JP2003133797A - Part mounting apparatus - Google Patents

Part mounting apparatus

Info

Publication number
JP2003133797A
JP2003133797A JP2002107830A JP2002107830A JP2003133797A JP 2003133797 A JP2003133797 A JP 2003133797A JP 2002107830 A JP2002107830 A JP 2002107830A JP 2002107830 A JP2002107830 A JP 2002107830A JP 2003133797 A JP2003133797 A JP 2003133797A
Authority
JP
Japan
Prior art keywords
component
mounting
head
mounting head
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002107830A
Other languages
Japanese (ja)
Other versions
JP3738747B2 (en
Inventor
Hideyasu Kamikawa
英康 上川
Nobuhiro Hino
信弘 日野
Toshiyuki Ishibe
敏幸 石部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2002107830A priority Critical patent/JP3738747B2/en
Priority to CN 02118368 priority patent/CN1242664C/en
Priority to CN 200410063345 priority patent/CN1290397C/en
Publication of JP2003133797A publication Critical patent/JP2003133797A/en
Application granted granted Critical
Publication of JP3738747B2 publication Critical patent/JP3738747B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors

Abstract

PROBLEM TO BE SOLVED: To provide a part mounting apparatus for reducing a tact time without using a complex driving structure in the part mounting apparatus with a constitution, in which a part held and carried by a mounting head is mounted on a mounting objective base on a mounting stage and a relative position of the part, and the mounting objective base is adjusted on the basis of the imaging positional information while an image pick-up means for imaging the part held by the mounting head and the mounting base on the mounting stage is provided. SOLUTION: A part carrying means 6 for carrying and feeding a part 4 to a mounting head 8 is provided at a shifting path of the mounting head 8 in a movable-in and -out state. At the same time a reflective member 16 included in an image pick-up means 9 is mounted on the part carrying means 6.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、チップ部品などの
電子部品を基板やパッケージなどの装着対象物に実装す
るための装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for mounting electronic parts such as chip parts on a mounting object such as a board or a package.

【0002】[0002]

【従来の技術】図16に、従来におけるこの種の部品装
着装置の一例が示されている。この部品装着装置は、部
品供給部31の部品32を装着ヘッド33の吸着ノズル
34で保持して装着ステージ35の上方にまで搬送し、
装着ヘッド33と装着ステージ35の間に、プリズムや
ハーフミラーなどの反射部材36およびカメラ37など
からなる撮像手段38を進入させ、装着ヘッド33に保
持された部品32および装着ステージ35上の装着対象
物39の位置をそれぞれ撮像して、それぞれの位置情報
を取り込み、撮像手段38を後退移動させた後、取り込
んだ位置情報に基づいて部品32および装着対象物39
の位置ずれを修正し、その後、装着ヘッド33を下降さ
せて、装着ステージ35に載置された装着対象物39に
部品32を押圧装着するように構成されている。
2. Description of the Related Art FIG. 16 shows an example of a conventional component mounting apparatus of this type. The component mounting apparatus holds the component 32 of the component supply unit 31 by the suction nozzle 34 of the mounting head 33 and conveys it to above the mounting stage 35.
An image pickup unit 38 including a reflecting member 36 such as a prism or a half mirror and a camera 37 is inserted between the mounting head 33 and the mounting stage 35, and the component 32 held by the mounting head 33 and the mounting target on the mounting stage 35. The position of the object 39 is imaged, the position information of each is captured, the image pickup means 38 is moved backward, and then the component 32 and the mounting target 39 based on the captured position information.
Is corrected, and then the mounting head 33 is lowered to press and mount the component 32 to the mounting target 39 placed on the mounting stage 35.

【0003】また、従来における上記部品装着方法の一
例が図18に示されている。図18に示しているよう
に、従来の装着方法では、一組の部品装着が完了する
と、装着ヘッド31は次に装着する部品32を受取るた
めに上昇移動し、装着ステージ33は次に装着される装
着対象物34を装着ヘッド31の下に移動させる。この
間、部品32は部品供給部より部品搬送手段35によっ
て装着ヘッド31の下方に搬入され、装着ヘッド31が
下降して、あるいは部品搬送手段35が上昇して、部品
32が装着ヘッド31の吸着ノズル36に受け渡され
る。次に、部品32を保持した装着ヘッド31が再び上
昇するとともに、部品搬送手段35は装着ヘッド31の
昇降移動経路から退避し、その後、部品32を保持した
装着ヘッド31が下降して、部品32を装着対象物34
に装着する。これで1回の部品装着が完了し、以後、上
記作動を繰り返すようにしていた。
FIG. 18 shows an example of a conventional component mounting method. As shown in FIG. 18, in the conventional mounting method, when mounting of one set of components is completed, the mounting head 31 moves upward to receive the component 32 to be mounted next, and the mounting stage 33 is mounted next. The mounting target 34 to be mounted is moved below the mounting head 31. During this time, the component 32 is carried into the lower part of the mounting head 31 from the component supply unit by the component conveying means 35, and the mounting head 31 is lowered or the component conveying means 35 is raised so that the component 32 is a suction nozzle of the mounting head 31. Handed over to 36. Next, the mounting head 31 holding the component 32 rises again, the component transporting means 35 retracts from the ascending / descending movement path of the mounting head 31, and then the mounting head 31 holding the component 32 descends to move the component 32. The target object 34
Attach to. This completes the one-time component mounting, and thereafter, the above operation is repeated.

【0004】[0004]

【発明が解決しようとする課題】しかし、上記図16に
示す従来装置では、装着ヘッドが上下動するのみなら
ず、部品を搬送するために水平移動する構造であるため
に、装着ヘッドの駆動構造が複雑になり、加熱や加圧機
構を備えた大きくて重い装着ヘッドを、高速で上下およ
び水平に駆動することは難しく、そのためにタクトタイ
ムが長くなったり、駆動振動が発生しやすくなる、等の
不具合が生じやすいものであった。また、複雑な駆動機
構を備えた質量の大きい装着ヘッドを高速かつ高精度で
移動させるためには、剛性の高いフレームや大容量の駆
動源が必要となり、設備の大型化を招くものであった。
However, in the conventional apparatus shown in FIG. 16, not only the mounting head moves up and down but also the structure moves horizontally for transporting components. Is complicated, and it is difficult to drive a large and heavy mounting head equipped with a heating and pressurizing mechanism vertically and horizontally at high speed, which leads to a long tact time and easy drive vibration. Was likely to cause a problem. In addition, in order to move a large-volume mounting head equipped with a complicated drive mechanism at high speed and with high accuracy, a highly rigid frame and a large-capacity drive source are required, which leads to an increase in the size of equipment. .

【0005】そこで、図17に示すように、部品搬送手
段40によって部品32の表裏を反転して装着ヘッド3
3に受け渡し、以下、上記例と同様にして位置情報の取
り込みおよび部品装着を行うようにすることで、装着ヘ
ッドを上下移動のみ行わせるように構成したものも提案
されている。
Therefore, as shown in FIG. 17, the front side and the back side of the component 32 are reversed by the component conveying means 40 and the mounting head 3 is mounted.
There is also proposed a configuration in which the mounting head is moved only up and down by handing over the position information and mounting components in the same manner as in the above example.

【0006】この構成によれば、装着ヘッドを上下およ
び水平移動させる先例の構造に見られた不具合は緩和す
ることができるのであるが、部品搬送手段と撮像手段と
の干渉を回避するための時間待ちが必要となり、タクト
タイムの遅れが生じるとともに、多くの駆動源を必要と
して設備コストが高くなる、等の不具合があった。
According to this structure, it is possible to alleviate the problems found in the structure of the prior example in which the mounting head is moved up and down and horizontally, but it is possible to avoid the interference between the component conveying means and the image pickup means. There is a problem that a waiting time is required, a takt time is delayed, a large number of drive sources are required, and the equipment cost is increased.

【0007】また、上記図18に示す従来方法では、装
着ヘッドの1サイクル作動において2回の上下動作が含
まれるために、タクトタイムが長くなり、装着処理能率
を向上する上での妨げとなっていた。
Further, in the conventional method shown in FIG. 18, since the mounting head includes two vertical movements in one cycle operation, the tact time becomes long, which is an obstacle to improving the mounting processing efficiency. Was there.

