JP2002331408A - Abrasion resistant coating film-covered tool - Google Patents

Abrasion resistant coating film-covered tool

Info

Publication number
JP2002331408A
JP2002331408A JP2001140903A JP2001140903A JP2002331408A JP 2002331408 A JP2002331408 A JP 2002331408A JP 2001140903 A JP2001140903 A JP 2001140903A JP 2001140903 A JP2001140903 A JP 2001140903A JP 2002331408 A JP2002331408 A JP 2002331408A
Authority
JP
Japan
Prior art keywords
hard
coating film
tool
cutting
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001140903A
Other languages
Japanese (ja)
Other versions
JP3454428B2 (en
Inventor
Takashi Ishikawa
剛史 石川
Nobuhiko Shima
順彦 島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to JP2001140903A priority Critical patent/JP3454428B2/en
Publication of JP2002331408A publication Critical patent/JP2002331408A/en
Application granted granted Critical
Publication of JP3454428B2 publication Critical patent/JP3454428B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a hard coating film-covered tool remarkably superior in oxidation resistance, abrasion resistance, a lubricity, and adhesion for coping with drying and speedup of cutting work of highly hard steel, and provide a composite hard coating film-covered tool further superior in adhesion by a combination with a conventional coating film. SOLUTION: This abrasion resistant coating film-covered tool is formed by covering a base body surface with a hard coating film. The coating film is formed of a hard layer composed of the chemical composition indicated by (Tia Si1-a )(Nx B1-x ), here, 0.5<=a<1, and 0.5<=x<=1. The hard layer is composed of a phase relatively rich in Si, and a phase relatively less in Si. An amorphous microcrystal (Tia Si1-a )(Nx B1-x ) exists in the hard layer. The hard layer is constituted by being alternately and respectively covered with one or more layers of a layer composed of the chemical composition indicated by general (CrAl)N.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明が属する技術分野】本発明は、高硬度鋼の高速切
削加工に使用される硬質皮膜被覆工具に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard film-coated tool used for high-speed cutting of high hardness steel.

【0002】[0002]

【従来の技術】金属加工の高能率化を目的とした調質鋼
の直切削においては、特開昭62−56565号公報、
特開平2−194159号公報に代表されるTiAlN
皮膜が開発され切削工具に適用されている。TiAlN
皮膜は、TiN、TiCNに比べ耐酸化性が優れるた
め、刃先が高温に達する調質鋼の切削においては、切削
工具の性能を著しく向上させるものである。
2. Description of the Related Art Japanese Patent Application Laid-Open No. Sho 62-56565 discloses the direct cutting of tempered steel for the purpose of improving the efficiency of metal working.
TiAlN represented by JP-A-2-194159
Coatings have been developed and applied to cutting tools. TiAlN
Since the coating has better oxidation resistance than TiN and TiCN, the performance of the cutting tool is remarkably improved in cutting of tempered steel whose cutting edge reaches a high temperature.

【0003】しかしながら、近年では更なる加工の高能
率、高精度化の要求を満たす為、切削速度の高速化に加
え、環境問題及び加工コスト低減の観点から乾式での切
削加工が重要視されている。こうような切削環境下にお
いては、切削工具表面に被覆される耐摩耗皮膜と切削さ
れる材料(以下、被削材と称す)との溶着現象が切削性
能に大きな影響を及ぼすとともに、切削温度がより高温
になりTiAlN系皮膜でも耐酸化が十分ではない状況
にある。すなわち、従来までの前記TiN、TiCNお
よびTiAlN皮膜はこのような苛酷な切削環境下にお
いては、被削材との溶着現象等に起因した摩擦抵抗の増
加及び酸化の進行により、十分な切削性能を得られな
く、また酸化による摩耗進行を十分に抑制できていなく
なったのが現状である。
However, in recent years, in order to meet the demand for higher efficiency and higher precision of processing, dry cutting has been regarded as important in view of environmental problems and reduction of processing cost in addition to increasing the cutting speed. I have. In such a cutting environment, the welding phenomena between the wear-resistant film coated on the cutting tool surface and the material to be cut (hereinafter referred to as the work material) has a great effect on the cutting performance, and the cutting temperature decreases. As the temperature becomes higher, oxidation resistance is not sufficient even with a TiAlN-based film. That is, the conventional TiN, TiCN, and TiAlN coatings have sufficient cutting performance under such severe cutting environment due to an increase in frictional resistance and progress of oxidation caused by a welding phenomenon with a work material and the like. At present, it is not possible to obtain any further, and it is no longer possible to sufficiently suppress the progress of wear due to oxidation.

