JP2003212665A - Setter for firing ceramic electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a setter for firing ceramic electronic components allowing no incomplete recovery of fired products in an automated firing process, wherein its components do not react with the firing setter and binders contained in the firing setter are easily evaporated also from the side contacting the setter to provide uniformly fired products. <P>SOLUTION: The setter has a coating layer on the surface of a base material. The coating layer has a surface roughness, expressed as an arithmetic average roughness height (Ra), of 1/20-1/65 against the thickness of the fired product. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a setter used for firing a ceramic electronic component such as a ceramic capacitor, a piezoelectric element, or a ferrite.

[0002]

2. Description of the Related Art In a ceramic electronic component firing setter, when a ceramic electronic component is produced by firing, a body to be fired (which becomes an electronic component after firing, the same applies hereinafter) is placed. Nowadays, when the firing process is automated, the setter is tilted after firing to collect the fired ceramic electronic components at a predetermined position.

In addition, in the setter, the constituent components do not act on the object to be burned during firing so as not to deteriorate the product, and moreover, the binder in the object to be fired is placed on the setter. By suppressing the volatilization by the surface,
An important characteristic is that it does not cause uneven firing.

Conventionally, as a setter or the like focused on such characteristics, a jig having a sprayed layer formed on the surface of a base material (Japanese Patent Publication No. 4-21330), and further, a sprayed layer on the surface of the base material There is disclosed a jig for firing electronic parts (Japanese Patent Laid-Open No. 2001-200378), in which the surface roughness of the surface on which the object to be fired is placed has a ten-point average roughness of 150 to 1000 μm.

In these jigs, the thermal sprayed layer formed on the surface of the base material prevents the reaction with the body to be fired. Further, in the latter jig, since the contact area with the object to be fired is small due to the sprayed layer having a predetermined surface roughness, the binder in the object to be fired is not suppressed by the presence of the jig. It is volatilized to give a uniform fired product.

However, in the case of these jigs whose surface roughness is relatively rough, even if the setter is tilted after firing, the body to be fired is caught in the concave portion of the jig surface, It sometimes remained in the setter.
Therefore, the electronic component once fired is further subjected to the firing process, which is one of the problems in automation. In particular, in recent years, ceramic capacitors have become more and more miniaturized, and 1.6 mm × 0.8 mm,
0.6mm x from 1.0mm x 0.5mm etc.
Main size is shifting to 0.3 mm,
When firing a ceramic capacitor of this size using a conventional jig, the current situation is that the concave portion on the jig surface is caught at a high rate.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, in which constituent components do not react with a body to be burned at the time of firing, and the binder in the body to be fired is set by a setter. A setter for firing ceramics electronic parts that does not have a collection failure when collecting products after firing in an automated firing process that can be easily volatilized from the placing side to obtain a uniform fired body The purpose is to provide.

[0008]

That is, according to the present invention, there is provided a ceramic electronic component baking setter having a coating layer on the surface of a base material, wherein the coating layer has an arithmetic mean roughness (Ra) 1/20 to 1 / of the thickness of the fired body
There is provided a setter for firing a ceramic electronic component, which has a surface roughness of 65.

Further, according to the present invention, there is provided a ceramic electronic component baking setter having a coating layer on the surface of a base material, wherein the coating layer has a ten-point average surface roughness (Rz) and a thickness of a body to be fired. 1 / 3.5 to 1 / 11.0, and the average interval (Sm) of irregularities, and 1 with respect to the length of the object to be fired.
Provided is a setter for firing a ceramic electronic component, which has a surface roughness of /1.3 to 1 / 10.0.

Here, the arithmetic average roughness (Ra) and the ten-point average surface roughness (Rz) are both JIS standard B06.
According to 01, the evaluation length is 12.5 mm and the cut-off value is 2.5 mm. The average interval (Sm) of the unevenness is 4.0 mm, the evaluation length is 4.0 mm, and the reference length is the standard length according to JIS B0601. A value measured as 0.8 mm.