【0008】そして、このような従来の部品装着方法で
は、タクトタイムの短縮のために装着ヘッドの作動速度
を高める努力も払われているが、装着時に加熱や加圧を
必要とする装着ヘッドの場合、装着ヘッドが大型化およ
び重量増加することで慣性が大きくなるので、高速化に
も限度がある。
In such a conventional component mounting method, efforts have been made to increase the operating speed of the mounting head in order to shorten the tact time, but the mounting head which requires heating or pressure at the time of mounting is required. In this case, since the mounting head becomes large and the weight increases, the inertia becomes large, and thus there is a limit to the speedup.

【0009】さらに、部品搬送手段から装着ヘッドへの
部品の受け渡しにおいて、装着ヘッドが部品搬送手段の
部品まで下降する際に、装着ヘッドの慣性力と重力によ
り部品に大きい衝撃を与えてしまうおそれがある。
Further, in the transfer of the component from the component conveying means to the mounting head, when the mounting head descends to the component of the component conveying means, there is a possibility that a large impact is given to the component due to the inertial force and gravity of the mounting head. is there.

【0010】なお、部品搬送手段から装着ヘッドへの部
品の受け渡し工程で、部品搬送手段を装着ヘッドに向か
って上昇させて部品を受け渡す形態においては、上記の
ように装着ヘッドを下降させて部品を受け渡す形態に比
較して部品に与える衝撃は少なくなると考えられるが、
部品を受け渡すために部品搬送手段を上昇させる時間が
装着ヘッド下降時間とは別に必要となり、タクトタイム
がさらに長くなる。
In the step of delivering the component from the component conveying means to the mounting head, in the mode in which the component conveying means is raised toward the mounting head to deliver the component, the mounting head is lowered as described above. It is thought that the impact on the parts will be less than in the case of handing over,
The time required to raise the component conveying means for delivering the components is required separately from the mounting head lowering time, and the takt time becomes longer.

【0011】本発明は、このような点に着目してなされ
たものであって、駆動構造を複雑化することなく、タク
トタイムの短縮化を図ることができる部品装着装置を提
供することを主たる目的としている。
The present invention has been made in view of such a point, and mainly provides a component mounting apparatus capable of shortening the tact time without complicating the driving structure. Has an aim.

【0012】[0012]

【課題を解決するための手段】本発明では、上記目的を
達成するために、次のように構成している。
In order to achieve the above object, the present invention is configured as follows.

【0013】すなわち、本発明に係る発明の部品装着装
置は、装着ヘッドに保持されて搬送されてきた部品を、
装着ステージ上に搭載された装着対象物に装着するよう
構成するとともに、装着ヘッドに保持された部品および
装着ステージ上の装着対象物を撮像するカメラと、部品
および装着対象物からの光路を屈曲させる反射部材とか
らなる撮像手段を備え、撮像によって得られた位置情報
に基づいて部品および装着対象物の相対位置を修正する
よう構成した部品装着装置において、前記装着ヘッドに
部品を供給搬送する部品搬送手段を装着ヘッドの移動経
路に出退可能に配備するとともに、前記反射部材を部品
搬送手段に装着し、前記カメラを前記反射部材を介して
屈曲させられた部品および装着対象物からの光路上に固
定配置してあることを特徴とする。
That is, the component mounting apparatus of the invention according to the present invention transfers the components held by the mounting head and conveyed.
The camera is configured to be mounted on the mounting target mounted on the mounting stage, and the camera that images the component held by the mounting head and the mounting target on the mounting stage and the optical path from the component and the mounting target are bent. A component mounting apparatus configured to correct a relative position of a component and a mounting target based on position information obtained by imaging, the component mounting apparatus including an image capturing unit including a reflecting member, and supplying and transporting the component to the mounting head. The device is arranged so as to be able to move in and out of the moving path of the mounting head, the reflecting member is mounted on the component conveying unit, and the camera is on the optical path from the component and the mounted object bent through the reflecting member. It is characterized by being fixedly arranged.

【0014】こうした場合、部品搬送手段によって部品
を装着ヘッドに受け渡した後に、部品搬送手段が装着ヘ
ッドから退避する工程で、部品および装着ステージ上の
装着対象物の撮像を行うことが可能となる。撮像手段全
体の重量に対して反射部材は軽量であり、部品搬送手段
の重量増加は少なくてすむ。また、部品搬送手段によっ
て移動させる質量が軽くなるので、部品搬送手段を高速
で移動させることができるうえ、位置決め時の振動の減
衰が速くなるので、位置決めにかかるタクトタイムを短
縮できる。また部品搬送手段そのものを小型にすること
ができる。さらに、カメラを移動させると、カメラの配
線が断線するおそれがあるが、カメラを固定すると、そ
のような不具合はなくなる。部品および装着対象物から
の光路を複数の反射部材によって屈曲させる場合は、部
品搬送手段に装着する反射部材は少なくとも1つあれば
よく、その他の反射部材は部品および装着対象物からの
光路上に固定配置していても良い。
In such a case, it is possible to image the component and the mounting object on the mounting stage in the step of retracting the component from the mounting head after the component is transferred to the mounting head by the component transporting means. Since the reflecting member is light in weight with respect to the weight of the entire image pickup unit, the weight increase of the component conveying unit is small. Further, since the mass to be moved by the component conveying means is lightened, the component conveying means can be moved at high speed and the vibration at the time of positioning is damped quickly, so that the takt time required for positioning can be shortened. Further, the component conveying means itself can be downsized. Furthermore, moving the camera may break the wiring of the camera, but fixing the camera eliminates such a problem. When the optical paths from the component and the mounting object are bent by a plurality of reflecting members, at least one reflecting member may be mounted on the component conveying means, and other reflecting members may be provided on the optical path from the component and the mounting object. It may be fixedly arranged.

【0015】また、本発明の場合、好ましくは、前記部
品搬送手段が装着ヘッドに部品を搬送するまでに、部品
保持状態を光学的に認識する手段を備えてある。
Further, in the case of the present invention, preferably, there is provided means for optically recognizing a component holding state before the component transport means transports the component to the mounting head.

【0016】こうした場合、部品搬送手段が装着ヘッド
に部品を搬送するまでに部品保持状態を光学的に認識で
きるので、部品搬送手段から装着ヘッドへの部品受け渡
しにおいて、装着ヘッドでの部品保持位置を適正にする
ことができる。
In such a case, the component holding state can be optically recognized by the time the component conveying means conveys the component to the mounting head. Therefore, when the component is transferred from the component conveying means to the mounting head, the component holding position on the mounting head can be changed. You can be proper.

【0017】また、本発明の場合、好ましくは、前記撮
像手段を、装着ヘッドに保持された部品が装着対象物に
対向した状態で、部品および装着対象物を同時に撮像す
るよう構成してある。
Further, in the case of the present invention, preferably, the image pickup means is configured to simultaneously image the component and the mounting object in a state where the component held by the mounting head faces the mounting object.

【0018】こうした場合、部品と装着対象物を別々に
撮像する形態に比較して撮像時間を短縮できる。撮像後
に装着ヘッドをXY方向に移動させる必要がないので、
撮像後の位置決め誤差を最小限に抑えることができる。
In such a case, the image pickup time can be shortened as compared with the case where the component and the mounting object are imaged separately. Since it is not necessary to move the mounting head in the XY directions after imaging,
The positioning error after imaging can be minimized.

【0019】また、本発明の場合、好ましくは、前記部
品搬送手段に備えられた前記反射部材の上下方向の振動
振幅を検出する手段を備えてある。
Further, in the case of the present invention, preferably, there is provided means for detecting the vertical vibration amplitude of the reflecting member provided in the component carrying means.

【0020】こうした場合、水平方向にずれがない場
合、もしくはずれが小さい場合、部品と同時に認識部位
を撮像することで、上下方向の振動振幅を測定すること
ができ、部品と装着対象物との相対的な位置ずれを補正
する情報に利用できる。
In such a case, when there is no displacement in the horizontal direction or when the displacement is small, the vibration amplitude in the vertical direction can be measured by imaging the recognition site at the same time as the component, and the component and the object to be mounted can be measured. It can be used as information for correcting relative positional deviation.

【0021】また、本発明の場合、好ましくは、部品と
同時に撮像される認識部位を装着ヘッドに備えてある。
Further, in the case of the present invention, preferably, the mounting head is provided with a recognition portion which is imaged at the same time as the parts.

