JP2002353583A - Resin-attached metal foil and multilayered printed wiring board - Google Patents

Resin-attached metal foil and multilayered printed wiring board

Info

Publication number
JP2002353583A
JP2002353583A JP2001154480A JP2001154480A JP2002353583A JP 2002353583 A JP2002353583 A JP 2002353583A JP 2001154480 A JP2001154480 A JP 2001154480A JP 2001154480 A JP2001154480 A JP 2001154480A JP 2002353583 A JP2002353583 A JP 2002353583A
Authority
JP
Japan
Prior art keywords
resin
metal foil
printed wiring
wiring board
resin layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001154480A
Other languages
Japanese (ja)
Other versions
JP2002353583A5 (en
Inventor
Katsuhiko Ito
克彦 伊藤
Akinori Hibino
日比野明憲
Tomotaka Morita
智貴 森田
Yoshinobu Marumoto
佳伸 丸本
Yoshihisa Sugawa
美久 須川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP2001154480A priority Critical patent/JP2002353583A/en
Publication of JP2002353583A publication Critical patent/JP2002353583A/en
Publication of JP2002353583A5 publication Critical patent/JP2002353583A5/ja
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a resin-fitted metal foil, capable of providing a multilayer printed wiring board where less warpage/deflection occurs at reflowing for component mounting, and to provide a multilayered printed wiring board where less warpage/deflection occurs at reflowing for component mounting. SOLUTION: A resin-attached metal foil is provided, which is formed by providing a resin layer on one surface of a metal foil, which has thermal fusion property and thermosetting property. The resin layer comprises a woven material or a nonwoven material. The resin layer side of the resin-attached metal foil is manufactured in a process of stacking it on an inner-layer substrate which forms a conductor circuit for lamination/molding.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、多層プリント配線
板等の製造に用いられる樹脂付き金属箔及びその樹脂付
き金属箔を用いて製造した多層プリント配線板に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal foil with resin used for manufacturing a multilayer printed wiring board and the like, and a multilayer printed wiring board manufactured using the metal foil with resin.

【0002】[0002]

【従来の技術】近年、多層プリント配線板等の製造に
は、樹脂付き金属箔と称される材料が広く利用されてい
る。この樹脂付き金属箔は、銅箔等の金属箔の片側の表
面にエポキシ樹脂ワニス(エポキシ樹脂組成物)等の樹
脂ワニスを塗布し、これを乾燥することによって、半硬
化状態(Bステージ)であって、熱溶融可能であり熱硬
化性を有する樹脂層を形成して製造されるのが一般的で
ある。なお、ここでいう熱溶融可能であり熱硬化性を有
するとは、加熱によって一旦溶融し、その後ゲル化して
硬化物となることのできることを表している。
2. Description of the Related Art In recent years, a material called a metal foil with resin has been widely used for manufacturing a multilayer printed wiring board and the like. The resin-coated metal foil is applied in a semi-cured state (B stage) by applying a resin varnish such as an epoxy resin varnish (epoxy resin composition) to one surface of a metal foil such as a copper foil and drying the same. Generally, it is manufactured by forming a resin layer which is heat-meltable and has thermosetting properties. Here, being capable of being thermally melted and having thermosetting means that it can be melted once by heating and then gelled to form a cured product.

【0003】そして、樹脂付き金属箔を用いて製造した
多層プリント配線板は、近年の軽薄短小への要求を満た
すものであるが、樹脂付き金属箔を用いて製造した多層
プリント配線板の場合、多層プリント配線板としての弾
性率が低くなる傾向があり、部品実装のリフロー時に反
り・タワミが発生し、部品実装が困難となる問題が発生
している。特に、樹脂付き金属箔を内層用基板の表裏に
配して積層成形して得られる多層プリント配線板の場合
にこの傾向が顕著になる。
A multilayer printed wiring board manufactured using a resin-attached metal foil satisfies recent demands for lightness, thinness and shortness. In the case of a multilayer printed wiring board manufactured using a resin-attached metal foil, The elastic modulus of the multilayer printed wiring board tends to be low, and warpage and deflection occur during reflow of component mounting, causing a problem that component mounting becomes difficult. In particular, this tendency becomes remarkable in the case of a multilayer printed wiring board obtained by arranging metal foils with resin on the front and back of the inner layer substrate and laminating them.

【0004】また、多層プリント配線板の回路の微細化
の要求が高まっており、その要求に対しては金属箔の厚
さが12μm未満(例えば9μm、5μm等)である樹
脂付き金属箔と内層用基板を重ねて積層成形したもの
に、回路形成をすることが検討されている。厚さが12
μm未満の極薄金属箔(例えば極薄銅箔)の場合には、
厚さが非常に薄く、ハンドリング時にシワ等が入るた
め、厚さが35μm程度の金属箔(銅箔やアルミニウム
箔等)を一体化しているキャリア箔付きとしているもの
が一般的である。しかし、キャリア箔付き極薄金属箔
は、積層成形後にキャリア箔を剥がす工程が必要であ
り、またキャリア箔の回収の問題があり、その使用が広
まっていないのが現状である。同様に、キャリア箔付き
の極薄金属箔を用いた樹脂付き極薄金属箔も、その使用
が広まっていないのが現状であり、ハンドリング時にシ
ワ等が生じにくい新たな樹脂付き極薄金属箔が求められ
ている。
[0004] Further, there is an increasing demand for miniaturization of circuits of a multilayer printed wiring board. To meet the demand, a metal foil with a resin having a thickness of less than 12 μm (for example, 9 μm, 5 μm, etc.) and an inner layer It has been studied to form a circuit on a laminate formed by stacking substrates for use. Thickness 12
In the case of ultra-thin metal foil of less than μm (for example, ultra-thin copper foil),
Since the thickness is very thin and wrinkles or the like are formed during handling, a metal foil (such as a copper foil or an aluminum foil) having a thickness of about 35 μm is generally provided with a carrier foil. However, the ultrathin metal foil with a carrier foil requires a step of peeling the carrier foil after lamination and has a problem of recovery of the carrier foil, and the use thereof has not been widespread at present. Similarly, the use of ultra-thin metal foil with resin using ultra-thin metal foil with a carrier foil is currently not widely used, and a new ultra-thin metal foil with resin, which is unlikely to cause wrinkles during handling, has been developed. It has been demanded.

