JP2003344797A5 - - Google Patents
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- Publication number
- JP2003344797A5 JP2003344797A5 JP2002154186A JP2002154186A JP2003344797A5 JP 2003344797 A5 JP2003344797 A5 JP 2003344797A5 JP 2002154186 A JP2002154186 A JP 2002154186A JP 2002154186 A JP2002154186 A JP 2002154186A JP 2003344797 A5 JP2003344797 A5 JP 2003344797A5
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- scanning mechanism
- rotation axis
- optical
- scanning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims 9
- 230000003287 optical effect Effects 0.000 claims 6
- 238000005530 etching Methods 0.000 claims 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002154186A JP2003344797A (ja) | 2002-05-28 | 2002-05-28 | 光走査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002154186A JP2003344797A (ja) | 2002-05-28 | 2002-05-28 | 光走査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003344797A JP2003344797A (ja) | 2003-12-03 |
| JP2003344797A5 true JP2003344797A5 (enExample) | 2005-09-22 |
Family
ID=29771041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002154186A Pending JP2003344797A (ja) | 2002-05-28 | 2002-05-28 | 光走査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003344797A (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4262583B2 (ja) | 2003-11-26 | 2009-05-13 | オリンパス株式会社 | 二次元光偏向器 |
| JP2008298686A (ja) * | 2007-06-01 | 2008-12-11 | Sanyo Electric Co Ltd | ビーム照射装置およびレーザレーダ |
| JP2008298652A (ja) * | 2007-05-31 | 2008-12-11 | Sanyo Electric Co Ltd | ビーム照射装置およびレーザレーダ |
| JP2009014698A (ja) * | 2007-06-06 | 2009-01-22 | Sanyo Electric Co Ltd | ビーム照射装置およびレーザレーダ |
| JP2009014639A (ja) * | 2007-07-09 | 2009-01-22 | Sanyo Electric Co Ltd | ビーム照射装置およびレーザレーダ |
| JP5125409B2 (ja) * | 2007-10-26 | 2013-01-23 | セイコーエプソン株式会社 | 画像表示装置 |
| JP5099020B2 (ja) * | 2009-01-21 | 2012-12-12 | セイコーエプソン株式会社 | 光走査装置および画像形成装置 |
| JP6069628B2 (ja) * | 2012-12-03 | 2017-02-01 | 北陽電機株式会社 | 偏向装置、光走査装置及び走査式測距装置 |
| JP6105518B2 (ja) | 2014-05-30 | 2017-03-29 | シナノケンシ株式会社 | 三次元駆動装置 |
-
2002
- 2002-05-28 JP JP2002154186A patent/JP2003344797A/ja active Pending
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