JP2003280205A5 - - Google Patents
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- Publication number
- JP2003280205A5 JP2003280205A5 JP2002086459A JP2002086459A JP2003280205A5 JP 2003280205 A5 JP2003280205 A5 JP 2003280205A5 JP 2002086459 A JP2002086459 A JP 2002086459A JP 2002086459 A JP2002086459 A JP 2002086459A JP 2003280205 A5 JP2003280205 A5 JP 2003280205A5
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen atom
- group
- atom
- acid
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002086459A JP3955489B2 (ja) | 2002-03-26 | 2002-03-26 | ポジ型レジスト組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002086459A JP3955489B2 (ja) | 2002-03-26 | 2002-03-26 | ポジ型レジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003280205A JP2003280205A (ja) | 2003-10-02 |
| JP2003280205A5 true JP2003280205A5 (enExample) | 2005-04-07 |
| JP3955489B2 JP3955489B2 (ja) | 2007-08-08 |
Family
ID=29233052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002086459A Expired - Fee Related JP3955489B2 (ja) | 2002-03-26 | 2002-03-26 | ポジ型レジスト組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3955489B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004013126A (ja) * | 2002-06-11 | 2004-01-15 | Jsr Corp | 感放射線性樹脂組成物 |
| EP1574497B1 (en) * | 2002-12-11 | 2014-07-16 | Asahi Glass Company, Limited | Fluorinated adamantane derivatives |
| US7488847B2 (en) | 2002-12-11 | 2009-02-10 | Asahi Glass Company, Limited | Fluorinated adamantane and its derivatives |
| JPWO2005123653A1 (ja) | 2004-06-16 | 2008-04-10 | 旭硝子株式会社 | フルオロアダマンタン誘導体 |
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2002
- 2002-03-26 JP JP2002086459A patent/JP3955489B2/ja not_active Expired - Fee Related