration amount ΔL. Therefore, in the subsequent temporary mounting, the carrying position of the component 1 from the predetermined position B to the temporary mounting position C is corrected to the calibration position C2 in which the initial correction amount ΔL0 and the set calibration amount ΔL are corrected. 1 is carried, positioned and used for the temporary mounting. In FIG. 3, the temporary mounting head 36 is
Since the component 1 is moved in the XY directions to perform positioning and position correction, the calibration amount corresponding to the displacement amount ΔL is set as two calibration amounts ΔX and ΔY in the XY2 directions.

However, the correction of the calibration amount ΔL is performed by correcting the origin position of the coordinate when the component 1 is positioned at the temporary mounting position C, and the initial correction amount ΔL0 of the initial correction amount ΔL0 is corrected each time the component 1 is temporarily mounted. You may only correct it,
In this way, highly accurate positioning and temporary mounting of the component 1 at the temporary mounting position can be performed in the same procedure as the normal correction operation.

The position recognition of the component 1 at the predetermined position B is carried out by image processing of image data obtained by the camera 5 capturing the component 1 carried by the temporary mounting tool 2. Temporary mounting position
The position recognition of C is performed by performing image processing on the image data of the position mark 43a provided on the upper surface of the backup body 43 from below using the transparent body 43 of the backup body 43. However, instead of this, the mounting position mark of the component 1 provided on the liquid crystal display substrate 12 positioned at the temporary mounting position C may be recognized by the cameras 45, 46 and the like. The position of the component 1 initially positioned at the temporary mounting position C is recognized by performing image processing on the image data captured from below by the camera 46. Depending on the case, the position of the position mark 43a of the temporary mounting position C or the component mounting position mark of the liquid crystal display substrate 12 which is changed to the position mark 43a can be recognized by the camera 45. The component 1 initially positioned at the temporary mounting position C corresponds to retracting the camera 45 from the temporary mounting position C to another as shown in FIG.
An image is picked up by 6 to recognize the position. However, instead of this, the camera 5 is integrated with the temporary mounting tool 2.
The position of the component 1 at the predetermined position B may be recognized by reciprocating in the Y direction, and the position mark 43a or the component mounting position mark at the temporary mounting position C may be recognized.

As described above, the predetermined position B of the component 1 is held before the component 1 held by the temporary mounting tool 2 is carried from the predetermined position B to the temporary mounting position C of the temporary mounting portion 13 and temporarily mounted. Predetermined position B based on the position information P2 recognized in
By carrying the component 1 to the initial correction position C1 which is the initial correction of the carrying position determined from the positional relationship information between the temporary mounting position C and the temporary mounting position C, and performing the initial positioning, the component 1 before the predetermined position B can be moved as in the conventional case. It is possible to avoid that the handling position of A affects the positioning accuracy at the temporary mounting position C.
In addition, the temporary mounting of the component 1 positioned at the initial correction position C1 is carried out based on the position information P1 for recognizing the position of the component 1 initially carried by carrying the initial correction position C1 and the position information P0 for recognizing the temporary mounting position C. The amount of deviation from the position C is determined, and the amount of deviation at that time is set as the calibration amount ΔL or ΔX, ΔY, and thereafter, during temporary mounting, in addition to the initial correction amount ΔL0, the set amount of calibration amount ΔL is added. By carrying out the correction of 1., when carrying the component 1 from the predetermined position B to the temporary mounting position C, it is possible to cancel any positional deviation that occurs continuously for some reason including temperature change. Therefore, by such calibration, the component 1 can be positioned at the temporary mounting position C with high accuracy and used for temporary mounting.

As a calibration apparatus that achieves such a method, as shown by the reference numeral 101 in FIG. 2, a component 1 that is supplied and is received at the receiving position B in FIG. 1B.
1 is equipped with a component temporary mounting means 51 which is held by the temporary mounting tool 2 with the movement of the temporary mounting head 36 and the X-direction table 35 and carried to the temporary mounting position C of the temporary mounting portion 13 as shown in FIG. , The component 1 carried to the temporary mounting section 13
Is temporarily mounted on the liquid crystal display substrate 12 as a liquid crystal device base material, and is ready for the next main mounting. Further, as shown in FIGS. 1 (b) and (c), the temporary mounting tool 2 is held at a predetermined position B on the carrying route of the component 1 from the receiving position D of the component 1 to the temporary mounting position C shown in FIG. The position recognition means 52 using the camera 5 for recognizing the position of the component 1
The position of the component 1 to be carried to the temporary mounting position C for the temporary mounting is recognized at the predetermined position B whenever necessary. In addition to this, the temporary mounting portion 13 is provided with position recognition means 53 using the cameras 45, 46 and the like as shown in FIGS. 1A and 1C for recognizing the position of the temporary mounting position C. Temporary mounting position C
Position recognition.

