JP2003052163A5 - - Google Patents

Download PDF

Info

Publication number
JP2003052163A5
JP2003052163A5 JP2002138068A JP2002138068A JP2003052163A5 JP 2003052163 A5 JP2003052163 A5 JP 2003052163A5 JP 2002138068 A JP2002138068 A JP 2002138068A JP 2002138068 A JP2002138068 A JP 2002138068A JP 2003052163 A5 JP2003052163 A5 JP 2003052163A5
Authority
JP
Japan
Prior art keywords
stator
actuator
buffer
mover
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2002138068A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003052163A (ja
Filing date
Publication date
Priority claimed from US09/854,599 external-priority patent/US6784592B2/en
Application filed filed Critical
Publication of JP2003052163A publication Critical patent/JP2003052163A/ja
Publication of JP2003052163A5 publication Critical patent/JP2003052163A5/ja
Withdrawn legal-status Critical Current

Links

JP2002138068A 2001-05-15 2002-05-14 原子分解能記憶装置の可動子の平面方向外への運動を防止するための離隔体の使用 Withdrawn JP2003052163A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/854599 2001-05-15
US09/854,599 US6784592B2 (en) 2001-05-15 2001-05-15 Use of standoffs to protect atomic resolution storage mover for out-of-plane motion

Publications (2)

Publication Number Publication Date
JP2003052163A JP2003052163A (ja) 2003-02-21
JP2003052163A5 true JP2003052163A5 (enExample) 2005-09-29

Family

ID=25319123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002138068A Withdrawn JP2003052163A (ja) 2001-05-15 2002-05-14 原子分解能記憶装置の可動子の平面方向外への運動を防止するための離隔体の使用

Country Status (4)

Country Link
US (3) US6784592B2 (enExample)
EP (1) EP1258979A3 (enExample)
JP (1) JP2003052163A (enExample)
CN (1) CN1280177C (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7514283B2 (en) * 2003-03-20 2009-04-07 Robert Bosch Gmbh Method of fabricating electromechanical device having a controlled atmosphere
US6930368B2 (en) * 2003-07-31 2005-08-16 Hewlett-Packard Development Company, L.P. MEMS having a three-wafer structure
US7116075B2 (en) 2003-10-31 2006-10-03 Valeo Electrical Systems, Inc. Electric power steering system for a vehicle
US7503989B2 (en) * 2004-12-17 2009-03-17 Hewlett-Packard Development Company, L.P. Methods and systems for aligning and coupling devices
US7583006B2 (en) * 2005-07-26 2009-09-01 Siimpel Corporation MEMS digital linear actuator
FR2889371A1 (fr) * 2005-07-29 2007-02-02 Commissariat Energie Atomique Dispositif de conversion de l'energie mecanique en energie electrique par cycle de charges et de decharges electriques sur les peignes d'un condensateur
JP4616156B2 (ja) * 2005-11-18 2011-01-19 アルプス電気株式会社 静電アクチュエータ
US20070291623A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20070121477A1 (en) * 2006-06-15 2007-05-31 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20070290282A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Bonded chip assembly with a micro-mover for microelectromechanical systems
US7808061B2 (en) * 2006-07-28 2010-10-05 Hewlett-Packard Development Company, L.P. Multi-die apparatus including moveable portions
US20080074984A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Architecture for a Memory Device
US7983138B2 (en) * 2006-10-11 2011-07-19 Seagate Technology Llc Surface spacing using rigid spacers
US7903532B2 (en) * 2006-10-11 2011-03-08 Seagate Technology Llc Elevated electrodes for probe position sensing
US20090032705A1 (en) * 2007-07-31 2009-02-05 Schroeder Dale W Fast Tip Scanning For Scanning Probe Microscope
US7876663B2 (en) * 2007-12-13 2011-01-25 International Business Machines Corporation Scanning system for a probe storage device
US7864653B2 (en) * 2007-12-13 2011-01-04 International Business Machines Corporation Probe storage device
US7440155B1 (en) 2007-12-13 2008-10-21 International Business Machines Corporation Mass-balanced actuating mechanism for a micro scanning device
US7965615B2 (en) * 2007-12-13 2011-06-21 International Business Machines Corporation Probe storage device scanner chip having a multi-layer media support table
US8000214B2 (en) * 2007-12-13 2011-08-16 International Business Machines Corporation Hermetic seal for a scanner assembly of a probe storage device
US7792010B2 (en) * 2007-12-13 2010-09-07 International Business Machines Corporation Scanning system for a probe storage device
US7913376B2 (en) * 2007-12-13 2011-03-29 International Business Machines Corporation Method of forming an actuating mechanism for a probe storage system
US20090155727A1 (en) * 2007-12-13 2009-06-18 International Business Machines Corporation Method of forming a flat media table for probe storage device
TW200940437A (en) * 2008-03-27 2009-10-01 Sunonwealth Electr Mach Ind Co Miniaturized motor
US8940570B2 (en) * 2012-01-03 2015-01-27 International Business Machines Corporation Micro-electro-mechanical system (MEMS) structures and design structures
US20130320466A1 (en) * 2012-05-31 2013-12-05 Analog Devices, Inc. Package for Damping Inertial Sensor
US9837935B2 (en) * 2013-10-29 2017-12-05 Honeywell International Inc. All-silicon electrode capacitive transducer on a glass substrate
JP6845208B2 (ja) * 2018-11-16 2021-03-17 住友電装株式会社 電気接続箱

