JP2002506288A - デュアルフィールド分離構造を形成する方法 - Google Patents

デュアルフィールド分離構造を形成する方法

Info

Publication number
JP2002506288A
JP2002506288A JP2000535047A JP2000535047A JP2002506288A JP 2002506288 A JP2002506288 A JP 2002506288A JP 2000535047 A JP2000535047 A JP 2000535047A JP 2000535047 A JP2000535047 A JP 2000535047A JP 2002506288 A JP2002506288 A JP 2002506288A
Authority
JP
Japan
Prior art keywords
layer
hard mask
region
mask layer
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000535047A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002506288A5 (https=
Inventor
ユ，スン
ファム，トゥアン・ディ
ラムズベイ，マーク・エス
チャン，チ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of JP2002506288A publication Critical patent/JP2002506288A/ja
Publication of JP2002506288A5 publication Critical patent/JP2002506288A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/012—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS]
    • H10W10/0128—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS] comprising multiple local oxidation process steps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/13—Isolation regions comprising dielectric materials formed using local oxidation of silicon [LOCOS], e.g. sealed interface localised oxidation [SILO] or side-wall mask isolation [SWAMI]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H10W46/301—Marks applied to devices, e.g. for alignment or identification for alignment

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP2000535047A 1998-03-06 1999-03-05 デュアルフィールド分離構造を形成する方法 Pending JP2002506288A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/036,288 US5966618A (en) 1998-03-06 1998-03-06 Method of forming dual field isolation structures
US09/036,288 1998-03-06
PCT/US1999/004905 WO1999045589A1 (en) 1998-03-06 1999-03-05 Method of forming dual field isolation structures

Publications (2)

Publication Number Publication Date
JP2002506288A true JP2002506288A (ja) 2002-02-26
JP2002506288A5 JP2002506288A5 (https=) 2006-04-06

Family

ID=21887749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000535047A Pending JP2002506288A (ja) 1998-03-06 1999-03-05 デュアルフィールド分離構造を形成する方法

Country Status (6)

Country Link
US (1) US5966618A (https=)
EP (1) EP1060510B1 (https=)
JP (1) JP2002506288A (https=)
KR (1) KR100537812B1 (https=)
DE (1) DE69939775D1 (https=)
WO (1) WO1999045589A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004503927A (ja) * 2000-06-16 2004-02-05 コミツサリア　タ　レネルジー　アトミーク 微細パターンとワイドパターンとが混在する集積回路ステージを形成するための方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6249036B1 (en) * 1998-03-18 2001-06-19 Advanced Micro Devices, Inc. Stepper alignment mark formation with dual field oxide process
US6127247A (en) * 1998-06-03 2000-10-03 Texas Instruments - Acer Incorporated Method of eliminating photoresist outgassing in constructing CMOS vertically modulated wells by high energy ion implantation
US6362049B1 (en) * 1998-12-04 2002-03-26 Advanced Micro Devices, Inc. High yield performance semiconductor process flow for NAND flash memory products
US6383861B1 (en) 1999-02-18 2002-05-07 Micron Technology, Inc. Method of fabricating a dual gate dielectric
US6750157B1 (en) 2000-10-12 2004-06-15 Advanced Micro Devices, Inc. Nonvolatile memory cell with a nitridated oxide layer
US6908817B2 (en) * 2002-10-09 2005-06-21 Sandisk Corporation Flash memory array with increased coupling between floating and control gates
US7183153B2 (en) * 2004-03-12 2007-02-27 Sandisk Corporation Method of manufacturing self aligned non-volatile memory cells
US7482223B2 (en) * 2004-12-22 2009-01-27 Sandisk Corporation Multi-thickness dielectric for semiconductor memory
US7202125B2 (en) * 2004-12-22 2007-04-10 Sandisk Corporation Low-voltage, multiple thin-gate oxide and low-resistance gate electrode
CN101090856B (zh) * 2004-12-29 2011-07-06 奥蒂斯电梯公司 在单一竖井内具有多个轿厢的电梯系统中的补偿
US7541240B2 (en) * 2005-10-18 2009-06-02 Sandisk Corporation Integration process flow for flash devices with low gap fill aspect ratio
EP3664151A1 (en) * 2018-12-06 2020-06-10 Nexperia B.V. Bipolar transistor with polysilicon emitter and method of manufacturing

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62183164A (ja) * 1986-02-07 1987-08-11 Hitachi Ltd 半導体記憶装置およびその製造方法
JPS6442164A (en) * 1987-08-07 1989-02-14 Fujitsu Ltd Semiconductor device and manufacture thereof
JPH08125006A (ja) * 1994-10-20 1996-05-17 Victor Co Of Japan Ltd 半導体装置及びその製造方法
JPH0997788A (ja) * 1995-07-21 1997-04-08 Rohm Co Ltd 半導体装置及びその製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3318213A1 (de) * 1983-05-19 1984-11-22 Deutsche Itt Industries Gmbh, 7800 Freiburg Verfahren zum herstellen eines integrierten isolierschicht-feldeffekttransistors mit zur gateelektrode selbstausgerichteten kontakten
US5061654A (en) * 1987-07-01 1991-10-29 Mitsubishi Denki Kabushiki Kaisha Semiconductor integrated circuit having oxide regions with different thickness
JP2512216B2 (ja) * 1989-08-01 1996-07-03 松下電器産業株式会社 半導体装置の製造方法
JPH04111465A (ja) * 1990-08-31 1992-04-13 Fujitsu Ltd 不揮発性半導体記憶装置の製造方法
FR2667440A1 (fr) * 1990-09-28 1992-04-03 Philips Nv Procede pour realiser des motifs d'alignement de masques.
US5110756A (en) * 1991-07-03 1992-05-05 At&T Bell Laboratories Method of semiconductor integrated circuit manufacturing which includes processing for reducing defect density
KR100214469B1 (ko) * 1995-12-29 1999-08-02 구본준 반도체소자의 격리막 형성방법
US5646063A (en) * 1996-03-28 1997-07-08 Advanced Micro Devices, Inc. Hybrid of local oxidation of silicon isolation and trench isolation for a semiconductor device
US5794809A (en) * 1997-02-18 1998-08-18 Shuval; Shlomo Trash container with automatic liner bag feed

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62183164A (ja) * 1986-02-07 1987-08-11 Hitachi Ltd 半導体記憶装置およびその製造方法
JPS6442164A (en) * 1987-08-07 1989-02-14 Fujitsu Ltd Semiconductor device and manufacture thereof
JPH08125006A (ja) * 1994-10-20 1996-05-17 Victor Co Of Japan Ltd 半導体装置及びその製造方法
JPH0997788A (ja) * 1995-07-21 1997-04-08 Rohm Co Ltd 半導体装置及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004503927A (ja) * 2000-06-16 2004-02-05 コミツサリア　タ　レネルジー　アトミーク 微細パターンとワイドパターンとが混在する集積回路ステージを形成するための方法

Also Published As

Publication number Publication date
WO1999045589A1 (en) 1999-09-10
EP1060510B1 (en) 2008-10-22
EP1060510A1 (en) 2000-12-20
DE69939775D1 (de) 2008-12-04
KR20010041645A (ko) 2001-05-25
KR100537812B1 (ko) 2005-12-20
US5966618A (en) 1999-10-12

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