JP2003200338A - Chamfering method and device for rectangular flat plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a chamfering method for a rectangular flat plate that can reduce machining cost and can improve machining precision. <P>SOLUTION: A laminate 8 consisting of a lamination of glass plates as a package cover, and abrasive are sealed in a pipe 10, and the laminate 8 is slid on an inner wall of the pipe 10 to develop chamfering of the laminate 8. The pipe 10 has a radius defined to a radius R satisfying the formula, R=L/2√(R<SP>2</SP>+1) or a proximate radius. In the formula, L is a longer side length (mm) of the glass plates, and (r) is a ratio of a chamfer length on the longer side to a chamber length on the shorter side on the glass plates. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for chamfering a rectangular flat plate, and more particularly to a method and apparatus for chamfering a lid member of a ceramic package containing a piezoelectric vibrating piece.

[0002]

2. Description of the Related Art Piezoelectric vibrators are widely used to obtain constant frequencies in electronic circuits. In particular, since it is necessary to reduce the size of a portable electronic device, a piezoelectric vibrator of a ceramic package in which a piezoelectric vibrating piece is enclosed is used. In the piezoelectric vibrator 100 of the ceramic package shown in FIG. 8, after mounting the piezoelectric vibrating piece 102, a glass plate is mounted on the upper surface as the lid member 104 and the inside is kept in vacuum. Note that a stable resonance frequency can be obtained by keeping the inside vacuum.

Here, if the mounting position of the lid member 104 with respect to the package 101 is deviated, the corner portion of the lid member 104 will protrude to the outside of the package 101. In particular, when the castellation 101a is formed on the corner portion of the package 101, there is a high possibility that the corner portion of the lid member 104 will protrude to the castellation 101a portion. When some force acts on the protruding portion, the portion may be chipped and a crack may occur.
When the crack further progresses, the inside of the package cannot be maintained in vacuum. Therefore, the lid member 10
A chamfer 105 is applied to the corner of No. 4.

In the conventional chamfering method, as shown in FIG. 9, first, a glass substrate 110 having a size corresponding to a plurality of lid members is used.
Are fixed on the discarded glass 112. Then, the diamond wheel saw 114 cuts the glass substrate 110 into the size of one lid member, and then further cuts the chamfered portion. Specifically, as shown in FIG. 10, first, the lid member 104 having a rectangular shape is obtained by vertically and horizontally cutting along a cutting line 116. Further cutting line 118
Chamfer the corners by cutting at an angle. By using such a chamfering method, the amount of movement of the diamond wheel saw is reduced and the processing speed is increased.

[0005]

According to the conventional chamfering method, the front, rear, left and right members 106 of the lid member 104 are cut at the central portion when they are cut diagonally along the cutting line 118 in FIG. As a result, the member 106 is discarded, and only about half of the glass substrate 110 can be used as the lid member 104. Due to this poor yield, there has been a problem that much processing cost is required.

Further, glass powder adheres to the cut surface of the diamond wheel saw 114 (see FIG. 9). If this glass powder mixes inside the package during the piezoelectric vibrator manufacturing process and adheres to the piezoelectric vibrating piece, there is a problem that a stable resonance frequency cannot be obtained from the piezoelectric vibrator. further,
The cut surface by the diamond wheel saw is rough, and cracks may occur from this portion. Then, if the cracks generated expand, there is a problem that the inside of the package cannot be maintained in vacuum.

In view of the above problems, the present invention has an object to provide a method and apparatus for chamfering a rectangular flat plate capable of reducing the processing cost. Another object of the present invention is to provide a chamfering method for a rectangular flat plate and an apparatus therefor capable of improving the processing accuracy.

[0008]

In order to achieve the above object, a method for chamfering a rectangular flat plate according to the present invention is to form a laminated body in which rectangular flat plates for a package lid are laminated and an abrasive into a cylindrical body. By enclosing it, the laminate is configured to be chamfered by sliding the laminate on the inner wall of the tubular body. As a result, the yield is improved as compared with the conventional chamfering processing method, so that the processing cost can be reduced.

The radius of the tubular body is

[Equation 3] The radius R satisfying the above condition or a radius in the vicinity thereof is adopted. Here, L is the length (mm) of the long side of the rectangular flat plate, and r is the ratio of the length of the chamfered portion on the long side of the rectangular flat plate to the length of the chamfered portion on the short side. As a result, a desired chamfering process can be performed, so that the processing accuracy can be improved. Further, chamfering can be performed using a small-diameter cylindrical body, and the central portion of the long side of the rectangular flat plate is not polished by the abrasive. Therefore, the processing accuracy can be improved.

In the chamfering process of the laminated body, the ratio of the length of the chamfered portion on the long side of the rectangular flat plate to the length of the chamfered portion on the short side is 1.0 or more and 4.0 or less. It is preferable that the configuration is performed. Set the ratio to 1.
By setting it to 0 or more, the radius of the cylindrical body does not become too small and the processing speed does not decrease. On the other hand, the ratio is 4.
By setting it to be 0 or less, the chamfered portion is close to a right angle, and the crack does not occur from the portion.

The sliding movement of the laminated body is caused by the distance from the revolution axis of the tubular body to one end of the tubular body and the revolution axis of the tubular body to the other end of the tubular body. By revolving the tubular body while repeatedly reversing the magnitude of the distance, the laminated body is relatively moved in the axial direction of the tubular body. The chamfering speed can be improved by moving the laminate not only in the circumferential direction of the cylindrical body but also in the axial direction. Therefore, the processing cost can be reduced.

The sliding motion of the laminated body is caused by the distance from the revolution axis of the tubular body to one end of the tubular body and from the revolution axis of the tubular body to the other end of the tubular body. The cylindrical body is revolved while reversing the magnitude with respect to the distance repeatedly, and the revolution direction of the cylindrical body is reversed at least once to move the laminated body relatively in the axial direction of the cylindrical body. It was configured. By reversing the revolution direction of the tubular body, the relative movement direction of the stacked body in the circumferential direction of the tubular body is reversed. Therefore, chamfering is uniformly performed on each corner of the laminated body, and the processing accuracy can be improved.