【0005】[0005]

【発明が解決しようとする課題】本発明は上記の事情に
鑑みてなされれたものであり、樹脂付き金属箔を用いて
製造される多層プリント配線板の弾性率を高くできて、
部品実装のリフロー時の反り・タワミの発生を低減でき
る多層プリント配線板を得ることのできる樹脂付き金属
箔を提供することを目的としている。また、この樹脂付
き金属箔を用いて製造される弾性率が高く、部品実装の
リフロー時の反り・タワミの発生が低減される多層プリ
ント配線板を提供することを目的としている。また、キ
ャリア箔付きの極薄金属箔を用いた樹脂付き極薄金属箔
ではなくて、ハンドリング時にシワ等が生じにくい新た
なタイプの樹脂付き極薄金属箔を提供することを目的と
している。なお、ここでいう極薄金属箔とは、金属箔自
身の厚さが9μm以下のものを指している。
SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and has an advantage that a multilayer printed wiring board manufactured using a resin-coated metal foil can have a high elastic modulus.
An object of the present invention is to provide a resin-attached metal foil capable of obtaining a multilayer printed wiring board capable of reducing the occurrence of warpage and deflection during reflow of component mounting. It is another object of the present invention to provide a multilayer printed wiring board having a high elastic modulus manufactured by using the resin-attached metal foil and reducing occurrence of warpage and warpage during reflow of component mounting. It is another object of the present invention to provide a new type of ultrathin metal foil with resin that is less likely to cause wrinkles or the like during handling, instead of using an ultrathin metal foil with resin using an ultrathin metal foil with a carrier foil. Here, the ultrathin metal foil refers to a metal foil having a thickness of 9 μm or less.

【0006】[0006]

【課題を解決するための手段】請求項1に係る発明の樹
脂付き金属箔は、金属箔の片面に熱溶融可能であり熱硬
化性を有する樹脂層を設けて形成される樹脂付き金属箔
であって、樹脂層が織布又は不織布を備えていることを
特徴とする樹脂付き金属箔である。
The resin-coated metal foil according to the first aspect of the present invention is a resin-coated metal foil formed by providing a heat-fusible and thermosetting resin layer on one side of the metal foil. Further, the resin-coated metal foil is characterized in that the resin layer includes a woven fabric or a nonwoven fabric.

【0007】なお、ここでいう熱溶融可能であり熱硬化
性を有するとは、加熱によって一旦溶融し、その後ゲル
化して硬化物となることのできることを表している。
[0007] The term "heat-fusible and thermosetting" as used herein means that the material can be melted once by heating and then gelled to form a cured product.

【0008】請求項2に係る発明の樹脂付き金属箔は、
金属箔の厚さが9μm以下であることを特徴とする請求
項1記載の樹脂付き金属箔である。
[0008] The metal foil with resin of the invention according to claim 2 is
2. The resin-attached metal foil according to claim 1, wherein the thickness of the metal foil is 9 μm or less.

【0009】請求項3に係る発明の樹脂付き金属箔は、
樹脂層が備える織布がガラスクロスであることを特徴と
する請求項1又は請求項2記載の樹脂付き金属箔であ
る。
The metal foil with resin of the invention according to claim 3 is:
The resin-attached metal foil according to claim 1 or 2, wherein the woven fabric provided in the resin layer is a glass cloth.

【0010】請求項4に係る発明の樹脂付き金属箔は、
樹脂層が備える不織布が有機繊維の不織布であることを
特徴とする請求項1又は請求項2記載の樹脂付き金属箔
である。
[0010] The metal foil with resin of the invention according to claim 4 is as follows.
The metal foil with resin according to claim 1 or 2, wherein the nonwoven fabric provided in the resin layer is a nonwoven fabric of organic fibers.

【0011】請求項5に係る発明の樹脂付き金属箔は、
樹脂層の硬化物の誘電率が5以下であることを特徴とす
る請求項1〜請求項4の何れかに記載の樹脂付き金属箔
である。
[0011] The metal foil with resin of the invention according to claim 5 is as follows.
The resin-attached metal foil according to any one of claims 1 to 4, wherein the cured product of the resin layer has a dielectric constant of 5 or less.

【0012】請求項6に係る発明の樹脂付き金属箔は、
樹脂層の厚さが30〜200μmであることを特徴とす
る請求項1〜請求項5の何れかに記載の樹脂付き金属箔
である。
[0012] The metal foil with resin of the invention according to claim 6 is:
The resin-coated metal foil according to any one of claims 1 to 5, wherein the thickness of the resin layer is 30 to 200 µm.

【0013】請求項7に係る発明の樹脂付き金属箔は、
請求項1〜請求項6の何れかに記載の樹脂付き金属箔の
樹脂層側を、導体回路を形成している内層用基板と重ね
て積層成形する工程を経て製造していることを特徴とす
る多層プリント配線板である。
[0013] The metal foil with resin of the invention according to claim 7 is:
A resin layer side of the metal foil with resin according to any one of claims 1 to 6, which is manufactured through a step of laminating and molding by laminating an inner layer substrate forming a conductor circuit. This is a multilayer printed wiring board.

【0014】[0014]

【発明の実施の形態】以下に本発明の実施の形態を説明
する。
Embodiments of the present invention will be described below.

【0015】本発明に係る樹脂付き金属箔の作製に用い
る金属箔としては、例えば電解銅箔、アルミニウム箔等
を用いることができる。
As the metal foil used for producing the metal foil with resin according to the present invention, for example, an electrolytic copper foil, an aluminum foil or the like can be used.