【0022】こうした場合、撮像時に反射部材に振動が
あっても、反射部材のずれを認識することができる。つ
まり、図13(b)に示すような反射部材の水平方向で
の振動については、カメラに取り込まれる部品と装着対
象物の像のずれ方向とずれ量δは同じになるために、部
品と装着対象物の相対的な位置ずれはないが、図13
(a)に示すような上下方向の振動については、カメラ
に取り込まれる部品と装着対象物の像のずれ方向とずれ
量δは同じであるが、ずれの方向が逆になるために、部
品と装着対象物の相対的な位置ずれは2δとなる。そこ
で、反射部材の上下方向の振動振幅δを検出すること
で、部品と装着対象物の相対的位置ずれ2δ分を補正す
ることが可能となる。
In such a case, even if the reflecting member vibrates during image pickup, the deviation of the reflecting member can be recognized. That is, as for the horizontal vibration of the reflecting member as shown in FIG. 13B, the deviation direction δ and the deviation direction δ of the image of the component taken into the camera and the object to be attached are the same. Although there is no relative displacement of the object, FIG.
Regarding vertical vibrations as shown in (a), the displacement direction δ and the displacement direction δ of the image of the component to be mounted on the camera and the component to be mounted are the same, but the displacement direction is opposite. The relative displacement of the mounting target is 2δ. Therefore, by detecting the vertical vibration amplitude δ of the reflecting member, it becomes possible to correct the relative positional deviation 2δ between the component and the mounting target.

【0023】本発明の場合、好ましくは、装着対象物に
対して接近および離間移動可能な前記装着ヘッドと、ヘ
ッド移動軌跡内に出退可能かつヘッド移動方向に移動可
能な部品搬送手段と、装着ヘッドが移動中に部品搬送手
段をヘッド移動方向に移動させながら両者を相対接近さ
せるように、部品搬送手段および装着ヘッドの少なくと
もいずれかの移動速度を制御する制御手段とを備えてあ
ることを特徴とする。
In the case of the present invention, preferably, the mounting head is capable of moving toward and away from an object to be mounted, component transport means capable of moving in and out of a head movement locus and moving in the head movement direction, and mounting. And a control means for controlling the moving speed of at least one of the component conveying means and the mounting head so that the component conveying means moves in the head moving direction while the head is moving so as to bring them closer to each other. And

【0024】こうした場合、例えば、1回の装着作動が
完了した後、装着ヘッドが装着対象物から離間移動する
工程において、ヘッド移動軌跡内に入った部品搬送手段
をヘッド移動方向に移動させながら装着ヘッドに相対接
近させることで、衝撃少なく部品を部品搬送手段から装
着ヘッドに受け渡すことができる。
In such a case, for example, in the step of moving the mounting head away from the mounting object after one mounting operation is completed, the mounting means moves while moving the component conveying means within the head movement locus in the head movement direction. By moving the parts relatively close to the head, the parts can be transferred from the parts conveying means to the mounting head with less impact.

【0025】また、本発明の部品装着装置は、好ましく
は、前記部品搬送手段を前記ヘッド移動方向に対応する
上下方向に移動させるために部品装着装置の基台部に対
して固定的に取り付けてある上下駆動手段と、該上下駆
動手段によって上下方向に移動可能な上下スライド部
と、該上下スライド部とともに上下動し、前記上下スラ
イド部に対して左右方向に移動可能な第1連結部と、前
記部品搬送手段を前記ヘッド移動軌跡内への出退方向に
対応する左右方向に移動させるために前記第1連結部を
左右方向に移動させる左右方向駆動手段と、該左右方向
駆動手段によって駆動され、左右方向に移動可能な左右
スライド部と、前記第1連結部と前後方向に摺動可能
で、かつ前記左右スライド部と上下方向に摺動可能であ
る第2連結部とを有するとともに、前記部品搬送手段を
前記第2連結部に設けていることを特徴とする。
Further, the component mounting apparatus of the present invention is preferably fixedly mounted on a base portion of the component mounting apparatus in order to move the component conveying means in a vertical direction corresponding to the head moving direction. A certain up-and-down driving means, an up-and-down sliding part that can move in the up-and-down direction by the up-and-down driving means, and a first connecting part that moves up and down together with the up-and-down sliding part and can move in the left-and-right direction with respect to the up-and-down sliding part, A left-right direction driving means for moving the first connecting portion in the left-right direction in order to move the component carrying means in the left-right direction corresponding to the direction of movement in and out of the head movement locus; A left and right slide part that is movable in the left and right direction, and a second connection part that is slidable in the front-rear direction with the first connection part and that is vertically slidable with the left and right slide part. Together, characterized in that it provided the component conveying means to the second connecting portion.

【0026】こうした場合、部品搬送手段および該部品
搬送手段に設けられる撮像手段の構成要素の一部は、上
下方向、左右方向および前後方向に移動可能であり、か
つ、その移動させるための可動質量を極力小さくできる
ので部品搬送動作においての部品搬送手段の移動タクト
時間を短縮できる。
In such a case, some of the components of the component conveying means and the image pickup means provided in the component conveying means are movable in the vertical direction, the horizontal direction, and the front-back direction, and the movable mass for moving them. Since it can be made as small as possible, the movement tact time of the component conveying means in the component conveying operation can be shortened.

【0027】[0027]

【発明の実施の形態】以下、本発明の実施の態様を図面
に基づいて説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

【0028】図1は、本発明に係る部品装着装置の概略
構成を示す斜視図、また、図2は、概略構成を示す正面
図である。この部品装着装置における装置フレーム1の
上面には、装着対象物の一例であるパッケージ2を搭載
支持(載置状態にしているものも含む)する左右2台の
装着ステージ3、および、チップ部品などの部品4を整
列収容した部品供給部5が装備されるとともに、装置フ
レーム1の上方には、部品搬送手段としての部品搬送ス
テージ6、部品供給部5から取出した部品4を部品搬送
ステージ6に供給する部品供給ユニット7、部品搬送ス
テージ6に供給された部品4を受取って装着ステージ3
上のパッケージ2に装着する装着ヘッド8、装着前の部
品4とパッケージ2の位置情報(位置、姿勢、形状な
ど)を取り込むための撮像手段9、などが配備された構
造となっており、各部の詳細な構成および機能を以下に
説明する。
FIG. 1 is a perspective view showing a schematic structure of a component mounting apparatus according to the present invention, and FIG. 2 is a front view showing a schematic structure. On the upper surface of the device frame 1 in this component mounting apparatus, two left and right mounting stages 3 for mounting and supporting (including a mounted state) a package 2 which is an example of a mounting target, and chip components, etc. Is equipped with a component supply unit 5 in which the components 4 are aligned and housed, and above the apparatus frame 1, a component transport stage 6 as a component transport means, and a component 4 taken out from the component supply unit 5 to the component transport stage 6. Component supply unit 7 to be supplied, component 4 supplied to the component transfer stage 6 to receive and mount stage 3
The structure is provided with a mounting head 8 to be mounted on the upper package 2, an imaging means 9 for capturing the positional information (position, posture, shape, etc.) of the component 4 and the package 2 before mounting, and the like. The detailed configuration and function of the will be described below.

【0029】2台の各装着ステージ3には、パッケージ
2を整列装填したトレイ10が脱着可能に搭載されると
ともに、そのトレイ搭載部位にはヒータ11が内蔵され
ており、トレイ10を介してパッケージ2が適度に加熱
されるようになっている。
A tray 10 on which the packages 2 are aligned and loaded is detachably mounted on each of the two mounting stages 3, and a heater 11 is built in the tray mounting portion. 2 is heated appropriately.

【0030】そして、各装着ステージ3は、制御装置3
0からの指令によって作動する図示しない駆動手段に接
続されており、装着ヘッド8の下方の装着エリアと、こ
れから左右に外れた待機位置とに亘って左右移動可能、
かつ、前後方向にも移動可能に、構成されている。
Each mounting stage 3 is connected to the control device 3
It is connected to a driving means (not shown) that operates according to a command from 0, and can be moved left and right over a mounting area below the mounting head 8 and a standby position that is deviated to the left and right from the mounting area.
Moreover, it is configured to be movable in the front-back direction.