In the present invention, 0.6 mm (length) ×
In order to be able to cope with a body to be fired of 0.3 mm (thickness), in the former ceramic electronic component firing setter, the surface roughness of the coating layer is the arithmetic average roughness (Ra).
In the latter setter for firing ceramic electronic components, the surface roughness of the coat layer is 27 to 86 μ in terms of ten-point average surface roughness (Rz).
m, and the average spacing (Sm) of irregularities is preferably 60 to 461 μm.

In the present invention, the coating layer having such a surface roughness may be formed by the surface layer alone, but it is composed of the intermediate layer and the surface layer, and substantially depends on the surface roughness of the intermediate layer. It is preferable that the surface roughness of the coat layer is specified. At this time, the surface roughness of the intermediate layer is preferably controlled in the range of 0.3 to 2.4 times the arithmetic mean roughness (Ra) with respect to the surface roughness of the coat layer. The surface roughness of the intermediate layer is 5 to 20 μm in terms of arithmetic average roughness (Ra).
Is preferable, and in particular, 0.6 mm (length) x
In order to be able to deal with a body to be fired having a thickness of 0.3 mm (thickness), the arithmetic average roughness (Ra) is more preferably 5 to 15 μm.

In order to control the surface roughness of the coat layer by the surface roughness of the intermediate layer as described above, the average thickness of the surface layer is
It is preferably 20 to 200 μm.

As described above, in the setter for firing a ceramic electronic component according to the present invention, the surface roughness of the coating layer is the arithmetic average roughness (Ra) and is 1/20 to 1 of the thickness of the body to be fired.
/ 65, or the ten-point average surface roughness (Rz),
1 / 3.5 to 1 / 11.0 of the thickness of the object to be fired, and an average interval (Sm) of irregularities, and 1 / 1.3 to the length of the object to be fired.
Since it is 1 / 10.0, it goes without saying that the constituent components of the setter do not react with the body to be fired during firing, and the binder in the body to be fired is easily volatilized from the mounting surface of the body to be fired. A uniform fired body can be obtained, and after firing, when the ceramic electronic components are collected by inclining the setter, all the electronic components can be collected smoothly without being caught in the recesses of the setter.

[0015]

DETAILED DESCRIPTION OF THE INVENTION Embodiments of the present invention will be specifically described below. The ceramic electronic component firing setter of the present invention (hereinafter sometimes simply referred to as “setter”) has a coat layer on the surface of the base material,
This coat layer has a specific range of surface roughness. Hereinafter, each component will be specifically described.

There is no particular limitation on the material of the base material in the present invention, and the base material may be made of ceramics which is usually applied as a setter. The method for producing the base material is also not particularly limited, and for example, it can be produced by molding a ceramizing raw material with a press or the like and then firing it.

Next, the surface roughness of the coat layer in the present invention is arithmetic average roughness (Ra) and is 1/20 to 1/65 of the thickness of the object to be fired, preferably the thickness of the object to be fired. Sano 1
/ 25 to 1/62.

When the surface roughness of the coat layer is arithmetic average roughness (Ra) and is less than 1/65 of the thickness of the object to be fired,
Volatilization of the binder in the body to be fired is suppressed, and a uniform body to be fired cannot be obtained. In some cases, the constituent components of the setter may react with the body to be fired. On the other hand, when the surface roughness of the coat layer is arithmetic average roughness (Ra) and exceeds 1/20 of the thickness of the body to be fired, the electronic components after firing are mounted at the time of collecting with a setter inclination or the like. Many electronic parts are caught in the recesses of the mounting surface and left as they are.

Specifically, for example, when manufacturing an electronic component having a size of 1.6 mm (length) × 0.8 mm (thickness), the surface roughness of the coat layer is the arithmetic average roughness ( R
In a), it is preferably 12 to 40 μm. Also,
For example, when manufacturing an electronic component having a size of less than 1.6 mm (length) × 0.8 mm (thickness), such as a size of 1.0 mm (length) × 0.5 mm (thickness), The surface roughness of the coat layer is 5 to 20 in terms of arithmetic average roughness (Ra).
It is preferably μm. In particular, when manufacturing a ceramic capacitor having a size of 0.6 mm (length) x 0.3 mm (thickness), which has recently been shifting to the main size, the surface roughness of the coating layer is an arithmetic average. The roughness (Ra) is preferably 5 to 15 μm. Incidentally, it has already been described that the conventional setter does not support electronic components of this size at all, which is a factor that hinders automation of firing.