【0016】本発明に係る樹脂付き金属箔は、その片面
に熱溶融可能であり熱硬化性を有する樹脂層設けてい
て、且つ、この樹脂層には織布又は不織布を備えるよう
にしている。この織布としては、ガラスクロス、各種有
機繊維の織布が例示できるが、ガラスクロスを用いるの
が入手が容易であって、多層プリント配線板の弾性率を
高くすることができるので好ましい。一方、不織布とし
ては、各種繊維を用いた不織布を使用することができる
が、アラミド繊維、ポリエステル繊維、ポリイミド繊
維、ポリアクリル繊維等の有機繊維の不織布を用いるの
が入手が容易であって、多層プリント配線板の弾性率を
高くすることができるので好ましい。また、樹脂層の硬
化物の誘電率が高い場合には多層プリント配線板の性能
が低下する傾向があるため、樹脂層の硬化物の誘電率を
5以下とするように制御することが、多層プリント配線
板の性能を確保するには好ましい。ガラス繊維の誘電率
は構成材料によって大きく異なるため、加工性等の性能
が確保できる範囲で低い誘電率の構成材料を用いたガラ
ス繊維を用いることが好ましい。好ましいガラス繊維と
しては、EガラスやDガラスを構成材料としたガラス繊
維が例示できる。
The resin-attached metal foil according to the present invention is provided with a heat-fusible and thermosetting resin layer on one surface thereof, and the resin layer is provided with a woven or nonwoven fabric. Examples of the woven fabric include a glass cloth and a woven fabric of various organic fibers. However, it is preferable to use a glass cloth because it is easily available and the elastic modulus of the multilayer printed wiring board can be increased. On the other hand, as the nonwoven fabric, nonwoven fabrics using various fibers can be used, but it is easy to use nonwoven fabrics of organic fibers such as aramid fibers, polyester fibers, polyimide fibers, and polyacrylic fibers. This is preferable because the elastic modulus of the printed wiring board can be increased. Further, when the dielectric constant of the cured resin layer is high, the performance of the multilayer printed wiring board tends to decrease. Therefore, it is necessary to control the dielectric constant of the cured resin layer to be 5 or less. It is preferable to ensure the performance of the printed wiring board. Since the dielectric constant of the glass fiber greatly varies depending on the constituent material, it is preferable to use a glass fiber using a constituent material having a low dielectric constant as long as performance such as workability can be ensured. As a preferable glass fiber, a glass fiber using E glass or D glass as a constituent material can be exemplified.

【0017】そして、熱溶融可能であり熱硬化性を有す
る樹脂層の形成は、エポキシ樹脂組成物、ポリイミド樹
脂組成物等の熱硬化性樹脂組成物であってワニス化した
ものを使用して形成する。エポキシ樹脂組成物を用いる
場合、主成分であるエポキシ樹脂として、例えばクレゾ
ールノボラック型エポキシ樹脂、フェノールノボラック
型エポキシ樹脂、ビスフェノールA型エポキシ樹脂やこ
れらの臭素化物等を用いることができる。そして、エポ
キシ樹脂の硬化剤としては、例えばジシアンジアミドや
フェノールノボラック樹脂等を用いることができる。さ
らに、必要に応じて、硬化促進剤、各種添加剤、溶剤、
無機充填材等をエポキシ樹脂組成物中に含有させること
ができる。硬化促進剤としては、例えば2−エチル−4
−メチルイミダゾール等のイミダゾール類や、ジメチル
ベンジルアミン等を用いることができる。また、溶剤を
配合することにより、エポキシ樹脂組成物の液状化を容
易に達成できるが、溶剤としては、例えばメチルエチル
ケトン(MEK)、メトキシプロパノール(MP)、ジ
メチルフォルムアミド(DMF)等を用いることができ
る。そして、これらのエポキシ樹脂、硬化剤等の成分を
配合し、ミキサーやブレンダー等で混合して液状化した
エポキシ樹脂組成物(エポキシ樹脂ワニス)を作製する
ことができる。
The heat-meltable and thermosetting resin layer is formed by using a varnished thermosetting resin composition such as an epoxy resin composition or a polyimide resin composition. I do. When an epoxy resin composition is used, for example, a cresol novolak type epoxy resin, a phenol novolak type epoxy resin, a bisphenol A type epoxy resin, or a bromide thereof can be used as an epoxy resin as a main component. As a curing agent for the epoxy resin, for example, dicyandiamide or phenol novolak resin can be used. Further, if necessary, a curing accelerator, various additives, a solvent,
An inorganic filler or the like can be contained in the epoxy resin composition. As the curing accelerator, for example, 2-ethyl-4
Imidazoles such as -methylimidazole, dimethylbenzylamine and the like can be used. In addition, liquefaction of the epoxy resin composition can be easily achieved by blending a solvent. As the solvent, for example, methyl ethyl ketone (MEK), methoxypropanol (MP), dimethylformamide (DMF), or the like is used. it can. Then, the epoxy resin composition (epoxy resin varnish) which is liquefied by mixing these components such as the epoxy resin and the curing agent and mixing with a mixer or a blender can be produced.

【0018】本発明に係る樹脂付き金属箔は、上記の液
状化した熱硬化性樹脂組成物を織布又は不織布に含浸・
乾燥して作製したプリプレグの一方の表面に金属箔を、
他方の表面にPETフィルム等のカバーフィルムを配し
て、それらを例えば真空ラミネーター等を用いて連続的
に一体化して作製することができる。このようにして、
樹脂付き金属箔の片面に形成する、熱溶融可能であり熱
硬化性を有する樹脂層であって、織布又は不織布を備え
ている樹脂層の厚さについては、特に限定するものでは
ないが、30〜200μmであることが好ましい。樹脂
層の厚さが30μm未満である樹脂付き金属箔を用い
て、多層プリント配線板を製造した場合には、導体回路
を備えた内層用基板の凹凸を樹脂付き金属箔の樹脂成分
で充填することが困難になる傾向が生じ、樹脂層の厚さ
が200μmを越える樹脂付き金属箔を用いて、多層プ
リント配線板を製造した場合には、絶縁層の厚さが厚く
なりすぎる傾向が生じるからである。
The metal foil with resin according to the present invention is obtained by impregnating a woven or nonwoven fabric with the liquefied thermosetting resin composition.
Metal foil on one surface of the dried prepreg,
A cover film such as a PET film can be provided on the other surface, and these can be continuously integrated by using, for example, a vacuum laminator or the like. In this way,
Formed on one side of the resin-attached metal foil, is a heat-meltable and thermosetting resin layer, the thickness of the resin layer having a woven or nonwoven fabric is not particularly limited, Preferably it is 30 to 200 μm. When a multilayer printed wiring board is manufactured using a metal foil with a resin in which the thickness of the resin layer is less than 30 μm, the unevenness of the inner layer substrate having the conductive circuit is filled with the resin component of the metal foil with a resin. When a multilayer printed wiring board is manufactured using a resin-coated metal foil having a resin layer thickness exceeding 200 μm, the insulating layer tends to be too thick. It is.

