JP2003048780A5 - - Google Patents

Download PDF

Info

Publication number
JP2003048780A5
JP2003048780A5 JP2001233369A JP2001233369A JP2003048780A5 JP 2003048780 A5 JP2003048780 A5 JP 2003048780A5 JP 2001233369 A JP2001233369 A JP 2001233369A JP 2001233369 A JP2001233369 A JP 2001233369A JP 2003048780 A5 JP2003048780 A5 JP 2003048780A5
Authority
JP
Japan
Prior art keywords
dielectric constant
heat treatment
aluminum nitride
porosity
thermal conductivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001233369A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003048780A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001233369A priority Critical patent/JP2003048780A/ja
Priority claimed from JP2001233369A external-priority patent/JP2003048780A/ja
Publication of JP2003048780A publication Critical patent/JP2003048780A/ja
Publication of JP2003048780A5 publication Critical patent/JP2003048780A5/ja
Pending legal-status Critical Current

Links

JP2001233369A 2001-08-01 2001-08-01 多孔質窒化アルミニウム Pending JP2003048780A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001233369A JP2003048780A (ja) 2001-08-01 2001-08-01 多孔質窒化アルミニウム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001233369A JP2003048780A (ja) 2001-08-01 2001-08-01 多孔質窒化アルミニウム

Publications (2)

Publication Number Publication Date
JP2003048780A JP2003048780A (ja) 2003-02-21
JP2003048780A5 true JP2003048780A5 (enrdf_load_stackoverflow) 2008-09-25

Family

ID=19065152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001233369A Pending JP2003048780A (ja) 2001-08-01 2001-08-01 多孔質窒化アルミニウム

Country Status (1)

Country Link
JP (1) JP2003048780A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4937738B2 (ja) * 2004-06-21 2012-05-23 株式会社トクヤマ 窒化物焼結体、及びその製造方法
JP6697363B2 (ja) * 2015-10-30 2020-05-20 日本碍子株式会社 半導体製造装置用部材、その製法及びシャフト付きヒータ
CN114477988B (zh) * 2022-03-28 2023-03-24 天通控股股份有限公司 一种易成型、高强度铁氧体材料及其制备方法
CN115141022A (zh) * 2022-07-28 2022-10-04 江苏正力新能电池技术有限公司 一种多孔陶瓷底托板的制备方法、多孔陶瓷底托板及电池

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6270210A (ja) * 1985-09-24 1987-03-31 Natl Inst For Res In Inorg Mater 窒化アルミニウム−炭化けい素複合微粉末の製造法
JP2730941B2 (ja) * 1988-12-27 1998-03-25 イビデン株式会社 窒化アルミニウム焼結体の製造方法
JPH046161A (ja) * 1990-04-23 1992-01-10 Kawasaki Steel Corp ＡｌＮ焼結体の製造方法
JP3003000B2 (ja) * 1990-08-29 2000-01-24 京セラ株式会社 窒化アルミニウムポリタイプ焼結体及びその製法

Similar Documents

Publication Publication Date Title
JP2003514758A5 (enrdf_load_stackoverflow)
JP2002532620A5 (enrdf_load_stackoverflow)
CN102531392B (zh) 一种低温共烧陶瓷材料及其制备方法
JP2001354559A5 (enrdf_load_stackoverflow)
WO2004038783A3 (en) Pecvd of organosilicate thin films
JP2004522942A5 (enrdf_load_stackoverflow)
EP1600432A4 (en) POROUS MATERIAL ON SILICON CARBIDE BASE, MANUFACTURING METHOD AND WAVE STRUCTURE
ES2167654T3 (es) Procedimiento para la obtencion de una proteccion antioxidante para ceramicas porosas a base de sic y si3n4.
EP1204135A3 (en) Method of forming an ultrathin SiO2 layer using N2O as the oxidant
DK1098848T3 (da) Hidtil ukendt dispergerbart aluminiumhydrat, fremgangsmåde til dets fremstilling af dets anvendelse til fremstilling af katalysatorer
ECSP034798A (es) Amidas de acido benzofuran-2-carboxílico sustituidas
JP2003048780A5 (enrdf_load_stackoverflow)
EP1355347A3 (en) Workpiece holder for semiconductor manufacturing apparatus
JP2004529205A5 (enrdf_load_stackoverflow)
JP2003518238A5 (enrdf_load_stackoverflow)
JP2005536436A5 (enrdf_load_stackoverflow)
JP2004508063A5 (enrdf_load_stackoverflow)
JP2006044970A5 (enrdf_load_stackoverflow)
JP2004508271A5 (enrdf_load_stackoverflow)
JP2002283096A5 (enrdf_load_stackoverflow)
JP2001094099A5 (enrdf_load_stackoverflow)
CN209472775U (zh) 多层梁式结构的陶瓷微加热板
TW201425267A (zh) 多孔陶瓷散熱片及製備方法
JP2004517145A5 (enrdf_load_stackoverflow)
JPH0196067A (ja) 窒化アルミニウム焼結体の製造方法