1 when the temporary mounting position C is the position mark 43a of the backup body 43 or the like and the position is unchanged.
The position information that has been recognized once may be used repeatedly, and if there is a changing time point or a timing that is likely to change, it is possible to respond to the change by re-recognizing the position at that time. When targeting the temporary mounting position mark of a liquid crystal device substrate such as the liquid crystal display substrate 12, the positioning to the temporary mounting position C is not always normal, so the recognition position information of the temporary mounting position C is required. It is preferable to recognize the position every time.

The calibration device 101 also includes
At the temporary mounting position C shown in FIG. 1, the above-described camera 46 shown in FIGS. 1A and 1C for recognizing the position of the component 1 carried by the temporary mounting head 36 of the temporary mounting means 51 is used. The position recognizing means 54 is provided to recognize the position of the component 1 carried to the temporary mounting position C whenever necessary.

Further, the carrying position C1 of the component 1 from the predetermined position B to the temporary mounting position C, which is determined by the positional relationship with the temporary mounting position C, based on the position information P2 of the position recognition of the component 1 at the predetermined position B. Initially correct the part 1 at this initial corrected position C1.
Initial positioning control means 55 for carrying and positioning
And the positional information C for recognizing the position of the initially positioned component 1 and the position information for recognizing the temporary mounting position C of the temporary mounting portion 13, the deviation amount ΔL from the temporary mounting position C of the initially positioned component 1 is calculated. A calibration amount setting means 56 for determining and setting the displacement amount at that time as the calibration amounts ΔL or ΔX, ΔY is provided, and such initial positioning and determination and setting of the calibration amount by such initial positioning are performed whenever necessary. .

Further, the calibration control means 57 for carrying and positioning the component 1 at the calibration position C2 in which the initial correction amount ΔL0 and the set calibration amount ΔL are corrected for provisional mounting.
While not only the recognition position information P2 of the component 1 at the predetermined position B, but also the thermal expansion of the ball screw 6 when carrying and positioning to the temporary mounting position C based on this, and while continuing for some other reason. Also, the position correction that reflects the amount of change in the deviation from the temporary mounting position C of the component 1 that occurs stepwise can be automatically achieved at high speed and stably for a long time according to a preset program.

Here, the setting of the calibration amounts ΔL or ΔX and ΔY as described above is performed by the component temporary mounting means 51.
If the calibration amount ΔL or ΔX, ΔY is set from the beginning of the operation, it is possible to cope with the gradual change in the positional deviation that may occur from the beginning if the operation is performed at the start of each operation. Further, the calibration amounts ΔL, ΔX, and ΔY can be set when they correspond to predetermined conditions. For example,
By setting the condition that the average amount of positional deviation that lasts for a certain period of time will change step by step, you can simply reset the calibration amount ΔL or ΔX, ΔY at the timing that matches the condition. It is possible to deal with such a change in the amount of positional deviation.

The conditions set in advance correspond to temperature changes above a predetermined level, changes to the extent that calibration is required, for example, the elapsed time from the start of every operation when temperature changes are expected, and these. It is effective that at least one of the set cycle or number and the elapsed time corresponding to the halfway stop time during each operation are subtracted. The more setting conditions, the more finely the changes in the positional deviation amount are dealt with. can do.

In order to satisfy these requirements, the calibration device 101 is provided with a control means for setting the calibration amount ΔL at a predetermined timing.
Alternatively, it can be executed at any timing set later. This includes the calibration control means 5
7 can be shared, or a dedicated one can be adopted.