【0019】本発明に係る樹脂付き金属箔における金属
箔自身の厚さは、特に制限するものではないが、9μm
以下のものであると微細回路を容易に形成することがで
きるので望ましい。なお、厚さの下限については回路形
成できる厚さであればよく特に制限はない。そして、本
発明に係る樹脂付き金属箔で金属箔自身の厚さを9μm
以下のものとした場合、樹脂層に織布又は不織布を備え
るために、樹脂付き金属箔としてはハンドリング時にシ
ワ等が生じにくい、作業性が改善されたものとなる。す
なわち、樹脂付き極薄金属箔であって、キャリア箔を一
体化することなしに、ハンドリング時のシワ等の発生を
防止することができるものが、本発明の樹脂付き金属箔
では得られる。
The thickness of the metal foil in the resin-coated metal foil according to the present invention is not particularly limited, but may be 9 μm.
The following is preferable because a fine circuit can be easily formed. Note that the lower limit of the thickness is not particularly limited as long as the circuit can be formed. Then, the thickness of the metal foil itself is 9 μm with the metal foil with resin according to the present invention.
In the case of the following, since the resin layer is provided with a woven fabric or a nonwoven fabric, the metal foil with resin is less likely to cause wrinkles and the like during handling, and has improved workability. That is, the resin-attached metal foil of the present invention can provide an ultrathin resin-attached metal foil which can prevent wrinkles and the like from occurring during handling without integrating the carrier foil.

【0020】請求項7に係る発明の多層プリント配線板
は、上述した本発明の樹脂付き金属箔を用いて製造され
る。すなわち、上述した樹脂付き金属箔の樹脂層側を、
導体回路を形成している内層用基板の片面又は両面に重
ね合わせ、重ね合わせたものを加熱加圧して積層成形す
る工程を経て製造される。
A multilayer printed wiring board according to a seventh aspect of the present invention is manufactured using the above-described resin-coated metal foil of the present invention. That is, the resin layer side of the above-described resin-attached metal foil,
It is manufactured through a process of superimposing on one or both surfaces of an inner layer substrate forming a conductor circuit, and heating and pressing the superimposed product to form a laminate.

【0021】なお、上記の積層成形を行って樹脂付き金
属箔と内層用基板を一体化したものに、レーザー等によ
って穴あけを行い、銅等のめっきを施してバイアホール
を形成し、次いで樹脂付き金属箔の金属箔にサブトラク
ティブ法等の方法で外層回路となる回路パターンを形成
する等の加工をさらに施して多層プリント配線板は製造
される。
The laminated metal foil and the substrate for the inner layer are integrated by performing the above-mentioned lamination molding, and a hole is formed by drilling with a laser or the like, plating with copper or the like to form a via hole, and then forming a via hole. A multilayer printed wiring board is manufactured by further processing such as forming a circuit pattern to be an outer layer circuit on the metal foil by a method such as a subtractive method.

【0022】このようにして得られる多層プリント配線
板は、樹脂層に織布又は不織布を備えている樹脂付き金
属箔を使用しているので、弾性率が高い多層プリント配
線板とすることができる。そのため、多層プリント配線
板に部品実装するたのリフロー時に、多層プリント配線
板に発生する反り・タワミが低減される。更に、樹脂付
き金属箔の金属箔の厚さが9μm以下である場合には、
微細回路を精度良く、且つ容易に形成することが可能な
多層プリント配線板となる。
The multilayer printed wiring board thus obtained uses a resin-coated metal foil having a woven or non-woven fabric in the resin layer, so that a multilayer printed wiring board having a high elastic modulus can be obtained. . Therefore, warpage and deflection generated in the multilayer printed wiring board at the time of reflow for component mounting on the multilayer printed wiring board are reduced. Further, when the thickness of the metal foil of the resin-attached metal foil is 9 μm or less,
A multilayer printed wiring board on which a fine circuit can be formed accurately and easily.

【0023】[0023]

【実施例】以下、本発明を実施例及び比較例を用いてさ
らに具体的に説明する。 実施例1〜実施例6、比較例1〜比較例3 〈エポキシ樹脂組成物(ワニス)の調製〉エポキシ樹脂
として、臭素化ビスフェノールA型エポキシ樹脂(東都
化成社製「YDB−500」:エポキシ当量500、臭
素含有率約24質量%)を、クレゾールノボラック型エ
ポキシ樹脂(東都化成社製「YDCN−220」:エポ
キシ当量220)を用いた。硬化剤として、ジシアンジ
アミド(分子量84、理論活性水素当量21)を用い、
硬化促進剤として、2−エチル−4−メチルイミダゾー
ルを用い、溶剤としてメチルエチルケトン(MEK)、
メトキシプロパノール(MP)、ジメチルフォルムアミ
ド(DMF)を用いた。
EXAMPLES The present invention will be described more specifically with reference to examples and comparative examples. Examples 1 to 6 and Comparative Examples 1 to 3 <Preparation of Epoxy Resin Composition (Varnish)> As an epoxy resin, a brominated bisphenol A type epoxy resin (“YDB-500” manufactured by Toto Kasei Co., Ltd .: epoxy equivalent) 500, a bromine content of about 24% by mass) and a cresol novolak type epoxy resin (“YDCN-220” manufactured by Toto Kasei: epoxy equivalent 220). As a curing agent, dicyandiamide (molecular weight 84, theoretically active hydrogen equivalent 21) was used.
2-ethyl-4-methylimidazole is used as a curing accelerator, methyl ethyl ketone (MEK) as a solvent,
Methoxypropanol (MP) and dimethylformamide (DMF) were used.

【0024】実施例1〜実施例6及び比較例1〜比較例
3における、上記の各成分の配合割合は、次のとおりで
ある。臭素化ビスフェノールA型エポキシ樹脂を60質
量部、クレゾールノボラック型エポキシ樹脂を10質量
部、ジシアンジアミドを2質量部、2−エチル−4−メ
チルイミダゾールを0.1質量部、メチルエチルケトン
を15質量部、メトキシプロパノールを5質量部、ジメ
チルフォルムアミドを15質量部の割合で配合するよう
にした。比較例3では、球状シリカも添加するように
し、その配合割合は、上記の溶剤を除く成分と球状シリ
カの全合計量に対し球状シリカが40体積%となるよう
に配合した。
The proportions of the above components in Examples 1 to 6 and Comparative Examples 1 to 3 are as follows. 60 parts by mass of brominated bisphenol A type epoxy resin, 10 parts by mass of cresol novolak type epoxy resin, 2 parts by mass of dicyandiamide, 0.1 parts by mass of 2-ethyl-4-methylimidazole, 15 parts by mass of methyl ethyl ketone, methoxy 5 parts by mass of propanol and 15 parts by mass of dimethylformamide were blended. In Comparative Example 3, spherical silica was also added, and the compounding ratio was such that spherical silica was 40% by volume based on the total amount of the components excluding the solvent and the spherical silica.

