JP2003344797A5 - - Google Patents

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Publication number
JP2003344797A5
JP2003344797A5 JP2002154186A JP2002154186A JP2003344797A5 JP 2003344797 A5 JP2003344797 A5 JP 2003344797A5 JP 2002154186 A JP2002154186 A JP 2002154186A JP 2002154186 A JP2002154186 A JP 2002154186A JP 2003344797 A5 JP2003344797 A5 JP 2003344797A5
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JP
Japan
Prior art keywords
scanning
scanning mechanism
rotation axis
optical
scanning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002154186A
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Japanese (ja)
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JP2003344797A (en
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Publication date
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Priority to JP2002154186A priority Critical patent/JP2003344797A/en
Priority claimed from JP2002154186A external-priority patent/JP2003344797A/en
Publication of JP2003344797A publication Critical patent/JP2003344797A/en
Publication of JP2003344797A5 publication Critical patent/JP2003344797A5/ja
Pending legal-status Critical Current

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Claims (4)

光を反射させるミラー部を有し、入射光軸に対して少なくとも2方向に光を偏向可能な光走査装置において、
前記ミラー部を保持し、該ミラー部の略ミラー平面上に回転軸を有した第1の走査機構と、
この第1の走査機構を保持し、該第1の走査機構の回転軸と略垂直かつ交差する回転軸を有した第2の走査機構とを具備し、走査中心において、前記ミラー部のミラー平面を、前記第1及び第2の走査機構の回転軸からなる平面に対して、前記第1の走査機構の回転軸回りに、略45度回転した平面上に設けたことを特徴とする光走査装置。
In an optical scanning device having a mirror part for reflecting light and capable of deflecting light in at least two directions with respect to an incident optical axis,
A first scanning mechanism that holds the mirror unit and has a rotation axis on a substantially mirror plane of the mirror unit;
A second scanning mechanism that holds the first scanning mechanism and has a rotation axis that is substantially perpendicular to and intersects with the rotation axis of the first scanning mechanism. Is provided on a plane rotated approximately 45 degrees around the rotation axis of the first scanning mechanism with respect to the plane consisting of the rotation axes of the first and second scanning mechanisms. apparatus.
前記入射光軸は、前記第2の走査機構の、回転軸と略一致するように配置したことを特徴とする請求項1記載の光走査装置。 The optical scanning device according to claim 1, wherein the incident optical axis is arranged so as to substantially coincide with a rotation axis of the second scanning mechanism. 前記第1及び第2の走査機構は、少なくとも一方の走査機構を共振型ガルバノスキャナで形成したことを特徴とする請求項1又は2記載の光走査装置。 3. The optical scanning device according to claim 1, wherein at least one of the first and second scanning mechanisms is formed by a resonance type galvano scanner. 前記第1の走査機構は、単結晶シリコン基板からエッチングにより一体加工された可動板と、The first scanning mechanism includes a movable plate integrally processed by etching from a single crystal silicon substrate,
前記可動板を揺動可能に支持するトーションバーと、A torsion bar for swingably supporting the movable plate;
前記トーションバーを支持する支持枠と、A support frame for supporting the torsion bar;
を有することを特徴とする請求項1記載の光走査装置。The optical scanning device according to claim 1, further comprising:
JP2002154186A 2002-05-28 2002-05-28 Optical scanner Pending JP2003344797A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002154186A JP2003344797A (en) 2002-05-28 2002-05-28 Optical scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002154186A JP2003344797A (en) 2002-05-28 2002-05-28 Optical scanner

Publications (2)

Publication Number Publication Date
JP2003344797A JP2003344797A (en) 2003-12-03
JP2003344797A5 true JP2003344797A5 (en) 2005-09-22

Family

ID=29771041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002154186A Pending JP2003344797A (en) 2002-05-28 2002-05-28 Optical scanner

Country Status (1)

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JP (1) JP2003344797A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4262583B2 (en) 2003-11-26 2009-05-13 オリンパス株式会社 2D optical deflector
JP2008298686A (en) * 2007-06-01 2008-12-11 Sanyo Electric Co Ltd Beam irradiation device and laser radar
JP2009014698A (en) * 2007-06-06 2009-01-22 Sanyo Electric Co Ltd Beam irradiation device and laser radar
JP2008298652A (en) * 2007-05-31 2008-12-11 Sanyo Electric Co Ltd Beam irradiation device and laser radar
JP2009014639A (en) * 2007-07-09 2009-01-22 Sanyo Electric Co Ltd Beam radiation unit and laser radar
JP5125409B2 (en) * 2007-10-26 2013-01-23 セイコーエプソン株式会社 Image display device
JP5099020B2 (en) * 2009-01-21 2012-12-12 セイコーエプソン株式会社 Optical scanning apparatus and image forming apparatus
JP6069628B2 (en) * 2012-12-03 2017-02-01 北陽電機株式会社 Deflection device, optical scanning device, and scanning distance measuring device
JP6105518B2 (en) 2014-05-30 2017-03-29 シナノケンシ株式会社 3D drive

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