The surface roughness of the coating layer in the present invention is a ten-point average surface roughness (Rz), which is 1 / 3.5 to 1 / 11.0 of the thickness of the object to be fired, and the average of unevenness. Interval (S
m) is preferably 1 / 1.3 to 1 / 10.0 of the length of the object to be fired, and is ten-point average surface roughness (Rz), which is 1/4. 0 to 1 / 10.0, and the average interval (Sm) of irregularities, 1 / 1.5 to 1 of the length of the object to be fired
It is more preferably /8.5.

When the surface roughness of the coating layer is ten-point average surface roughness (Rz) and is less than 1 / 11.0 of the thickness of the object to be fired, a sufficient space is provided between the object to be fired and the setter. Is not secured, the volatilization of the binder is suppressed, and firing unevenness is likely to occur. On the other hand, when the surface roughness of the coat layer is the ten-point average surface roughness (Rz) and exceeds 1 / 3.5 of the thickness of the body to be fired, the electronic components after firing are collected by the inclination of the setter or the like. At this time, many electronic components are caught in the recesses on the mounting surface and left as they are.

If the surface roughness of the coating layer is less than 1 / 10.0 or more than 1 / 1.3 of the average length (Sm) of irregularities of the object to be fired, the object to be fired is Since a sufficient space cannot be secured between the setter and the setter, the volatilization of the binder is suppressed, and uneven firing is likely to occur.

Specifically, for example, in the case of manufacturing a ceramic capacitor having a size of 0.6 mm (length) × 0.3 mm (thickness), which has recently been shifting to a main size, the coating layer Has a ten-point average surface roughness (Rz) of 27 to 86 μm and an average spacing (S).
m), it is preferably from 60 to 461 μm.

Next, the coating layer may be any layer as long as it coats the mounting portion of the base material, but if the reaction between the gas in the furnace and the base material occurs during firing, the base material may be deformed. Therefore, it is preferable to form the coat layer on other portions as well.

The coat layer may be either a surface layer alone or an intermediate layer and a surface layer. However, when the coat layer is composed of the intermediate layer and the surface layer, it is preferable that the surface roughness of the coat layer is substantially defined by the surface roughness of the intermediate layer. With such a coat layer, the surface layer can be formed by a method such as gas plasma spraying which makes it difficult to obtain the desired surface roughness.

Further, in this case, the surface roughness of the intermediate layer is calculated as the arithmetic average roughness (R
In a), it is preferably 0.3 to 2.4 times, and 0.
It is more preferable to set it to 5 to 2.0 times.

When the surface roughness of the intermediate layer is an arithmetic average roughness (Ra) within this range with respect to the surface roughness of the coat layer, the thickness of the surface layer becomes substantially uniform and the deterioration of the coat layer is uniform. Therefore, it is difficult for the surface layer to peel off.

Specifically, it is preferable that the size of the body to be fired is substantially the same as the surface roughness of the above-mentioned coat layer, for example, 0.6 mm (length) × 0.3 m.
In the case of manufacturing a ceramic capacitor having a size larger than m (thickness), the surface roughness of the intermediate layer is preferably 5 to 20 μm in terms of arithmetic average roughness (Ra). Also, 0.6 mm (length) x 0.3 mm (thickness)
In the case of manufacturing a ceramic capacitor of the size of, the surface roughness of the intermediate layer is calculated as the arithmetic mean roughness (Ra).
Therefore, the thickness is preferably 5 to 15 μm.

When the coat layer is composed of the intermediate layer and the surface layer, the average thickness of the surface layer is preferably 20 to 200 μm, and more preferably 20 to 100 μm. When the average thickness of the surface layer is less than 20 μm, the surface layer may not be attached to a part of the intermediate layer and the intermediate layer may be exposed, and the constituent components of the setter may easily react with the body to be fired. On the other hand, when the average thickness of the surface layer exceeds 200 μm, it becomes difficult to control the surface roughness of the coat layer due to the surface roughness of the intermediate layer. The thickness of the intermediate layer is not particularly limited, but it is preferable to form the intermediate layer with a thickness of about 70 to 300 μm.