【0004】このような問題を解決する為に、耐溶着性
を改善する観点より特表平11−502775号公報に
示される二硫化モリブデンや、特開平7−164211
号公報に示される炭化タングステンおよびダイヤモンド
ライクカーボンからなる潤滑性皮膜を硬質皮膜最表面に
積層した切削工具が開発されているが、いずれも硬質皮
膜との密着性が悪く、皮膜そのものが非常に脆い上耐酸
化性に乏しく、切削時に剥離または破壊、酸化摩滅など
により上記切削環境下においては十分対応できてはいな
い。
In order to solve such a problem, molybdenum disulfide disclosed in JP-A-11-502775 and JP-A-7-164211 are disclosed from the viewpoint of improving the welding resistance.
The cutting tool has been developed in which a lubricating film consisting of tungsten carbide and diamond-like carbon is laminated on the outermost surface of the hard film, but the adhesion of the hard film is poor and the film itself is very brittle. It is poor in oxidation resistance, and cannot be adequately treated in the above cutting environment due to peeling or destruction during cutting, oxidative wear and the like.

【0005】また、耐酸化性を改善する観点から特開平
7−237010号公報や特開平10−130620号
公報に代表されるようにTiAlNに第3成分を添加す
る事例があるものの、第3成分の添加によるだけでは十
分に満足される耐酸化性の向上は実現されていないのが
実状である。また特開平8−118106号公報にはT
iSiNの事例も提案されているが、単なるTiSiN
では耐酸化性を改善するには至っていない。
From the viewpoint of improving oxidation resistance, there is a case where a third component is added to TiAlN as typified by JP-A-7-237010 and JP-A-10-130620. In fact, a satisfactory improvement in oxidation resistance has not yet been realized by merely adding chromium. Japanese Patent Application Laid-Open No. Hei 8-118106 discloses T
The case of iSiN has also been proposed, but only TiSiN
Thus, the oxidation resistance has not been improved.

【0006】また特開平11−138038号公報にみ
られるように硬質皮膜内部にSi 粒等を介在させ
る事例もみられるがSi粒界を介して酸化が進行
するため十分な耐酸化性を付与するに至っていない。
Further, Japanese Patent Application Laid-Open No. 11-138038 discloses
Si inside the hard coating so that3N 4With particles
In some cases, Si3N4Oxidation proceeds via grain boundaries
Therefore, sufficient oxidation resistance has not been imparted.

【0007】[0007]

【発明が解決しようとする課題】本発明はこうした事情
に鑑み、切削加工の乾式化、高速化に対応可能な、即
ち、耐酸化性に優れるとともに被削材との溶着性が少な
い硬質層を提案し、耐酸化及び耐溶着性を同時に実現
し、高硬度鋼を乾式で高速切削出来うる耐摩耗皮膜被覆
工具を提供することを課題とする。
In view of these circumstances, the present invention provides a hard layer which can cope with dry and high-speed cutting, that is, which has excellent oxidation resistance and low adhesion to a work material. It is an object of the present invention to provide a wear-resistant film-coated tool capable of simultaneously realizing oxidation resistance and welding resistance and capable of cutting high-hardness steel dry at high speed.