【0031】図2に示すように、トレイ10は、加熱に
よって反ることがないように、その上面に配備されたト
レイ押さえ部材12によって適度の荷重で装着ステージ
3に押圧されている。トレイ押さえ部材12は、パッケ
ージ2を露出させる開口13が形成されるとともに、ト
レイ押さえ部材12の下面の適所には多数の突起14が
設けられ、トレイ10を複数箇所において点接触状態で
押圧している。このようにトレイ10を点接触状態で押
圧することで、トレイ押さえ部材12自体が加熱などに
よって反り返り変形するのを抑制し、もって、トレイ1
0が装着ステージ3に全面的に密着されて、ヒータ11
からの熱が効率よくトレイ10に伝達されて、各パッケ
ージ2が均一に加熱されるようになっている。なお、本
発明は、トレイ10とパッケージ2とで組み合わせたも
のに部品供給するものに限定されるのでなく、プリント
基板や、アルミナ基板などを装着対象物として部品供給
するものでもよい。プリント基板などを装着対象物とし
た場合、基板上の導体電極を部品装着のための撮像にお
ける位置合わせマークとしてもよいとともに、専用の位
置合わせマークを設けてもよい。
As shown in FIG. 2, the tray 10 is pressed against the mounting stage 3 by an appropriate load by the tray pressing member 12 provided on the upper surface of the tray 10 so as not to be warped by heating. The tray pressing member 12 has an opening 13 for exposing the package 2 and a large number of protrusions 14 provided at appropriate places on the lower surface of the tray pressing member 12 to press the tray 10 at a plurality of points in a point contact state. There is. By pressing the tray 10 in the point contact state in this manner, the tray pressing member 12 itself is prevented from warping and deforming due to heating or the like.
0 is completely adhered to the mounting stage 3 and the heater 11
The heat from is efficiently transmitted to the tray 10 so that each package 2 is uniformly heated. It should be noted that the present invention is not limited to supplying components to the combination of the tray 10 and the package 2, and may be a component supplying components such as a printed circuit board or an alumina substrate. When a printed circuit board or the like is used as the mounting target, the conductor electrodes on the circuit board may be used as alignment marks for image pickup for component mounting, or dedicated alignment marks may be provided.

【0032】部品供給ユニット7は、制御装置30に接
続された図示しない駆動手段によって上下および水平移
動可能であり、部品供給部5に整列収容された部品4を
吸着ノズル15で1個づつ吸着保持して搬出し、部品搬
送ステージ6の上面に供給するよう構成されている。
The component supply unit 7 can be moved up and down and horizontally by a driving means (not shown) connected to the control device 30, and the components 4 lined up and accommodated in the component supply unit 5 are suction-held one by one by the suction nozzle 15. Then, it is carried out and supplied to the upper surface of the component carrying stage 6.

【0033】部品搬送ステージ6も、制御装置30から
の指令によって作動する後述する駆動手段A(図1では
図示していない)に接続されており、部品供給ユニット
7によって供給された部品4を装着ヘッド8の上下移動
軌跡内に搬入して、装着ヘッド8に受け渡すよう上下お
よび左右に移動可能に構成されている。また、部品搬送
ステージ6の側部には、撮像手段9の一部を構成する反
射部材16(プリズム、反射鏡、ハーフミラーなどが利
用されている)が備えられている。
The component carrying stage 6 is also connected to a drive means A (not shown in FIG. 1) which will be described later and which operates according to a command from the control device 30, and mounts the component 4 supplied by the component supply unit 7. The head 8 is configured so that it can be moved up and down and left and right so as to be carried into the vertical movement locus and delivered to the mounting head 8. A reflecting member 16 (a prism, a reflecting mirror, a half mirror, or the like is used) that constitutes a part of the imaging unit 9 is provided on a side portion of the component carrying stage 6.

【0034】前記装着ヘッド4は、部品搬送ステージ6
によって上下移動軌跡内に搬入された部品4を受取る吸
着ノズルなどの部品保持部17を備え、上方の待機位置
と下方の装着位置とにわたって上下移動可能に構成され
るとともに、保持した部品4の角度を変更するために部
品保持部17が縦軸心周りに回転制御可能に構成されて
いる。
The mounting head 4 has a component transfer stage 6
Is provided with a component holder 17 such as a suction nozzle that receives the component 4 carried in the vertical movement locus, and is configured to be vertically movable between an upper standby position and a lower mounting position, and the angle of the retained component 4 The component holder 17 is configured to be rotationally controllable about the vertical axis in order to change

【0035】撮像手段9は、装着ヘッド4の部品保持部
17に保持された部品4と、トレイ10上のパッケージ
2を、部品搬送ステージ6に備えた反射部材16および
位置固定の反射部材18を介して撮像する部品用のカメ
ラ19とパッケージ用のカメラ20とで構成されてい
る。
The image pickup means 9 includes the component 4 held by the component holder 17 of the mounting head 4, the package 2 on the tray 10, the reflecting member 16 provided on the component carrying stage 6, and the reflecting member 18 for fixing the position. It is composed of a camera 19 for a component and a camera 20 for a package, which are imaged through.

【0036】本発明に係る部品装着装置の基本的な構成
は以上のようである。
The basic structure of the component mounting apparatus according to the present invention is as described above.

【0037】次に、部品搬送ステージ6を上下左右前後
に移動操作する駆動手段Aについて、図14,図15に
基づいて説明する。図14は、駆動手段Aの全体を概略
的に示す斜視図であり、図15は、駆動手段Aのうち要
部の概略構造を示す斜視図である。
Next, the drive means A for moving the component carrying stage 6 up, down, left and right will be described with reference to FIGS. 14 and 15. FIG. 14 is a perspective view schematically showing the entire driving means A, and FIG. 15 is a perspective view showing a schematic structure of a main part of the driving means A.

【0038】図14,図15に示すように、前後駆動手
段としてのY軸ステージ26および上下駆動手段として
のZ軸ステージ27は、基台部としてのフレーム28
(前記装置フレーム1に固定されている)に設置され、
左右駆動手段としてのX軸ステージ29はY軸ステージ
26のスライド部(詳細は図示せず)に設置されてい
る。X軸ステージ29、Y軸ステージ26、および、Z
軸ステージ27のそれぞれにはリニアアクチュエータが
駆動手段として備えられている。
As shown in FIGS. 14 and 15, a Y-axis stage 26 as a front-back driving means and a Z-axis stage 27 as a vertical driving means are provided with a frame 28 as a base portion.
(Fixed to the device frame 1),
The X-axis stage 29 as a left-right driving unit is installed on a slide portion (details not shown) of the Y-axis stage 26. X-axis stage 29, Y-axis stage 26, and Z
Each of the shaft stages 27 is equipped with a linear actuator as a driving means.

【0039】X軸ステージ29はY軸ステージ26によ
ってY軸方向(前後方向)に移動するため、X軸ステー
ジ29のリニアガイドレール30は、Y軸方向に移動可
能となっている。
Since the X-axis stage 29 is moved in the Y-axis direction (front-back direction) by the Y-axis stage 26, the linear guide rail 30 of the X-axis stage 29 is movable in the Y-axis direction.

【0040】したがって、このリニアガイドレール30
で摺動案内され、かつX軸ステージ29によって左右方
向に移動操作される左右スライド部41は、X軸方向
(左右方向)およびY軸方向に移動可能である。
Therefore, this linear guide rail 30
The left and right slide portion 41, which is slidably guided by and is moved in the left-right direction by the X-axis stage 29, is movable in the X-axis direction (left-right direction) and the Y-axis direction.

【0041】左右スライド部41に取り付けてあるリニ
アガイドレール42は、第2連結部43をZ軸方向(上
下方向)に摺動案内可能に構成している。
The linear guide rail 42 attached to the left and right slide portions 41 is constructed so that the second connecting portion 43 can be slidably guided in the Z-axis direction (vertical direction).

【0042】そして、前記Z軸ステージ27によって上
下方向に移動操作される上下スライド部44が設けられ
ているとともに、この上下スライド部44には、第1連
結部46を左右方向に摺動案内するためのリニアガイド
レール45が設けられている。
A vertical slide portion 44 that is vertically moved by the Z-axis stage 27 is provided, and the first connecting portion 46 is slidably guided in the horizontal direction on the vertical slide portion 44. A linear guide rail 45 is provided for this purpose.

【0043】したがって、このリニアガイドレール45
で案内される第1連結部46は、リニアガイドレール4
5がZ軸方向に移動するから、X軸およびZ軸方向に移
動可能となっている。
Therefore, this linear guide rail 45
The first connecting portion 46 guided by is the linear guide rail 4
Since 5 moves in the Z-axis direction, it can move in the X-axis and Z-axis directions.

