JP4023141B2 - 位相シフトマスクの検査方法 - Google Patents

位相シフトマスクの検査方法 Download PDF

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Publication number
JP4023141B2
JP4023141B2 JP2001360316A JP2001360316A JP4023141B2 JP 4023141 B2 JP4023141 B2 JP 4023141B2 JP 2001360316 A JP2001360316 A JP 2001360316A JP 2001360316 A JP2001360316 A JP 2001360316A JP 4023141 B2 JP4023141 B2 JP 4023141B2
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Prior art keywords
pattern
phase shift
shift mask
inspection
data
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Expired - Fee Related
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Japanese (ja)
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JP2003162043A5 (zh
JP2003162043A (ja
Inventor
一郎 鏡
透 古溝
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Sony Corp
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Sony Corp
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Priority to JP2001360316A priority Critical patent/JP4023141B2/ja
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Publication of JP2003162043A5 publication Critical patent/JP2003162043A5/ja
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  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2001360316A 2001-11-27 2001-11-27 位相シフトマスクの検査方法 Expired - Fee Related JP4023141B2 (ja)

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JP2001360316A JP4023141B2 (ja) 2001-11-27 2001-11-27 位相シフトマスクの検査方法

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JP2001360316A JP4023141B2 (ja) 2001-11-27 2001-11-27 位相シフトマスクの検査方法

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JP2003162043A JP2003162043A (ja) 2003-06-06
JP2003162043A5 JP2003162043A5 (zh) 2005-06-30
JP4023141B2 true JP4023141B2 (ja) 2007-12-19

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JP2001360316A Expired - Fee Related JP4023141B2 (ja) 2001-11-27 2001-11-27 位相シフトマスクの検査方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9673420B2 (en) 2013-02-08 2017-06-06 Kabushiki Kaisha Toshiba Organic electroluminescent device, illumination apparatus, and illumination system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005026360A (ja) 2003-06-30 2005-01-27 Toshiba Corp フォトマスクの欠陥検査方法、半導体装置の製造方法、およびフォトマスクの製造方法
JP5330019B2 (ja) * 2009-02-18 2013-10-30 ルネサスエレクトロニクス株式会社 マスクパターンの検査方法およびマスクパターン検査装置
CN116203802B (zh) * 2022-10-12 2024-03-29 北京超弦存储器研究院 晶圆光刻参数获取方法和装置及晶圆光刻实现方法和装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9673420B2 (en) 2013-02-08 2017-06-06 Kabushiki Kaisha Toshiba Organic electroluminescent device, illumination apparatus, and illumination system

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JP2003162043A (ja) 2003-06-06

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