JP2003245789A5 - - Google Patents
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- Publication number
- JP2003245789A5 JP2003245789A5 JP2002050111A JP2002050111A JP2003245789A5 JP 2003245789 A5 JP2003245789 A5 JP 2003245789A5 JP 2002050111 A JP2002050111 A JP 2002050111A JP 2002050111 A JP2002050111 A JP 2002050111A JP 2003245789 A5 JP2003245789 A5 JP 2003245789A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- dichroic mirror
- lens
- receiving lens
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 8
- 230000005855 radiation Effects 0.000 claims 6
- 230000001154 acute effect Effects 0.000 claims 2
- 239000006096 absorbing agent Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002050111A JP4220707B2 (ja) | 2002-02-26 | 2002-02-26 | レーザ加工ヘッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002050111A JP4220707B2 (ja) | 2002-02-26 | 2002-02-26 | レーザ加工ヘッド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003245789A JP2003245789A (ja) | 2003-09-02 |
| JP2003245789A5 true JP2003245789A5 (enrdf_load_stackoverflow) | 2005-10-27 |
| JP4220707B2 JP4220707B2 (ja) | 2009-02-04 |
Family
ID=28662450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002050111A Expired - Fee Related JP4220707B2 (ja) | 2002-02-26 | 2002-02-26 | レーザ加工ヘッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4220707B2 (enrdf_load_stackoverflow) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4618531B2 (ja) * | 2004-03-15 | 2011-01-26 | 株式会社ニコン | レーザ加工用光学系及びこれを用いたレーザ加工装置 |
| US7422988B2 (en) | 2004-11-12 | 2008-09-09 | Applied Materials, Inc. | Rapid detection of imminent failure in laser thermal processing of a substrate |
| US7438468B2 (en) * | 2004-11-12 | 2008-10-21 | Applied Materials, Inc. | Multiple band pass filtering for pyrometry in laser based annealing systems |
| CN101107501B (zh) * | 2005-03-04 | 2011-07-27 | 松下电器产业株式会社 | 激光加热装置及激光加热方法 |
| JP2009093984A (ja) * | 2007-10-11 | 2009-04-30 | Hitachi Displays Ltd | 有機ｅｌ表示装置およびその製造方法 |
| JP2011003558A (ja) * | 2010-10-07 | 2011-01-06 | Hitachi Displays Ltd | 表示装置の製造方法 |
| WO2015145681A1 (ja) * | 2014-03-27 | 2015-10-01 | 三菱電機株式会社 | レーザ加工装置 |
| CN104942431A (zh) * | 2015-06-17 | 2015-09-30 | 王金 | 一种激光加工装置及其激光热熔胶快速粘合工艺 |
| WO2020080368A1 (ja) * | 2018-10-16 | 2020-04-23 | 古河電気工業株式会社 | 温度計測システム、温度計測方法およびレーザ加工装置 |
| JP7509575B2 (ja) * | 2020-05-20 | 2024-07-02 | 浜松ホトニクス株式会社 | 熱輻射光検出装置及びレーザ加工装置 |
| JP7616151B2 (ja) | 2022-05-16 | 2025-01-17 | トヨタ自動車株式会社 | レーザ加工装置、および、評価方法 |
| CN120395112A (zh) * | 2025-07-04 | 2025-08-01 | 西安晟光硅研半导体科技有限公司 | 一种用于激光微射流设备加工头的紫外消色差物镜 |
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2002
- 2002-02-26 JP JP2002050111A patent/JP4220707B2/ja not_active Expired - Fee Related