FR2885446B1 - Sonde coaxiale, son procede de fabrication et dispositif de mesure en champ proche electromagnetique sur des systemes a distance submicrometrique - Google Patents

Sonde coaxiale, son procede de fabrication et dispositif de mesure en champ proche electromagnetique sur des systemes a distance submicrometrique

Info

Publication number
FR2885446B1
FR2885446B1 FR0504634A FR0504634A FR2885446B1 FR 2885446 B1 FR2885446 B1 FR 2885446B1 FR 0504634 A FR0504634 A FR 0504634A FR 0504634 A FR0504634 A FR 0504634A FR 2885446 B1 FR2885446 B1 FR 2885446B1
Authority
FR
France
Prior art keywords
submicrometric
electromagnetic
measuring device
manufacturing same
coaxial probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0504634A
Other languages
English (en)
Other versions
FR2885446A1 (fr
Inventor
Jean Mouis Carbonero
Maxime Marchetti
Michel Castagne
Daniel Gasquet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
STMicroelectronics SA
Original Assignee
Centre National de la Recherche Scientifique CNRS
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, STMicroelectronics SA filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0504634A priority Critical patent/FR2885446B1/fr
Priority to US11/430,192 priority patent/US20070052433A1/en
Publication of FR2885446A1 publication Critical patent/FR2885446A1/fr
Application granted granted Critical
Publication of FR2885446B1 publication Critical patent/FR2885446B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
FR0504634A 2005-05-09 2005-05-09 Sonde coaxiale, son procede de fabrication et dispositif de mesure en champ proche electromagnetique sur des systemes a distance submicrometrique Expired - Fee Related FR2885446B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0504634A FR2885446B1 (fr) 2005-05-09 2005-05-09 Sonde coaxiale, son procede de fabrication et dispositif de mesure en champ proche electromagnetique sur des systemes a distance submicrometrique
US11/430,192 US20070052433A1 (en) 2005-05-09 2006-05-08 Coaxial probe, method for production thereof, and device for measuring in the near electromagnetic field on systems at a submicrometric distance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0504634A FR2885446B1 (fr) 2005-05-09 2005-05-09 Sonde coaxiale, son procede de fabrication et dispositif de mesure en champ proche electromagnetique sur des systemes a distance submicrometrique

Publications (2)

Publication Number Publication Date
FR2885446A1 FR2885446A1 (fr) 2006-11-10
FR2885446B1 true FR2885446B1 (fr) 2007-07-20

Family

ID=35134773

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0504634A Expired - Fee Related FR2885446B1 (fr) 2005-05-09 2005-05-09 Sonde coaxiale, son procede de fabrication et dispositif de mesure en champ proche electromagnetique sur des systemes a distance submicrometrique

Country Status (2)

Country Link
US (1) US20070052433A1 (fr)
FR (1) FR2885446B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI574013B (zh) * 2013-03-15 2017-03-11 穩懋半導體股份有限公司 探針卡、探針結構及其製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4764722A (en) * 1985-10-28 1988-08-16 International Business Machines Corporation Coaxial probe
US4727319A (en) * 1985-12-24 1988-02-23 Hughes Aircraft Company Apparatus for on-wafer testing of electrical circuits
JP2834173B2 (ja) * 1989-02-17 1998-12-09 株式会社日立製作所 走査型トンネル音響顕微鏡
DE3916047C2 (de) * 1989-05-17 1998-09-17 Ulrich Dr Fischer Stabförmige Sonde zur berührungslosen Untersuchung von Oberflächenstrukturen im Submikrometerbereich sowie Verfahren zur Herstellung dieser Sonde
US5185572A (en) * 1989-09-28 1993-02-09 Olympus Optical Co., Ltd. Scanning tunneling potentio-spectroscopic microscope and a data detecting method
JPH05164514A (ja) * 1991-12-19 1993-06-29 Advantest Corp トンネル顕微鏡及び原子間力顕微鏡両用探針
US5274336A (en) * 1992-01-14 1993-12-28 Hewlett-Packard Company Capacitively-coupled test probe
US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
DE69433974T2 (de) * 1993-04-13 2005-09-01 Agilent Technologies, Inc., Palo Alto Elektro-optisches instrument
JP3402512B2 (ja) * 1994-05-23 2003-05-06 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
US6189374B1 (en) * 1999-03-29 2001-02-20 Nanodevices, Inc. Active probe for an atomic force microscope and method of use thereof
JP3735701B2 (ja) * 1999-03-31 2006-01-18 独立行政法人産業技術総合研究所 電気測定用プローバおよび該プローバによる電気的特性の測定方法
US6680617B2 (en) * 2000-09-20 2004-01-20 Neocera, Inc. Apertured probes for localized measurements of a material's complex permittivity and fabrication method
WO2004057355A1 (fr) * 2002-12-20 2004-07-08 The Provost Fellows And Scholars Of The College Of The Holy And Undivided Trinity Of Queen Elizabeth Near Dublin Procede et appareil d'inspection de circuits hybrides a micro-ondes et a hautes frequences et cartes de circuit imprime

Also Published As

Publication number Publication date
FR2885446A1 (fr) 2006-11-10
US20070052433A1 (en) 2007-03-08

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Legal Events

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Effective date: 20090119