JP2002346463A - Sheet glass coating device - Google Patents

Sheet glass coating device

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Publication number
JP2002346463A
JP2002346463A JP2001155062A JP2001155062A JP2002346463A JP 2002346463 A JP2002346463 A JP 2002346463A JP 2001155062 A JP2001155062 A JP 2001155062A JP 2001155062 A JP2001155062 A JP 2001155062A JP 2002346463 A JP2002346463 A JP 2002346463A
Authority
JP
Japan
Prior art keywords
coating
substrate
glass plate
glass
sheet glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001155062A
Other languages
Japanese (ja)
Inventor
Hideki Mori
秀樹 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP2001155062A priority Critical patent/JP2002346463A/en
Publication of JP2002346463A publication Critical patent/JP2002346463A/en
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)
  • Optical Filters (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a sheet glass coating device capable of providing a high precision coating film on a sheet glass by a die coating method, without moving such a conventional expensive, large sized and heavy unit, with a low-priced device. SOLUTION: The sheet glass coating device 100 is for applying a coating liquid to a sheet glass 13, and is equipped with a glass supply part 8 which supplies the sheet glass 13, a precision table with an air blowing-off hole which floats this sheet glass 13 with air, a block for receiving glass which limits rising and right and left positional displacement of the sheet glasses 13, a glass press-out block 5b with a glass feeding precision linear motor 5a which shifts the sheet glass 13 at a predetermines coating speed, a die head 1 which applys the coating liquid to the sheet glass 13, a coating liquid supply means which supplies the coating liquid, and a glass discharge part 9 which discharges the sheet glasses 13.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、枚葉状の基板、例
えばガラス板に塗布する単板塗布装置に関するものであ
り、特に液晶ディスプレイ用のカラーフィルターの如き
大型化するガラス板に高精度の塗布膜を形成する単板塗
布装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a single-plate coating apparatus for coating a sheet-like substrate, for example, a glass plate, and more particularly to a high-precision coating method for a large-sized glass plate such as a color filter for a liquid crystal display. The present invention relates to a veneer coating apparatus for forming a film.

【0002】[0002]

【従来の技術】従来、例えば枚葉状のガラス板への塗布
装置として、ガラス板中央部へ塗液を滴下し、回転しな
がら薄膜を形成するスピンコート法が知られ、種々の製
品に広く使用されている。
2. Description of the Related Art Conventionally, as a coating apparatus for a sheet-like glass plate, for example, a spin coating method in which a coating liquid is dropped on the center of a glass plate and a thin film is formed while rotating is known, and widely used for various products. Have been.

【0003】しかし近年において、例えば液晶ディスプ
レー用のカラーフィルターの基板としてのガラス板など
では、その大型化に伴い滴下する液量を多く必要とし、
従って飛ばされて廃棄される量も多くなり不経済的であ
り、またその膜厚の精度も低下する傾向があった。
However, in recent years, for example, a glass plate or the like as a substrate of a color filter for a liquid crystal display requires a large amount of liquid to be dropped due to an increase in size thereof.
Accordingly, the amount of the film to be skipped and discarded increases, which is uneconomical, and the accuracy of the film thickness tends to decrease.

【0004】そのため、ガラス板への塗布方法として、
例えば精密なテーブル上へ真空吸着させて保持し、その
ガラス板を保持したままの状態でテーブルを移動させ、
塗布を行うダイヘッドの下部を通過させることでガラス
板へ塗布を行うダイコート方式がある。また、前記のガ
ラス板を保持するテーブル上部に位置するダイヘッドユ
ニットが、ガラス板を保持したままの状態のテーブル上
を移動、通過することでガラス板へ塗布を行うダイコー
ト方式もある。
[0004] Therefore, as a coating method on a glass plate,
For example, vacuum suction on a precision table and hold it, and move the table while holding the glass plate,
There is a die coating method in which coating is performed on a glass plate by passing through a lower portion of a die head for performing coating. There is also a die coating method in which a die head unit located above a table holding the glass plate moves and passes over the table holding the glass plate to apply the liquid to the glass plate.