In the present invention, when the coat layer is composed of the surface layer alone, the surface layer may be formed by, for example, spray coating or thermal spraying accompanied with a surface roughening treatment. At this time, the spray coating may be performed by controlling the raw material particle size, slurry concentration, coating conditions, etc. to obtain a desired surface roughness, and the thermal spraying accompanied by the surface roughening treatment is performed by controlling the raw material particle size and the raw material charging conditions. The surface roughness may be used.

On the other hand, even when the coat layer is composed of the intermediate layer and the surface layer, the intermediate layer is the same as above.
For example, it may be formed by spray coating or thermal spraying with surface roughening. The surface layer may be formed by, for example, spray coating or thermal spraying without roughening.

When forming the surface layer by spray coating, the raw material particle size, slurry concentration, coating conditions and the like may be controlled to obtain a desired surface roughness. When forming the surface layer by thermal spraying, a thermal spraying method may be used. The raw material particle size and raw material charging position may be selected and controlled to obtain a desired surface roughness.

As the thermal spraying, for example, gas thermal spraying using a combustion flame depending on the heating method, arc thermal spraying using an arc, plasma thermal spraying using a plasma jet, and the like can be mentioned, but a layer having an average thickness of 20 to 250 μm can be accurately formed. It is preferable that the surface layer is formed by plasma spraying because it can be formed. Further, as the plasma spraying, water-stabilized plasma spraying, gas plasma spraying and the like can be mentioned, and water-stabilized plasma spraying is preferable in that a surface layer having high adhesion to the intermediate layer can be formed, Gas plasma spraying is preferable because the surface layer can be thinned to an average thickness of about 20 to 50 μm and the surface roughness of the intermediate layer can be more directly reflected on the surface roughness of the mounting surface.

In the present invention, the materials of the intermediate layer and the surface layer are not particularly limited and may be those which are normally coated on the setter.

[0035]

EXAMPLES Hereinafter, the present invention will be described more specifically based on examples. However, the present invention is not limited to these examples.

(Evaluation method) Surface roughness Arithmetic average roughness (Ra), ten-point average surface roughness (Rz), and average spacing of irregularities (Sm) were evaluated. Evaluation is JI
Performed according to S Standard B0601, and calculated the arithmetic mean roughness (R
a) and ten-point average surface roughness (Rz) are both measured with an evaluation length of 12.5 mm and a cut-off value of 2.5 mm, and the average interval (Sm) of irregularities is an evaluation length of 4.0 m.
m, and the standard length was 0.8 mm.

Thickness ratio (1) Each example and each comparative example with respect to the thickness of the body to be fired when the size of the body to be fired is 0.6 mm (length) × 0.3 mm (thickness) Arithmetic mean roughness of setter (R
The ratio of a) is shown.

Thickness ratio (2) Each example and each comparative example with respect to the thickness of the object to be fired when the object to be fired has a dimension of 0.6 mm (length) × 0.3 mm (thickness) The ratio of the ten-point average surface roughness (Rz) of the setter is shown.

When the length ratio dimension of 0.6 mm (length) × 0.3 mm (thickness) is used as the object to be fired, the setters of the respective Examples and Comparative Examples with respect to the length of the object to be fired Average spacing of irregularities (S
The ratio of m) is shown.

Catch Frequency Using barium titanate as a raw material, a sample having dimensions of 0.6 mm (length) × 0.3 mm (thickness) and the same shape as a commercially available ceramic capacitor was prepared. Then, after placing 5000 of this sample on the setters obtained in each of the examples and the comparative examples, vibration was applied while the setter was tilted at 30 ° to observe the movement and collection state of the sample. Evaluated. The evaluation was ○ when all the samples were collected without being caught in the concave portion of the coat layer, and Δ when some samples were collected while being caught, and all the samples were caught and were caught. When it could not be collected, it was evaluated as x.