【0044】この第1連結部46と、前記第2連結部4
3とは、リニアガイドレール47を介して互いが相対的
に前後方向で摺動案内される状態で結合している。
The first connecting portion 46 and the second connecting portion 4
3 are coupled to each other via linear guide rails 47 in a state of being relatively slidably guided in the front-rear direction.

【0045】部品搬送ステージ6は、第2連結部43の
前後方向での先端部に連結されている。
The component carrying stage 6 is connected to the front end portion of the second connecting portion 43 in the front-rear direction.

【0046】したがって、第2連結部43へのZ軸方向
の駆動力は、Z軸ステージ27から上下スライド部4
4,リニアガイドレール45、第1連結部46、リニア
ガイドレール47を通して伝えられる。
Therefore, the driving force in the Z-axis direction to the second connecting portion 43 is applied from the Z-axis stage 27 to the vertical slide portion 4.
4, transmitted through the linear guide rail 45, the first connecting portion 46, and the linear guide rail 47.

【0047】なお、Y軸方向の移動範囲は、Y軸での位
置調整を行う小範囲に限定されていて、X軸方向やZ軸
方向の移動範囲よりも小さく設定されている。
The range of movement in the Y-axis direction is limited to a small range for position adjustment in the Y-axis, and is set smaller than the range of movement in the X-axis direction and Z-axis direction.

【0048】以上の駆動手段Aの構成により、部品搬送
ステージ6に取り付けた部品載置部6aおよびプリズム
からなる反射部材16は、X軸ステージ29、Y軸ステ
ージ26、Z軸ステージ27によって、X軸、Y軸、Z
軸方向に移動可能であり、かつ、可動質量を小さくで
き、タクトタイムの短縮を図れる。
With the configuration of the driving means A described above, the component mounting portion 6a attached to the component carrying stage 6 and the reflecting member 16 including the prism are moved by the X-axis stage 29, the Y-axis stage 26, and the Z-axis stage 27 to the X-axis stage 29. Axis, Y axis, Z
It can move in the axial direction, the movable mass can be reduced, and the tact time can be shortened.

【0049】すなわち、Z軸ステージ27は、主に、上
下スライド部44、連結部47、第2連結部43、部品
搬送ステージ6を可動質量とするものであって、X軸ス
テージ29やY軸ステージ26も含めてZ軸方向へ移動
させるのでない。また、Y軸ステージ26は、主に、X
軸ステージ29、左右スライド部41、第2連結部4
3、部品搬送ステージ6を可動質量とするものであっ
て、Z軸ステージ27も含めてY軸方向へ移動させるも
のでない。また、X軸ステージ29は、主に、左右スラ
イド部41、第1連結部46、第2連結部43、部品搬
送ステージ6を可動質量とするものであって、Z軸ステ
ージ27も含めてX軸方向へ移動させるものでない。
That is, the Z-axis stage 27 mainly has the vertical slide portion 44, the connecting portion 47, the second connecting portion 43, and the component carrying stage 6 as movable masses, and includes the X-axis stage 29 and the Y-axis. The stage 26 is not moved in the Z-axis direction. The Y-axis stage 26 is mainly used for X-axis.
Axis stage 29, left and right slide portion 41, second connecting portion 4
3. The component transfer stage 6 is a movable mass and is not moved in the Y axis direction including the Z axis stage 27. The X-axis stage 29 mainly has the left and right slide portions 41, the first connecting portion 46, the second connecting portion 43, and the component carrying stage 6 as movable masses, and the X-axis stage 27 and the X-axis stage 27 are included. It does not move in the axial direction.

【0050】したがって、X軸ステージ29、Y軸ステ
ージ26、Z軸ステージ27それぞれに対する可動部分
の小型化を図ることができ、よって、小型軽量な可動部
分を駆動することになるため、部品搬送手段6を軽快か
つ迅速に作動させることが可能であって、タクトタイム
の短縮を図れる。
Therefore, the moving parts for the X-axis stage 29, the Y-axis stage 26, and the Z-axis stage 27 can be downsized, and the small and lightweight moving parts can be driven. 6 can be operated lightly and quickly, and the tact time can be shortened.

【0051】次にその部品装着作動を図4〜図9に基づ
いて工程順に説明する。なお、部品供給ユニット7から
部品供給ステージ6への移し替えは、部品4を同じ姿勢
で移し替えるものに限らず、図17のように反転してか
ら移し替えても構わない。
Next, the component mounting operation will be described in the order of steps with reference to FIGS. The transfer from the component supply unit 7 to the component supply stage 6 is not limited to the transfer of the component 4 in the same posture, and the component 4 may be inverted and then transferred as shown in FIG.

【0052】(1)図4に示すように、パケージ2への
部品4の装着が完了したことが確認されると、同図中の
仮想線で示すように、装着ヘッド8が上昇を開始すると
ともに、部品搬送ステージ6が装着ヘッド8の移動経路
に向けて進出する。この場合、部品搬送ステージ6の水
平移動経路の上方には、搬送される部品4を撮像するカ
メラ23が配備されており、取り込まれた撮像情報は、
部品4を装着ヘッド8に受け渡す際の位置合わせに利用
される。このカメラ23は、部品搬送ステージ6が装着
ヘッド8に部品4を搬送するまでに、部品保持状態を光
学的に認識する手段を構成している。この撮像結果に基
づいて部品4を装着ヘッド8へ受け渡す前の部品4位置
の修正を部品搬送ステージ6で行う。
(1) When it is confirmed that the mounting of the component 4 into the package 2 is completed as shown in FIG. 4, the mounting head 8 starts to rise as shown by the phantom line in FIG. At the same time, the component transfer stage 6 advances toward the movement path of the mounting head 8. In this case, a camera 23 for picking up an image of the conveyed component 4 is provided above the horizontal movement path of the component conveying stage 6, and the captured image information is
It is used for alignment when the component 4 is transferred to the mounting head 8. The camera 23 constitutes means for optically recognizing the component holding state before the component transport stage 6 transports the component 4 to the mounting head 8. The position of the component 4 before the component 4 is transferred to the mounting head 8 is corrected on the component transfer stage 6 based on the result of this imaging.

【0053】(2)図5に示すように、装着ヘッド8が
上昇すると、装着ステージ3は水平方向にピッチ移動し
て、次に装着するパッケージ2を装着ヘッド8の直下位
置にセットする。
(2) As shown in FIG. 5, when the mounting head 8 rises, the mounting stage 3 moves horizontally in the pitch and sets the package 2 to be mounted next to the position directly below the mounting head 8.

【0054】(3)装着ヘッド8が或る高さまで上昇す
ると、部品4を保持して水平方向に移動してきた部品搬
送ステージ6が上昇中の装着ヘッド8の直下にもぐり込
みながら上昇作動する。
(3) When the mounting head 8 rises to a certain height, the component carrying stage 6 which holds the component 4 and moves in the horizontal direction moves upward while slipping directly under the mounting head 8 which is being raised.

【0055】(4)ここで、制御装置30を作動させ
て、装着ヘッド8の上昇速度の減速制御、あるいは、部
品搬送ステージ6の上昇速度の増速制御、の少なくとも
いずれかを行うことで、装着ヘッド8と部品搬送ステー
ジ6との上昇速度差を次第に少なくし、図6に示すよう
に、装着ヘッド8の上昇作動中に装着ヘッド8に部品搬
送ステージ6を追いつかせることで、部品4を装着ヘッ
ド8の部品保持部17に受け渡す。
(4) Here, the control device 30 is operated to perform at least either deceleration control of the ascending speed of the mounting head 8 or acceleration control of the ascending speed of the component carrying stage 6. By gradually reducing the rising speed difference between the mounting head 8 and the component conveying stage 6, as shown in FIG. 6, the mounting head 8 is made to catch up with the component conveying stage 6 during the raising operation of the mounting head 8, so that the component 4 is removed. It is delivered to the component holder 17 of the mounting head 8.

【0056】(5)図7に示すように、部品受け渡しが
行われて装着ヘッド8が上方待機位置に到達すると、部
品搬送ステージ6は下降しながら横移動し、装着ヘッド
8に保持された部品4と、その直下に位置するパッケー
ジ2との間に反射部材16を位置させ、部品用カメラ1
9とパッケージ用カメラ20によって部品4およびパッ
ケージ2をそれぞれ撮像する。
(5) As shown in FIG. 7, when the mounting head 8 reaches the upper standby position after the components are transferred, the component transfer stage 6 moves laterally while descending, and the components held by the mounting head 8 are moved. 4 and the package 2 located immediately below the reflection member 16 so that the component camera 1
The component 4 and the package 2 are imaged by the camera 9 and the package camera 20, respectively.