【0005】上記のようなダイコート方式で精密なコー
ティングを実現するには、塗布されるガラス板と塗液を
塗布するダイヘッドとの距離(塗布ギャップ)を一定に
し、かつ塗布速度を一定にすることが重要な要件であ
る。ところが従来の装置で、高精度の塗布膜を得るため
には、上記のような真空吸着でガラス板を保持する大き
く重い精密なテーブル(定盤)で、それを駆動させるた
めの大きなトルクと高精度の駆動を兼ね備えた駆動用モ
ータ、高精度ガイドユニットが必要となり、高価な装置
となるものであった。
In order to realize precise coating by the above-mentioned die coating method, the distance (coating gap) between the glass plate to be coated and the die head for coating the coating liquid is constant and the coating speed is constant. Is an important requirement. However, in order to obtain a high-precision coating film with the conventional apparatus, a large, heavy precision table (platen) that holds the glass plate by vacuum suction as described above requires a large torque and a high level to drive it. A high-precision guide unit and a driving motor having high-precision driving are required, which makes the apparatus expensive.

【0006】また、上記のようなダイヘッドを搭載した
ダイヘッドユニットが移動するタイプの場合、いわゆる
門型の形状を取り、ユニットのピッチングおよびヨーイ
ングを押さえるため、高い剛性を必要とし、その結果重
く、かつ容量も大きくなる。さらにこの方式では駆動系
の位置とガイド部、重心の位置関係が離れる場合が多
く、前記のテーブル移動タイプに比べ、ピッチングおよ
びびヨーイングの影響が出やすい。また、いずれの方法
においてもガイド部に案内され移動する形となり、移動
しながらガラス板とダイヘッドの塗布ギャップを一定に
保つ必要があり、そのガイド部は精密なエアーガイドも
しくはキサゲ加工を施したガイド部を用いているもの
で、重いものを高精度に移動させることは非常に難し
く、より高価な装置となるものであった。
In the case of a type in which a die head unit having the above-described die head mounted thereon moves, a so-called portal shape is required, and high pitch rigidity is required to suppress pitching and yawing of the unit. The capacity also increases. Further, in this method, the position of the drive system, the position of the guide portion, and the position of the center of gravity are often separated from each other, and the influence of pitching and yawing is more likely to occur as compared with the table moving type. In either method, it is guided by the guide part and moves, and it is necessary to keep the coating gap between the glass plate and the die head constant while moving, and the guide part is a precision air guide or a guide that has been subjected to scraping processing. It is very difficult to move a heavy object with high precision because of the use of a unit, and it becomes a more expensive device.

【0007】[0007]

【発明が解決しようとする課題】本発明は、かかる従来
技術の問題点を解決するものであり、その課題とすると
ころは、ダイコート方式で、従来のように高価でかつ大
きく重いユニットを移動させることが無く、安価な装置
でかつガラス板上へ高精度の塗布膜が得られる単板塗布
装置を提供することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to move an expensive, large and heavy unit as in the prior art by a die coat method. It is an object of the present invention to provide a single-plate coating apparatus which can obtain a high-precision coating film on a glass plate without using any apparatus at a low cost.

【0008】[0008]

【課題を解決するための手段】本発明に於いて上記課題
を達成するために、まず請求項1の発明では、枚葉状の
基板へ塗液を塗布する単板塗布装置であって、前記基板
を供給する供給手段と、該基板をエアで浮上させる基板
浮上手段と、該基板の上昇限界および左右の位置ずれを
防ぐ基板ガイド手段と、該基板を所定の塗布速度で移動
させる基板移動手段と、該基板へ塗液を塗布する塗布手
段と、該塗布手段に塗液を供給する塗液供給手段と、該
基板を排出する基板排出手段とを具備することを特徴と
する単板塗布装置としたものである。
In order to achieve the above object, the present invention is directed to a single-plate coating apparatus for applying a coating solution to a sheet-like substrate, Supply means for supplying, substrate floating means for floating the substrate by air, substrate guide means for preventing the substrate from rising and shifting left and right, and substrate moving means for moving the substrate at a predetermined coating speed. A single-plate coating apparatus, comprising: a coating unit that applies a coating liquid to the substrate; a coating liquid supply unit that supplies a coating liquid to the coating unit; and a substrate discharging unit that discharges the substrate. It was done.

