FR2978243B1 - Dispositif de capteur a ultrasons et son procede de fabrication - Google Patents

Dispositif de capteur a ultrasons et son procede de fabrication

Info

Publication number
FR2978243B1
FR2978243B1 FR1257000A FR1257000A FR2978243B1 FR 2978243 B1 FR2978243 B1 FR 2978243B1 FR 1257000 A FR1257000 A FR 1257000A FR 1257000 A FR1257000 A FR 1257000A FR 2978243 B1 FR2978243 B1 FR 2978243B1
Authority
FR
France
Prior art keywords
manufacturing
same
sensor device
ultrasonic sensor
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1257000A
Other languages
English (en)
Other versions
FR2978243A1 (fr
Inventor
Guenter Gerlach
Andre Gerlach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2978243A1 publication Critical patent/FR2978243A1/fr
Application granted granted Critical
Publication of FR2978243B1 publication Critical patent/FR2978243B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521—Constructional features
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/004—Mounting transducers, e.g. provided with mechanical moving or orienting device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/93—Sonar systems specially adapted for specific applications for anti-collision purposes
    • G01S15/931—Sonar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G01S2015/932—Sonar systems specially adapted for specific applications for anti-collision purposes of land vehicles for parking operations
FR1257000A 2011-07-22 2012-07-19 Dispositif de capteur a ultrasons et son procede de fabrication Expired - Fee Related FR2978243B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201110079646 DE102011079646A1 (de) 2011-07-22 2011-07-22 Ultraschallsensorvorrichtung zum Erfassen und/oder Senden von Ultraschall

Publications (2)

Publication Number Publication Date
FR2978243A1 FR2978243A1 (fr) 2013-01-25
FR2978243B1 true FR2978243B1 (fr) 2017-06-23

Family

ID=46881679

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1257000A Expired - Fee Related FR2978243B1 (fr) 2011-07-22 2012-07-19 Dispositif de capteur a ultrasons et son procede de fabrication

Country Status (4)

Country Link
CN (1) CN102890273B (fr)
DE (1) DE102011079646A1 (fr)
FR (1) FR2978243B1 (fr)
GB (1) GB2493101B (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015216163A1 (de) * 2015-08-25 2017-03-02 Robert Bosch Gmbh Akustischer Sensor zum Aussenden und/oder Empfangen akustischer Signale
DE102015224763A1 (de) * 2015-12-10 2017-06-14 Robert Bosch Gmbh Schallwandleranordnung und Verfahren zur Herstellung einer Schallwandleranordnung
DE102015224770A1 (de) * 2015-12-10 2017-06-14 Robert Bosch Gmbh Schallwandleranordnung mit ringförmigen ersten Verbindungsbereichen und Verfahren zur Herstellung einer Schallwandleranordnung mit ringförmigen ersten Verbindungsbereichen
DE102015224772A1 (de) * 2015-12-10 2017-06-14 Robert Bosch Gmbh Schallwandleranordnung mit konzentrischen Stegen und Verfahren zur Herstellung einer Schallwandleranordnung mit konzentrischen Stegen
DE102015224767A1 (de) * 2015-12-10 2017-06-14 Robert Bosch Gmbh Schallwandleranordnung und Verfahren zur Herstellung einer Schallwandleranordnung
DE102016205240B3 (de) * 2016-03-30 2017-07-13 Continental Automotive Gmbh Verfahren zum Herstellen eines Ultraschallsensors und Ultraschallensor
DE102016220068A1 (de) * 2016-10-14 2018-04-19 Robert Bosch Gmbh Verfahren zum Anordnen einer Anzahl von mikromechanischem Beschleunigungssensoren auf oder in ein Kunststoffbauteil und entsprechendes Kunststoffbauteil
CN110230031B (zh) * 2019-06-28 2021-03-02 中北大学 一种宽频带无源耐高温柔性振动传感器及其制备工艺

