JP2002190539A - Container for piezoelectric vibrator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem in subjecting in a vacuum to a heat treatment the conductive bonding agent for the fixedly bonding of a piezoelectric vibrator piece, where a portion of the components of the sealing glass of a container for the piezoelectric vibrator piece becoming so volatilized as to make hard the vacuum lock of the piezoelectric vibrator piece. SOLUTION: A container for a piezoelectric vibrator piece 3 comprises a substantially flat-plate form insulation base body 1 and a cap 2. The base body 1 has a mounting portion 1a of the piezoelectric vibrator piece 3 on its top surface and has a through-hole 6, passing through from its top surface to its rear surface. The cap 2 is jointed to the top surface of the insulation base body 1 by a sealant 10 previously stuck on the top surface, and the piezoelectric vibrator piece 3 is stored hermetically with the cap 2 in the space between the cap 2 and the insulation base body 1. In the sealant 10, as its filler, a solid solution of 10-30 wt.% of the weight of a glass component which is made of phosphoric zirconium, zirconium oxide, and niobium oxide is added to the glass component made of silver oxide of 20-40 wt.%, silver iodide of 5-20 wt.%, phosphorus pentaoxide of 20-30 wt.%, boron oxide of 5-15 wt.%, and zinc oxide of 1-6 wt.%.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a container for a piezoelectric vibrator for accommodating a piece of a piezoelectric vibrator, and more particularly to a container for a piezoelectric vibrator for sealing using glass as a sealing material.

[0002]

2. Description of the Related Art Conventionally, a piezoelectric vibrator is manufactured by hermetically storing a piezoelectric vibrator piece in a container for the piezoelectric vibrator.

A container for a piezoelectric vibrator for hermetically containing the piezoelectric vibrator piece is made of, for example, a ceramic such as an aluminum oxide sintered body, and has a mounting portion for mounting the piezoelectric vibrator piece at a substantially central portion of an upper surface thereof. A substantially flat insulating substrate having a portion, and a light-transmitting material such as glass, which is joined to the upper surface of the insulating substrate via a sealing material such as low-melting glass to form a space between the insulating substrate and the insulating substrate. And a lid that accommodates the piezoelectric vibrator piece. The piezoelectric vibrator accommodated inside the container consisting of the insulating base and the lid is, for example, 1.3
In the case of a piezoelectric vibrator requiring vacuum sealing of about × 10 ^-2 Pa, a through hole for evacuating the space between the insulating base and the lid from the upper surface to the lower surface is provided on the insulating base. Is formed. Then, the piezoelectric vibrator is bonded and fixed to the inside of the container including the insulating base and the lid with a conductive adhesive, and is heated in a vacuum. Then, the piezoelectric vibrator is passed through the through-hole formed in the insulating base. Evacuating the space containing the
Thereafter, the through-hole is filled with a sealing member made of a brazing material such as a gold-tin alloy and the through-hole is sealed, so that the piezoelectric vibrator piece is hermetically housed inside the piezoelectric vibrator container. The resulting piezoelectric vibrator is obtained.

Incidentally, a sealing material for sealing the insulating base and the lid is usually attached to the insulating base before the piezoelectric vibrator is fixed to the insulating base with a conductive adhesive.

As a sealing material for joining the lid to the insulating substrate, for example, 50 to 65% by weight of lead oxide, 2 to 10% of boron oxide
A lead-based material in which a lead titanate compound is added as a filler to a glass component containing 26% to 45% by weight of a glass component containing 1% to 6% by weight of zinc oxide, 10% to 30% by weight of lead fluoride, and 10% to 20% by weight of bismuth oxide. Glass is used.

[0006]

However, in this conventional piezoelectric vibrator, 50 to 65% by weight of lead oxide and 2 to 10% of boron oxide are added to glass which is a sealing material for joining a lid to an insulating base.
Lead-based glass obtained by adding a lead titanate compound as a filler to a glass component containing 26 to 45% by weight as a filler to a glass component containing 1% to 6% by weight of zinc oxide, 10 to 30% by weight of lead fluoride, and 10 to 20% by weight of bismuth oxide Is used, when the piezoelectric vibrator pieces are bonded and fixed with a conductive adhesive, and then heat-treated in a vacuum, the fluorine component in the sealing glass previously applied to the insulating substrate is volatilized and sealed. The stop glass is crystallized, and it is difficult to firmly seal the insulating base and the lid. This causes a decrease in the degree of vacuum inside the vacuum-sealed container, thereby lowering the Q value of the piezoelectric vibrator or reducing the surface electrode. There is a problem that it is oxidized and corroded.