【0009】また、請求項2の発明では、前記基板がガ
ラス板であることを特徴とする請求項1記載の単板塗布
装置としたものである。
According to a second aspect of the present invention, there is provided the veneer coating apparatus according to the first aspect, wherein the substrate is a glass plate.

【0010】また、請求項3の発明では、前記基板浮上
手段が複数のエア吹出し孔を有するエア吹出し孔付精密
テーブルのエアで基板を浮上させ、該浮上した基板を前
記基板移動手段が精密リニアモータと基板押し出しブロ
ックとで押し出して所定の速度で移動させることを特徴
とする請求項1または2記載の単板塗布装置としたもの
である。
Further, in the invention according to claim 3, the substrate floating means floats the substrate by air of a precision table having a plurality of air blowing holes and has a plurality of air blowing holes. 3. The single-plate coating apparatus according to claim 1, wherein the single-plate coating apparatus is extruded by a motor and a substrate extruding block and is moved at a predetermined speed.

【0011】さらにまた、請求項3の発明では、前記塗
布手段がダイヘッドによるダイコート方式である請求項
1、2または3記載の単板塗布装置としたものである。
Further, in the invention according to claim 3, the single-plate coating apparatus according to any one of claims 1, 2 and 3, wherein the coating means is a die coating method using a die head.

【0012】上記本発明の単板塗布装置によれば、エア
吹出し孔付精密テーブルのエアで基板を浮上させ、この
浮上した基板のみを精密リニアモータ付基板押し出しブ
ロックで押し出して所定の速度で移動させるので、従来
のように高価でかつ大きく重いユニット(ダイヘッドユ
ニットまたは精密テーブル(吸引孔付常磐)ユニット)
を移動させることが無く、安価な装置でかつガラス板上
へ高精度の塗布膜が得られる単板塗布装置を提供するこ
とができる。
According to the veneer coating apparatus of the present invention, the substrate is levitated by the air of the precision table having the air blowing holes, and only the levitated substrate is extruded by the substrate extrusion block with the precision linear motor and moved at a predetermined speed. The unit is expensive and large and heavy as in the past (die head unit or precision table (Joban with suction holes) unit)
A single-plate coating device can be provided which does not move the device and which can obtain a high-precision coating film on a glass plate with an inexpensive device.

【0013】[0013]