【0025】特殊機化工業社製のホモミキサーを用い、
エポキシ樹脂、硬化剤及び溶剤を回転速度1000rp
mにて90分間攪拌して混合し(比較例3では球状シリ
カも添加)、その後硬化促進剤(2−エチル−4−メチ
ルイミダゾール)を添加し、再度回転速度1000rp
mにて15分間攪拌し、その後脱気して、エポキシ樹脂
組成物のワニスを調製した。
Using a homomixer manufactured by Tokushu Kika Kogyo Co., Ltd.
Rotating speed of epoxy resin, hardener and solvent 1000rpm
The mixture was mixed by stirring at 90 m for 90 minutes (spherical silica was also added in Comparative Example 3), then a curing accelerator (2-ethyl-4-methylimidazole) was added, and the rotation speed was again set to 1000 rpm.
m, and then degassed to prepare a varnish of the epoxy resin composition.

【0026】〈プリプレグの作製〉実施例1〜実施例6
では、表1〜表2に示す樹脂層が備える基材(ガラスク
ロス又はアラミド繊維の不織布)を、上記のように調製
したエポキシ樹脂組成物のワニスに含浸し、含浸したも
のを非接触タイプの加熱ユニットにより、160℃で加
熱乾燥して、ワニス中の溶剤を乾燥除去し、エポキシ樹
脂組成物を半硬化させて、硬化時間(ゲル化時間)が1
70℃で150秒であるプリプレグを、各実施例につい
て作製した。
<Preparation of Prepreg> Examples 1 to 6
Then, the base material (nonwoven fabric of glass cloth or aramid fiber) provided in the resin layer shown in Tables 1 and 2 is impregnated with the varnish of the epoxy resin composition prepared as described above, and the impregnated one is a non-contact type. By heating and drying at 160 ° C. by a heating unit, the solvent in the varnish is dried and removed, and the epoxy resin composition is semi-cured, and the curing time (gelling time) is 1
Prepregs at 150C for 70 seconds were made for each example.

【0027】〈樹脂付き銅箔の作製〉実施例1〜実施例
6では、上記のプリプレグ1枚と、表1〜表2に示す厚
さの銅箔と、厚さ35μmのPETフィルムとを、プリ
プレグを中央位置に配して、名機製作所製の真空加圧式
ラミネータ(品番MVLP−500)内に導き、連続的
に接着し、樹脂層を挟んで銅箔とカバーフィルム(PE
Tフィルム)が一体化されている樹脂付き銅箔を作製し
た。ラミネータ条件は、熱盤温度100℃、吸引時間6
0秒、加圧時間60秒、圧力0.1MPaとして行っ
た。また、比較例1〜比較例3では、表3に示す銅箔
に、上記のように調製したエポキシ樹脂組成物のワニス
を塗布し、加熱乾燥して、樹脂付き銅箔を作製した。得
られた各樹脂付き銅箔の樹脂層の厚さは表1〜表3に示
す厚さであった。なお、比較例3ではキャリア箔である
厚さ35μmのキャリア銅箔と、厚さ5μmの極薄銅箔
とを一体化しているものの極薄銅箔面にエポキシ樹脂組
成物のワニスを塗布するようにした。
<Production of Copper Foil with Resin> In Examples 1 to 6, one prepreg, a copper foil having a thickness shown in Tables 1 and 2, and a PET film having a thickness of 35 μm were prepared. The prepreg is arranged at the center position, guided into a vacuum pressurized laminator (product number MVLP-500) manufactured by Meiki Seisakusho, continuously bonded, and sandwiched with a resin layer with a copper foil and a cover film (PE).
A T-film) was formed into a resin-coated copper foil. Laminator conditions are: hot platen temperature 100 ° C, suction time 6
The test was performed at 0 seconds, a pressurizing time of 60 seconds and a pressure of 0.1 MPa. In Comparative Examples 1 to 3, a varnish of the epoxy resin composition prepared as described above was applied to the copper foil shown in Table 3 and dried by heating to prepare a resin-coated copper foil. The thickness of the resin layer of each of the obtained copper foils with resin was as shown in Tables 1 to 3. In Comparative Example 3, although a carrier copper foil having a thickness of 35 μm, which is a carrier foil, and an ultra-thin copper foil having a thickness of 5 μm were integrated, a varnish of an epoxy resin composition was applied to the ultra-thin copper foil surface. I made it.

【0028】〈多層プリント配線板の作製〉実施例1〜
実施例6、比較例1〜比較例3では、基板厚さ0.2m
mのFR−4グレードの両面銅張積層板(銅箔厚さ35
μm)の銅箔に表面処理(黒化処理)を施したものを内
層用基板として使用した。この内層用基板の両面に上記
のようにして作製した樹脂付き銅箔のカバーフィルムを
剥離して露出する樹脂層面を重ね、170℃、90分間
加熱しながら、2.94MPaで加圧して内層用基板と
2枚の樹脂付き銅箔を一体化した(但し、比較例1〜比
較例3ではカバーフィルムなしの樹脂付き銅箔を使
用)。その後表面の銅箔にパターンレジストの形成、エ
ッチング、レジスト除去の各工程を行うことにより、外
層回路パターンを形成した評価用多層プリント配線板を
各実施例毎に作製した。なお、比較例3では表面にあっ
たキャリア銅箔を剥がして露出させた厚さ5μmの銅箔
に外層回路パターンを形成するようにした。
<Production of multilayer printed wiring board>
In Example 6, Comparative Examples 1 to 3, the substrate thickness was 0.2 m.
m FR-4 grade double-sided copper-clad laminate (copper foil thickness 35
μm) copper foil subjected to a surface treatment (blackening treatment) was used as an inner layer substrate. The resin layer surface exposed by peeling off the resin-coated copper foil cover film prepared as described above is overlapped on both surfaces of the inner layer substrate, and pressurized at 2.94 MPa while heating at 170 ° C. for 90 minutes. The substrate and two pieces of copper foil with resin were integrated (however, in Comparative Examples 1 to 3, copper foil with resin without a cover film was used). Thereafter, each step of forming a pattern resist, etching and removing the resist was performed on the copper foil on the surface, thereby producing a multilayer printed wiring board for evaluation having an outer layer circuit pattern formed for each example. In Comparative Example 3, the outer layer circuit pattern was formed on a copper foil having a thickness of 5 μm, which was exposed by peeling off the carrier copper foil on the surface.