In addition to the above, the mounting apparatus 11 of the present embodiment can also adopt the following calibration method. This will be described with reference to FIGS. The calibration method of this example is shown in FIG.
(I), the basic steps are as shown in FIG. In FIG. 4 (I) (a), the temporary mounting position is on the temporary mounting portion 13 side.
The position of C is recognized. In FIGS. 4 (I) and (b), as indicated by the solid line, the position of the component 1 held by the temporary mounting tool 2 is recognized at a predetermined position B during carrying to the temporary mounting position C. Further, as indicated by a broken line, the carrying position C without correction of the component 1 held by the temporary mounting tool 2 from the predetermined position B to the temporary mounting position C determined by the positional relationship with the temporary mounting position C is shown.
6 and carry out temporary positioning and position recognition, and
The position information P01 shown in (a) is obtained, and the position information P01 is obtained.
The calibration reference position C01 shown in FIG. 6A is determined from the shift amount ΔL1 with respect to the position information P0 for which the temporary mounting position C of 01 is recognized. In FIGS. 4 (I) and (c), based on the position information P0 for recognizing the temporary mounting position C and the position information P2 for recognizing the position of the component 1 held by the temporary mounting tool 2 at the predetermined position B, Initially correct the carrying position to the temporary mounting position C determined by the positional relationship with the temporary mounting position C by ΔL0. Further, the component 1 is carried to the initial corrected position C1 which has been initially corrected and initially positioned, the position of the initially positioned component 1 is recognized, and the position information shown in FIG.
Got P3. Based on the position information P3 of the initially positioned component 1, the deviation amount of the initially positioned component 1 from the calibration reference position C01 is determined, and the deviation amount at this time is set as the calibration amount ΔL2.

Explaining with reference to FIGS. 4 to 6, for example, the component 1 supplied to the receiving position D by the component take-out tool 3 shown in FIG. 1 is temporarily attached as shown in FIG.
Held at a predetermined position B, and then the temporary mounting position C of the temporary mounting portion 13
In order to carry it temporarily and to temporarily mount it on the liquid crystal display substrate 12 which is one example of the liquid crystal device base material located there, first, the temporary mounting tool 2 is moved to a predetermined position shown by a solid line in FIGS. 4 (I) and (b). The component 1 held in B is moved to the temporary mounting position C, which is determined by the positional relationship between the predetermined position B and the temporary mounting position C, up to the carry position C3 without correction by a broken line in FIG. 4 (I) (b). Carry and provisionally position as shown.

Next, the position information P01 shown in FIG. 6A and the position mark 4 shown in FIGS. 4I and 4A on the image data in which the position of the component 1 temporarily positioned at the temporary mounting position C is recognized.
3a or the like, the position of the temporary mounting position C is recognized, or the position information P0 shown in FIG. 6 (a), which has been previously recognized, is used for temporary positioning shown by the broken line in FIG. 4 (I) (a). Part 1
Deviation Δ from the temporary mounting position C shown in FIG.
L1 or ΔX1, ΔY1 is determined, and the shift position at that time is set as the calibration reference position C01 shown in FIGS. 4 (I) and 6 (a).

In this way, the component 1 held by the temporary mounting tool 2 is carried again to the temporary mounting position C via the predetermined position B, and the position of the component 1 is recognized at the predetermined position B. Based on the position information P2 at that time, the temporary mounting position C
The carrying position of the component 1 from the predetermined position B to the temporary mounting position C, which is determined by the positional relationship with, is initially corrected by ΔL0, and the component 1 is shown in this initially corrected initial corrected position C1 in FIG. 4 (I) (c). And carry out initial positioning at the temporary mounting position C. Next, based on the position information P3 shown in FIG. 6 (b) in which the position of the initially positioned component 1 is recognized, the calibration reference position C01 of the initially positioned component 1 as shown by the solid line in FIG. 4 (c). From the predetermined correction amount ΔL0 for the carrying position of the component 1 from the predetermined position B to the temporary mounting position C in the subsequent temporary mounting.
Then, the component 1 is carried to the calibration position C4 where the correction of the set calibration amount ΔL2 has been performed, and the component 1 is positioned and provided for the temporary mounting. As in the case of the previous example, the calibration amount ΔL2 is as shown in FIG. 6 (b).
ΔX2-ΔX1 and ΔY2-ΔY1 in the XY2 directions.

However, the calibration amount ΔL2
Similarly to the case of the calibration amount ΔL described above, the correction is performed by correcting the origin position of the coordinates when the component 1 is positioned at the temporary mounting position C, and the initial correction amount is set for each temporary mounting of the component 1. Only ΔL0 may be corrected, and in this way, highly accurate positioning and temporary mounting of the component 1 can be performed in the same procedure as a normal correction operation.