【発明の実施の形態】以下本発明の実施の形態を図面を
用いて詳細に説明する。まず本発明の単板塗布装置は、
図1の側面概略図に示すように、例えば枚葉状のガラス
板(13)へ塗液を塗布する単板塗布装置(100)で
あって、枚葉状のガラス板(13)を供給する供給手段
としてのガラス板供給部(8)と、このガラス板(1
3)をエアで浮上させる基板浮上手段とてのエア吹出し
孔付精密テーブル(4)と、図2の正面概略図に示すよ
うに、ガラス板(13)の上昇限界および左右の位置ず
れを防ぐ基板ガイド手段としてのガラス板受けブロック
(10a,10b)と、図1に示すように、このガラス
板(13)を所定の塗布速度で移動させる基板移動手段
としてのガラス板送り精密リニアモータ(5a)が付い
たガラス板押出しブロック(5b)と、ガラス板(1
3)へ塗液を塗布する塗布手段としてのヘッド上下シリ
ンダー(3)付ダイヘッド(1)と、このダイヘッド
(1)にに塗液を供給する塗液供給手段としての塗液供
給用ポンプ(11)と塗液タンク(12)と、塗布され
たガラス板(13)を排出する基板排出手段としてのガ
ラス板排出部(9)とを具備しているものである。ま
た、図示はしていないが、ガラス板供給部(8)及びガ
ラス板排出部(9)に、ガラス板を供給排出する為のロ
ーダー/アンローダーがある。
Embodiments of the present invention will be described below in detail with reference to the drawings. First, the veneer coating apparatus of the present invention
As shown in the schematic side view of FIG. 1, for example, a single-plate applying apparatus (100) for applying a coating liquid to a sheet-like glass plate (13), and a supply means for supplying the sheet-like glass plate (13) Glass plate supply section (8) as the
A precision table (4) with air blowing holes as a substrate levitation means for floating 3) with air, and as shown in the schematic front view of FIG. As shown in FIG. 1, a glass plate receiving block (10a, 10b) as a substrate guide means, and a glass plate feed precision linear motor (5a) as a substrate moving means for moving the glass plate (13) at a predetermined coating speed. ) With a glass plate extrusion block (5b) and a glass plate (1
3) A die head (1) with a head vertical cylinder (3) as a coating means for coating the coating liquid, and a coating liquid supply pump (11) as a coating liquid supply means for supplying a coating liquid to the die head (1). ), A coating liquid tank (12), and a glass plate discharge section (9) as a substrate discharge means for discharging the applied glass plate (13). Although not shown, the glass plate supply unit (8) and the glass plate discharge unit (9) have a loader / unloader for supplying and discharging the glass plate.

【0014】次に各手段での基本的な塗布動作について
説明する。まず、本装置の待機位置について、図3の側
面概略図に示すように、ダイヘッド(1)は上方に移動
するもので、乾燥防止ユニット(2)上の待機位置にあ
る。ガラス板与圧保持シリンダー(6a)本体に付いた
ガラス板与圧保持ブロック(6b)は、ストロークエン
ド(後退端)にあり、そこでガラス板(13)が接触停
止した位置が塗布開始位置となる。また、ガラス板与圧
保持シリンダー(6a)、ガラス板与圧保持ブロック
(6b)はそのユニットごと上下する機能を有し、下降
した位置すなわちエア吹出し孔付精密テーブル(4)上
に接している。またガラス板送り精密リニアモータ(5
a)とガラス板押し出しブロック(5b)はそのユニッ
トごと上下する機能を有し、上昇した位置すなわちガラ
ス板押し出しブロック(5b)の下をガラス板(13)
が通過できる位置にあり、このガラス板押し出しブロッ
ク(5b)は後退端にある。そこで人手もしくはローダ
ー(図示せず)にてガラス板(13)を複数のローラで
構成されるガラス板供給部(8)にのせる。
Next, the basic application operation of each means will be described. First, as for the standby position of the present apparatus, as shown in the schematic side view of FIG. 3, the die head (1) moves upward and is at the standby position on the drying prevention unit (2). The glass plate pressurization holding block (6b) attached to the glass plate pressurization holding cylinder (6a) body is at the stroke end (retreat end), and the position where the glass plate (13) stops contacting there becomes the coating start position. . Further, the glass plate pressurization holding cylinder (6a) and the glass plate pressurization holding block (6b) have the function of moving up and down together with their units, and are in contact with the lowered position, that is, on the precision table (4) with air blowing holes. . In addition, precision linear motor (5
a) and the glass plate extruding block (5b) have a function of moving up and down together with the unit, and the glass plate (13) is placed at an elevated position, that is, below the glass plate extruding block (5b).
Is at a position through which the glass sheet extrusion block (5b) is located at the retracted end. Then, the glass plate (13) is placed on the glass plate supply section (8) composed of a plurality of rollers by hand or by a loader (not shown).

