JP2003197671A5 - - Google Patents

Download PDF

Info

Publication number
JP2003197671A5
JP2003197671A5 JP2001400285A JP2001400285A JP2003197671A5 JP 2003197671 A5 JP2003197671 A5 JP 2003197671A5 JP 2001400285 A JP2001400285 A JP 2001400285A JP 2001400285 A JP2001400285 A JP 2001400285A JP 2003197671 A5 JP2003197671 A5 JP 2003197671A5
Authority
JP
Japan
Prior art keywords
image
reflected
illumination means
axis direction
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001400285A
Other languages
English (en)
Other versions
JP3813088B2 (ja
JP2003197671A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001400285A priority Critical patent/JP3813088B2/ja
Priority claimed from JP2001400285A external-priority patent/JP3813088B2/ja
Priority to TW091133247A priority patent/TWI255000B/zh
Priority to US10/325,991 priority patent/US6683731B2/en
Priority to KR10-2002-0081622A priority patent/KR100491371B1/ko
Publication of JP2003197671A publication Critical patent/JP2003197671A/ja
Publication of JP2003197671A5 publication Critical patent/JP2003197671A5/ja
Application granted granted Critical
Publication of JP3813088B2 publication Critical patent/JP3813088B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【００２５】
次に照明手段５０を消灯し、照明手段５１を点灯した状態とすると、ツール５及び基準部材３０のＸ軸方向の像は、照明手段５１からの光に対する影として、ミラー４８、４７よりハーフミラー４６の反射面で反射し、続いてミラー４２、４３で反射し、レンズ４４を通ってミラー４５で反射し、レンズ２０より位置検出用カメラ１１でＸ軸方向の図４（ｂ）に示す画像が撮像される。この画像に適宜の画像処理を施すことにより、ツール５の軸心５ａと基準部材３０の軸心３０ａとのＸ軸方向のずれ量ΔＸ1 が算出される。
JP2001400285A 2001-12-28 2001-12-28 ボンディング装置 Expired - Fee Related JP3813088B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001400285A JP3813088B2 (ja) 2001-12-28 2001-12-28 ボンディング装置
TW091133247A TWI255000B (en) 2001-12-28 2002-11-13 Bonding apparatus
US10/325,991 US6683731B2 (en) 2001-12-28 2002-12-19 Bonding apparatus
KR10-2002-0081622A KR100491371B1 (ko) 2001-12-28 2002-12-20 본딩 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001400285A JP3813088B2 (ja) 2001-12-28 2001-12-28 ボンディング装置

Publications (3)

Publication Number Publication Date
JP2003197671A JP2003197671A (ja) 2003-07-11
JP2003197671A5 true JP2003197671A5 (ja) 2004-12-16
JP3813088B2 JP3813088B2 (ja) 2006-08-23

Family

ID=19189596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001400285A Expired - Fee Related JP3813088B2 (ja) 2001-12-28 2001-12-28 ボンディング装置

Country Status (4)

Country Link
US (1) US6683731B2 (ja)
JP (1) JP3813088B2 (ja)
KR (1) KR100491371B1 (ja)
TW (1) TWI255000B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3827645B2 (ja) * 2003-02-19 2006-09-27 株式会社新川 ボンディング装置及びボンディング外観検査装置
JP4547330B2 (ja) * 2005-12-28 2010-09-22 株式会社新川 ワイヤボンディング装置、ボンディング制御プログラム及びボンディング方法
US7810698B2 (en) * 2008-11-20 2010-10-12 Asm Assembly Automation Ltd. Vision system for positioning a bonding tool
US9136243B2 (en) * 2013-12-03 2015-09-15 Kulicke And Soffa Industries, Inc. Systems and methods for determining and adjusting a level of parallelism related to bonding of semiconductor elements
TWI580511B (zh) * 2014-06-10 2017-05-01 Shinkawa Kk A bonding device, and a method of estimating the placement position of the engagement tool
CN108986167B (zh) * 2017-06-05 2022-01-11 梭特科技股份有限公司 置晶设备的校正方法及使用该方法的置晶设备
TWI697656B (zh) * 2017-12-20 2020-07-01 日商新川股份有限公司 線形狀檢查裝置以及線形狀檢查方法
TWI826789B (zh) * 2020-06-05 2023-12-21 日商新川股份有限公司 打線接合裝置
CN112382590A (zh) * 2020-11-11 2021-02-19 华天科技(南京)有限公司 一种编带设备交手校正系统及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3178567B2 (ja) * 1993-07-16 2001-06-18 株式会社カイジョー ワイヤボンディング装置及びその方法
JP2982000B1 (ja) * 1998-07-03 1999-11-22 株式会社新川 ボンディング方法及びその装置
JP3328878B2 (ja) * 1998-10-26 2002-09-30 澁谷工業株式会社 ボンディング装置
JP3416091B2 (ja) 2000-01-21 2003-06-16 株式会社新川 ボンディング装置およびボンディング方法
JP2003163236A (ja) * 2001-11-27 2003-06-06 Shinkawa Ltd ワイヤボンディング装置
JP3802403B2 (ja) * 2001-11-27 2006-07-26 株式会社新川 ワイヤボンディング方法及び装置

Similar Documents

Publication Publication Date Title
EP1434093A3 (en) Catoptric projection system, exposure apparatus and device fabrication method
JP2003114387A5 (ja)
EP1336887A4 (en) CATADIOPTRIC SYSTEM AND EXPOSURE DEVICE PROVIDED WITH SAID SYSTEM
DE60126849D1 (de) Vereinzelte Die-Wafer mit Mikrospiegeln
JP2003197671A5 (ja)
JP2008543070A5 (ja)
JP2000188712A5 (ja)
EP1020897A4 (en) ALIGNMENT DEVICE, LIGHTING METHOD, METHOD FOR PRINTING AN OPTICAL PROJECTION SYSTEM, AND METHOD FOR COMPOSING THIS ALIGNMENT DEVICE
WO2000013065A8 (en) Genuineness detecting system and method for using genuineness detecting film
EP0964307A3 (en) Projection exposure apparatus and method
JP2004511757A5 (ja)
JP2004258666A5 (ja)
JP2005510759A5 (ja)
JP2003043384A5 (ja)
JP2005173413A5 (ja)
EP1170945A3 (en) Illumination optical system and projector using the same
EP0957179A3 (en) Device for projecting flat articles profiles on a working plane of a machine for automatic cutting such flat articles
WO2006063045A3 (en) Methods and devices for enhancing intensity of on-surface lines cast by laser line projectors or the like
JP2004126448A5 (ja)
DK1698996T3 (da) Identifikationsindretning
EP1860477A4 (en) OPTICAL PROJECTION SYSTEM, EXPOSURE EQUIPMENT, AND DEVICE MANUFACTURING METHOD
EP1471565A3 (en) Mapping device for semiconductor wafers
EP1298494A3 (en) High numerical aperture projection system for microlithography
EP1098216A3 (en) Line exposure type image forming apparatus
WO2002055925A3 (fr) Appareil de source de lumiere, son procede de fabrication, et procede, appareil et source de lumiere de localisation du foyer d'un reflecteur, procede et appareil de localisation de la position de l'emission d'une lampe a decharge, et procede et appareil de positionnement du reflecteur/de la lampe a decharge