【0008】[0008]

【課題を解決するための手段】本発明者は、硬質皮膜の
耐摩耗性と様々な被削材と摩擦抵抗の低減に及ぼす影響
および皮膜の層構造について詳細な検討を行った結果、
耐溶着性を付与する(TiSi1−a)(N
1−x)、但し、0.5≦a<1.0、0.5≦x≦
1.0で示される化学組成からなる硬質層を被覆するこ
とにより耐溶着性を改善し、さらにその結晶形態を制御
することにより、耐酸化性及び耐摩耗性を同時に付与さ
れた硬質皮膜被覆工具とする事により、高硬度鋼の乾式
高速切削加工において切削工具の性能が極めて良好とな
ることを見出し本発明に到達した。また、該硬質層はC
rAlN系硬質皮膜等との組み合わせにより、より密着
性、耐酸化性の優れた被覆工具を実現するものである。
また上記耐摩耗皮膜は、物理蒸着法により被覆されるこ
とが望ましい。
The inventor of the present invention has conducted detailed studies on the wear resistance of a hard coating, its effect on various work materials and reduction of frictional resistance, and the layer structure of the coating.
Imparting adhesion resistance (Ti a Si 1-a) (N x B
1−x ), provided that 0.5 ≦ a <1.0, 0.5 ≦ x ≦
Hard coating coated tool with improved oxidation resistance by coating with a hard layer having a chemical composition represented by 1.0, and further having oxidation resistance and wear resistance simultaneously controlled by its crystal morphology As a result, the present inventors have found that the performance of a cutting tool becomes extremely good in dry high-speed cutting of high-hardness steel, and have reached the present invention. The hard layer is made of C
Combination with an rAlN-based hard coating or the like realizes a coated tool having more excellent adhesion and oxidation resistance.
It is desirable that the abrasion resistant film is coated by a physical vapor deposition method.

【0009】[0009]

【作用】はじめに、該硬質層に関して、その各構成の作
用について詳しく述べる。(Ti Si1−a)(N
1−x)、但し、0.5≦a<1.0、0.5≦x≦
1.0、で示される化学組成からなるTiとSiより構
成される窒化物もしく窒硼化物は、大気中、室温におけ
る鋼との摩擦係数が従来のTiAl窒化物皮膜の0.8
に比べ、0.6と低摩擦を示すが、特に高温下ではその
数値が0.3に激減する。これは高温下で皮膜内のSi
が切粉との間の反応により皮膜表面に内部拡散し、皮膜
表面で低融点のSi酸化物を形成することに起因するこ
とが確認された。
[Operation] First, regarding the hard layer, the work of each configuration is performed.
The details will be described. (Ti aSi1-a) (Nx
B1-x), Provided that 0.5 ≦ a <1.0 and 0.5 ≦ x ≦
1.0 and Ti and Si having the chemical composition represented by
The nitrides or boronitrides formed can be stored in air at room temperature.
Coefficient of friction with conventional steel is 0.8
It shows a low friction of 0.6 compared to
The value drops sharply to 0.3. This is because the Si
Is diffused into the film surface by the reaction between
Due to the formation of low melting point Si oxide on the surface
And was confirmed.

【0010】この低融点のSi酸化物により(Ti
1−a)(N1−x)皮膜は潤滑皮膜として機能
し、溶着による切削抵抗の増大を抑制する作用を有する
ものであることが確認された。さらに硼素の添加によ
り、硼素が皮膜内部でBN相を形成し、このBN相の有
する潤滑性の作用により、より一層潤滑性が向上するこ
とが明らかとなった。
[0010] The Si oxides of low melting point (Ti a S
i 1-a) (N x B 1-x) film functions as a lubricating film, it was confirmed that those having an action to suppress an increase in cutting resistance due to welding. Furthermore, it has been clarified that the addition of boron causes boron to form a BN phase inside the film, and the lubricating action of the BN phase further improves the lubricity.