【0015】次に図4の側面概略図に示すように、この
ガラス板供給部(8)のローラが回転することによって
ガラス板(13)をエア吹出し孔付精密テーブル(4)
上へ送り込む。この時エア吹出し孔付精密テーブル
(4)の前半部では、エア吹出し孔(4a)よりエアー
を吹出し、ガラス板(13)を浮上させる。
Next, as shown in the schematic side view of FIG. 4, the glass plate (13) is rotated by the rotation of the rollers of the glass plate supply section (8) so that the glass plate (13) is moved to the precision table (4) with air blowing holes.
Send it up. At this time, in the first half of the precision table with air outlets (4), air is blown out from the air outlets (4a) to float the glass plate (13).

【0016】さらに図5の側面概略図に示すように、ガ
ラス板(13)がガラス板押し出しブロック(5b)の
下を通過した時点でガラス板送り精密リニアモータ(5
a)付ガラス板押し出しブロック(5b)はそのユニッ
トごと下降し、そのガラス板(13)を押し始める。
Further, as shown in the schematic side view of FIG. 5, when the glass plate (13) passes under the glass plate extruding block (5b), the glass plate feeding precision linear motor (5) is used.
a) The attached glass plate extruding block (5b) descends together with its unit and starts pushing the glass plate (13).

【0017】さらに図6の側面概略図に示すように、ガ
ラス板押し出しブロック(5b)に突き当たるまでガラ
ス板押し出しブロック(5b)でガラス板(13)を送
り込む。
Further, as shown in the schematic side view of FIG. 6, the glass plate (13) is fed by the glass plate extruding block (5b) until the glass plate (13) comes into contact with the glass plate extruding block (5b).

【0018】続いて図7の側面概略図に示すように、ダ
イヘッド(1)が一旦上昇し、乾燥防止ユニット(2)
が退避した後設定された塗布ギャップとなる位置までダ
イヘッド(1)が下降し、塗液タンクから供給される塗
液をダイヘッド(1)に供給し、塗布を開始する。この
時ガラス板(13)の送り速度はガラス板送り精密リニ
アモータ(5a)によるもので塗布速度は、20〜12
0mm/sec程度となる。また実際にはガラス板(1
3)を押すガラス板押し出しブロック(5b)とガラス
板(13)とを密着させるため、ガラス板与圧保持シリ
ンダー(6a)とガラス板与圧保持ブロック(6b)に
より進行方向と対抗する方向に2〜10Nの与圧をかけ
る。
Subsequently, as shown in the schematic side view of FIG. 7, the die head (1) once rises and the drying prevention unit (2)
After retreating, the die head (1) descends to a position where the coating gap is set, supplies the coating liquid supplied from the coating liquid tank to the die head (1), and starts coating. At this time, the feeding speed of the glass plate (13) is based on the glass plate feeding precision linear motor (5a), and the coating speed is 20 to 12
It is about 0 mm / sec. In fact, a glass plate (1
3) Pressing the glass plate extruding block (5b) and the glass plate (13) in close contact with each other by the glass plate pressurizing holding cylinder (6a) and the glass plate pressurizing holding block (6b) in the direction opposite to the traveling direction. Apply a pressure of 2-10N.

【0019】そして図8の側面概略図に示すように、塗
布終了位置まで前述の形態でガラス板(13)を送り塗
布を行う。
Then, as shown in the schematic side view of FIG. 8, the glass plate (13) is fed in the above-described manner to the coating end position to perform coating.

【0020】また図9の側面概略図に示すように、塗布
終了位置において、塗液供給用ポンプ(図示せず)は停
止し、ダイヘッド(1)は上昇し、乾燥防止ユニット
(2)へ格納される。そしてガラス板与圧保持シリンダ
ー(6a)とガラス板与圧保持ブロック(6b)はその
ユニットごと上昇退避するようになる。
As shown in the schematic side view of FIG. 9, at the coating end position, the coating liquid supply pump (not shown) stops, the die head (1) rises, and is stored in the drying prevention unit (2). Is done. Then, the glass plate pressurizing holding cylinder (6a) and the glass plate pressurizing holding block (6b) rise and retreat together with their units.