【0057】この場合、反射部材16から部品用カメラ
19までの光路の長さと、反射部材16からパッケージ
用カメラ20までの光路の長さとが等しくなる位置で撮
像することが、図12に示すように、反射部材16の上
下への回転振動に対する撮像誤差を少なくする上で望ま
しい。
In this case, as shown in FIG. 12, the image is taken at a position where the length of the optical path from the reflecting member 16 to the component camera 19 and the length of the optical path from the reflecting member 16 to the packaging camera 20 are equal. In addition, it is desirable to reduce the imaging error due to the vertical vibration of the reflecting member 16.

【0058】また、この撮像工程に入ると、常時は退避
していた透明板21が水平に進出移動されてパッケージ
4を上方から覆い、パッケージ加熱用の熱で暖められた
空気の揺らぎによる撮像誤差を抑制する。また、パッケ
ージ2を覆った透明板21の上方に送風装置22からの
風を吹き付けて、透明板21の上方での空気の揺らぎを
除去することで、一層撮像誤差を少なくすることができ
る。この場合、送風装置22からの風は透明板21で遮
られて直接にパッケージ2に吹き付けられることがない
ので、パッケージ2の温度が低下することはない。
Further, in this image pickup process, the transparent plate 21 which is normally retracted is horizontally moved to cover the package 4 from above, and an image pickup error due to fluctuation of air warmed by the heat for heating the package. Suppress. Further, by blowing the air from the air blower 22 above the transparent plate 21 that covers the package 2 to remove the fluctuation of the air above the transparent plate 21, the imaging error can be further reduced. In this case, the wind from the blower 22 is not blocked by the transparent plate 21 and is not directly blown to the package 2, so that the temperature of the package 2 does not decrease.

【0059】そして、上記撮像は複数回行われ、その撮
像データを制御装置30内に記憶設定された所定の手順
によって平均化処理することで、更に位置情報の精度の
向上が図られる。
The image pickup is performed a plurality of times, and the image pickup data is averaged according to a predetermined procedure stored and set in the control device 30 to further improve the accuracy of the position information.

【0060】(6)得られた位置情報は制御装置30内
で演算解析されて、部品4とパッケージ2との位置ずれ
が割り出される。そのずれ量に基づいて、装着ヘッド8
における部品保持部17の回転、および、装着ステージ
3の水平方向での二次元移動によってその位置ずれが修
正される。
(6) The obtained positional information is arithmetically analyzed in the control device 30 to determine the positional deviation between the component 4 and the package 2. Based on the displacement amount, the mounting head 8
The positional deviation is corrected by the rotation of the component holder 17 and the two-dimensional movement of the mounting stage 3 in the horizontal direction.

【0061】(7)図8に示すように、部品搬送ステー
ジ6は部品供給を受ける待機位置まで水平復帰移動する
とともに、装着ヘッド8は下降作動して、加熱されてい
るパッケージ2に部品4が押圧装着される。
(7) As shown in FIG. 8, the component carrying stage 6 is horizontally returned to the standby position for receiving the component supply, and the mounting head 8 is moved downward to place the component 4 on the heated package 2. It is installed by pressing.

【0062】(8)以上で1回の部品装着処理が完了
し、以後上記作動を繰り返す。
(8) With the above, one component mounting process is completed, and the above operation is repeated thereafter.

【0063】(9)一方の装着ステージ3での部品装着
処理が行われている間、他方の装着ステージ3において
は次に処理されるパッケージ2の予備加熱が行われる。
(9) While the component mounting process is being performed on the one mounting stage 3, the package 2 to be processed next is preheated on the other mounting stage 3.

【0064】(10)そして、一方の装着ステージ3で
の部品装着処理が完了すると、図9に示すように、その
装着ステージ3は装着ヘッド下方の装着エリアから外れ
た待機位置に移動するとともに、予備過熱処理を行いな
がら待機していた他方の装着ステージ3が装着エリアに
進出移動され、他方の装着ステージ3に搭載されたパッ
ケージ群への部品装着処理が上記手順で行われる。
(10) When the component mounting process on one of the mounting stages 3 is completed, as shown in FIG. 9, the mounting stage 3 moves to the standby position outside the mounting area below the mounting head and The other mounting stage 3 waiting while performing the preliminary overheat treatment is moved to the mounting area, and the component mounting process for the package group mounted on the other mounting stage 3 is performed by the above procedure.

【0065】(11)そして、装着エリアから待機位置
に退避移動した装着ステージ3においては、部品装着処
理の済んだトレイ10の搬出と、新しいパッケージ2を
搭載したトレイ10の装填が行われる。
(11) Then, on the mounting stage 3 retracted from the mounting area to the standby position, the tray 10 after the component mounting process is carried out and the tray 10 on which the new package 2 is mounted is loaded.

【0066】〔他の実施形態〕図10および図11に、
本発明の他の実施形態が示されている。
[Other Embodiments] FIG. 10 and FIG.
Another embodiment of the invention is shown.

【0067】この例の基本的な構成は、先の例と同様で
あるが、以下の点で相違している。つまり、装着ヘッド
8の吸着ノズル17近くに、部品4と同時に撮像できる
認識部位24を備えてあり、図13(a)に示すよう
に、反射部材16が上下方向に振動した際のずれ量δを
測定して、部品4と装着対象物2との相対的な位置ずれ
量2δ分を補正するのに利用する。
The basic structure of this example is the same as that of the previous example, but is different in the following points. That is, a recognition portion 24 that can be imaged at the same time as the component 4 is provided near the suction nozzle 17 of the mounting head 8, and as shown in FIG. 13A, the displacement amount δ when the reflecting member 16 vibrates in the vertical direction. Is used to correct the relative positional deviation amount 2δ between the component 4 and the mounting target 2.

【0068】また、部品搬送ステージ6には、反射部材
16の上下方向の振動振幅を検出する手段の一例として
の加速度センサ25を装着してあり、検出結果を積分演
算することで、撮影時における反射部材16の上下方向
のずれ量を測定することができる。なお、反射部材の上
下方向の振動振幅を検出する手段としては、振動振幅を
直接に検出する変位センサを利用することもできる。
An acceleration sensor 25 as an example of means for detecting the vertical vibration amplitude of the reflecting member 16 is mounted on the component carrying stage 6, and the detection result is integrated to calculate the time of photographing. It is possible to measure the vertical shift amount of the reflecting member 16. A displacement sensor that directly detects the vibration amplitude can also be used as a means for detecting the vibration amplitude in the vertical direction of the reflecting member.

【0069】また、部品搬送ステージ6の装着ヘッド8
の上下移動経路に対する進退移動方向を、この部品搬送
ステージ6に備えた反射部材16への入射光および反射
光の光軸と直交する方向に設定されている。
Further, the mounting head 8 of the component carrying stage 6
The forward / backward movement direction with respect to the vertical movement path is set to a direction orthogonal to the optical axes of the incident light and the reflected light on the reflecting member 16 provided in the component carrying stage 6.

【0070】[0070]

【発明の効果】以上の説明から明らかなように、本発明
によれば以下に示すような効果が期待できる。
As is apparent from the above description, according to the present invention, the following effects can be expected.

【0071】請求項1に係る発明の部品装着装置によれ
ば、撮像手段を構成する反射部材を部品搬送手段に装着
することで、部品を装着ヘッドに受け渡した後に、部品
搬送手段を退避させながら、部品と装着対象物を撮像す
ることができ、部品受け渡しから撮像までに要する時間
が短くなり、タクトタイムの短縮化に有効となる。ま
た、撮像手段の反射部材を移動させる駆動構造が部品搬
送手段と共通となるので、設備の小型化およびコスト低
減にも有効となる。さらに、カメラを移動させると、カ
メラの配線が断線するおそれがあるが、カメラを反射部
材を介して屈曲させられた部品および装着対象物からの
光路上に固定配置しているので、そのような不具合はな
くなる。また、撮像手段のうち、反射部材が部品搬送手
段に装着されていて、カメラは別途固定されているか
ら、部品搬送手段全体の重量増加および大型化を抑制で
きる。
According to the component mounting apparatus of the first aspect of the invention, by mounting the reflecting member constituting the image pickup means on the component conveying means, the component conveying means is retracted after the component is delivered to the mounting head. The parts and the object to be mounted can be imaged, and the time required from the delivery of the parts to the imaging is shortened, which is effective in shortening the tact time. Further, since the drive structure for moving the reflecting member of the image pickup means is common to the component carrying means, it is effective for downsizing of equipment and cost reduction. Further, when the camera is moved, the wiring of the camera may be broken, but since the camera is fixedly arranged on the optical path from the component bent through the reflecting member and the mounting target, The defect disappears. Further, in the image pickup means, the reflecting member is attached to the component conveying means, and the camera is separately fixed, so that it is possible to suppress an increase in weight and an increase in size of the entire component conveying means.