The rectangular flat plate may be a glass member. As a result, it is possible to perform chamfering processing at low cost and with high accuracy on the glass plate that serves as the lid member of the ceramic package piezoelectric vibrator. Further, the glass powder does not mix inside the package and adhere to the piezoelectric vibrating piece, so that a stable resonance frequency can be obtained. Furthermore, the inside of the package can be maintained in a vacuum without cracking from the chamfered portion.
A glass plate is used as a lid member of the ceramic package piezoelectric vibrator, and the piezoelectric vibrating piece is irradiated with laser through the glass plate to adjust the resonance frequency.

The rectangular flat plate may be a crystal member. As a result, it is possible to perform chamfering processing at low cost and with high precision on the crystal plate that serves as the lid member of the ceramic package piezoelectric vibrator. Further, the coefficient of thermal expansion can be made to match that of the piezoelectric vibrating piece. On the other hand, the rectangular flat plate may be a ceramic member. As a result, it is possible to perform chamfering processing at low cost and with high accuracy on the ceramic plate that serves as the lid member of the ceramic package piezoelectric vibrator. Also, the coefficient of thermal expansion can be matched with that of the package.

The laminated body having a protective member on the surface may be enclosed in the cylindrical body. Further, the laminated body having a protective member on the surface, after laminating and fixing the substrate, and fixing the protective member on the upper and lower surfaces thereof,
After cutting into the width of the long side of the rectangular flat plate, stacking and fixing the cut intermediate bodies to roll over, and fixing the protective member to the upper and lower surfaces thereof, cutting into the width of the short side of the rectangular flat plate. It may be configured to be formed. As a result, the portions other than the chamfered portion are protected from the abrasive, so that the processing accuracy can be improved. Further, it is possible to prevent the laminated body from being decomposed into individual pieces of a rectangular flat plate during the chamfering process.

On the other hand, the chamfering apparatus for a rectangular flat plate according to the present invention includes a seamless cylindrical body for enclosing the rectangular flat plates laminated in the thickness direction together with an abrasive, and the revolution axis of the cylindrical body to While reversing the magnitude of the distance to the one end of the tubular body and the distance from the revolution axis of the tubular body to the other end of the tubular body, the tubular body is revolved and its revolution speed is changed. And a cylindrical body revolving means formed so as to be changeable. As a result, the yield is improved and the processing cost can be reduced. Since the seamless tubular body is adopted, the laminated body which is relatively moving on the inner peripheral surface of the tubular body does not receive an impact force from the seam portion, and the processing accuracy can be improved. Further, by lowering the revolution speed of the tubular body, the laminated body enclosed inside can be inverted. Therefore, the chamfering process is performed uniformly, and the processing accuracy can be improved. The tubular body revolving means may be configured to be able to reverse the revolving direction of the tubular body. This makes it possible to improve the processing accuracy.

A step of performing a first chamfering process on a corner formed by the long side of the laminated body and the short side of the laminated body to secure the length of the chamfered portion on the long side of the rectangular flat plate. And a step of performing a second chamfering process on a corner formed by the oblique side of the chamfered portion of the laminated body and the short side of the laminated body to secure the length of the chamfered portion on the short side of the rectangular flat plate. And is configured to have. The second chamfering process encloses the first chamfered laminated body and the abrasive in a tubular body having an inner diameter smaller than that of the tubular body used in the first chamfering process. The configuration may be performed as follows. As a result, the R-like processing is applied to the corners of the long side and the short side of the laminated body, so that stress concentration does not occur at each corner. Moreover, since the chamfering processing time of the laminated body is not significantly extended, the processing cost can be reduced.

The second chamfering process is the first chamfering process.
The cylindrical body used for the chamfering may be additionally charged with an abrasive. When the amount of abrasive is increased, a large amount of abrasive enters between the inner surface of the pipe and the laminated body,
It is considered that the transfer effect on the inner surface of the pipe is weakened. As a result, by increasing the amount of the abrasive, the same effect as when the pipe diameter is reduced can be obtained. Therefore, it is not necessary to transfer the laminated body that has undergone the first chamfering process from the large diameter pipe to the small diameter pipe, and the processing cost can be reduced.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of an apparatus and method for chamfering a rectangular flat plate according to the present invention will be described in detail with reference to the accompanying drawings. It should be noted that what is described below is only one aspect of the embodiment of the present invention, and the present invention is not limited thereto.

First, the first embodiment will be described.
FIG. 2 shows an explanatory view of the pipe according to the first embodiment, and FIG.
FIG. 3 shows an explanatory view of the barrel device according to the first embodiment. The chamfering apparatus for a rectangular flat plate according to the present embodiment includes a pipe 10 for enclosing a rectangular glass plate (hereinafter, referred to as a laminated body) 8 laminated in a thickness direction together with an abrasive 12, and a revolution axis of the pipe 10. To the one end of the pipe 10 and the distance from the revolution axis of the pipe 10 to the other end of the pipe 10 while repeatedly reversing the magnitude.
It has a barrel device 20 formed so as to revolve and revolve. In the following, the chamfering process of the glass plate that will be the lid member of the ceramic package piezoelectric vibrator will be described as an example. This glass plate is, for example, a rectangular, minute flat plate having a long side L of 3 mm and a short side S of 1.3 mm. Note that a metal plate, a crystal plate, a ceramic plate, or the like can be similarly chamfered, and these can be used as a lid member of a ceramic package piezoelectric vibrator. By using the crystal plate as the lid member, the coefficient of thermal expansion can be matched with that of the piezoelectric vibrating piece. Further, by using the ceramic plate as the lid member, the coefficient of thermal expansion can be matched with that of the package.

