JP2003162043A5 - - Google Patents
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- Publication number
- JP2003162043A5 JP2003162043A5 JP2001360316A JP2001360316A JP2003162043A5 JP 2003162043 A5 JP2003162043 A5 JP 2003162043A5 JP 2001360316 A JP2001360316 A JP 2001360316A JP 2001360316 A JP2001360316 A JP 2001360316A JP 2003162043 A5 JP2003162043 A5 JP 2003162043A5
- Authority
- JP
- Japan
- Prior art keywords
- phase shift
- shift mask
- pattern
- inspection
- dimensional change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001360316A JP4023141B2 (ja) | 2001-11-27 | 2001-11-27 | 位相シフトマスクの検査方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001360316A JP4023141B2 (ja) | 2001-11-27 | 2001-11-27 | 位相シフトマスクの検査方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003162043A JP2003162043A (ja) | 2003-06-06 |
JP2003162043A5 true JP2003162043A5 (zh) | 2005-06-30 |
JP4023141B2 JP4023141B2 (ja) | 2007-12-19 |
Family
ID=19171158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001360316A Expired - Fee Related JP4023141B2 (ja) | 2001-11-27 | 2001-11-27 | 位相シフトマスクの検査方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4023141B2 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005026360A (ja) | 2003-06-30 | 2005-01-27 | Toshiba Corp | フォトマスクの欠陥検査方法、半導体装置の製造方法、およびフォトマスクの製造方法 |
JP5330019B2 (ja) * | 2009-02-18 | 2013-10-30 | ルネサスエレクトロニクス株式会社 | マスクパターンの検査方法およびマスクパターン検査装置 |
JP2014154405A (ja) | 2013-02-08 | 2014-08-25 | Toshiba Corp | 有機電界発光素子、照明装置及び照明システム |
CN116203802B (zh) * | 2022-10-12 | 2024-03-29 | 北京超弦存储器研究院 | 晶圆光刻参数获取方法和装置及晶圆光刻实现方法和装置 |
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2001
- 2001-11-27 JP JP2001360316A patent/JP4023141B2/ja not_active Expired - Fee Related
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