【0072】請求項2に係る発明の部品装着装置によれ
ば、装着ヘッドでの部品保持位置を適正にすることがで
き、部品装着精度の向上を図ることができる。
According to the component mounting apparatus of the second aspect of the invention, the component holding position on the mounting head can be made appropriate, and the component mounting accuracy can be improved.

【0073】請求項3に係る発明の部品装着装置によれ
ば、部品と装着対象物を同時に撮像することで、タクト
タイムの一層の短縮化を図ることができる。また、撮像
後に装着ヘッドをXY方向に移動させる必要がないの
で、撮像後の位置決め誤差を最小限に抑えることができ
る。
According to the component mounting apparatus of the third aspect of the present invention, the tact time can be further shortened by simultaneously imaging the component and the mounting target. Further, since it is not necessary to move the mounting head in the XY directions after the image pickup, the positioning error after the image pickup can be minimized.

【0074】請求項4に係る発明の部品装着装置によれ
ば、部品搬送手段に装着した反射部材の上下方向のずれ
による撮像誤差を低減できるので、装着精度の向上を図
ることができる。
According to the component mounting apparatus of the fourth aspect of the present invention, the image pickup error due to the vertical displacement of the reflecting member mounted on the component conveying means can be reduced, so that the mounting accuracy can be improved.

【0075】請求項5に係る発明の部品装着装置によれ
ば、部品搬送手段に装着した反射部材の上下方向のずれ
による撮像誤差を低減できるので、装着精度の向上を図
ることができる。
According to the component mounting apparatus of the fifth aspect of the present invention, the image pickup error due to the vertical displacement of the reflecting member mounted on the component conveying means can be reduced, so that the mounting accuracy can be improved.

【0076】請求項6に係る発明の部品装着装置によれ
ば、装着ヘッドの本来の移動時間内に部品受け渡しを行
うので、タクトタイムの短縮化を図ることができ、処理
能率の向上に有効となる。また、部品搬送手段から装着
ヘッドへの部品の受け渡し工程において、部品搬送手段
と装着ヘッドの相対移動速度を小さくしながら部品を受
け渡すことができるので、部品への衝撃ダメージを少な
くすることができる。
According to the component mounting apparatus of the sixth aspect of the invention, the components are delivered within the original movement time of the mounting head, so that the tact time can be shortened and the processing efficiency can be improved. Become. Further, in the step of delivering the component from the component transporting means to the mounting head, the component can be delivered while reducing the relative movement speed of the component transporting means and the mounting head, so that the impact damage to the component can be reduced. .

【0077】請求項7に係る発明の部品装着装置によれ
ば、部品搬送手段および該部品搬送手段に設けられる撮
像手段の構成要素の一部は、上下方向、左右方向および
前後方向に移動可能であり、かつ、その移動させるため
の可動質量を極力小さくできるので部品搬送動作におい
ての部品搬送手段の移動タクト時間を短縮できる。
According to the component mounting apparatus of the seventh aspect of the invention, a part of the components of the component conveying means and the image pickup means provided in the component conveying means are movable in the vertical direction, the horizontal direction and the front-back direction. In addition, since the movable mass for the movement can be made as small as possible, the movement tact time of the component conveying means in the component conveying operation can be shortened.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る部品装着装置の概略構成を示す斜
視図
FIG. 1 is a perspective view showing a schematic configuration of a component mounting apparatus according to the present invention.

【図2】本発明に係る部品装着装置の概略構成を示す正
面図
FIG. 2 is a front view showing a schematic configuration of a component mounting apparatus according to the present invention.

【図3】トレイ押え部材の裏面側から見た斜視図FIG. 3 is a perspective view of the tray pressing member viewed from the back surface side.

【図4】部品装着工程を示す正面図FIG. 4 is a front view showing a component mounting process.

【図5】部品装着工程を示す正面図FIG. 5 is a front view showing a component mounting process.

【図6】部品装着工程を示す正面図FIG. 6 is a front view showing a component mounting process.

【図7】部品装着工程を示す正面図FIG. 7 is a front view showing a component mounting process.

【図8】部品装着工程を示す正面図FIG. 8 is a front view showing a component mounting process.

【図9】部品装着工程を示す正面図FIG. 9 is a front view showing a component mounting process.

【図10】本発明の他の実施形態の概略構成を示す斜視
FIG. 10 is a perspective view showing a schematic configuration of another embodiment of the present invention.

【図11】本発明の他の実施形態の概略構成を示す正面
FIG. 11 is a front view showing a schematic configuration of another embodiment of the present invention.

【図12】反射部材の回転振動に対する作動説明図FIG. 12 is an operation explanatory view of the reflecting member against rotational vibration.

【図13】反射部材の上下および水平振動に対する作動
説明図
FIG. 13 is an operation explanatory diagram of vertical and horizontal vibrations of the reflecting member.

【図14】部品搬送手段を駆動する駆動手段の全体を概
略的に示す斜視図
FIG. 14 is a perspective view schematically showing the whole driving means for driving the component carrying means.

【図15】部品搬送手段を駆動する駆動手段のうち要部
の概略構造を示す斜視図
FIG. 15 is a perspective view showing a schematic structure of a main part of a driving unit that drives a component conveying unit.

【図16】従来例の概略構成を示す正面図FIG. 16 is a front view showing a schematic configuration of a conventional example.

【図17】他の従来例の概略構成を示す正面図FIG. 17 is a front view showing a schematic configuration of another conventional example.

【図18】従来例の部品装着工程を示す概略正面図FIG. 18 is a schematic front view showing a component mounting process of a conventional example.

【符号の説明】[Explanation of symbols]

2 装着対象物 3 装着ステージ 4 部品 6 部品搬送手段(部品搬送ステージ) 8 装着ヘッド 9 撮像手段 16 反射部材 19 カメラ 20 カメラ 24 認識部位 27 Z軸ステージ(上下駆動手段) 28 フレーム(基台) 29 X軸ステージ(左右駆動手段) 41 左右スライド部 43 第2連結部 44 上下スライド部 46 第1連結部 2 Target object 3 mounting stage 4 parts 6 Parts transfer means (Parts transfer stage) 8 mounting heads 9 Imaging means 16 Reflective member 19 cameras 20 cameras 24 recognition sites 27 Z-axis stage (vertical drive means) 28 frames (base) 29 X-axis stage (left and right driving means) 41 Left and right slide 43 Second connection part 44 Vertical slide part 46 First connection part

───────────────────────────────────────────────────── フロントページの続き (72)発明者 石部 敏幸 京都府長岡京市天神二丁目26番10号 株式 会社村田製作所内 Fターム(参考) 5E313 AA02 AA11 AA23 AA31 CC04 DD02 DD03 DD07 DD21 DD50 EE02 EE03 EE24 EE35 FF24 FF26 FF28 FF33 FG01 FG06 FG10 5F047 FA14 FA73 FA79 FA83    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Toshiyuki Ishibe             2-10-10 Tenjin, Nagaokakyo, Kyoto Stock             Murata Manufacturing Co., Ltd. F-term (reference) 5E313 AA02 AA11 AA23 AA31 CC04                       DD02 DD03 DD07 DD21 DD50                       EE02 EE03 EE24 EE35 FF24                       FF26 FF28 FF33 FG01 FG06                       FG10                 5F047 FA14 FA73 FA79 FA83