A laminated body is formed by laminating rectangular glass plates as described above in the thickness direction. FIG. 1 shows an explanatory diagram of a method for forming a laminated body. First, as shown in FIG. 1A, glass substrates 1 having a size corresponding to a plurality of lid members are laminated. In addition,
Dummy glass 2 is arranged as a protective member on the upper end surface and the lower end surface, and the whole is fixed by a thermoplastic resin. Next, this is cut along the cutting line 3 to the width of the long side L of the lid member. At this time, since the dummy glasses 2 are arranged on the upper and lower surfaces, chipping due to the diamond wheel saw coming in and out does not occur on the glass substrate 1. When the product cut in this way is rolled 90 degrees, the intermediate 4 shown in FIG. 1 (2) is obtained.

Next, as shown in FIG. 1C, the intermediate 4
Are arranged side by side, dummy glasses 6 are arranged on the upper and lower surfaces thereof as protective members, and the whole is fixed by a thermoplastic resin. The dummy glass may be fixed to each intermediate body 4. Next, this is cut along the cutting line 7 to the width of the short side S of the lid member. Also in this case, since the dummy glasses 6 are arranged on the upper and lower surfaces, chipping of the glass substrate 1 does not occur. When the thus cut product is turned sideways by 90 degrees, the laminated body 8 shown in FIG. 1 (4) is obtained. The laminated body 8 is formed by laminating glass plates having long sides L and short sides S in the thickness direction.

The laminated body 8 is formed by providing dummy glasses 2 and 6 on a part of its surface. The dummy glass functions as a protective member that protects the portion of the laminated body 8 other than the chamfered portion from the abrasive. Therefore, it is preferable that the dummy glass is also fixed to the cut surface along the cutting line 7 in FIG. 1C after cutting. As a result, the laminated body 8 is provided with the protective member on the entire surface.

It is preferable to use an environment-friendly water-soluble adhesive as the thermoplastic resin for fixing the laminated glass substrates. However, when chamfering is performed in a high-humidity environment, the water-soluble adhesive may dissolve and the laminate may be decomposed into individual pieces of glass plate. In this respect, if the above-mentioned dummy glass 6 is fixed to the surface of the laminated body, the dummy glass 6 plays a role of bundling the laminated body. Therefore,
Even when chamfering is performed in a high humidity environment, the laminated body does not decompose into individual pieces of glass plate.

The laminated body 8 formed as described above is enclosed in a pipe as a tubular body. FIG. 2 shows an explanatory view of the pipe according to the first embodiment. The pipe 10 is formed of a metal material such as stainless steel. If a seamless pipe is used as the pipe 10, the laminated body 8 is formed on the inner peripheral surface of the pipe.
When the chamfering process is performed by relatively moving, the laminated body 8 does not receive an impact force at the seam (joint) portion. Therefore, the chamfering precision can be improved. However, if the inner peripheral surface of the pipe 10 is a mirror surface,
The coefficient of friction is small and chamfering takes too long.
Therefore, it is preferable to use the pipe 10 whose inner peripheral surface is appropriately roughened. Further, the pipe is not limited to having a circular cross section, and may have a rectangular cross section.

The radius of the pipe 10 is determined as follows. FIG. 3 shows an explanatory diagram of a method of determining the radius of the pipe. FIG. 1A is a sectional view of the pipe at right angles to the axis, and FIG. 2B is an enlarged view of a portion H in FIG. First, the dimensions of the chamfer to be formed are determined. In FIG. 3 (2), the ratio r (r = r = the length L0 of the chamfered portion on the long side of the laminate 8 to the length S0 of the chamfered portion on the short side).
When L0 / S0) is 4.0 or more, the angle between the oblique side of the chamfered portion and the short side of the laminated body 8 becomes close to 90 degrees,
There is no point in chamfering. In this respect, the ratio r is 1.0
Is ideal, but the radius of the pipe that can realize such chamfering is very small. As a result, relative movement of the laminated body 8 inside the pipe becomes difficult, and chamfering takes time. Therefore, the ratio r is determined to be 1.0 or more and 4.0 or less as the dimension of the chamfer to be formed.

Next, the radius R of the pipe that allows chamfering with the ratio r is determined. In FIG. 3 (1),
The contact point between the inner peripheral surface of the pipe 10 and the laminated body 8 is Q. Further, an angle formed by a line connecting the center O of the pipe and the contact point Q and a vertical line passing through the center O of the pipe is defined as θ. Then, the following equation is generally established.

[Equation 4] However, L is the length (mm) of the long side of the glass plate. On the other hand, the chamfering process for the laminated body 8 inside the pipe 10 is performed in parallel with the tangent line to the inner peripheral surface of the pipe at the contact point Q. Therefore, the radius R of the pipe 10 is calculated so that the oblique side of the chamfer to be formed and the tangent line are parallel to each other. Here, as shown in FIG. 3B, the angle formed by the oblique side and the long side of the chamfer to be formed is equal to the above angle θ. Therefore, the following equation is established.

[Equation 5] From the above, the radius R of the pipe can be obtained by the following equation.

[Equation 6]

Then, as shown in FIG. 2, the laminated body 8 is enclosed in the pipe 10. The laminated body 8 is enclosed so that the laminating direction is parallel to the axial direction of the pipe 10. The number of laminated bodies 8 enclosed in one pipe 10 is 1
The number is not limited to one, and a plurality may be used. Further, the abrasive 12 of the laminated body 8 is enclosed inside the pipe 10. As the polishing material 12, abrasive grains made of a material such as SiC and having a diameter of about 20 μm are used. After encapsulating the laminate 8 and the abrasive 12,
Closing members 14 are attached to both ends of the pipe 10 to prevent the laminated body 8 and the abrasive 12 from flowing out from the pipe 10.