In this way, the temporary mounting tool 2 is placed at the predetermined position B.
To obtain the position recognition data P01 by temporarily carrying the component 1 held by the user to the carry position C3 without correction to the temporary mount position C determined by the positional relationship between the predetermined position B and the temporary mount position C. Fig. 4 (I) at that time
At the position of the component 1 shown by the broken line in (b), the total displacement between the control side and the mechanism side where the temporary mounting tool 2 is moved from the predetermined position B to the carrying position C3 from the temporary mounting position C, specifically, The habits of the mechanism side, such as inclinations of the temporary mounting tool 2 and the component take-out head 34 having the temporary attachment tool 2, habits influenced by wear and deformation over time, which cannot be set in advance on the control side,
It is reflected as a deviation amount ΔL1 from the temporary mounting position C.
As a result, from the position information P01 for recognizing the position of the temporarily positioned component 1 and the position information P0 for recognizing the position of the temporary mounting position C indicated by the broken line in FIGS. 4 (I) and (b), the deviation amount ΔL1 and The shift positions ΔX1 and ΔY1 can be determined as a result of the mechanism-specific occurrence. Therefore, by setting the determined shift positions ΔX1 and ΔY1 as the calibration reference position C01, the calibration operation when the component 1 at the predetermined position B is subsequently carried to the temporary mounting position for positioning and provisional mounting is performed. With this, it is possible to correct and correct the positional deviation that occurs for each mechanism, regardless of the cause.

At the same time, the amount of deviation of the initially positioned component 1 from the calibration reference position C01 is determined based on the position information P3 for recognizing the position of the initially positioned component 1 at the ΔL0 initial correction position C1. Then, the deviation amount at that time is set as the calibration amount ΔL2 or ΔX2-ΔX1, ΔY2-ΔY1,
By carrying out position correction at the time of subsequent temporary mounting, when carrying the component 1 from the predetermined position B to the temporary mounting position C, all of the steps that occur gradually while continuing for some reason including temperature change In addition to the above example of canceling the change in the positional deviation, it is also possible to cancel the positional deviation tendency of each mechanism side that is initially held for some reason or that occurs over time. It can be positioned with high accuracy and used for temporary mounting.

4 (II) is a side view of FIG. 4 (I), and the camera 5 is moved integrally with the temporary mounting head 36 in the X direction so that both the predetermined position B and the temporary mounting position C are moved. It is also used for recognizing the position of component 1. Further, as shown in FIG. 4 (II), the position recognition of the component 1 at the temporary mounting position C is performed by imaging the position mark of the component 1 at the position where the backup body 43 is removed. This is because the backup body 43 is made of transparent quartz glass but has a certain refractive index for light so that it does not affect the position recognition. Accordingly, at the predetermined position B, the position of the component 1 is recognized in the same manner as at the temporary mounting position C by picking up an image of a position mark provided in a biased manner. For this reason, the backup body 43 is cut into a strip shape rather than a circular shape when viewed from above. The same can be applied to the examples shown in FIGS.

As shown in FIG. 5, the calibration device 101 for achieving the above method holds the supplied component 1 on the temporary mounting tool 2 and carries it to the temporary mounting position C of the temporary mounting portion 13. The component temporary mounting means 51 having the temporary mounting head 36 is provided, and the component 1 carried to the temporary mounting position C is temporarily mounted on the liquid crystal display substrate 12 so as to be used for the next main mounting. At this time, a position recognizing means 52 is provided at a predetermined position B set on the way of the carrying path of the component 1 from the receiving position D of the component 1 to the temporary mounting position C by the temporary mounting tool 2 and the temporary mounting tool 2 is The position of the held component 1 is recognized. Further, at the temporary mounting position C, position recognition means 53 for recognizing the position of the temporary mounting position C, and position recognition means for recognizing the position of the temporary mounting head 36 and the component 1 carried by the temporary mounting tool 2 at the temporary mounting position C are recognized. 54 is provided.