【0029】〈評価〉上記で得られた実施例1〜実施例
6、比較例1〜比較例3の各樹脂付き銅箔及び各評価用
多層プリント配線板について外層回路のパターン精度、
硬化させた樹脂層の誘電率、硬化させた樹脂層の弾性
率、レーザー加工性の各評価項目について、下記の測定
方法で評価し、得られた結果を表1〜表3に示した。リ
フロー工程による反り量は下記の測定方法で述べるよう
に、さらに別途に反り評価用多層プリント配線板を作製
して評価し、得られた結果を表1〜表3に示した。
<Evaluation> For each of the obtained copper foils with resin and the multilayer printed wiring boards for evaluation in Examples 1 to 6 and Comparative Examples 1 to 3 obtained above, the pattern accuracy of the outer layer circuit was determined.
Each evaluation item of the dielectric constant of the cured resin layer, the elastic modulus of the cured resin layer, and the laser workability was evaluated by the following measurement methods, and the obtained results are shown in Tables 1 to 3. As described in the following measurement method, the amount of warpage due to the reflow step was evaluated by separately producing a multilayer printed wiring board for evaluating warpage, and the obtained results are shown in Tables 1 to 3.

【0030】外層回路のパターン精度の評価方法:評価
用多層プリント配線板に形成する外層回路パターンに、
ライン幅/ライン間間隔が20μm/20μm、30μ
m/30μm、40μm/40μm、50μm/50μ
m、100μm/100μmである5種類(5レベル)
のテストパターンを備えるようにして評価用多層プリン
ト配線板を作製し、どのレベルの微細回路パターンまで
が、断線や短絡等の不具合無く形成できているかを顕微
鏡で観察し、不具合無く形成できている限界を評価す
る。
Evaluation method of pattern accuracy of outer layer circuit: The outer layer circuit pattern formed on the multilayer printed wiring board for evaluation is
Line width / inter-line spacing is 20 μm / 20 μm, 30 μm
m / 30 μm, 40 μm / 40 μm, 50 μm / 50 μ
m, 100 μm / 100 μm, 5 types (5 levels)
A multi-layer printed wiring board for evaluation was prepared so as to be provided with the test pattern described above, and up to which level of the fine circuit pattern could be formed without a defect such as disconnection or short-circuit was observed with a microscope, and the pattern could be formed without a defect. Evaluate the limits.

【0031】硬化させた樹脂層の誘電率の評価方法:樹
脂付き銅箔の樹脂層のみを硬化させたものの誘電率をI
PC規格のTM-650 2.5.5.9に準拠して測定する(測定周
波数1MHz)。試験片は、実施例1〜実施例6では、
樹脂層とするプリプレグを成形後の厚さが約1.0mm
となるように重ねたものの両側に銅箔を配置したものを
積層成形(成形条件:温度170℃、圧力2.94MP
a、加熱加圧時間90分)し、得られた両面銅張積層板
の表裏の銅箔を前面エッチングして作製する。比較例1
〜比較例3では、樹脂付き銅箔より樹脂部分を剥ぎ取っ
て得た樹脂紛を集めて、測定形状の型に流し込み、プレ
ス成形(成形条件:温度170℃、圧力2.94MP
a、加熱加圧時間90分)して、約1.0mmの厚さの
試験片を作製する。
Evaluation method of the dielectric constant of the cured resin layer: The dielectric constant of the cured resin layer of the copper foil with the resin is expressed as I
Measure according to PC standard TM-650 2.5.5.9 (measurement frequency 1 MHz). The test piece was used in Examples 1 to 6.
The thickness after molding the prepreg as the resin layer is about 1.0mm
Laminate molding with copper foils on both sides of the laminated material (molding conditions: temperature 170 ° C., pressure 2.94MP)
a, heating and pressurizing time: 90 minutes), and the front and back copper foils of the obtained double-sided copper-clad laminate are etched on the front side. Comparative Example 1
In Comparative Example 3, resin powder obtained by stripping a resin portion from a resin-coated copper foil is collected, poured into a mold having a measured shape, and press-molded (molding conditions: temperature 170 ° C., pressure 2.94MP).
a, heating and pressurizing time: 90 minutes) to produce a test piece having a thickness of about 1.0 mm.

【0032】硬化させた樹脂層の弾性率の評価方法:樹
脂付き銅箔の樹脂層のみの弾性率をJIS規格のC64
81に準拠して測定する。試験片は、実施例1〜実施例
6では、樹脂層とするプリプレグを成形後の厚さが約
1.6mmとなるように重ねたものの両側に銅箔を配置
したものを積層成形(成形条件:温度170℃、圧力
2.94MPa、加熱加圧時間90分)し、得られた両
面銅張積層板の表裏の銅箔を前面エッチングして作製す
る。比較例1〜比較例3では、樹脂付き銅箔より樹脂部
分を剥ぎ取って得た樹脂紛を集めて、測定形状の型に流
し込み、プレス成形(成形条件:温度170℃、圧力
2.94MPa、加熱加圧時間90分)して、約1.6
mmの厚さの試験片を作製する。
Evaluation method of the elastic modulus of the cured resin layer: The elastic modulus of only the resin layer of the resin-coated copper foil was measured according to JIS standard C64.
Measure according to No.81. In Examples 1 to 6, a test piece was prepared by laminating prepregs as resin layers so that the thickness after molding was about 1.6 mm and arranging copper foils on both sides of the prepreg (forming conditions). : A temperature of 170 ° C., a pressure of 2.94 MPa, and a heating and pressing time of 90 minutes), and the front and back copper foils of the obtained double-sided copper-clad laminate are etched on the front surface. In Comparative Examples 1 to 3, resin powder obtained by stripping the resin portion from the resin-coated copper foil was collected, poured into a mold having a measured shape, and press-molded (molding conditions: temperature 170 ° C., pressure 2.94 MPa, Heating and pressurizing time of 90 minutes)
A test piece having a thickness of mm is prepared.