Binder A volatile barium titanate is used as a main raw material, and a raw material containing 30% of an acrylic binder is used as a binder to prepare a sheet by a doctor blade method. A sample having a size of (length) × 0.3 mm (thickness) and the same shape as a commercially available ceramic capacitor was prepared. Then, this sample was placed on the setters obtained in each Example and Comparative Example, heated at 300 ° C. for 2 hours under N ₂ atmosphere, and the amount of volatilized binder was determined by the weight reduced before and after heating. evaluated. Evaluation,
The theoretical weight loss was evaluated as 100%, 100-80% was evaluated as O, 80-50% was evaluated as Δ, and 50% or less was evaluated as x.

Peelability A barium titanate solution, which is a dielectric, was applied to the setters obtained in each of the examples and each of the comparative examples, and then 1350 ° C. and 2
It was confirmed that the coating layer was peeled from the substrate by repeating the firing for 5 times. The evaluation is as follows: No peeling of the coat layer was observed, Peeling was observed in 20% or less of the coat layer, and Peeling was observed in 20% or more of the coat layer. It was evaluated as x.

When the setters of Examples and Comparative Examples in which the surface-adhesive intermediate layer and the surface layer are formed are cut and the cut surfaces are observed with a microscope, the case where there is no unattached portion is ○, the case where there is an unattached portion Was evaluated as x.

Controllability of Surface Roughness of Coat Layer by Intermediate Layer Arithmetic Average Arithmetic Average Roughness (Ra) of the intermediate layer and the coat layer (surface layer) was measured to obtain the arithmetic average arithmetic mean roughness (Ra) of the intermediate layer. When Ra) was 0.3 to 2.4 times the arithmetic average roughness (Ra) of the coat layer (surface layer), it was evaluated as ◯, and the other cases were evaluated as x.

Example 1 As a base material, a material having an Al ₂ O ₃ content of 80% by mass, SiO ₂ of 19% by mass and other materials of 1% by mass was press-molded and then fired. , Al ₂ O ₃ -SiO ₂ quality, size 150 mm long ×
A plate-shaped body having a width of 150 mm and a thickness of 5 mm was prepared.

Then, Al ₂ O ₃ 60 having an average particle diameter of 2 μm is used.
After mass% and 40 mass% of Al ₂ O ₃ having an average particle diameter of 20 μm are mixed to prepare a solid component, 67 mass parts of this solid component and 3 mass parts of the binder are added to 30 mass parts of water. A slurry was prepared by incorporating it. Then, this slurry is applied to the surface of the base material with a spray gun at an air pressure of 5
After the spray coating in kg / cm ^2, 1450
After baking for 2 hours at ℃, Al ₂ O ₃ quality, thickness 10
An intermediate layer having a thickness of 0 μm and an arithmetic mean arithmetic mean roughness (Ra) of 5 μm was formed.

Then, on the surface of this base material, an average particle size of 8
Plasma spraying using 0 μm zirconia particles
O ₂ quality, thickness 100 μm, arithmetic average arithmetic average roughness (R
a) A surface layer having a thickness of 15 μm was formed to manufacture a ceramic electronic component setter. Table 1 shows the characteristics and evaluation.
Are shown together.

(Examples 2 to 4 and Comparative Examples 1 to 3) Average particle diameters of 60 μm, 50 μm, 40 μm and 110 μ, respectively.
Plasma spraying was performed using zirconia particles of m, 80 μm, or 30 μm, and the arithmetic mean arithmetic mean roughness (Ra) was 12 μm, 8 μm, 5 μm, 20 μm, 16 μ, respectively.
m or 4 μm except that a surface layer was formed.
A setter was manufactured in the same manner as in. The characteristics and evaluation are summarized in Table 1.

(Evaluation) As shown in Table 1, when the arithmetic average roughness (Ra) is in the range of 5 to 15 μm, the thickness ratio (1) is set.
However, in the ceramic electronic component setters of Examples 1 to 4 of 1 / 20.0 to 1 / 60.0, the setter is 30
When tilted, all the mounted samples were collected smoothly and the volatility of the binder was good.