Further, the component 1 at the predetermined position B is temporarily mounted at the position C.
Of the temporary mounting position C, the temporary positioning control means 61 for carrying the temporary positioning to the temporary mounting position C without correction to the temporary mounting position C, the positional information P01 for recognizing the position of the temporarily positioned component 1, and the temporary mounting position C. The displacement amount ΔL1 of the temporarily positioned component 1 from the temporary mounting position C is determined from the position information P0 obtained by the position recognition, and the displacement position ΔX at this time is determined.
1. Based on the calibration reference position setting means 62 for setting ΔY1 as the calibration reference position C01 and the position information P2 for recognizing the position of the component 1 at the predetermined position B,
An initial positioning control means 63 for carrying out and correcting the carrying position of the component 1 from the predetermined position B determined by the positional relationship with the temporary mounting position C to the temporary mounting position C by ΔL0 and carrying and positioning the component 1 at the initial corrected position C1. Based on the position information P3 obtained by recognizing the position of the initially positioned component 1, the deviation amount from the calibration reference position C01 of the initially positioned component 1 is determined, and the deviation amount at that time is determined as the calibration amount ΔL2 or ΔX2. -Calibration amount setting means 64 for setting as ΔX1, ΔY2-ΔY1 and the component 1 at the calibration position C4 where the initial correction amount and the set calibration amount are corrected.
A calibration control means 65 is provided for carrying, positioning, and provisionally mounting.

As a result, the above-mentioned calibration method corresponding to the peculiarities which occur individually on the mechanism side in the initial stage and over time can be automatically achieved at high speed and stably for a long period of time in accordance with a preset program.

It is effective to set the calibration reference position as described above at least at one timing when the reference position is arbitrarily measured in addition to the initial operation of the mechanism, the start of each operation, and the operation operation. Therefore, the more opportunities to set the calibration reference position, the more finely the individual mechanism side can cope with the habit of positional deviation that occurs for some reason. Therefore, if the apparatus is provided with a control means for setting the calibration reference position at a predetermined timing, it is preferable that the apparatus can be executed at any timing set in advance or later. Control means 6
5 may be shared, or a dedicated one may be adopted.

According to the method and apparatus as described above, the positional accuracy of the temporary mounting is as shown in FIG. 10 (a), the positional deviation after 3 hours from the initial operation is 0 μm in the X direction and Y.
Direction becomes 0.2 μm, and as shown in FIG. 10 (b), even if the temperature changes from 18 ° C to 23 ° C and 28 ° C, the positional deviation due to the temperature change occurs in both X and Y directions. It was within 0.5 μm, and highly accurate position accuracy was obtained.

[0070]

According to one feature of the present invention, as is clear from the above description, the offset amount of the component at the predetermined position affects the positioning accuracy at the temporary mounting position as in the prior art. However, when carrying a part from the predetermined position to the temporary mounting position, it will cancel any positional deviation that occurs stepwise even if it continues for some reason including temperature change, so the component will be moved to the temporary mounting position. It can be positioned with high accuracy and used for temporary mounting.

According to another feature of the present invention, the component held by the temporary mounting tool at the predetermined position can be carried to the temporary mounting position determined by the positional relationship between the predetermined position and the temporary mounting position without correction. Comprehensive displacement between the control side that moved the temporary mounting tool from the predetermined position to the temporary mounting position and the mechanism side that is moved from the position of the component when it was carried to the position and temporarily positioned, The habits of the mechanism side, which cannot be set on the control side, such as the inclination of the temporary mounting tool and the component mounting head that holds it, and the habits that are affected by wear and deformation over time, can be deviated from the temporary mounting position. It is reflected in the quantity, and by recognizing the position of the temporarily positioned component,
Such displacement and displacement position can be determined as a result of each mechanism, and this is set as the calibration reference position, and thereafter, the component at the predetermined position is carried to the temporary mounting position for positioning and temporarily mounted. It is possible to reflect the positional deviation that occurs in each mechanism differently in the calibration when it is used, regardless of its cause.

At the same time, the deviation amount of the recognition position of the initially positioned component from the calibration reference position is determined and used as the calibration amount for subsequent position correction, so that the component can be carried from the predetermined position to the temporary mounting position. Therefore, in addition to canceling the change in the positional deviation that occurs due to some reason such as temperature change, it also cancels out the positional deviation tendency of each mechanism side that has been held from the beginning for some reason or that occurs over time. Therefore, it is possible to position the components with higher accuracy and to temporarily mount them.

[Brief description of drawings]

FIG. 1 is an operation explanatory diagram of a mounting apparatus that mounts a component on a liquid crystal device system base material that employs a calibration method and apparatus during temporary mounting of a component according to an embodiment of the present invention.

