JP2003243199A5 - - Google Patents
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- Publication number
- JP2003243199A5 JP2003243199A5 JP2002044518A JP2002044518A JP2003243199A5 JP 2003243199 A5 JP2003243199 A5 JP 2003243199A5 JP 2002044518 A JP2002044518 A JP 2002044518A JP 2002044518 A JP2002044518 A JP 2002044518A JP 2003243199 A5 JP2003243199 A5 JP 2003243199A5
- Authority
- JP
- Japan
- Prior art keywords
- hole
- plasma
- insulating member
- prevented
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002044518A JP2003243199A (ja) | 2002-02-21 | 2002-02-21 | 静電気除去装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002044518A JP2003243199A (ja) | 2002-02-21 | 2002-02-21 | 静電気除去装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003243199A JP2003243199A (ja) | 2003-08-29 |
| JP2003243199A5 true JP2003243199A5 (https=) | 2004-11-25 |
Family
ID=27783868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002044518A Pending JP2003243199A (ja) | 2002-02-21 | 2002-02-21 | 静電気除去装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003243199A (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006112020A1 (ja) * | 2005-04-15 | 2006-10-26 | Koganei Corporation | 除電装置 |
| JP4811731B2 (ja) * | 2007-02-14 | 2011-11-09 | Smc株式会社 | イオナイザ |
| JP4575948B2 (ja) * | 2007-12-18 | 2010-11-04 | 春日電機株式会社 | チューブ型除電器 |
| CN102064476B (zh) * | 2009-11-18 | 2013-12-18 | 株式会社小金井 | 离子发生器 |
| JP6341494B2 (ja) * | 2017-06-05 | 2018-06-13 | 春日電機株式会社 | イオン生成装置 |
-
2002
- 2002-02-21 JP JP2002044518A patent/JP2003243199A/ja active Pending
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