JP2002236265A5 - - Google Patents

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Publication number
JP2002236265A5
JP2002236265A5 JP2001365798A JP2001365798A JP2002236265A5 JP 2002236265 A5 JP2002236265 A5 JP 2002236265A5 JP 2001365798 A JP2001365798 A JP 2001365798A JP 2001365798 A JP2001365798 A JP 2001365798A JP 2002236265 A5 JP2002236265 A5 JP 2002236265A5
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JP
Japan
Prior art keywords
actuation
driver
optical element
voltage
subsystem
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001365798A
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English (en)
Japanese (ja)
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JP2002236265A (ja
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Publication date
Priority claimed from US09/727,557 external-priority patent/US6504641B2/en
Application filed filed Critical
Publication of JP2002236265A publication Critical patent/JP2002236265A/ja
Publication of JP2002236265A5 publication Critical patent/JP2002236265A5/ja
Pending legal-status Critical Current

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JP2001365798A 2000-12-01 2001-11-30 マイクロエレクトロメカニカルシステム（ｍｅｍｓ）デバイスを動作するドライバおよび方法 Pending JP2002236265A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/727557 2000-12-01
US09/727,557 US6504641B2 (en) 2000-12-01 2000-12-01 Driver and method of operating a micro-electromechanical system device

Publications (2)

Publication Number Publication Date
JP2002236265A JP2002236265A (ja) 2002-08-23
JP2002236265A5 true JP2002236265A5 (enExample) 2005-07-21

Family

ID=24923116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001365798A Pending JP2002236265A (ja) 2000-12-01 2001-11-30 マイクロエレクトロメカニカルシステム（ｍｅｍｓ）デバイスを動作するドライバおよび方法

Country Status (3)

Country Link
US (1) US6504641B2 (enExample)
JP (1) JP2002236265A (enExample)
TW (1) TW504490B (enExample)