On the other hand, a barrel device is formed as the revolving means of the pipe 10. FIG. 4 shows an explanatory view of the barrel device according to the first embodiment. FIG. 4 (1) is a plan sectional view taken along the line EE of (2), and FIG. 4 (2) is a side view of (1). The barrel device 20 is formed with a tank 18 for storing a plurality of pipes 10. For example, about 30 pipes 10 bundled in the diameter direction can be enclosed in one tank.
Although only two tanks 18 are shown in FIG. 4 for simplicity, the number of tanks 18 may be more than this.

The tank 18 is arranged between two opposing flywheels 22. Each flywheel 22 is formed so as to rotate about the rotation axis 23 in the same phase as each other. Further, the flywheel 22 is formed so that its rotation speed can be changed. In addition, each flywheel 2
Through holes 24 are formed at two opposite positions. On the other hand, the center axis of the tank 18 is the rotary shaft 23 of the flywheel.
Place it so that it intersects with. Arms 19 are connected to both ends of the tank 18 in parallel with the rotary shaft 23 of the flywheel 22. Then, the arm 19 is inserted into the through hole 24 of each flywheel 22 to support the tank 18. When the flywheel 22 is rotated in this state, the tank 18 revolves around its rotation axis 23. Along with this, the pipe 10 stored in the tank 18 also revolves around the rotary shaft 23 of the flywheel 22.

A gear mechanism 30 is provided between the rotary shaft 23 of the flywheel 22 and the arm 19 of the tank 18. Specifically, the first gear 36 is arranged coaxially with the rotary shaft 23 of the flywheel 22. The first gear 36
Absolutely fixes its position so it does not rotate. On the other hand, the second gear 32 is fixed to the arm 19 of the tank 18. The pitch circle diameter of the second gear 32 is formed to be the same as the pitch circle diameter of the first gear 36. Then, around the first gear 36, via the intermediate gear 34, the second gear 32
Can be rolled. Accordingly, the tank 18 can revolve around the rotary shaft 23 of the flywheel without changing its vertical and horizontal directions. Along with this, the pipe 10 stored in the tank 18 can also revolve around the rotary shaft 23 of the flywheel 22 without changing its vertical and horizontal directions.

FIG. 11 shows an explanatory view of a modified example of the barrel device. FIG. 11 (1) is a plan sectional view taken along line U-U of (2), and FIG. 11 (2) is a side view. In this barrel device 220, the central axis 223 is fixed, and the flywheel 222 rotates around the central axis 223.
The flywheel 222 is rotated by a motor 226 via a belt 227. As a result, the tank 21
8 can revolve around the central axis 223.

On the other hand, a belt mechanism 230 is provided between the central shaft 223 and the arm 219 of the tank 218. Specifically, a first pulley 236 fixed to the central shaft 223,
The second pulley 23 fixed to the arm 219 of the tank 218
A belt 234 is stretched between the two. The diameter of the second pulley 232 is the same as the diameter of the first pulley 236. This allows the tank 218 to revolve around the central axis 223 without changing its vertical and horizontal directions.

The chamfering device for a rectangular flat plate according to this embodiment, which is configured as described above, is used as follows. As described above, the laminated body is sealed inside the pipe together with the abrasive. A plurality of such pipes are created and bundled in the diameter direction to be collected. Then, the bundled pipes are stored in the tank of the barrel device.

Next, the barrel device is operated. Specifically, in the barrel device 20 of FIG. 4, each flywheel 22 is rotated in the same phase. The rotation speed is, for example, 18
Set to 0 rpm. When the flywheel 22 rotates, a force in the rotation direction acts on the tank 18 through the through hole 24 and the arm 19. As a result, the tank 18 is
Like A, B, C and D in (1), the flywheel 22 revolves around the rotation axis. At the same time, the pipe 10 stored in the tank 18 also revolves around the revolution axis of the flywheel 22. Along with this, centrifugal force acts on the laminated body 8 enclosed in the pipe 10. On the other hand, since the pipe 10 revolves without changing the vertical and horizontal directions, the laminated body 8 slides on the inner peripheral surface of the pipe 10 in the circumferential direction. And the laminated body 8 is A to D
In the process of 1, the inner peripheral surface of the pipe 10 is rotated once.

FIG. 6 is an explanatory view of the sliding motion of the laminated body along the axial direction of the pipe. Note that FIG. 6 (1) corresponds to FIG.
FIG. 6B is a plan sectional view of a portion corresponding to the line EE in (2), and FIG. 6 (2) is a side sectional view of the pipe 10 in the A portion of FIG. 5 (1). As mentioned above, the tank 18
Is arranged so that its central axis crosses the rotation axis of the flywheel obliquely, so that the pipe 10 stored in the tank 18 is arranged so as to cross the revolution axis GG. Therefore, when the pipe 10 is revolved, the distance from the revolution axis GG to the one end 10a of the pipe 10 and the revolution axis G
The magnitude relationship between the distance from -G to the other end 10b of the pipe 10 is repeatedly reversed. In addition, since the centrifugal force acts on the laminated body 8 in the pipe 10 as the pipe 10 revolves, the laminated body 8 has a large distance from the end portion having a smaller distance from the revolution axis GG. Move towards one end. That is, the laminated body 8 slides on the inner peripheral surface of the pipe 10 in the axial direction. Specifically, as shown in FIG. 6A, when the tank 18 revolves from A to C,
The stacked body 8 moves from the end 10b indicated by the arrow toward the end 10a. When the tank 18 revolves from C to A, the laminated body 8 moves from the end portion 10a indicated by the arrow toward the end portion 10b. As a result, as shown in FIG. 6B, chamfering by friction is applied to the corners W and X of the laminated body 8 that are in contact with the inner peripheral surface of the pipe 10.

