JP2002540436A5 - - Google Patents

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JP2002540436A5
JP2002540436A5 JP2000608203A JP2000608203A JP2002540436A5 JP 2002540436 A5 JP2002540436 A5 JP 2002540436A5 JP 2000608203 A JP2000608203 A JP 2000608203A JP 2000608203 A JP2000608203 A JP 2000608203A JP 2002540436 A5 JP2002540436 A5 JP 2002540436A5
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Japan
Prior art keywords
cantilever
self
control signal
feedback circuit
sample
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JP2000608203A
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JP4595041B2 (ja
JP2002540436A (ja
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Priority claimed from US09/280,160 external-priority patent/US6189374B1/en
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Publication of JP2002540436A5 publication Critical patent/JP2002540436A5/ja
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【請求項１】 試料を分析するためのＡＦＭであって、
その上に配置されたＺ−位置決め要素と、そこに取り付けられて、走査動作中に試料とほぼ連続的に接触する先端部とを有する自己駆動型カンチレバーと、
前記自己駆動型カンチレバーの垂直方向の偏位に応じて、カンチレバー制御信号を生成する第１のフィードバック回路と、
前記カンチレバー制御信号に応答して、位置制御信号を生成する第２のフィードバック回路と、前記第１のフィードバック回路は前記第２のフィードバック回路内に入れ子になっていることと、
前記位置制御信号に応答して、自己駆動型カンチレバー及び試料のうちの一方の位置決めを行って、自己駆動型カンチレバーと試料との間隔を変更するＺ−位置アクチュエーターとを備えるＡＦＭ。
JP2000608203A 1999-03-29 2000-03-03 原子間力顕微鏡用能動型探針及びその使用方法 Expired - Fee Related JP4595041B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/280,160 US6189374B1 (en) 1999-03-29 1999-03-29 Active probe for an atomic force microscope and method of use thereof
US09/280,160 1999-03-29
PCT/US2000/005450 WO2000058759A2 (en) 1999-03-29 2000-03-03 Active probe for an atomic force microscope and method of use thereof

Publications (3)

Publication Number Publication Date
JP2002540436A JP2002540436A (ja) 2002-11-26
JP2002540436A5 true JP2002540436A5 (ja) 2007-05-10
JP4595041B2 JP4595041B2 (ja) 2010-12-08

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JP2000608203A Expired - Fee Related JP4595041B2 (ja) 1999-03-29 2000-03-03 原子間力顕微鏡用能動型探針及びその使用方法

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US (4) US6189374B1 (ja)
JP (1) JP4595041B2 (ja)
KR (1) KR100732254B1 (ja)
AU (1) AU3510100A (ja)
DE (1) DE10084431B4 (ja)
WO (1) WO2000058759A2 (ja)

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