【0011】耐酸化性の向上に対し、本発明者らは鋭意
検討した結果、(TiSi1−a)(N1−x
相の結晶形態が耐酸化性に大きく影響を及ぼし、結晶形
態を制御することにより、一般的に耐酸化性が優れると
言われる(TiAl)N系皮膜より優れる耐酸化性を持
たせることができるという驚くべき知見を得るに至っ
た。(TiSi1−a)(N1−x)相は被覆時
のイオンエネルギーにより結晶形態が異なり、イオンエ
ネルギーが低い場合は全体的に柱状結晶を呈し、その中
にSi粒子が介在した形態となる。イオンエネル
ギーが高い場合は、全体的にアモルファス状に近い状態
となり、TiNBの中にSiとNの結合が確認される状
態となる。イオンエネルギーが中程度であり、かつ被覆
温度が550℃以上の場合は完全アモルファスのTiS
iBN相が微細結晶で存在し、このTiSiBN相のS
i含有量は、マトリックスとなるTiSiBN相より富
む形態となることが確認された。温度が低いとイオンエ
ネルギーが高い場合と同様の結晶形態を呈することが確
認された。温度、イオンエネルギーと結晶形態との相関
理由は今後の物理学的研究が必要である。
[0011] For improving the oxidation resistance, the present inventors have a result of intensive studies, (Ti a Si 1-a ) (N x B 1-x)
The crystal morphology of the phase has a great influence on the oxidation resistance, and by controlling the crystal morphology, it is possible to impart oxidation resistance superior to (TiAl) N-based coatings, which are generally said to have excellent oxidation resistance. That led to the surprising finding. (Ti a Si 1-a) (N x B 1-x) phase have different crystal form by ion energy during coating, if a low ion energy exhibited an overall columnar crystals, Si 3 N 4 therein It is in the form of intervening particles. When the ion energy is high, the overall state is close to an amorphous state, and a state in which a bond between Si and N is confirmed in TiNB. When the ion energy is moderate and the coating temperature is 550 ° C. or higher, completely amorphous TiS
The iBN phase exists in the form of fine crystals.
It was confirmed that the i content was in a form richer than the TiSiBN phase serving as the matrix. It was confirmed that when the temperature was low, a crystal form similar to that when the ion energy was high was exhibited. The reason for the correlation between temperature, ion energy and crystal morphology requires future physical studies.

【0012】中でも完全アモルファスTiSiBN相が
微細結晶で存在する場合結晶粒界が非常に整合した粒界
となり、欠陥が少なく、酸素の粒界での拡散を著しく抑
制し、非常に優れた耐酸化性を有することが確認され
た。同時に微細結晶で介在することにより、マトリック
スを歪強化し、硬度が向上し結果耐摩耗性をも向上する
ことになった。
In particular, when the completely amorphous TiSiBN phase exists as fine crystals, the crystal grain boundaries become very aligned grain boundaries, there are few defects, diffusion of oxygen at the grain boundaries is remarkably suppressed, and excellent oxidation resistance is obtained. It was confirmed to have. At the same time, by interposing fine crystals, the matrix was strain-reinforced, the hardness was improved, and as a result, the wear resistance was also improved.

【0013】被覆条件としては比較的イオンエネルギー
が中程度となる、-100V〜-150Vの印荷バイア
ス、反応圧力は1Pa〜5Pa程度、被覆温度は550
℃以上が好ましい範囲である。
The coating conditions are such that the ion energy is relatively moderate, that the applied bias is -100 V to -150 V, the reaction pressure is about 1 Pa to 5 Pa, and the coating temperature is 550.
C. or higher is a preferable range.