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 装着ヘッドに保持されて搬送されてきた
部品を、装着ステージ上に搭載された装着対象物に装着
するよう構成するとともに、装着ヘッドに保持された部
品および装着ステージ上の装着対象物を撮像するカメラ
と、部品および装着対象物からの光路を屈曲させる反射
部材とからなる撮像手段を備え、撮像によって得られた
位置情報に基づいて部品および装着対象物の相対位置を
修正するよう構成した部品装着装置において、 前記装着ヘッドに部品を供給搬送する部品搬送手段を装
着ヘッドの移動経路に出退可能に配備するとともに、前
記反射部材を部品搬送手段に装着し、前記カメラを前記
反射部材を介して屈曲させられた部品および装着対象物
からの光路上に固定配置してあることを特徴とする部品
装着装置。
1. A component held and carried by a mounting head is mounted on a mounting target mounted on a mounting stage, and a component held by the mounting head and a mounting target on the mounting stage are mounted. An image pickup unit including a camera for picking up an image of an object and a reflecting member for bending an optical path from the component and the mounting target is provided, and the relative position of the component and the mounting target is corrected based on the position information obtained by the imaging. In the component mounting apparatus configured, the component transporting means for supplying and transporting the component to the mounting head is arranged so as to be able to move in and out of the moving path of the mounting head, the reflecting member is mounted on the component transporting means, and the camera is set to the reflection unit. A component mounting apparatus characterized in that it is fixedly arranged on an optical path from a component bent through a member and a mounting target.
【請求項2】 請求項1記載の部品装着装置において、 前記部品搬送手段が装着ヘッドに部品を搬送するまで
に、部品保持状態を光学的に認識する手段を備えてある
部品装着装置。
2. The component mounting apparatus according to claim 1, further comprising means for optically recognizing a component holding state before the component transporting unit transports the component to the mounting head.
【請求項3】 請求項1または2記載の部品装着装置に
おいて、 前記撮像手段を、装着ヘッドに保持された部品が装着対
象物に対向した状態で、部品および装着対象物を同時に
撮像するよう構成してある部品装着装置。
3. The component mounting apparatus according to claim 1, wherein the imaging unit is configured to simultaneously image the component and the mounting object in a state where the component held by the mounting head faces the mounting object. Part mounting device.
【請求項4】 請求項1から3のいずれかに記載の部品
装着装置において、 前記部品搬送手段に備えられた前記反射部材の上下方向
の振動振幅を検出する手段を備えてある部品装着装置。
4. The component mounting apparatus according to claim 1, further comprising means for detecting a vertical vibration amplitude of the reflecting member provided in the component transporting means.
【請求項5】 請求項1から4のいずれかに記載の部品
装着装置において、 部品と同時に撮像される認識部位を装着ヘッドに備えて
ある部品装着装置。
5. The component mounting apparatus according to claim 1, wherein the mounting head includes a recognition portion that is imaged at the same time as the component.
【請求項6】 請求項1から5のいずれかに記載の部品
装着装置において、 装着対象物に対して接近および離間移動可能な前記装着
ヘッドと、ヘッド移動軌跡内に出退可能かつヘッド移動
方向に移動可能な部品搬送手段と、装着ヘッドが移動中
に部品搬送手段をヘッド移動方向に移動させながら両者
を相対接近させるように、部品搬送手段および装着ヘッ
ドの少なくともいずれかの移動速度を制御する制御手段
とを備えてあることを特徴とする部品装着装置。
6. The component mounting apparatus according to claim 1, wherein the mounting head is capable of moving toward and away from an object to be mounted, and a head moving direction capable of moving in and out of a head moving path. The moving speed of at least one of the component transporting means and the mounting head such that the component transporting means and the mounting head are relatively close to each other while moving the component transporting means in the head moving direction while the mounting head is moving. A component mounting apparatus comprising: a control unit.
【請求項7】 請求項6に記載の部品装着装置におい
て、 前記部品搬送手段を前記ヘッド移動方向に対応する上下
方向に移動させるために部品装着装置の基台部に対して
固定的に取り付けてある上下駆動手段と、 該上下駆動手段によって上下方向に移動可能な上下スラ
イド部と、 該上下スライド部とともに上下動し、前記上下スライド
部に対して左右方向に移動可能な第1連結部と、 前記部品搬送手段を前記ヘッド移動軌跡内への出退方向
に対応する左右方向に移動させるために前記第1連結部
を左右方向に移動させる左右方向駆動手段と、 該左右方向駆動手段によって駆動され、左右方向に移動
可能な左右スライド部と、 前記第1連結部と前後方向に摺動可能で、かつ前記左右
スライド部と上下方向に摺動可能である第2連結部とを
有するとともに、 前記部品搬送手段を前記第2連結部に設けていることを
特徴とする部品装着装置。
7. The component mounting apparatus according to claim 6, wherein the component transporting means is fixedly mounted to a base of the component mounting apparatus in order to move the component transporting unit in a vertical direction corresponding to the head moving direction. A certain up-and-down driving means, an up-and-down sliding portion that can move in the up-and-down direction by the up-and-down driving means, and a first connecting portion that moves up and down together with the up-and-down sliding portion and can move in the left-and-right direction with respect to the up-and-down sliding portion, A left-right direction driving means for moving the first connecting portion in the left-right direction in order to move the component carrying means in the left-right direction corresponding to the direction of movement in and out of the head movement locus; A left and right slide part that is movable in the left and right direction, and a second connection part that is slidable in the front-rear direction with the first connection part and that is slidable in the up and down direction with the left and right slide part. In addition, the component mounting device is characterized in that the component transfer means is provided in the second connecting portion.
JP2002107830A 2001-04-27 2002-04-10 Component mounting device Expired - Fee Related JP3738747B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002107830A JP3738747B2 (en) 2001-04-27 2002-04-10 Component mounting device
CN 02118368 CN1242664C (en) 2001-04-27 2002-04-25 Parts installation device
CN 200410063345 CN1290397C (en) 2001-04-27 2002-04-25 Parts installation device

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2001132258 2001-04-27
JP2001-132258 2001-04-27
JP2001247726 2001-08-17
JP2001-247726 2001-08-17
JP2002107830A JP3738747B2 (en) 2001-04-27 2002-04-10 Component mounting device

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JP3738747B2 JP3738747B2 (en) 2006-01-25

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340780A (en) * 2004-04-27 2005-12-08 Matsushita Electric Ind Co Ltd Electronic component mounting device and electronic component mounting method
JP2007180210A (en) * 2005-12-27 2007-07-12 Toshiba Corp Bonding device, and manufacturing method of semiconductor device
JP2008282915A (en) * 2007-05-09 2008-11-20 Shibaura Mechatronics Corp Mounting apparatus for electronic component, reversing pick-up device, and mounting method
KR100889424B1 (en) * 2007-08-20 2009-03-23 주식회사 피앤텔 Insert plate carrying device
CN101060770B (en) * 2006-04-18 2011-05-11 富士机械制造株式会社 Electronic parts mounting head and electronic parts mounting device
JP2014027225A (en) * 2012-07-30 2014-02-06 Hitachi High-Tech Instruments Co Ltd Wafer cart and electronic component mounting device
WO2015008701A1 (en) * 2013-07-18 2015-01-22 Eizo株式会社 Tray holder, conveying pallet, and electronic-component mounting method and electronic-component mounter using said tray holder and conveying pallet

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CN102118958B (en) * 2010-12-27 2012-08-22 东莞市新泽谷机械制造股份有限公司 Plug-in machine with plug-in fixing function

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340780A (en) * 2004-04-27 2005-12-08 Matsushita Electric Ind Co Ltd Electronic component mounting device and electronic component mounting method
JP2007180210A (en) * 2005-12-27 2007-07-12 Toshiba Corp Bonding device, and manufacturing method of semiconductor device
CN101060770B (en) * 2006-04-18 2011-05-11 富士机械制造株式会社 Electronic parts mounting head and electronic parts mounting device
JP2008282915A (en) * 2007-05-09 2008-11-20 Shibaura Mechatronics Corp Mounting apparatus for electronic component, reversing pick-up device, and mounting method
KR100889424B1 (en) * 2007-08-20 2009-03-23 주식회사 피앤텔 Insert plate carrying device
JP2014027225A (en) * 2012-07-30 2014-02-06 Hitachi High-Tech Instruments Co Ltd Wafer cart and electronic component mounting device
WO2015008701A1 (en) * 2013-07-18 2015-01-22 Eizo株式会社 Tray holder, conveying pallet, and electronic-component mounting method and electronic-component mounter using said tray holder and conveying pallet

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