Since the corners Y and Z on the opposite side are also chamfered, the revolution speed of the tank 18 or the pipe 10 is reduced. FIG. 7 shows an explanatory view in the case of reducing the revolution speed of the pipe. Note that FIG. 7 corresponds to FIG.
It is a side surface sectional view of the pipe 10 in the B section. When the revolution speed of the pipe 10 is reduced, the centrifugal force acting on the laminated body 8 is reduced. Then, as shown in FIG.
The laminated body 8 located above is dropped by gravity and the laminated body 8 is inverted. After that, if the revolution speed of the pipe 10 is increased again, the corners Y and Z are chamfered. In addition, it is preferable that the revolving speed is reduced a plurality of times so that each corner of the laminated body 8 in all the pipes 10 arranged in each tank 18 is chamfered uniformly.

On the other hand, in the chamfering apparatus according to this embodiment, since the above-mentioned gear mechanism is provided, the tank revolves without changing its vertical and horizontal directions. Therefore, FIG.
Even if the flywheel 22 rotates as in (1) A to D, the pipe 10 arranged in the tank 18 does not change its vertical and horizontal directions. However, it is preferable to rotate the pipe 10 so that the vertical and horizontal directions of the pipe 10 change slightly. As a result, the above-described movement of the laminated body 8 along the axial direction of the pipe 10 is performed at different positions each time, and uneven wear does not occur on the inner peripheral surface of the pipe.
Therefore, the accuracy of chamfering can be improved.

Since the pipe 10 does not change its vertical and horizontal directions, as shown in FIG. 5 (2), a slip occurs between the laminated body 8 enclosed inside the pipe 10 and the inner peripheral surface of the pipe 10. Occurs. Then, the inner peripheral surface of the pipe 10 and the laminated body 8
Since most of the centrifugal force acts on the contact points on the front side in the traveling direction 50 of the laminated body 8 among the contact points with the, the chamfering of the corner X of the laminated body corresponding to the contact points on the front side is It progresses faster than chamfering of the corner W corresponding to the contact point on the rear side. As described above, since the revolution speed is decreased and the laminated body 8 is inverted, the chamfering process of the corner portion Z also proceeds faster than the chamfering process of the corner portion Y.

Therefore, the pipe 1 stored in the tank 18
Reverse the positions of both axial ends of 0. Then, the traveling direction 50 of the laminated body 8 on the inner peripheral surface of the pipe 10 is reversed. Thereby, contrary to the above, chamfering of the corner W progresses faster than chamfering of the corner X. Further, if the revolution speed is reduced and the laminated body 8 is inverted, chamfering of the corner portion Y also proceeds faster than chamfering of the corner portion Z. Therefore, all the corners are chamfered uniformly. If the rotation direction of the flyhole of the barrel device is reversed instead of reversing the axial direction of the pipe 10, the traveling direction 50 of the laminated body 8 is reversed. In this case, the same result as above can be obtained.

By using the chamfering apparatus according to this embodiment having the above-described structure according to the above method, the chamfering cost can be reduced. In this respect, the conventional chamfering method has a poor yield, and the chamfering method requires a lot of cost.

However, in the chamfering method according to this embodiment, the laminated body in which the glass plates for the package lid are laminated and the abrasive are enclosed in the pipe, and the laminated body is slid on the inner wall of the pipe, The chamfering process of the laminated body was performed. As a result, the yield is improved as compared with the conventional chamfering processing method, so that the processing cost can be reduced.

The radius of the cylindrical body is

[Equation 7] The radius R satisfying the above condition or a radius in the vicinity thereof is adopted. Here, L is the length (mm) of the long side of the rectangular flat plate, and r is the ratio of the length of the chamfered portion on the long side of the rectangular flat plate to the length of the chamfered portion on the short side. As a result, a desired chamfering process can be performed, so that the processing accuracy can be improved. Further, chamfering can be performed with a small-diameter pipe, and the central portion of the long side of the glass plate will not be polished by the abrasive. Therefore, the processing accuracy can be improved.

In the chamfering process of the laminate, the ratio of the length of the chamfered portion on the long side of the rectangular flat plate to the length of the chamfered portion on the short side is 1.0 or more and 4.0 or less. It is preferable that the configuration is performed. Set the ratio to 1.
By setting it to 0 or more, the radius of the pipe does not become too small and the processing speed does not decrease. On the other hand, the ratio is 4.
By setting it to be 0 or less, the chamfered portion is close to a right angle, and the crack does not occur from the portion.

The sliding motion of the laminated body causes the pipe to revolve while repeatedly reversing the magnitude of the distance from the revolution axis of the pipe to one end of the pipe and the distance from the revolution axis of the pipe to the other end of the pipe. As a result, the laminated body is relatively moved in the axial direction of the pipe. The chamfering speed can be improved by moving the laminate not only in the circumferential direction of the pipe but also in the axial direction. Therefore, the processing cost can be reduced.

The sliding motion of the laminated body causes the pipe to revolve while repeatedly reversing the magnitude of the distance from the revolution axis of the pipe to one end of the pipe and the distance from the revolution axis of the pipe to the other end of the pipe. At the same time, the laminated body is relatively moved in the axial direction of the pipe by reversing the revolving direction of the pipe at least once or by reversing the positions of both ends in the axial direction of the pipe at least once. By reversing the revolving direction of the pipe or reversing the positions of both ends of the pipe in the axial direction, the relative movement direction of the laminate in the circumferential direction of the pipe is reversed. Therefore, chamfering is uniformly performed on each corner of the laminated body, and the processing accuracy can be improved. If the orbiting speed of the pipe is reduced at least once before and after the reverse rotation to invert the laminated body, chamfering is performed more uniformly, and the processing accuracy can be improved.