【0021】さらにまた図10の側面概略図に示すよう
に、ガラス板(13)は、ガラス板送り精密リニアモー
タ(5a)とガラス板押し出しブロック(5b)及びガ
ラス板排出部(9)のローラの回転によりガラス板排出
位置までガラス板(13)を送り出す。以上の工程をも
って塗布工程1サイクルの動作とする。
Further, as shown in the schematic side view of FIG. 10, the glass plate (13) is composed of a glass plate feeding precision linear motor (5a), a glass plate extruding block (5b), and rollers of a glass plate discharging section (9). The glass plate (13) is sent out to the glass plate discharge position by the rotation of. The above process is defined as one cycle of the application process.

【0022】[0022]

【発明の効果】本発明は以上の構成であるから、下記に
示す如き効果がある。即ち、本発明の単板塗布装置によ
れば、エア吹出し孔付精密テーブルのエアで基板として
のガラス板を浮上させ、この浮上したガラス板のみを精
密リニアモータ付ガラス板押し出しブロックで押し出し
て所定の速度で移動させるので、従来のように高価でか
つ大きく重いユニット(ダイヘッドユニットまたは精密
テーブル(吸引孔付常磐)ユニット)を移動させること
が無く、安価な装置でかつガラス板上へ高精度の塗布膜
が得られる単板塗布装置を提供することができる。
As described above, the present invention has the following effects. That is, according to the veneer coating apparatus of the present invention, a glass plate as a substrate is levitated by the air of a precision table with air blowing holes, and only the levitated glass plate is extruded by a glass plate extruding block with a precision linear motor to a predetermined value. It does not move expensive, large and heavy units (die head unit or precision table (Joban with suction holes) unit) as in the past. A single-plate coating device from which a coating film can be obtained can be provided.

【0023】また、ガラス板上面を制限するガイドを有
する構造のため、従来方式のようにガラス板の微少な厚
みの変化に対してその厚みの変化量に合わせて塗布ギャ
ップを一定に保つためのダイヘッドを上下させる機構と
ガラス板厚を測定する測定ユニットが不要となる。よっ
て簡単な構造と安価な構成部品により構成される本発明
の単板塗布装置は、低価格で高精度の塗布膜を実現でき
る。
Further, since the structure has a guide for limiting the upper surface of the glass plate, it is necessary to keep the coating gap constant in accordance with the amount of change in the thickness of the glass plate as in the conventional method. A mechanism for raising and lowering the die head and a measurement unit for measuring the glass plate thickness are not required. Therefore, the single-plate coating apparatus of the present invention, which has a simple structure and inexpensive components, can realize a low-cost, high-precision coating film.

【0024】従って本発明は、枚葉状のガラス板、特に
液晶ディスプレイ用のカラーフィルターの如き大型化す
るガラス板に高精度の塗布膜を形成する単板塗布装置と
して、優れた実用上の効果を発揮する。
Accordingly, the present invention has an excellent practical effect as a single-plate coating apparatus for forming a high-precision coating film on a sheet-like glass plate, particularly a glass plate which becomes large, such as a color filter for a liquid crystal display. Demonstrate.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の単板塗布装置の一実施の形態を側面で
表した説明図である。
FIG. 1 is an explanatory view showing an embodiment of a veneer coating apparatus according to the present invention in a side view.

【図2】本発明の単板塗布装置の一実施の形態を正面で
表した説明図である。
FIG. 2 is an explanatory view showing an embodiment of the veneer coating apparatus of the present invention as viewed from the front.

【図3】本発明の単板塗布装置の塗布工程の動作の一実
施の形態を側面で表した説明図である。
FIG. 3 is an explanatory view showing an embodiment of an operation of a coating process of the veneer coating apparatus of the present invention in a side view.

【図4】本発明の単板塗布装置の塗布工程の他の動作の
一実施の形態を側面で表した説明図である。
FIG. 4 is an explanatory view showing another embodiment of another operation of the coating process of the veneer coating apparatus of the present invention in a side view.