【0033】レーザー加工性の評価方法:得られた多層
プリント配線板に、バイアホールを形成するための穴加
工を、炭酸ガスレーザー(三菱電機社製「ML605G
TX−5100U」)を用いて実施し、樹脂付き銅箔の
樹脂層に穴径が100μmの穴を、1ショット当たりの
エネルギーを2mJとしたときに、何ショットで形成で
きるかを調べる。なお、穴加工をする位置の表面の銅箔
は予めエッチングで除去して、樹脂層を露出させた状態
で穴加工は行うようにする。
Evaluation method of laser workability: A hole for forming a via hole was formed in the obtained multilayer printed wiring board by a carbon dioxide laser (“ML605G” manufactured by Mitsubishi Electric Corporation).
TX-5100U ”), and it is examined how many shots can be formed in the resin layer of the resin-coated copper foil when a hole having a hole diameter of 100 μm is set at 2 mJ per shot. The copper foil on the surface where the hole is to be formed is removed by etching in advance, and the hole is formed while the resin layer is exposed.

【0034】リフロー工程による反り量の評価方法:基
板厚さ0.2mmのFR−4グレードの両面銅張積層板
(銅箔厚さ35μm)の銅箔に表面処理(黒化処理)を
施したものを内層用基板として使用した。この内層用基
板の両面に上記のようにして作製した樹脂付き銅箔のカ
バーフィルムを剥離して露出する樹脂層面を重ね、17
0℃、90分間加熱しながら、2.94MPaで加圧し
て内層用基板と2枚の樹脂付き銅箔を一体化した。そし
て、さらに得られた基板の両面に上記のようにして作製
した樹脂付き銅箔のカバーフィルムを剥離して露出する
樹脂層面を重ね、170℃、90分間加熱しながら、
2.94MPaで加圧して一体化してサイズが150m
m×150mmの反り評価用の多層プリント配線板を作
製した。但し、比較例1〜比較例3ではカバーフィルム
なしの樹脂付き銅箔を使用し、比較例3では一体化した
後にキャリア銅箔は剥離除去するようにして反り評価用
の多層プリント配線板を作製した。この反り評価用の多
層プリント配線板について、リフロー処理として230
℃の雰囲気中に10秒間曝す処理を行い、反り量を評価
する。反り量は、サイズ150mm×150mmの反り
評価用の多層プリント配線板を水平な板の上に置いたと
きの最大持ちあがり量を測定した。
Evaluation method of the amount of warpage by the reflow process: A copper foil of a FR-4 grade double-sided copper-clad laminate (copper foil thickness: 35 μm) having a substrate thickness of 0.2 mm was subjected to a surface treatment (blackening treatment). This was used as a substrate for the inner layer. The resin layer surface exposed by peeling off the cover film of the resin-coated copper foil prepared as described above is superposed on both surfaces of the inner layer substrate, and 17
While heating at 0 ° C. for 90 minutes, pressure was applied at 2.94 MPa to integrate the inner layer substrate and the two resin-coated copper foils. Then, on both surfaces of the obtained substrate, a resin layer surface exposed by peeling off the cover film of the resin-coated copper foil prepared as described above is overlapped, and heated at 170 ° C. for 90 minutes.
2. Pressed at 94MPa and integrated into 150m size
A multilayer printed wiring board for evaluation of warpage of mx 150 mm was produced. However, in Comparative Examples 1 to 3, a resin-coated copper foil without a cover film was used, and in Comparative Example 3, the carrier copper foil was peeled and removed after being integrated to produce a multilayer printed wiring board for warpage evaluation. did. The multilayer printed wiring board for evaluating the warpage was subjected to a reflow process of 230.
A process of exposing to an atmosphere of 10 ° C. for 10 seconds is performed, and the amount of warpage is evaluated. The amount of warpage was measured by measuring the maximum amount of lifting when a multilayer printed wiring board for evaluation of warpage having a size of 150 mm × 150 mm was placed on a horizontal board.

【0035】[0035]

【表1】 [Table 1]

【0036】[0036]

【表2】 [Table 2]

【0037】[0037]

【表3】 [Table 3]

【0038】得られた表1〜表3の結果から明かなよう
に、本発明の実施例は比較例に比べ硬化させた樹脂層の
弾性率が高く、リフロー工程による反り量が小さくなっ
ている。また、外層回路のパターン精度についても、比
較例1よりも良好となっている。
As is evident from the results shown in Tables 1 to 3, in the examples of the present invention, the elastic modulus of the cured resin layer is higher and the amount of warpage due to the reflow process is smaller than in the comparative example. . Also, the pattern accuracy of the outer layer circuit is better than that of Comparative Example 1.

【0039】[0039]

【発明の効果】請求項1〜請求項6に係る発明の樹脂付
き金属箔は、樹脂層が織布又は不織布を備えているの
で、請求項1〜請求項6に係る発明の樹脂付き金属箔に
よれば、これを用いて製造される多層プリント配線板の
弾性率を高くできて、部品実装のリフロー時の反り・タ
ワミの発生が低減できる多層プリント配線板を得ること
ができる。
According to the metal foil with resin of the invention according to claims 1 to 6, the resin layer is provided with a woven fabric or a non-woven fabric. According to this method, it is possible to obtain a multilayer printed wiring board in which the elastic modulus of a multilayer printed wiring board manufactured using the same can be increased, and the occurrence of warpage and deflection during reflow of component mounting can be reduced.

【0040】請求項2に係る発明の樹脂付き金属箔は、
金属箔の厚さが9μm以下であるため、上記の請求項1
〜請求項6に係る発明の樹脂付き金属箔の効果に加え
て、ハンドリング時にシワ等が生じにくくて、微細回路
を容易に形成することができる樹脂付き金属箔となると
いう有用な効果を奏する。
The metal foil with resin of the invention according to claim 2 is
The above claim 1 because the thickness of the metal foil is 9 μm or less.
In addition to the effects of the metal foil with resin of the invention according to the sixth to sixth aspects, a useful effect that a wrinkle or the like hardly occurs during handling and a metal foil with resin from which a fine circuit can be easily formed is obtained.