FIG. 2 is a control block diagram of the apparatus of FIG.

FIG. 3 is a schematic diagram showing image data when recognizing the position of a component at the temporary mounting position of FIG.

FIG. 4 is an operation explanatory diagram of a mounting apparatus that mounts a component on a liquid crystal device base material that employs the calibration method and apparatus for temporarily mounting a component according to another example of the embodiment of the present invention.

5 is a control block diagram of the apparatus of FIG.

6A and 6B show image data at the time of recognizing the position of the component at the temporary mounting position of FIG. 4, where FIG. 6A is a schematic diagram during temporary positioning, and FIG. 6B is a schematic diagram during initial positioning.

FIG. 7 is a perspective view showing the entire mounting apparatus according to the present embodiment.

FIG. 8 is a perspective view showing a component pickup head of the apparatus of FIG.

9 is a side view of a temporary mounting portion of the apparatus of FIG.

FIG. 10 shows positional accuracy during temporary mounting according to the present embodiment,
(A) is a graph showing a relationship between time and a shift amount, and (b) is a graph showing a relationship between temperature and a shift amount.

FIG. 11 is a graph showing a positional accuracy at the time of temporary mounting in a conventional mounting apparatus, (a) is a graph showing a relationship between time and a shift amount,
(B) is a graph showing the relationship between temperature and shift amount.

[Explanation of symbols]

1 part 2 Temporary mounting tool 5,45,46 camera 11 Mounting device 36 Temporary mounting head 51 Parts temporary mounting means 52, 53, 54 Position recognition means 55 Initial positioning control means 56, 64 Calibration amount setting means 57, 65 Calibration control means 61 Temporary positioning control means 62 Calibration reference position setting means 101 Calibration device B predetermined position C Temporary mounting position

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Ryoichiro Katano             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Yasuhiro Noma             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. (72) Inventor Akemi Mukai             1006 Kadoma, Kadoma-shi, Osaka Matsushita Electric             Sangyo Co., Ltd. F term (reference) 2H088 FA18 FA19 FA20 FA24 FA30                       HA05 MA16                 5E313 AA00 FG01                 5F044 KK06 PP17

Claims (10)