On the other hand, arithmetic mean roughness (Ra)
Are 20 μm and 16 μm respectively, and the thickness ratio (1)
However, in the ceramic electronic component setters of Comparative Examples 1 and 2 which have large values of 1 / 15.0 and 1 / 18.8, respectively, the volatility of the binder was good, but when the setter was inclined by 30 °. , The placed sample was caught at a high rate. Also, the arithmetic mean roughness (Ra) is 4 μm,
In the ceramic electronic component setter of Comparative Example 3 in which the thickness ratio (1) is as small as 1 / 75.0, the setter is 30
When the sample was tilted, all the mounted samples were collected smoothly, but the volatility of the binder was found to be less than 80% by weight loss.

[0051]

[Table 1]

(Examples 5 to 10 and Comparative Examples 4 to 7) Using zirconia particles having an average particle size of 50 μm, plasma spraying was performed by adjusting the distance between the spray gun and the base material. A setter was produced in the same manner as in Example 1 except that the surface layer having the surface roughness of 1 was used.

(Evaluation) As shown in Table 2, the thickness ratio (2) is 1 / 4.0 to 1 / 10.0 and the length ratio is 1 / 1.5 to 1 / 8.0. In the ceramic electronic component setters of Examples 5 to 10, which are
When the sample was tilted at 0 °, all the mounted samples were collected smoothly and the volatility of the binder was good.

On the other hand, the thickness ratio (2) is 1 /
Although the length ratio is 7.0, the setter for ceramic electronic parts of Comparative Example 4 having a large length ratio of 1 / 1.2 and the setter for a ceramic electronic component having a small length ratio of 1 / 12.0 have both: When the setter was tilted at 30 °, all the mounted samples were collected smoothly, but the volatility of the binder was 50% or less in weight loss in most of the samples.

Further, although the length ratio is 1 / 3.0, the thickness ratio (2) is as large as 1 / 3.0. Comparative Example 6
In the ceramic electronic component setter, the binder had good volatility, but when the setter was tilted at 30 °, the mounted sample was caught at a high rate. Further, although the length ratio is 1 / 3.0, the thickness ratio is as small as 1 / 12.0, and the ceramic electronic component setter of Comparative Example 7 is mounted when the setter is inclined by 30 °. Although all samples were collected smoothly,
Regarding the volatility of the binder, the weight loss was 50% or less in most of the samples.

[0056]

[Table 2]

(Examples 11 to 14 and Comparative Examples 8 to 10)
The average particle size is 30μ on the base material on which the intermediate layer is formed.
m, 50 μm, 60 μm, 90 μm, 25 μm, 120
Plasma spraying was performed using zirconia particles of μm or 150 μm, and the arithmetic mean roughness (Ra) was 2.5 μm, respectively.
m, 8.0 μm, 10.0 μm, 16 μm, 1.5 μ
A setter was produced in the same manner as in Example 1 except that a setter having a thickness of m, 17.0 μm, or 20.0 μm was formed to produce a setter for ceramic electronic components.

(Evaluation) As shown in Table 3, in the ceramic electronic component setters of Examples 11 to 14 having a surface roughness ratio of 0.313 to 2.381, no peeling of the coating layer was observed. It was

On the other hand, the surface roughness ratio is 3.33.
In Comparative Example 8 having a large value of 3 and Comparative Example 9 having a relatively small surface roughness ratio of 0.294, a part of the coat layer was peeled off in the setter for ceramic electronic parts of Comparative Example 9. Further, in the ceramic electronic component setter of Comparative Example 10 in which the surface roughness ratio was as small as 0.250, peeling was recognized in most of the coat layer.