【0014】本発明の硬質皮膜を構成する硬質層の金属
元素の組成は、(TiSi1−a)において、aの値
が0.5≦a<1.0という式を満足させることが必要
である。aの値が0.5未満の場合、Si含有量が多く
なりすぎて、皮膜そのものの靭性が劣化し、乾式高速切
削において皮膜の内部破壊や破壊にともなう皮膜の剥離
が顕著となり、十分な性能を発揮できない。
The composition of the metal element of the hard layer constituting the hard coating of the present invention is such that in (Ti a Si 1-a ), the value of a satisfies the expression 0.5 ≦ a <1.0. is necessary. When the value of a is less than 0.5, the Si content becomes too large, the toughness of the film itself is deteriorated, and the internal destruction of the film and the peeling of the film accompanying the destruction become remarkable in dry high-speed cutting, and sufficient performance is obtained. Can not be demonstrated.

【0015】また、上記硬質層に係る窒化物もしくは窒
硼化物の場合、N1−xで0.5≦x≦1.0を満
足することが必要であり、xの値が0.5未満の場合
は、皮膜の硬度が著しく上昇し、残留圧縮応力が増大
し、皮膜の密着性が劣化するため十分な切削性能を示さ
ない。
[0015] In the case of nitrides or窒硼product according to the hard layer, it is necessary to satisfy 0.5 ≦ x ≦ 1.0 with N x B 1-x, the value of x is 0. If it is less than 5, the hardness of the coating increases significantly, the residual compressive stress increases, and the adhesion of the coating deteriorates, so that sufficient cutting performance is not exhibited.

【0016】アモルファスTiSiBN相の微細結晶粒
径は500nmを越えると格子歪の効果が少なく、皮膜
の硬度向上寄与が低下するため、500nm以下である
方がより好ましい。該硬質層は、静的および動的条件下
において優れた密着性、低摩擦、高耐酸化性を有すもの
の、HRCが60を越えるような高硬度鋼の乾式高速切
削加工には、単一皮膜では密着性が十分でなく剥離が発
生する場合がある。そこで、優れた耐密着性並びに耐摩
耗性、耐酸化性を有した(CrAl)N硬質層等と積層
することが、このような高硬度鋼切削ではより好ましい
結果となる。(TiAl)N系硬質層との積層も性能を
改善するものであるが、(CrAl)N硬質層との積層
が耐酸化性の向上の観点からより好ましいものである。
If the fine crystal grain size of the amorphous TiSiBN phase exceeds 500 nm, the effect of lattice distortion is small and the contribution to improving the hardness of the film is reduced, so that it is more preferably 500 nm or less. Although the hard layer has excellent adhesion, low friction, and high oxidation resistance under static and dynamic conditions, it is a single material for dry high-speed cutting of high-hardness steel having an HRC of more than 60. The coating may not have sufficient adhesiveness and peeling may occur. Therefore, lamination with a (CrAl) N hard layer having excellent adhesion resistance, abrasion resistance, and oxidation resistance is a more preferable result in such high hardness steel cutting. Lamination with a (TiAl) N-based hard layer also improves performance, but lamination with a (CrAl) N hard layer is more preferable from the viewpoint of improving oxidation resistance.

【0017】ここで用いられる(CrAl)N層は場合
によっては第3の金属成分を添加されたものでも同様の
作用が期待されることは、言うまでもないことである。
It is needless to say that the (CrAl) N layer used here may have the same effect even if the third metal component is added in some cases.

【0018】本発明の硬質皮膜被覆工具は、その被覆方
法については、特に限定されるものではないが、被覆母
材への熱影響、工具の疲労強度、皮膜の密着性等を考慮
した場合、比較的低温で被覆でき、被覆した皮膜に圧縮
応力が残留するアーク放電方式イオンプレーティング、
もしくはスパッタリング等の被覆基体側にバイアス電圧
を印加する物理蒸着法であることが望ましい。
The method of coating the hard film-coated tool of the present invention is not particularly limited, but in consideration of the thermal effect on the coated base material, the fatigue strength of the tool, the adhesion of the film, etc. Arc discharge ion plating that can be coated at a relatively low temperature and compressive stress remains in the coated film,
Alternatively, a physical vapor deposition method of applying a bias voltage to the coated substrate side such as sputtering is preferable.