[Claims] 1. When temporarily holding a component to be supplied by holding the supplied component with a temporary mounting tool and carrying it to a temporary mounting position of a temporary mounting portion and temporarily mounting it on a liquid crystal device base material located there. In the calibration method described in (1), based on the position information that the position of the component held in the temporary mounting tool is recognized at the predetermined position, the component is moved to the temporary mounting position determined by the positional relationship with the temporary mounting position at the predetermined position. Initially position the parts by carrying the parts to the initial correction position where the carry position is initially corrected and performing initial positioning, and the position information of the position of the initially positioned parts and the position information of the temporary mounting position of the temporary mounting part. The amount of deviation of the component from the temporary mounting position is determined, and the amount of deviation at that time is set as the calibration amount. Chi carry position for each,
A calibration method at the time of temporary mounting of a component, characterized in that the component is carried and positioned at a calibration position where the initial correction amount and the set calibration amount are corrected, and the component is temporarily mounted. 2. When temporarily holding a component to be supplied, holding the component with a temporary mounting tool, carrying it to a temporary mounting position of a temporary mounting portion, and temporarily mounting it on a liquid crystal device system base material located there to be used for actual mounting. In the calibration method described in (1), the component held by the temporary mounting tool at a predetermined position that is set in the path for carrying the component and that recognizes the position of the component is temporarily mounted according to the positional relationship between the predetermined position and the temporary mounting position. Displacement of the provisionally positioned component from the temporary mounting position is based on the position information of the provisionally positioned component and the position information of the provisionally positioned component. The position is determined, the displacement position at that time is set as the calibration reference position, and the temporary mounting is performed based on the position information of the position of the component held in the temporary mounting tool at the predetermined position. Initially correct the carrying position of the component from the predetermined position determined by the positional relationship with the placement to the temporary mounting position, carry the component to this initial correction position for initial positioning, and then use the position information obtained by recognizing the position of this initially positioned component. Based on this, the amount of deviation of the initially positioned component from the calibration reference position is determined, and the amount of deviation at that time is set as the calibration amount,
Thereafter, at the time of temporary mounting, the component is carried from the predetermined position to the temporary mounting position, and the component is carried to the calibration position where the initial correction amount and the set calibration amount are corrected, and the temporary mounting is performed. A calibration method for temporarily mounting a component, which is characterized by being used for 3. The calibration reference position is set by
The calibration method according to claim 2, wherein the calibration is performed at the initial operation of the mechanism, at the start of each operation, and at least one timing when the reference position is arbitrarily measured separately from the operation operation. 4. The calibration method at the time of temporary mounting of the component according to claim 1, wherein the setting of the calibration amount is performed at the start of each operation of the temporary component mounting means. 5. The calibration method at the time of provisional mounting of a component according to claim 1, wherein the setting of the calibration amount is performed when a predetermined condition is satisfied. 6. The preset conditions are a temperature change above a predetermined value, an elapsed time from the start of each operation, a period or number of times set corresponding to these, an elapsed time commensurate with a halfway stop time during each operation. 6. The calibration method for temporarily mounting a component according to claim 5, wherein the calibration is at least one of 7. A temporary component holder for holding a component to be supplied in a temporary attachment tool, carrying it to a temporary attachment position of a temporary attachment portion, temporarily attaching it to a liquid crystal device system base material, and providing it for the next main attachment. The mounting means, the position recognizing means for recognizing the position of the component held by the temporary mounting tool at a predetermined position of the component carrying path from the component receiving position to the temporary mounting position, and the temporary mounting part for temporary mounting. Based on position recognition means for recognizing the position of the mounting position, position recognition means for recognizing the position of the component carried by the mounting head at the temporary mounting position, and position information for recognizing the position of the component at a predetermined position, Initial positioning control means for initially correcting the carrying position of the component to the temporary mounting position determined by the positional relationship with the temporary mounting position at the predetermined position so that the component is carried and positioned at the initial correction position, The positioned parts A calibration that determines the amount of deviation of the initially positioned component from the temporary mounting position based on the position information for which the position has been recognized and the position information for which the temporary mounting position of the temporary mounting portion has been recognized, and sets that displacement amount as the calibration amount. Calibration amount setting means and the calibration position where the component temporary mounting means carries out the component from the predetermined position to the temporary mounting position and temporarily mounts it, and performs the correction by the initial correction amount and the set calibration amount. A calibration device at the time of temporary mounting of the component, comprising: a calibration control unit that carries the component, positions it, and is used for temporary mounting. 8. A component provisional package for holding a supplied component in a temporary mounting tool, carrying it to a temporary mounting position of a temporary mounting portion, temporarily mounting it on a liquid crystal device system base material, and preparing it for the next main mounting. The mounting means, the position recognizing means for recognizing the position of the component held by the temporary mounting tool at the predetermined position set in the carrying path of the component from the component receiving position to the temporary mounting position, and the temporary mounting portion. Position recognizing means for recognizing the position of the temporary mounting position, position recognizing means for recognizing the position of the component carried by the component mounting head at the temporary mounting position, and the positional relationship between the component at the predetermined position and the temporary mounting position. Temporary positioning based on temporary positioning control means for carrying to a temporary mounting position and carrying out temporary positioning, position information for recognizing the position of the temporarily positioned component, and position information for recognizing the position of the temporary mounting position. Shi The calibration reference position setting means for determining the deviation amount of the component from the temporary mounting position and setting the displacement position at this time as the calibration reference position, and the component temporary mounting means for carrying the component from the predetermined position to the temporary mounting position. At the time of temporary mounting, the initial position is corrected by correcting the carrying position of the component from the predetermined position determined by the positional relationship with the temporary mounting position to the temporary mounting position on the basis of the position information obtained by recognizing the position of the component at the predetermined position. Based on the initial positioning control means for carrying and positioning the part to the correction position and the position information for recognizing the position of the initially positioned part, the amount of deviation of the initially positioned part from the calibration reference position is determined, and at that time, Calibration amount setting means for setting a deviation amount as a calibration amount, the initial correction amount and the set carrier. A calibration device at the time of temporary mounting of a component, comprising: a calibration control unit that carries the component to a calibration position that has been corrected by a correction amount and is positioned and provided for temporary mounting. . 9. The calibration device according to claim 8, wherein the calibration control means sets the calibration reference position at a predetermined timing. 10. The calibration device for provisionally mounting a component according to claim 7, wherein the calibration control means sets the calibration amount at a predetermined timing.