[0007] In recent years, with the rise of the global environmental protection movement, lead oxide has been designated as an environmentally hazardous substance. For example, when an electronic device containing lead oxide is discarded or left outdoors and exposed to the wind and rain, the There is a possibility that lead may be melted into the environment and pollute the environment, and the development of a sealing material that does not use lead oxide, which is harmful to the human body, has been required.

The present invention has been devised in view of the above-mentioned problems, and has as its object to seal a piezoelectric vibrator piece airtightly in a vacuum inside a container comprising an insulating base and a lid, and to obtain the characteristics thereof. An object of the present invention is to provide a container for a piezoelectric vibrator that can normally and stably operate a piezoelectric element for a long period of time without causing deterioration.

[0009]

According to the present invention, there is provided a container for a piezoelectric vibrator, comprising a substantially flat insulating base having a mounting portion for a piezoelectric vibrator piece on an upper surface and a through hole provided from the upper surface to the lower surface. A lid for a piezoelectric vibrator, which is joined with a sealing material previously adhered to the upper surface of the base, and a lid housing the piezoelectric vibrator piece in a space between the piezoelectric base and the insulating base, wherein the sealing material is oxidized. 20-40% by weight of silver, 5-20% by weight of silver iodide, phosphorus pentoxide 20
-30% by weight, boron oxide 5-15% by weight and zinc oxide 1
It is characterized by comprising a glass component comprising up to 6% by weight and a solid solution of zirconium phosphate, zirconium oxide and niobium oxide as a filler added thereto in an amount of 10 to 30% by weight.

According to the container for a piezoelectric vibrator of the present invention, the sealing material for sealing the insulating substrate and the lid is 20 to 40% by weight of silver oxide,
A glass component consisting of 5 to 20% by weight of silver iodide, 20 to 30% by weight of phosphorus pentoxide, 5 to 15% by weight of boron oxide, and 1 to 6% by weight of zinc oxide contains zirconium phosphate, zirconium oxide and niobium oxide as filler. Since the solid solution consists of 10 to 30% by weight of the solid solution added externally, in order to improve the characteristics of the piezoelectric vibrator, the piezoelectric vibrator piece is bonded and fixed with a conductive adhesive and then heat-treated in vacuum. Even though the components in the sealing glass previously applied to the insulating substrate do not volatilize, the crystallization of the sealing glass does not proceed, and an extremely strong sealing between the insulating substrate and the lid is possible. It becomes possible to suppress a decrease in the degree of vacuum inside the container, which has the adverse effect of lowering the Q value of the piezoelectric vibrator inside the container or oxidizing and corroding the surface electrode thereof. As a result,
The piezoelectric vibrator can be hermetically sealed without deteriorating its characteristics, and can be operated stably for a long period of time.

Further, according to the container for a piezoelectric vibrator of the present invention, since the sealing material for joining the insulating base and the lid is made of glass containing no lead oxide, it may harm the human body or harm the earth. It does not burden the environment.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a sectional view showing an embodiment of a piezoelectric vibrator container and a piezoelectric vibrator using the same according to the present invention. In this figure, 1 is an insulating substrate, 2 is a lid, 3
Is a piezoelectric vibrator piece. Then, a piezoelectric vibrator is formed by hermetically sealing the piezoelectric vibrator piece 3 in a piezoelectric vibrator container including the insulating base 1 and the lid 2.

An insulating base 1 constituting a container for a piezoelectric vibrator
Is made of electrical insulating materials such as aluminum oxide sintered body, aluminum nitride sintered body, silicon carbide sintered body, silicon nitride sintered body, mullite sintered body, glass ceramic sintered body, etc. It is a substantially rectangular flat plate having a concave mounting portion 1a formed at a substantially central portion of the upper surface, and a piezoelectric vibrator piece 3 is adhered and fixed to the bottom surface of the concave mounting portion 1a via an adhesive 5.