【0019】[0019]

【実施例】以下本発明を実施例に基づいて説明する。ア
ークイオンプレーティング装置を用い、金属成分の蒸発
源である各種合金製ターゲット、ならびに反応ガスであ
るN ガスから目的の皮膜が得られるものを選択し、被
覆基体温度600℃、反応ガス圧力3.0Paの条件下
にて、被覆基体である外径10mmの超硬合金製2枚刃
エンドミル、および超硬合金製インサートに−130V
の電位を印加し、全皮膜総厚みが3μmとなるように成
膜した。また硼素、Siは蒸発源であるターケ゛ットに必要量
添加した。比較例19,20の(TiSi)N系皮膜は
基体温度400℃、反応ガス圧力3.0Pa、バイアス
-100Vで成膜したもので単純な固溶体(TiSi)
N層である。試作した本発明例並びに比較例を表1に示
す。尚多層の場合はTiSiN系層の総厚1.5μ、他
層の総厚1.5μとなるよう均等に被覆した。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on embodiments. A
Evaporation of metal components using the ion plating system
The source is a target made of various alloys and a reaction gas.
N 2Select a gas that provides the desired film from the gas,
Conditions of 600 ° C. substrate temperature and 3.0 Pa reaction gas pressure
, 2 blades made of cemented carbide with an outer diameter of 10 mm, which is the coated substrate
-130V for end mills and cemented carbide inserts
Voltage to form a total film thickness of 3 μm.
Filmed. In addition, boron and Si are necessary for the evaporation source
Was added. The (TiSi) N-based coatings of Comparative Examples 19 and 20
Substrate temperature 400 ° C, reaction gas pressure 3.0 Pa, bias
Simple solid solution (TiSi) deposited at -100V
N layer. Table 1 shows the prototypes of the present invention and comparative examples.
You. In the case of a multilayer, the total thickness of the TiSiN-based layer is 1.5 μm,
The coating was evenly applied to a total layer thickness of 1.5μ.

【0020】[0020]

【表1】 [Table 1]

【0021】得られた硬質皮膜被覆エンドミルおよび硬
質皮膜被覆インサートを用い切削試験を行った。工具寿
命は刃先の欠けないしは摩耗等により工具が切削不能と
なった時の切削長とした。得られた結果を表1に併記す
る。
A cutting test was performed using the obtained hard-coated end mill and hard-coated insert. The tool life was defined as the cutting length when the tool could not be cut due to chipping or wear of the cutting edge. Table 1 also shows the obtained results.

【0022】2枚刃超硬エンドミルの切削条件は、側面
切削ダウンカット、被削材S50C(硬さHB22
0)、切り込みAd10mm×Rd1mm、切削速度2
50m/min、送り0.06mm/tooth、エア
ーブロー使用、とした。
The cutting conditions of the two-flute carbide end mill are side cutting down cut, work material S50C (hardness HB22).
0), incision Ad10mm × Rd1mm, cutting speed 2
50 m / min, feed 0.06 mm / tooth, and use of air blow.

【0023】インサート切削条件は、工具形状SEE4
2TN、巾100mm×長さ250mmの面取り加工、
被削材SKD61(硬さHRC45)、切り込み2.0
mm、切削速度150m/min、送り0.15mm/
rev、乾式切削とした。表1に試験結果を併記する。
The insert cutting conditions are as follows: Tool shape SEE4
2TN, 100mm width x 250mm length chamfering,
Work material SKD61 (hardness HRC45), depth of cut 2.0
mm, cutting speed 150m / min, feed 0.15mm /
rev, dry cutting. Table 1 also shows the test results.