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3513439A (en) * 1968-12-23 1970-05-19 Parke Davis & Co Ultrasonic beam transducer
DE59100463D1 (de) * 1991-02-07 1993-11-11 Siemens Ag Verfahren zur Herstellung von Ultraschallwandlern.
US5553035A (en) * 1993-06-15 1996-09-03 Hewlett-Packard Company Method of forming integral transducer and impedance matching layers
US5655276A (en) * 1995-02-06 1997-08-12 General Electric Company Method of manufacturing two-dimensional array ultrasonic transducers
US7376236B1 (en) * 1997-03-17 2008-05-20 American Technology Corporation Piezoelectric film sonic emitter
DE19744229A1 (de) * 1997-10-07 1999-04-29 Bosch Gmbh Robert Ultraschallwandler
JP4432245B2 (ja) * 2000-06-02 2010-03-17 パナソニック電工株式会社 超音波振動子
DE10106477C2 (de) * 2001-02-13 2002-12-19 Fraunhofer Ges Forschung Ultraschallwandler mit Gehäuse
DE10138892A1 (de) * 2001-08-08 2003-02-20 Valeo Schalter & Sensoren Gmbh Ultraschallwandler
JP3972900B2 (ja) * 2003-04-23 2007-09-05 株式会社村田製作所 表面実装型電子部品の筐体構造
JP4513596B2 (ja) * 2004-08-25 2010-07-28 株式会社デンソー 超音波センサ
JP4715236B2 (ja) * 2005-03-01 2011-07-06 株式会社デンソー 超音波センサ装置
DE102006040344B4 (de) * 2006-08-29 2022-09-29 Robert Bosch Gmbh Haltevorrichtung für einen Ultraschallwandler
DE102006041975A1 (de) 2006-09-07 2008-03-27 Hella Kgaa Hueck & Co. Ultraschallsensor und Verfahren zur Herstellung eines Ultraschallsensors
DE102008054533B8 (de) * 2007-12-26 2013-02-14 Denso Corporation Ultraschallsensor
DE102009046148A1 (de) * 2009-10-29 2011-05-05 Robert Bosch Gmbh Ultraschallwandler zum Einsatz in einem fluiden Medium
DE102009046143A1 (de) * 2009-10-29 2011-05-12 Robert Bosch Gmbh Verfahren zur Herstellung eines Ultraschallwandlers

Also Published As

Publication number Publication date
FR2978243A1 (fr) 2013-01-25
GB201212895D0 (en) 2012-09-05
GB2493101A (en) 2013-01-23
DE102011079646A1 (de) 2013-02-07
CN102890273A (zh) 2013-01-23
GB2493101B (en) 2018-12-26
CN102890273B (zh) 2017-04-12

Similar Documents

Publication Publication Date Title
FR2978243B1 (fr) Dispositif de capteur a ultrasons et son procede de fabrication
FR2997552B1 (fr) Dispositif optoelectronique et son procede de fabrication
FR2995729B1 (fr) Dispositif opto-electrique a microfils ou nanofils semiconducteurs et son procede de fabrication
FR3005784B1 (fr) Dispositif optoelectronique et son procede de fabrication
EP2770320A4 (fr) Capteur chimique, module de capteur chimique, dispositif de détection de biomolécules et procédé associé
FR2963100B1 (fr) Capteur de pression et son procede de fabrication
IT1402406B1 (it) Metodo di fabbricazione di un dispositivo sensore di una sostanza gassosa di interesse.
BR112014012574A2 (pt) sensor químico, módulo de sensor químico, e, aparelho e método de detecção de substância química
FR3003086B1 (fr) Dispositif a semi-conducteur et son procede de fabrication
FR3005785B1 (fr) Dispositif optoelectronique et son procede de fabrication
FR2970096B1 (fr) Dispositif et procede optoelectronique de determination de position bidimensionnelle
BR112013020729A2 (pt) chip de medição, dispositivo microfluido e método de fabricação de chip de medição
FR3005788B1 (fr) Dispositif optoelectronique et son procede de fabrication
FR2990561B1 (fr) Procede de fabrication de dispositif semi-conducteur et dispositif semi-conducteur;
FR3006113B1 (fr) Procede de fabrication d'un capteur piezoelectrique souple
EP2750190A4 (fr) Capteur d'image, son procédé de fabrication et dispositif de contrôle
FR2947784B1 (fr) Module de camera et son procede de fabrication
FR2989485B1 (fr) Capteur tactile et procede de fabrication d'un tel capteur
FR2977944B1 (fr) Dispositif electronique et son procede de fabrication
FR2999470B1 (fr) Procede et dispositif de fabrication d'ebauche de pneumatique
EP2762856A4 (fr) Capteur physique/chimique, dispositif de détection de phénomène physique/chimique et procédé de fabrication de ceux-ci
FR2939564B1 (fr) Capteur et son procede de fabrication
FR2958403B1 (fr) Capteur a ondes infrarouges evanescentes et son procede de fabrication
FR3013510B1 (fr) Procede de fabrication d'un dispositif pyroelectrique et/ou piezoelectrique
FR2979066B1 (fr) Procede et dispositif de formage incremental

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5

PLSC Publication of the preliminary search report

Effective date: 20160812

PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9

PLFP Fee payment

Year of fee payment: 10

ST Notification of lapse

Effective date: 20230305