【図5】本発明の単板塗布装置の塗布工程の他の動作の
一実施の形態を側面で表した説明図である。
FIG. 5 is an explanatory view showing another embodiment of another operation of the coating process of the veneer coating apparatus of the present invention in a side view.

【図6】本発明の単板塗布装置の塗布工程の他の動作の
一実施の形態を側面で表した説明図である。
FIG. 6 is an explanatory view showing another embodiment of another operation of the coating process of the single-plate coating device according to the present invention in a side view.

【図7】本発明の単板塗布装置の塗布工程の他の動作の
一実施の形態を側面で表した説明図である。
FIG. 7 is an explanatory view showing another embodiment of another operation of the coating process of the single-plate coating apparatus according to the present invention in a side view.

【図8】本発明の単板塗布装置の塗布工程の他の動作の
一実施の形態を側面で表した説明図である。
FIG. 8 is an explanatory view showing another embodiment of another operation of the coating process of the veneer coating apparatus of the present invention in a side view.

【図9】本発明の単板塗布装置の塗布工程の他の動作の
一実施の形態を側面で表した説明図である。
FIG. 9 is an explanatory view showing one embodiment of another operation of the coating process of the single-plate coating apparatus of the present invention in a side view.

【図10】本発明の単板塗布装置の塗布工程の他の動作
の一実施の形態を側面で表した説明図である。
FIG. 10 is an explanatory view showing another embodiment of another operation of the coating process of the veneer coating apparatus of the present invention in a side view.

【符号の説明】[Explanation of symbols]

1‥‥ダイヘッド 2‥‥乾燥防止ユニット 3‥‥ヘッド上下シリンダー 4‥‥エアー吹出し孔付精密テーブル 4a‥‥エアー吹出し孔 5a‥‥ガラス板送り精密リニアモーター 5b‥‥ガラス板押し出しブロック 6a‥‥ガラス板与圧保持シリンダー 6b‥‥ガラス板与圧保持ブロック 7a‥‥塗布ギャップ調整用リニアアクチュエーター1 7b‥‥塗布ギャップ調整用リニアアクチュエーター2 8‥‥ガラス板供給部 9‥‥ガラス板排出部 10a‥‥ガラス板受けブロック1 10b‥‥ガラス板受けブロック2 11‥‥塗液供給用ポンプ 12‥‥塗液タンク 13‥‥ガラス板 100‥‥単板塗布装置 1 Die head 2 Drying prevention unit 3 Head vertical cylinder 4 Precision table with air blowout hole 4a Air blowout hole 5a Glass plate feed precision linear motor 5b {Glass plate extrusion block 6a} Glass plate pressurization holding cylinder 6b {Glass plate pressurization holding block 7a} Coating gap adjustment linear actuator 17b {Coating gap adjustment linear actuator 2 8} Glass plate supply unit 9 Glass plate discharge unit 10a {Glass plate receiving block 1 10b} Glass plate receiving block 2 11} Coating liquid supply pump 12} Coating liquid tank 13} Glass plate 100} Single plate coating device