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07112354B2 (ja) * 1986-10-13 1995-11-29 キヤノン株式会社 静電アクチユエータ
US4754185A (en) * 1986-10-16 1988-06-28 American Telephone And Telegraph Company, At&T Bell Laboratories Micro-electrostatic motor
JPH06113563A (ja) * 1992-09-29 1994-04-22 Sumitomo Heavy Ind Ltd 静電アクチュエータ
JPH0851786A (ja) * 1994-08-08 1996-02-20 Yaskawa Electric Corp 静電モータ
US5542295A (en) * 1994-12-01 1996-08-06 Analog Devices, Inc. Apparatus to minimize stiction in micromachined structures
JPH08186989A (ja) * 1994-12-29 1996-07-16 Asmo Co Ltd 静電アクチュエータ
US5604392A (en) * 1995-05-12 1997-02-18 The United States Of America As Represented By The Secretary Of The Army Levitated crystal resonator
JP2928752B2 (ja) * 1995-12-07 1999-08-03 株式会社東芝 静電アクチュエータ及びその駆動方法

Similar Documents

Publication Publication Date Title
JP2003052163A5 (enExample)
EP1202099A3 (en) Electrostatic actuator and camera module using the same
JP2005193374A5 (enExample)
FI20000339A7 (fi) Mikromekaaninen säädettävä kondensaattori ja integroitu säädettävä resonaattori
WO2004027832A3 (en) Bending actuators and sensors constructed from shaped active materials and methods for making the same
JP2006210843A (ja) 可変キャパシタ及びその製造方法
EP1225644A3 (en) Piezoelectric/electrostrictive device and method of producing the same
US7705514B2 (en) Bi-directional actuator utilizing both attractive and repulsive electrostatic forces
EP1258979A3 (en) Actuators with micro-movers
JP5399075B2 (ja) 直列接続されたキャパシタを有するｍｅｍｓデバイス装置
JP2008311225A (ja) 電気機械素子、その駆動方法およびそれを用いた電気機器
EP0189302A2 (en) Piezoelectric latching actuator having an impact receiving projectile
JP5283512B2 (ja) 熱効率のよいマイクロモータ
ATE517439T1 (de) Doppelt elektromechanisches element
WO2003015128A3 (en) An electromechanical switch and method of fabrication
CN111653663A (zh) 致动器
TW200703399A (en) Micro electromechanical switch and method of manufacturing the same
US20040166602A1 (en) Electro-thermally actuated lateral-contact microrelay and associated manufacturing process
WO2007006154A1 (en) Optimized bi-directional electrostatic actuators
JP5812096B2 (ja) Ｍｅｍｓスイッチ
KR102135533B1 (ko) 스마트 물질 기반 다족 이동 로봇
JP2002289081A5 (enExample)
Nadeem et al. Parametric Analysis and Optimization of Non-Contact Transversally Actuated RF MEMS Switch with High Reliability for Wireless Applications
CA2396269A1 (en) A capacitor element for a power capacitor, a method for manufacturing the same and a power capacitor comprising such capacitor element
CN102820134A (zh) 可变电容系统