JP2002343234A5 - - Google Patents
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- Publication number
- JP2002343234A5 JP2002343234A5 JP2001139753A JP2001139753A JP2002343234A5 JP 2002343234 A5 JP2002343234 A5 JP 2002343234A5 JP 2001139753 A JP2001139753 A JP 2001139753A JP 2001139753 A JP2001139753 A JP 2001139753A JP 2002343234 A5 JP2002343234 A5 JP 2002343234A5
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- air supply
- treated
- exhaust
- treatment zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 5
- 238000007664 blowing Methods 0.000 claims 1
- 238000001035 drying Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001139753A JP2002343234A (ja) | 2001-05-10 | 2001-05-10 | 熱処理装置及び方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001139753A JP2002343234A (ja) | 2001-05-10 | 2001-05-10 | 熱処理装置及び方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002343234A JP2002343234A (ja) | 2002-11-29 |
| JP2002343234A5 true JP2002343234A5 (enExample) | 2005-02-24 |
Family
ID=18986474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001139753A Pending JP2002343234A (ja) | 2001-05-10 | 2001-05-10 | 熱処理装置及び方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002343234A (enExample) |
-
2001
- 2001-05-10 JP JP2001139753A patent/JP2002343234A/ja active Pending
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