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】枚葉状の基板へ塗液を塗布する単板塗布装
置であって、前記基板を供給する供給手段と、該基板を
エアで浮上させる基板浮上手段と、該基板の上昇限界お
よび左右の位置ずれを防ぐ基板ガイド手段と、該基板を
所定の塗布速度で移動させる基板移動手段と、該基板へ
塗液を塗布する塗布手段と、該塗布手段に塗液を供給す
る塗液供給手段と、該基板を排出する基板排出手段とを
具備することを特徴とする単板塗布装置。
1. A single-plate coating apparatus for applying a coating liquid to a sheet-like substrate, comprising: a supply unit for supplying the substrate; a substrate floating unit for floating the substrate by air; Substrate guide means for preventing left and right displacement, substrate moving means for moving the substrate at a predetermined coating speed, coating means for applying a coating liquid to the substrate, and a coating liquid supply for supplying the coating liquid to the coating means And a substrate discharging means for discharging the substrate.
【請求項2】前記基板がガラス板であることを特徴とす
る請求項1記載の単板塗布装置。
2. The veneer coating apparatus according to claim 1, wherein said substrate is a glass plate.
【請求項3】前記基板浮上手段が複数のエア吹出し孔を
有するエア吹出し孔付精密テーブルのエアで基板を浮上
させ、該浮上した基板を前記基板移動手段が精密リニア
モータと基板押し出しブロックとで押し出して所定の速
度で移動させることを特徴とする請求項1または2記載
の単板塗布装置。
3. The substrate floating means floats a substrate with air from a precision table having air blowing holes having a plurality of air blowing holes, and the substrate moving means moves the floating substrate by a precision linear motor and a substrate pushing block. 3. The single-plate coating apparatus according to claim 1, wherein the single-plate coating apparatus is extruded and moved at a predetermined speed.
【請求項4】前記塗布手段がダイヘッドによるダイコー
ト方式である請求項1、2または3記載の単板塗布装
置。
4. The veneer coating apparatus according to claim 1, wherein said coating means is a die coating method using a die head.
JP2001155062A 2001-05-24 2001-05-24 Sheet glass coating device Pending JP2002346463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001155062A JP2002346463A (en) 2001-05-24 2001-05-24 Sheet glass coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001155062A JP2002346463A (en) 2001-05-24 2001-05-24 Sheet glass coating device

Publications (1)

Publication Number Publication Date
JP2002346463A true JP2002346463A (en) 2002-12-03

Family

ID=18999310

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2002346463A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006253373A (en) * 2005-03-10 2006-09-21 Tokyo Electron Ltd Apparatus, method, and program for substrate processing
WO2008143259A1 (en) * 2007-05-22 2008-11-27 Kabushiki Kaisha Watanabe Shoko Slit coater
JP2009061380A (en) * 2007-09-05 2009-03-26 Dainippon Screen Mfg Co Ltd Coating device and coating method
KR100943470B1 (en) 2003-08-05 2010-02-22 엘지디스플레이 주식회사 The device for coating photoresist and the method for driving the same
JP2010080983A (en) * 2009-12-25 2010-04-08 Tokyo Electron Ltd Substrate processing apparatus
KR101006819B1 (en) 2002-12-31 2011-01-10 도쿄엘렉트론가부시키가이샤 Method and apparatus for monitoring a material processing system
KR101061707B1 (en) 2004-02-05 2011-09-01 도쿄엘렉트론가부시키가이샤 Coating film forming apparatus and coating film forming method

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101006819B1 (en) 2002-12-31 2011-01-10 도쿄엘렉트론가부시키가이샤 Method and apparatus for monitoring a material processing system
KR100943470B1 (en) 2003-08-05 2010-02-22 엘지디스플레이 주식회사 The device for coating photoresist and the method for driving the same
KR101061707B1 (en) 2004-02-05 2011-09-01 도쿄엘렉트론가부시키가이샤 Coating film forming apparatus and coating film forming method
JP2006253373A (en) * 2005-03-10 2006-09-21 Tokyo Electron Ltd Apparatus, method, and program for substrate processing
JP4571525B2 (en) * 2005-03-10 2010-10-27 東京エレクトロン株式会社 Substrate processing apparatus and substrate processing method
KR101154756B1 (en) * 2005-03-10 2012-06-08 도쿄엘렉트론가부시키가이샤 Substrate processing apparatus and substrate processing method
WO2008143259A1 (en) * 2007-05-22 2008-11-27 Kabushiki Kaisha Watanabe Shoko Slit coater
JP2008289966A (en) * 2007-05-22 2008-12-04 Watanabe Shoko:Kk Slit coater
JP2009061380A (en) * 2007-09-05 2009-03-26 Dainippon Screen Mfg Co Ltd Coating device and coating method
JP2010080983A (en) * 2009-12-25 2010-04-08 Tokyo Electron Ltd Substrate processing apparatus

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