【0024】同様に膜の耐酸化性と高温摩擦係数を測定
した結果を表2に示す。耐酸化性はそれぞれ5μの皮膜
を被覆し900℃大気中で1時間保持した時に形成され
る酸化層の厚さで評価した。摩擦係数は600℃におい
てSKD61のボールを用い、一般的なボールオンディ
スク法により測定した。
Table 2 shows the results of measuring the oxidation resistance and the high temperature friction coefficient of the film in the same manner. The oxidation resistance was evaluated based on the thickness of an oxide layer formed when a 5 μm film was coated and held at 900 ° C. for 1 hour in the atmosphere. The coefficient of friction was measured by a general ball-on-disk method using a ball of SKD61 at 600 ° C.

【0025】[0025]

【表2】 [Table 2]

【0026】比較例16、17はSiもしくは硼素の量
が多すぎる場合の比較例であり、静的評価数値は満足す
るものの密着性が十分ではなく工具寿命が短い結果であ
る。また19,20は同じ(TiSi)N系皮膜である
が、被覆条件によりアモルファスナノ結晶が介在しない
単純な固溶体(TiSi)Nの事例である。比較例1
3、14、15は、TiAlN系皮膜に第3成分を添加
した事例であり、耐酸化性は改善はされるものの、本発
明例と比べれば改善効果が少ない。
Comparative Examples 16 and 17 are comparative examples in which the amount of Si or boron is too large. Although the static evaluation values are satisfied, the adhesion is not sufficient and the tool life is short. 19 and 20 are the same (TiSi) N-based films, but are examples of simple solid solution (TiSi) N in which amorphous nanocrystals do not intervene depending on the coating conditions. Comparative Example 1
Nos. 3, 14, and 15 are examples in which the third component is added to the TiAlN-based coating, and although the oxidation resistance is improved, the improvement effect is less than that of the present invention.

【0027】これらに対し本発明例は、静的評価特性に
優れると同時に、密着性にも優れ、溶着現象に起因した
異常摩耗や皮膜の酸化摩耗、皮膜剥離が進行することも
なく、総合して工具寿命が著しく向上する。従って、本
発明は高硬度鋼の乾式高速切削加工に十分対応するもの
である。
On the other hand, the examples of the present invention are excellent in static evaluation characteristics and also excellent in adhesiveness, and are free from abnormal wear, film oxidative wear and film peeling due to the welding phenomenon. Tool life is significantly improved. Therefore, the present invention is sufficient for dry high-speed cutting of high hardness steel.

【0028】[0028]

【発明の効果】以上の如く、本発明の硬質皮膜被覆工具
は、従来の被覆工具に比べ優れた高密着性、低摩擦、高
耐酸化性を同時に有すことから、乾式高速切削加工にお
いて格段に長い工具寿命が得られ、切削加工における生
産性の向上に極めて有効であるものである。
As described above, the hard-coated tool of the present invention has excellent high adhesion, low friction and high oxidation resistance at the same time as the conventional coated tool. A long tool life can be obtained, which is extremely effective in improving productivity in cutting.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は、本発明例の(TiSi1−a)(N
1−x)マトリックス内に介在する微細アモルファ
ス結晶(TiSi1−a)(N1−x)のTEM
像を示す。
Figure 1 is the present invention embodiment (Ti a Si 1-a) (N
x B 1-x) fine amorphous crystal interposed in a matrix of (Ti a Si 1-a) (N x B 1-x) TEM
An image is shown.

【図2】図2は、図1中のスポット1に対応する(Ti
Si1−a)(N1−x)マトリックスの極微電
子線回折像を示す。
FIG. 2 corresponds to spot 1 in FIG. 1 (Ti
1 shows a microelectron diffraction image of a Si 1-a ) (N x B 1-x ) matrix.