Further, the laminate having the protective member on the surface is enclosed in the pipe. As a result, the portions other than the chamfered portion are protected from the abrasive, so that the processing accuracy can be improved. Further, it is possible to prevent the laminated body from being decomposed into individual pieces of a rectangular flat plate during the chamfering process. The pipe is a seamless pipe. As a result, the laminated body, which is relatively moving on the inner peripheral surface of the pipe, does not receive an impact force from the seam portion, and the processing accuracy can be improved.

As described above, by using the chamfering apparatus and method for a rectangular flat plate according to this embodiment, a glass plate serving as a lid member of a ceramic package piezoelectric vibrator can be manufactured at low cost and with high accuracy. It can be chamfered. As a result, a stable resonance frequency can be obtained without the glass powder entering the package and adhering to the piezoelectric vibrating piece. In addition, the inside of the package can be maintained in a vacuum without cracking from the chamfered portion. Therefore, the glass plate can be used as the lid member of the ceramic package piezoelectric vibrator.

It is essential to adjust the resonance frequency of the piezoelectric vibrator. Such adjustment is performed by irradiating the piezoelectric vibrating piece with laser light to reduce the mass. Further, in order to avoid a change in the resonance frequency after the adjustment, it is preferable to adjust the resonance frequency after the piezoelectric vibrator is completed. On the other hand, the glass plate has a property of transmitting laser light. Therefore, by using a glass plate as the lid member of the ceramic package piezoelectric vibrator, it is possible to adjust the resonance frequency by irradiating a laser through the glass plate after the piezoelectric vibrator is completed.

Next, the second embodiment will be described. As shown in FIG. 12A, when the ratio r (r = L1 / S1) between the length L1 of the chamfered portion on the long side of the laminate and the length S1 of the chamfered portion on the short side is large. Is
The angle at the corner K between the oblique side of the chamfered portion and the short side of the laminate is close to 90 degrees. As a result, stress concentration occurs at the corners K, the lid member of the piezoelectric vibrator is damaged, and the airtightness of the package cannot be maintained. On the other hand, when the ratio r is small, the angle θ shown in FIG. 3 is large, so that the chamfering process is performed using the pipe 10 having a small inner diameter. However, when the pipe 10 having a small inner diameter is used, the amount of slip of the laminated body 8 in the circumferential direction of the pipe 10 decreases. This causes a problem that the chamfering processing time of the laminated body 8 becomes long.

Therefore, in the chamfering method according to the second embodiment, the first chamfering process is performed on the corner formed by the long side and the short side of the laminated body, and the length of the chamfered portion on the long side of the rectangular flat plate is increased. Secure. Then, after securing the length of the chamfered portion, a second chamfering process is performed on a corner formed by the oblique side of the chamfered portion of the laminated body and the short side of the laminated body, and the chamfered portion on the short side of the rectangular flat plate. Secure the length of.

That is, first, as shown in FIG. 12A, the length L1 of the chamfered portion on the long side of the rectangular flat plate.
The first chamfering process is performed on the corner portion J formed by the long side and the short side of the laminated body so as to match the final target value Lf. In this first chamfering process step, the length S1 of the chamfered portion on the short side of the rectangular flat plate is set smaller than the final target value Sf. Then, the ratio r1 (r1 = L1 / S1) becomes larger than the final target value rf (rf = Lf / Sf).
Since the angle θ shown in is small, the pipe 1 with a large inner diameter
0 can be used. Therefore, the chamfering processing time can be shortened. Next, as shown in FIG. 12 (2), in order to match the length of the chamfered portion on the short side of the rectangular flat plate with the final target value Sf, the oblique side of the chamfered portion of the laminated body and the short side of the laminated body are arranged. The second chamfering process is performed on the corner portion K formed by. The ratio r2 (r2 = L2 / S2) in the second chamfering process is set smaller than r1 in the first chamfering process. That is, in the second chamfering process, a pipe having an inner diameter smaller than that of the first chamfering process is used. However, since the processing amount in the second chamfering process step is smaller than the processing amount in the first chamfering process step, the chamfering process time is not significantly extended.

As a result of the above, as shown in FIG.
A corner portion M between the long side of the laminate and the oblique side formed by the first chamfering process, a corner part N between the oblique side formed by the first chamfering process and the oblique side formed by the second chamfering process, and The angle at the corner P between the hypotenuse formed by the second chamfering process and the short side of the laminate is 90 in each case.
It greatly exceeds the degree and approaches 180 degrees. That is, the corner portion J between the long side and the short side of the laminated body approaches the state where R processing is performed. This prevents stress concentration at each corner. Therefore, the lid member of the piezoelectric vibrator can be prevented from being damaged, and the airtightness of the package can be maintained.

In addition, the second chamfering processing time is extended to
As shown in FIG. 12 (3), rf (= Lf / Sf ') =
The hypotenuse of r2 may be formed. In the present embodiment, since the large diameter pipe is used for the first chamfering process, the chamfering process time can be shortened compared to the case where the small diameter pipe is used from the beginning.

By the way, in the above-mentioned second chamfering process, it is necessary to transfer the laminated body after the first chamfering process from the large diameter pipe to the small diameter pipe. However,
By adding an abrasive to the large diameter pipe used in the first chamfering process, the pipe can be used in the second chamfering process.

In the chamfering method according to the present invention described above, the shape of the inner surface of the pipe 10 is transferred to the laminated body 8,
Chamfering of the laminated body is performed. If the amount of the abrasive is increased here, it is considered that the transfer effect on the inner surface of the pipe is weakened because a large amount of the abrasive enters between the inner surface of the pipe and the laminated body. As a result, by increasing the amount of abrasive, the same effect as when the pipe diameter is reduced can be obtained. FIG. 13 (1) is a graph showing the results of measuring the L2 dimension of FIG. 12 (2) by chamfering while changing the volume ratio of the abrasive. Here, the volume ratio of the abrasive means the ratio of the volume of the abrasive used in the second chamfering process to the total volume inside the pipe. The revolution speed of the barrel device is 180 RPM and the chamfering time is 2
It's time. According to the figure, when the volume ratio of the abrasive is 10% to 30%, the L2 dimension is 0, but when the volume ratio of the abrasive is 40%, the L2 dimension is 0.02 mm. There is. This result shows that when the volume ratio of the abrasive is small,
The second chamfering process is not performed, and only the first chamfering process is continued, but when the abrasive volume ratio is increased, the second chamfering process is performed.
Indicates that chamfering is performed.