【0041】請求項7に係る発明の多層プリント配線板
は、請求項1〜請求項6の何れかに記載の樹脂付き金属
箔を用いて製造されるので、弾性率が高く、部品実装の
リフロー時の反り・タワミの発生が低減される多層プリ
ント配線板となる。
The multilayer printed wiring board of the invention according to claim 7 is manufactured by using the metal foil with resin according to any one of claims 1 to 6, so that it has a high elastic modulus and reflow of component mounting. It becomes a multilayer printed wiring board in which the occurrence of warpage and deflection is reduced.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 森田 智貴 大阪府門真市大字門真1048番地松下電工株 式会社内 (72)発明者 丸本 佳伸 大阪府門真市大字門真1048番地松下電工株 式会社内 (72)発明者 須川 美久 大阪府門真市大字門真1048番地松下電工株 式会社内 Fターム(参考) 5E346 AA12 AA15 AA43 CC04 CC05 CC09 CC10 CC32 CC34 CC55 DD02 DD12 DD32 EE07 EE09 FF04 GG02 GG15 GG17 GG22 GG28 HH11  ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Tomoki Morita 1048 Kadoma Kadoma, Osaka Pref.Matsushita Electric Works, Ltd. (72) Inventor Miku Sugawa 1048, Kazuma, Kadoma, Osaka Prefecture F-term in Matsushita Electric Works, Ltd.

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 金属箔の片面に熱溶融可能であり熱硬化
性を有する樹脂層を設けて形成される樹脂付き金属箔で
あって、樹脂層が織布又は不織布を備えていることを特
徴とする樹脂付き金属箔。
1. A resin-attached metal foil formed by providing a heat-fusible and thermosetting resin layer on one side of a metal foil, wherein the resin layer comprises a woven or nonwoven fabric. Metal foil with resin.
【請求項2】 金属箔の厚さが9μm以下であることを
特徴とする請求項1記載の樹脂付き金属箔。
2. The metal foil with resin according to claim 1, wherein the thickness of the metal foil is 9 μm or less.
【請求項3】 樹脂層が備える織布がガラスクロスであ
ることを特徴とする請求項1又は請求項2記載の樹脂付
き金属箔。
3. The resin-attached metal foil according to claim 1, wherein the woven cloth provided in the resin layer is a glass cloth.
【請求項4】 樹脂層が備える不織布が有機繊維の不織
布であることを特徴とする請求項1又は請求項2記載の
樹脂付き金属箔。
4. The resin-attached metal foil according to claim 1, wherein the nonwoven fabric provided in the resin layer is an organic fiber nonwoven fabric.
【請求項5】 樹脂層の硬化物の誘電率が5以下である
ことを特徴とする請求項1〜請求項4の何れかに記載の
樹脂付き金属箔。
5. The resin-attached metal foil according to claim 1, wherein the cured product of the resin layer has a dielectric constant of 5 or less.
【請求項6】 樹脂層の厚さが30〜200μmである
ことを特徴とする請求項1〜請求項5の何れかに記載の
樹脂付き金属箔。
6. The metal foil with resin according to claim 1, wherein the thickness of the resin layer is 30 to 200 μm.
【請求項7】 請求項1〜請求項6の何れかに記載の樹
脂付き金属箔の樹脂層側を、導体回路を形成している内
層用基板と重ねて積層成形する工程を経て製造している
ことを特徴とする多層プリント配線板。
7. A resin layer side of the resin-attached metal foil according to any one of claims 1 to 6, which is manufactured through a step of laminating and laminating the resin layer side with an inner layer substrate forming a conductor circuit. A multilayer printed wiring board.
JP2001154480A 2001-05-23 2001-05-23 Resin-attached metal foil and multilayered printed wiring board Pending JP2002353583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001154480A JP2002353583A (en) 2001-05-23 2001-05-23 Resin-attached metal foil and multilayered printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001154480A JP2002353583A (en) 2001-05-23 2001-05-23 Resin-attached metal foil and multilayered printed wiring board

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007278606A Division JP2008053746A (en) 2007-10-26 2007-10-26 Resin-bearing metal foil

Publications (2)

Publication Number Publication Date
JP2002353583A true JP2002353583A (en) 2002-12-06
JP2002353583A5 JP2002353583A5 (en) 2007-12-13

Family

ID=18998818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001154480A Pending JP2002353583A (en) 2001-05-23 2001-05-23 Resin-attached metal foil and multilayered printed wiring board

Country Status (1)

Country Link
JP (1) JP2002353583A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005329694A (en) * 2004-04-21 2005-12-02 Hitachi Chem Co Ltd Metal foil with resin
JP2008254451A (en) * 2008-06-23 2008-10-23 Matsushita Electric Works Ltd Insulating sheet with metal foil

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09289378A (en) * 1996-04-19 1997-11-04 Fuji Xerox Co Ltd Printed wiring board and manufacture thereof
JPH09321430A (en) * 1996-05-30 1997-12-12 Matsushita Electric Ind Co Ltd Manufacture of multilayer printed wiring board
JPH1154924A (en) * 1997-08-06 1999-02-26 Hitachi Chem Co Ltd Manufacture of multilayered printed board
JPH11150366A (en) * 1997-11-18 1999-06-02 Asahi Chem Ind Co Ltd Production of sequential multilayer wiring board
JPH11163208A (en) * 1997-12-01 1999-06-18 Mitsubishi Gas Chem Co Inc Multilayered printed wiring board
JP2000143734A (en) * 1998-11-06 2000-05-26 Tomoegawa Paper Co Ltd Thermosetting low-permittivity resin composition and circuit laminated board

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09289378A (en) * 1996-04-19 1997-11-04 Fuji Xerox Co Ltd Printed wiring board and manufacture thereof
JPH09321430A (en) * 1996-05-30 1997-12-12 Matsushita Electric Ind Co Ltd Manufacture of multilayer printed wiring board
JPH1154924A (en) * 1997-08-06 1999-02-26 Hitachi Chem Co Ltd Manufacture of multilayered printed board
JPH11150366A (en) * 1997-11-18 1999-06-02 Asahi Chem Ind Co Ltd Production of sequential multilayer wiring board
JPH11163208A (en) * 1997-12-01 1999-06-18 Mitsubishi Gas Chem Co Inc Multilayered printed wiring board
JP2000143734A (en) * 1998-11-06 2000-05-26 Tomoegawa Paper Co Ltd Thermosetting low-permittivity resin composition and circuit laminated board

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005329694A (en) * 2004-04-21 2005-12-02 Hitachi Chem Co Ltd Metal foil with resin
JP4590982B2 (en) * 2004-04-21 2010-12-01 日立化成工業株式会社 Metal foil with resin
JP2008254451A (en) * 2008-06-23 2008-10-23 Matsushita Electric Works Ltd Insulating sheet with metal foil

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