[0060]

[Table 3]

(Examples 15 to 18 and Comparative Examples 11 and 1)
2) First, 60% by mass of Al ₂ O ₃ having an average particle size of ₂ μm and 40% by mass of Al ₂ O ₃ having an average particle size of 20 μm are mixed to prepare a solid component, and then, with respect to 25 parts by mass of water, 72 parts by mass of this solid component and 3 parts by mass of a binder were contained to prepare a slurry. Then, on the surface of the base material prepared in the same manner as in Example 1, this slurry was subjected to spray coating and further baking treatment in the same manner as in Example 1,
Arithmetic Mean An intermediate layer having an arithmetic average roughness (Ra) of 20.0 μm was formed. Then, on the surface of this substrate, an average particle size of 110
Plasma spraying with Zr
O ₂ quality surface layer, thickness 20.0 μm, 50.0
μm, 100.0 μm, 200.0 μm, 15.0 μ
m or 250.0 μm to produce a ceramic electronic component setter.

(Evaluation) As shown in Table 4, the surface layer thickness is
In the ceramic electronic component setters of Examples 15 to 18 having a thickness of 20.0 to 200.0 μm, no unattached portion was observed between the intermediate layer and the surface layer, and the arithmetic mean arithmetic mean roughness of the intermediate layer ( Ra) was in the range of 0.3 to 2.4 times the arithmetic average roughness (Ra) of the coat layer (surface layer).

On the other hand, the surface layer has a thickness of 15.0 μm.
In the ceramic electronic component setter of Comparative Example 11 with m, some unattached portions were observed between the intermediate layer and the surface layer. Further, in the ceramic electronic component setter of Comparative Example 12 having a surface layer thickness of 250.0 μm, there is a large difference in the arithmetic mean arithmetic mean roughness (Ra) between the coat layer (surface layer) and the intermediate layer. The control of the surface roughness of the coat layer was insufficient.

[0064]

[Table 4]

[0065]

As described above, according to the ceramic electronic component firing setter of the present invention, not only the constituents do not react with the body to be fired during firing, but also volatilization of the binder in the body to be fired is suppressed. Without doing so, it is possible to obtain a uniform fired body. In addition, in the automated baking process, when collecting the products after baking, there is no collection failure, and it is possible to cope with the automation of baking.

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Hiroaki Nihonmatsu             3040 Misano, Mitake-cho, Kani-gun, Gifu Prefecture             CG Adrec Co., Ltd. (72) Inventor Shinji Morasasa             3040 Misano, Mitake-cho, Kani-gun, Gifu Prefecture             CG Adrec Co., Ltd.

Claims (8)

[Claims] 1. A setter for firing a ceramic electronic component, comprising a coating layer on the surface of a substrate, wherein the coating layer has an arithmetic mean roughness (Ra) and is 1/20 of the thickness of a body to be fired. A setter for firing a ceramic electronic component, which has a surface roughness of about 1/65. 2. The coating layer has an arithmetic mean roughness (Ra).
2. The setter for firing ceramic electronic components according to claim 1, having a surface roughness of 5 to 15 μm. 3. A ceramic electronic component firing setter having a coating layer on the surface of a base material, wherein the coating layer has a ten-point average surface roughness (Rz) and is 1 with respect to the thickness of the article to be fired. /3.5 to 1 / 11.0, and the average interval of irregularities (Sm) is 1/1.
A setter for firing a ceramic electronic component, which has a surface roughness of 3 to 1 / 10.0. 4. The ten-point average surface roughness (R
z), 27 to 86 μm, and the average interval of irregularities (Sm)
4. The setter for firing ceramic electronic components according to claim 3, having a surface roughness of 60 to 461 μm. 5. A ceramic electronic component baking setter having a coat layer on the surface of a base material, wherein the coat layer comprises an intermediate layer and a surface layer, and substantially by the surface roughness of the intermediate layer, A setter for firing a ceramic electronic component, wherein the surface roughness of the coat layer is defined. 6. The surface roughness of the intermediate layer is an arithmetic average roughness (Ra) and is 0.3 with respect to the surface roughness of the coat layer.
It is about 2.4 times, The setter for ceramic electronic component baking of Claim 5 which is. 7. The average thickness of the surface layer is 20 to 200 μm.
The setter for firing a ceramic electronic component according to claim 5 or 6, wherein m is m. 8. The setter for firing ceramic electronic components according to claim 7, wherein the surface roughness of the intermediate layer is 5 to 20 μm in terms of arithmetic average roughness (Ra).