Families Citing this family (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7471444B2 (en) 1996-12-19 2008-12-30 Idc, Llc Interferometric modulation of radiation
KR100703140B1 (ko) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 간섭 변조기 및 그 제조 방법
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6677695B2 (en) * 2001-09-18 2004-01-13 Jds Uniphase Corporation MEMS electrostatic actuators with reduced actuation voltage
US6809851B1 (en) * 2001-10-24 2004-10-26 Decicon, Inc. MEMS driver
JP2004103559A (ja) * 2002-07-15 2004-04-02 Toshiba Corp Ｍｅｍｓ装置
US6972881B1 (en) 2002-11-21 2005-12-06 Nuelight Corp. Micro-electro-mechanical switch (MEMS) display panel with on-glass column multiplexers using MEMS as mux elements
US7034370B2 (en) * 2002-11-22 2006-04-25 Advanced Nano Systems, Inc. MEMS scanning mirror with tunable natural frequency
EP1563333A1 (en) * 2002-11-22 2005-08-17 Advanced Nano Systems Mems scanning mirror with tunable natural frequency
US6987432B2 (en) * 2003-04-16 2006-01-17 Robert Bosch Gmbh Temperature compensation for silicon MEMS resonator
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) * 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
JP3967713B2 (ja) * 2003-12-09 2007-08-29 株式会社東芝 リレー回路およびスイッチング素子
JP2006065272A (ja) * 2004-07-28 2006-03-09 Sony Corp ホログラム装置、空間光変調器と撮像素子の位置決め方法及びホログラム記録材料
US7515147B2 (en) 2004-08-27 2009-04-07 Idc, Llc Staggered column drive circuit systems and methods
US7560299B2 (en) 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
US7551159B2 (en) * 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7602375B2 (en) 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US8514169B2 (en) 2004-09-27 2013-08-20 Qualcomm Mems Technologies, Inc. Apparatus and system for writing data to electromechanical display elements
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7679627B2 (en) * 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
TW200628833A (en) 2004-09-27 2006-08-16 Idc Llc Method and device for multistate interferometric light modulation
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8310441B2 (en) * 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7675669B2 (en) * 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8310442B2 (en) * 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US8482496B2 (en) * 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US7468572B2 (en) * 2005-03-28 2008-12-23 Maurice Thomas Versatile digitally controlled micro-mechanical actuator
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
KR20080027236A (ko) 2005-05-05 2008-03-26 콸콤 인코포레이티드 다이나믹 드라이버 ｉｃ 및 디스플레이 패널 구성
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US7355779B2 (en) 2005-09-02 2008-04-08 Idc, Llc Method and system for driving MEMS display elements
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
JP4966562B2 (ja) * 2006-02-28 2012-07-04 富士フイルム株式会社 微小電気機械式素子、微小電気機械式素子アレイ、光変調素子、微小電気機械式光変調素子、微小電気機械式光変調素子アレイ、及びこれらを用いた画像形成装置
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
JP4773301B2 (ja) * 2006-08-18 2011-09-14 日本電信電話株式会社 ミラー制御装置
CA2747115C (en) * 2006-07-27 2014-06-17 Nippon Telegraph And Telephone Corporation Mirror control device
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US7957589B2 (en) * 2007-01-25 2011-06-07 Qualcomm Mems Technologies, Inc. Arbitrary power function using logarithm lookup table
US7907320B2 (en) * 2007-02-26 2011-03-15 Silicon Quest Kabushiki-Kaisha Micromirror device with a single address electrode
JP4744500B2 (ja) * 2007-11-09 2011-08-10 日本電信電話株式会社 光スイッチ
JP4847488B2 (ja) * 2008-03-26 2011-12-28 富士通株式会社 ミラー駆動回路および光スイッチ
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US8405649B2 (en) * 2009-03-27 2013-03-26 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US20110109615A1 (en) * 2009-11-12 2011-05-12 Qualcomm Mems Technologies, Inc. Energy saving driving sequence for a display
JP5310529B2 (ja) * 2009-12-22 2013-10-09 株式会社豊田中央研究所 板状部材の揺動装置
BR112012019383A2 (pt) 2010-02-02 2017-09-12 Pixtronix Inc Circuitos para controlar aparelho de exibição
CN102834763B (zh) 2010-02-02 2015-07-22 皮克斯特罗尼克斯公司 用于制造填充冷密封流体的显示装置的方法
JP5411101B2 (ja) * 2010-10-01 2014-02-12 日本電信電話株式会社 光スイッチ、ミラー装置および制御方法
US20130286463A1 (en) * 2011-10-24 2013-10-31 Texas Instruments Incorporated Dynamic actuation waveform for a digital micromirror device
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
JP6234073B2 (ja) * 2013-06-07 2017-11-22 キヤノン株式会社 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置
CN114690400B (zh) * 2020-12-29 2023-05-02 极米科技股份有限公司 一种静电力驱动方式的振镜
DE102022209391A1 (de) * 2022-09-09 2024-03-14 Carl Zeiss Smt Gmbh Verfahren zum Betreiben eines optischen Bauelements, optisches Bauelement
DE102022211335A1 (de) * 2022-10-26 2024-05-02 Carl Zeiss Smt Gmbh Verfahren zum Betreiben eines optischen Bauelements, optisches Bauelement

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5142405A (en) * 1990-06-29 1992-08-25 Texas Instruments Incorporated Bistable dmd addressing circuit and method
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5388170A (en) * 1993-11-22 1995-02-07 At&T Corp. Electrooptic device structure and method for reducing thermal effects in optical waveguide modulators
CA2137059C (en) * 1993-12-03 2004-11-23 Texas Instruments Incorporated Dmd architecture to improve horizontal resolution
US6000280A (en) 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
JP3926871B2 (ja) * 1995-09-11 2007-06-06 テキサス インスツルメンツ インコーポレイテツド デジタルマイクロミラーリセット方法
JPH09167926A (ja) * 1995-12-15 1997-06-24 Sanyo Electric Co Ltd 増幅器の保護回路
JPH10206755A (ja) * 1997-01-24 1998-08-07 Ricoh Co Ltd メカニカル光シャッタ
US5867297A (en) 1997-02-07 1999-02-02 The Regents Of The University Of California Apparatus and method for optical scanning with an oscillatory microelectromechanical system
US5903380A (en) 1997-05-01 1999-05-11 Rockwell International Corp. Micro-electromechanical (MEM) optical resonator and method
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
JPH11316347A (ja) * 1998-05-01 1999-11-16 Nikon Corp 表示素子および駆動方法、並びに光路変更ユニット

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