JP2002289081A5 - - Google Patents

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Publication number
JP2002289081A5
JP2002289081A5 JP2001089900A JP2001089900A JP2002289081A5 JP 2002289081 A5 JP2002289081 A5 JP 2002289081A5 JP 2001089900 A JP2001089900 A JP 2001089900A JP 2001089900 A JP2001089900 A JP 2001089900A JP 2002289081 A5 JP2002289081 A5 JP 2002289081A5
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JP
Japan
Prior art keywords
convex portion
electrode
electric field
suppressed
concentrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001089900A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002289081A (ja
JP3651404B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2001089900A external-priority patent/JP3651404B2/ja
Priority to JP2001089900A priority Critical patent/JP3651404B2/ja
Priority to TW091105215A priority patent/TW550616B/zh
Priority to KR10-2002-0015990A priority patent/KR100455949B1/ko
Priority to EP02252164.5A priority patent/EP1246216B1/en
Priority to CNB021082308A priority patent/CN1234144C/zh
Publication of JP2002289081A publication Critical patent/JP2002289081A/ja
Publication of JP2002289081A5 publication Critical patent/JP2002289081A5/ja
Publication of JP3651404B2 publication Critical patent/JP3651404B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001089900A 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置 Expired - Lifetime JP3651404B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001089900A JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置
TW091105215A TW550616B (en) 2001-03-27 2002-03-19 Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method
KR10-2002-0015990A KR100455949B1 (ko) 2001-03-27 2002-03-25 정전 마이크로 릴레이, 그 정전 마이크로 릴레이를 이용한무선장치, 계측장치 및 접점 개폐방법
EP02252164.5A EP1246216B1 (en) 2001-03-27 2002-03-26 Electrostatic micro-relay, radio device and measuring device using the electrostatic micro-relay, and contact switching method
CNB021082308A CN1234144C (zh) 2001-03-27 2002-03-27 静电微型继电器、无线电器件和测量器件及触点切换方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001089900A JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置

Publications (3)

Publication Number Publication Date
JP2002289081A JP2002289081A (ja) 2002-10-04
JP2002289081A5 true JP2002289081A5 (cg-RX-API-DMAC7.html) 2005-02-17
JP3651404B2 JP3651404B2 (ja) 2005-05-25

Family

ID=18944757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001089900A Expired - Lifetime JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置

Country Status (5)

Country Link
EP (1) EP1246216B1 (cg-RX-API-DMAC7.html)
JP (1) JP3651404B2 (cg-RX-API-DMAC7.html)
KR (1) KR100455949B1 (cg-RX-API-DMAC7.html)
CN (1) CN1234144C (cg-RX-API-DMAC7.html)
TW (1) TW550616B (cg-RX-API-DMAC7.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004046019A1 (es) * 2002-11-19 2004-06-03 Baolab Microsystems S.L. Relé miniaturizado y sus usos correspondientes
DE102004010150B9 (de) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung
JP4540443B2 (ja) 2004-10-21 2010-09-08 富士通コンポーネント株式会社 静電リレー
JP2006147540A (ja) * 2004-10-22 2006-06-08 Matsushita Electric Ind Co Ltd 電気機械スイッチ
JP2014130767A (ja) * 2012-12-28 2014-07-10 Omron Corp 静電マイクロリレーおよびその製造方法
KR101595456B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 가변식 차광기구
KR101595453B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 고정식 차광기구
DE102025102599A1 (de) * 2025-01-24 2026-07-30 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS-Bauteil

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2072199C (en) * 1991-06-24 1997-11-11 Fumihiro Kasano Electrostatic relay
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
JP3852224B2 (ja) * 1998-10-08 2006-11-29 オムロン株式会社 静電マイクロリレー
JP3796988B2 (ja) * 1998-11-26 2006-07-12 オムロン株式会社 静電マイクロリレー

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