On the other hand, FIG. 13 (2) is a graph showing the result of measuring the L2 dimension of FIG. 12 (2) by carrying out chamfering while changing the revolution speed of the barrel device. The volume ratio of the abrasive is 20%, and the chamfering time is 2
It's time. According to the figure, when the revolution speed is 180 RPM, the L2 dimension is 0, but the revolution speed is 100R.
In the case of PM, the L2 dimension is 0.03 mm. From the obtained results, when the revolution speed is fast,
Abrasive does not easily enter between the laminate and the inner surface of the pipe,
It can be seen that the first chamfering process only continues due to the transfer effect on the inner surface of the pipe. On the other hand, when the revolving speed is slowed, it is found that the abrasive easily enters between the laminate and the inner surface of the pipe, and the second chamfering process is performed.

FIG. 13C is a graph showing the results of measuring the L2 dimension of FIG. 12B by carrying out chamfering while changing the processing time. The volume ratio of the abrasive is 20% and the revolution speed of the barrel device is 180 RP.
It is M. According to the figure, when the chamfering processing time is 2 hours, the L2 dimension is 0.03 mm, and when the chamfering processing time is 4 hours, the L2 dimension is 0.1 mm. This indicates that the chamfering processing time and the chamfering processing amount are in a proportional relationship.

From the above experimental results, it is considered that the second chamfering work is optimally carried out at a polishing material volume ratio of about 20%, a revolution speed of the barrel device of about 100 RPM, and a working time of about 4 hours. First, regarding the volume ratio of the abrasive, it is necessary to consider that the larger the value, the easier the second chamfering process is, but the use efficiency of the abrasive decreases. Therefore, the volume ratio of the abrasive is increased to about 20%, while the first chamfering processing is about 5%. Regarding the revolution speed of the barrel device, it is necessary to consider that the slower the revolution speed is, the easier the second chamfering process is, but the longer the machining is. Therefore, the revolution speed of the barrel device is 1 for the first chamfering process.
Although it is about 80 RPM, it is reduced to about 100 RPM. On the other hand, the chamfering processing time may be appropriately set so that the L2 dimension or the S2 dimension of FIG. 12 (2) becomes the target value.

By the way, when the first and second chamfering processes are performed using the abrasive having a small particle diameter, the tips of the corners M, N and P shown in FIG. 12B are sharply formed. In this case, stress concentration may occur at the tip of each corner, and the lid member of the piezoelectric vibrator may be damaged and its airtightness may be broken. Therefore, the first and second chamfering processes are performed using an abrasive having a large particle size. Specifically, the particle size is 20 μm
The above abrasive is used. FIG. 14 is an enlarged view of each corner when chamfering is performed using an abrasive having a large particle size. As shown in the figure, the tip of each of the corners M, N, and P has a surface sag (working roughness) due to the impact of the abrasive having a large grain size. This processing roughness is similar to a state where fine R processing is continuously performed. This makes it possible to prevent damage to the lid member of the piezoelectric vibrator without causing stress concentration at each corner, and to maintain its airtightness.

[0061]

[Effect of the Invention] The laminated body in which the rectangular flat plates for the package lid are laminated and the abrasive are enclosed in the cylindrical body, and the laminated body is slid on the inner wall of the cylindrical body, whereby the laminated body is formed. Since the chamfering process is performed, the processing cost can be reduced.

The radius of the cylindrical body is

[Equation 8] The radius R satisfying the above condition or a radius in the vicinity thereof is adopted. Here, L is the length (mm) of the long side of the rectangular flat plate, and r is the ratio of the length of the chamfered portion on the long side of the rectangular flat plate to the length of the chamfered portion on the short side. This makes it possible to improve the processing accuracy.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a method for forming a laminated body.

FIG. 2 is an explanatory diagram of a pipe according to the first embodiment.

FIG. 3 is an explanatory diagram of a method of determining a radius of a pipe,
(1) is a sectional view perpendicular to the axis of the pipe, and (2) is an enlarged view of the H portion.

FIG. 4 is an explanatory view of the barrel device according to the first embodiment, (1) is a plan sectional view taken along line EE of (2), and (2) is a side view of (1).

5 is a side sectional view taken along the line FF of FIG.
(1) is an explanatory view of the circumferential movement of the laminated body, and (2) is an explanatory view of the chamfering process performed on the laminated body.

6 (1) is a plan sectional view taken along line EE of FIG. 4, and is an explanatory view of the axial movement of the laminated body;
FIG. 6A is an enlarged view of a portion A of FIG. 5A, and is an explanatory view of chamfering processing performed on the laminated body.

FIG. 7 is an explanatory diagram of a state where the stacked body is inverted.

FIG. 8 is an explanatory view of a piezoelectric vibrator of a ceramic package, (1) is a side sectional view taken along line TT,
(2) is a plan view.

FIG. 9 is an explanatory diagram of a conventional chamfering apparatus.

FIG. 10 is an explanatory diagram of a conventional chamfering method.

FIG. 11 is an explanatory view of a modified example of the barrel device,
(1) is a plan sectional view taken along line U-U of (2),
(2) is a side view of (1).

FIG. 12 is an explanatory diagram of a chamfering method according to the second embodiment.

FIG. 13 shows chamfering processing under different conditions.
It is a graph showing the result of measuring the L2 dimension of (2).

FIG. 14 is an enlarged view of each corner when chamfering is performed using an abrasive having a large particle size.