【図3】図3は、図1中のスポット2に対応する(Ti
Si1−a)(N1−x)微細アモルファス結晶
(TiSi1−a)(N1−x)の極微電子線回
折像を示す。
FIG. 3 corresponds to a spot 2 in FIG. 1 (Ti
shows the a Si 1-a) (N x B 1-x) fine amorphous crystal (Ti a Si 1-a) (N x nanobeam electron diffraction image of B 1-x).

【図4】図4は、図1中のスポット1に対応する(Ti
Si1−a)(N1−x)マトリックスの組成分
析結果を示す。
FIG. 4 corresponds to spot 1 in FIG. 1 (Ti
shows the a Si 1-a) (N x B 1-x) composition analysis result of the matrix.

【図5】図5は、図1中のスポット2に対応する(Ti
Si1−a)(N1−x)微細アモルファス結晶
(TiSi1−a)(N1−x)の組成分析結果
を示す。
FIG. 5 is a diagram corresponding to spot 2 in FIG. 1 (Ti
shows the a Si 1-a) (N x B 1-x) the composition analysis of the fine amorphous crystal (Ti a Si 1-a) (N x B 1-x).

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】基体上に硬質皮膜、(TiSi1−a
(N1−x)、但し、0.5≦a<1、0.5≦x
≦1、で示される化学組成からなる硬質層を少なくとも
1層被覆された耐摩耗皮膜被覆工具において、該硬質層
が相対的にSiに富むTiSi(N1−x)相と相
対的にSiの少ないTiSi(N1− )相とから
構成されることを特徴とする耐摩耗皮膜被覆工具。
1. A hard film on a substrate, (Ti a Si 1-a )
(N x B 1-x ), provided that 0.5 ≦ a < 1 , 0.5 ≦ x
In a wear-resistant coating-coated tool coated with at least one hard layer having a chemical composition represented by ≦ 1, the hard layer is relatively relatively to a Si-rich TiSi (N x B 1-x ) phase. abrasion coating coated tool, characterized in that it is composed of a Si less TiSi (N x B 1- x) phase.
【請求項2】請求項1記載の耐摩耗皮膜被覆工具におい
て、該相対的にSiに富むTiSi(N1−x)相
がアモルファス相であることを特徴とする耐摩耗皮膜被
覆工具。
2. A tool as claimed in claim 1, wherein said relatively Si-rich TiSi (N x B 1-x ) phase is an amorphous phase.
【請求項3】請求項1乃至2記載の耐摩耗皮膜被覆工具
において、該相対的にSiに富むTiSi(N
1−x)相の結晶粒径が500nm以下であることを特
徴とする耐摩耗皮膜被覆工具。
3. The tool according to claim 1, wherein said relatively Si-rich TiSi (N x B
1-x ) A tool coated with a wear-resistant coating, wherein the phase has a crystal grain size of 500 nm or less.
【請求項4】請求項1乃至3記載の耐摩耗皮膜被覆工具
において、該硬質層とCrとAlを主成分とする窒化
物、炭窒化物、窒酸化物、窒硼化物層が2層以上積層さ
れたことを特徴とする耐摩耗皮膜被覆工具。
4. The tool as claimed in claim 1, wherein said hard layer and at least two layers of nitride, carbonitride, nitride oxide and boride containing Cr and Al as main components. A wear-resistant film-coated tool characterized by being laminated.
JP2001140903A 2001-05-11 2001-05-11 Wear-resistant film-coated tools Expired - Fee Related JP3454428B2 (en)

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WO2005089990A1 (en) * 2004-03-18 2005-09-29 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool
JP2008013852A (en) * 2003-01-17 2008-01-24 Hitachi Tool Engineering Ltd Hard film, and hard film-coated tool
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WO2005089990A1 (en) * 2004-03-18 2005-09-29 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool
US7527457B2 (en) 2004-03-18 2009-05-05 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool
JP2008534297A (en) * 2005-04-01 2008-08-28 エーリコン・トレイディング・アーゲー・トリューバッハ Multilayer hard material coating for tools
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