JP2002273169A5 - - Google Patents

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Publication number
JP2002273169A5
JP2002273169A5 JP2001081777A JP2001081777A JP2002273169A5 JP 2002273169 A5 JP2002273169 A5 JP 2002273169A5 JP 2001081777 A JP2001081777 A JP 2001081777A JP 2001081777 A JP2001081777 A JP 2001081777A JP 2002273169 A5 JP2002273169 A5 JP 2002273169A5
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JP
Japan
Prior art keywords
gas
halogen
discharge
containing gas
water
Prior art date
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Application number
JP2001081777A
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English (en)
Japanese (ja)
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JP2002273169A (ja
JP4549563B2 (ja
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Priority to JP2001081777A priority Critical patent/JP4549563B2/ja
Priority claimed from JP2001081777A external-priority patent/JP4549563B2/ja
Publication of JP2002273169A publication Critical patent/JP2002273169A/ja
Publication of JP2002273169A5 publication Critical patent/JP2002273169A5/ja
Application granted granted Critical
Publication of JP4549563B2 publication Critical patent/JP4549563B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001081777A 2001-03-22 2001-03-22 ハロゲン含有ガスの処理装置 Expired - Fee Related JP4549563B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001081777A JP4549563B2 (ja) 2001-03-22 2001-03-22 ハロゲン含有ガスの処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001081777A JP4549563B2 (ja) 2001-03-22 2001-03-22 ハロゲン含有ガスの処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009277414A Division JP5258739B2 (ja) 2009-12-07 2009-12-07 ハロゲン含有ガスの処理装置

Publications (3)

Publication Number Publication Date
JP2002273169A JP2002273169A (ja) 2002-09-24
JP2002273169A5 true JP2002273169A5 (de) 2006-12-28
JP4549563B2 JP4549563B2 (ja) 2010-09-22

Family

ID=18937815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001081777A Expired - Fee Related JP4549563B2 (ja) 2001-03-22 2001-03-22 ハロゲン含有ガスの処理装置

Country Status (1)

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JP (1) JP4549563B2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0403797D0 (en) * 2004-02-20 2004-03-24 Boc Group Plc Gas abatement
JP5229203B2 (ja) * 2004-06-29 2013-07-03 三菱電機株式会社 揮発性有機化合物処理装置
JP2006278236A (ja) * 2005-03-30 2006-10-12 Ngk Insulators Ltd プラズマ発生電極及びプラズマ反応器
JP2006314869A (ja) * 2005-05-10 2006-11-24 L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude 半導体プロセスチャンバからの排ガスを除害するためのシステム
GB0602506D0 (en) * 2006-02-08 2006-03-22 Boc Group Plc Method of treating a gas stream
JP4588726B2 (ja) * 2007-02-08 2010-12-01 クリーン・テクノロジー株式会社 排ガス処理装置
JP4733779B1 (ja) * 2010-07-12 2011-07-27 エドワーズ株式会社 ガス処理装置及びガス処理システム
KR102351585B1 (ko) 2014-03-06 2022-01-13 어플라이드 머티어리얼스, 인코포레이티드 플라즈마 포어라인 열 반응기 시스템

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