[Explanation of symbols]

1 ………… Glass substrate, 2 ………… Dummy glass, 3 …………
Cutting line, 4 ......... Intermediate, 6 ......... Dummy glass, 7 ...
...... Cutting line, 8 ......... Laminate, 10 ......... Pipe, 10
a, 10b ......... End, 12 ......... Abrasive material, 14 ...
Closing member, 18 ..., Tank, 19 ..., Arm, 20
……… Barrel device, 22 ……… Flywheel, 23…
...... Rotary shaft, 24 ......... Through hole, 30 ......... Gear mechanism,
32 ... 2nd gear, 34 ......... intermediate gear, 36 ...
1st gear, 50 ......... Progression direction, 100 ......... Ceramic package piezoelectric vibrator, 101 ...
01a ......... Castellation, 102 ..... Piezoelectric vibrating piece, 104 ..... lid member, 105 .... Chamfering, 10
6 ... Member, 110 ... Glass substrate, 112 ...
Discarded glass, 114 ………… Diamond wheel saw, 1
16,118 ……… Cutting line, 218 ……… Tank, 21
9 ... Arm, 220 ... Barrel device, 222 ...
… Flywheel, 223 ………… Center axis, 226 …………
Motor, 227 ... Belt, 230 Belt mechanism, 232 Second pulley, 234 Belt, 2
36 ......... First pulley.

Claims (16)

[Claims] 1. A laminated body in which a rectangular plate for a package lid is laminated and an abrasive are enclosed in a cylindrical body, and the laminated body is slid on an inner wall of the cylindrical body, whereby the laminated body. A chamfering method for a rectangular flat plate, characterized in that the chamfering is performed. 2. The radius of the cylindrical body is The method of chamfering a rectangular flat plate according to claim 1, wherein the chamfering method is formed to have a radius R that satisfies the above or a radius in the vicinity thereof. Here, L is the length (mm) of the long side of the rectangular flat plate, and r is the ratio of the length of the chamfered portion on the long side of the rectangular flat plate to the length of the chamfered portion on the short side. 3. The chamfering process of the laminate is such that the ratio of the length of the chamfered portion on the long side of the rectangular flat plate to the length of the chamfered portion on the short side is 1.0 or more and 4.0 or less. The method for chamfering a rectangular flat plate according to claim 1 or 2, characterized in that 4. The sliding motion of the laminated body includes a distance from the revolution axis of the tubular body to one end of the tubular body and a revolution axis of the tubular body to the other end of the tubular body. 4. The laminated body is relatively moved in the axial direction of the tubular body by revolving the tubular body while reversing the magnitude of the tubular body repeatedly. Chamfering method for rectangular flat plate. 5. The sliding motion of the laminated body includes a distance from the revolution axis of the tubular body to one end of the tubular body and a revolution axis of the tubular body to the other end of the tubular body. The cylindrical body is revolved while repeatedly reversing the magnitude of the distance and the revolving direction of the cylindrical body is reversed at least once to relatively move the laminated body in the axial direction of the cylindrical body. The method for chamfering a rectangular flat plate according to any one of claims 1 to 3, wherein 6. The method for chamfering a rectangular flat plate according to claim 1, wherein the rectangular flat plate is a glass member. 7. The chamfering method for a rectangular flat plate according to claim 1, wherein the rectangular flat plate is a crystal member. 8. The chamfering method for a rectangular flat plate according to claim 1, wherein the rectangular flat plate is a ceramic member. 9. The laminated body having a protective member on the surface thereof,
It is enclosed in the inside of the cylindrical body.
9. The method for chamfering a rectangular flat plate according to any one of 8). 10. A seamless tubular body in which rectangular flat plates laminated in the thickness direction are enclosed together with an abrasive, a distance from the revolution axis of the tubular body to one end of the tubular body, and the tubular body. A tubular body revolving means formed so that the tubular body revolves while reversing the magnitude of the distance from the revolution axis of the tubular body to the other end of the tubular body and the revolution speed of the tubular body can be changed. A chamfering device for a rectangular flat plate having. 11. The chamfering apparatus for a rectangular flat plate according to claim 10, wherein the cylindrical body revolving means is formed so as to be able to reverse the revolution direction of the cylindrical body. 12. The radius of the cylindrical body is given by: 12. The chamfering device for a rectangular flat plate according to claim 10, wherein the chamfering device is formed to have a radius R satisfying the above condition or a radius in the vicinity thereof. Here, L is the length (mm) of the long side of the rectangular flat plate, and r is the ratio of the length of the chamfered portion on the long side of the rectangular flat plate to the length of the chamfered portion on the short side. 13. The method for chamfering a rectangular flat plate according to claim 9, wherein the laminated body having a protective member on the surface is formed by laminating and fixing substrates, and fixing the protective members on the upper and lower surfaces thereof. , Cut into the width of the long side of the rectangular flat plate, stack and fix the cut intermediates, roll them over, and fix the protective members to the upper and lower surfaces thereof, and then cut into the width of the short side of the rectangular flat plate. And a chamfering method for a rectangular flat plate. 14. A step of performing a first chamfering process on a corner formed by a long side of the laminated body and a short side of the laminated body to secure a length of a chamfered portion on the long side of the rectangular flat plate. And a step of performing a second chamfering process on a corner formed by the oblique side of the chamfered portion of the laminated body and the short side of the laminated body to secure the length of the chamfered portion on the short side of the rectangular flat plate. The chamfering method for a rectangular flat plate according to claim 1, further comprising: 15. The second chamfering process comprises: a laminate having an inner diameter smaller than that of the cylinder used in the first chamfering process; 15. The method for chamfering a rectangular flat plate according to claim 14, characterized in that 16. The rectangular shape according to claim 14, wherein the second chamfering process is performed by additionally adding an abrasive to the cylindrical body used in the first chamfering process. Chamfering method for flat plates.