The insulating base 1 has a width of, for example, 2 to 3.
About 5mm, length about 5-10mm, thickness 0.3-0.6m
m, the width of the concave mounting portion 1a is about 1 to 4 mm, the length is about 4 to 9 mm, and the depth is about 0.2 to 0.5 mm. With the demand for smaller and thinner piezoelectric vibrators, the size and thickness of the piezoelectric vibrators have been increasingly reduced.

When the insulating substrate 1 is made of, for example, an aluminum oxide sintered body, an organic binder, a solvent, a plasticizer, and a dispersant suitable for a raw material powder such as aluminum oxide, silicon oxide, magnesium oxide, and calcium oxide. The mixture is added and mixed to form a slurry, and the slurry is formed into a sheet using a sheet forming method such as a doctor blade method or a calender roll method, which is conventionally known, to obtain a ceramic green sheet (ceramic green sheet). Thereafter, the ceramic green sheet is manufactured by subjecting the ceramic green sheet to an appropriate punching process, laminating a plurality of the sheets, and firing at a high temperature of about 1600 ° C.

A plurality of metallized wiring layers 4 are formed from the bottom surface to the lower surface of the mounting portion 1a of the insulating base 1. Each electrode of the piezoelectric vibrator piece 3 is electrically connected to a portion of the metallized wiring layer 4 located at the mounting portion 1 a via an adhesive 5. The wiring conductor of the electric circuit is attached via a brazing material such as a gold-tin alloy.

The metallized wiring layer 4 is made of a metal paste obtained by adding a suitable organic solvent, solvent, plasticizer, etc. to a high melting point metal powder such as tungsten, molybdenum, manganese or the like, and forming a thick film by a conventionally known screen printing method or the like. The ceramic green sheet serving as the insulating base 1 is printed and applied in advance by employing a technique, and is fired at the same time as the ceramic green sheet, so that a predetermined pattern is formed on the upper surface of the insulating base 1.

The metallized wiring layer 4 is coated with a metal such as nickel or gold having good conductivity, good corrosion resistance and good wettability with the brazing material to a thickness of 1 to 20 μm by plating. In addition, it is possible to effectively prevent oxidation corrosion of the metallized wiring layer 4 and to connect the metallized wiring layer 4 and the piezoelectric vibrator piece 3 via the adhesive 5 and to connect the metallized wiring layer 4 to external electrodes (not shown). ) Can be very firmly brazed.

The bonding material 5 is made of, for example, silver-polyimide resin, and the piezoelectric vibrator piece 3 is placed on one end of the metallized wiring layer 4 exposed on the bottom surface of the mounting portion 1a of the insulating base 1 via the bonding material 5. Thereafter, the adhesive 5 is heated to a temperature of about 300 ° C. to perform a thermosetting treatment, and the thermosetting is performed so that the piezoelectric vibrator piece 3 is bonded and fixed to the insulating base 1. At this time, by heat-treating the adhesive 5 in a vacuum, the heat resistance of the resin-based adhesive 5 can be improved, and the piezoelectric vibrator is subjected to heat history due to heat history when the piezoelectric vibrator is mounted on an external circuit board. Vibration frequency characteristic fluctuation can be minimized.

The insulating substrate 1 has a through hole 6 extending from the bottom surface to the lower surface of the mounting portion 1a.

After the piezoelectric vibrator piece 3 is accommodated in a container including the insulating base 1 and the lid 2, the through hole 6 is evacuated to evacuate the space accommodating the piezoelectric vibrator piece 3 to a vacuum. It functions as a hole. The through hole 6 includes a first hole 6a on the upper surface side of the insulating base 1 and a second hole 6b on the lower surface side having an opening larger than the first hole 6a. A sealing metal member 7 described below is attached to the periphery of the opening on the second hole 6b side, specifically, to the lower surface of the step formed between the first hole 6a and the second hole 6b. Metal layer 8 is applied.

The first hole 6a and the second hole 6b
The opening is preferably a circular hole, and the first hole 6a is
The diameter of the second hole 6b is about 0.1 mm to 0.5 mm, and the diameter of the second hole 6b is about 0.1 mm to 0.5 mm larger than the diameter of the first hole 6a. However, the first hole 6a and the second hole 6b
The opening need not necessarily be circular, and the opening may be triangular, quadrangular, or any other shape. The metal layer 8 applied to the periphery of the opening of the first hole 6a on the side of the second hole 6b is partially covered by the first hole as long as it does not reach the upper surface of the insulating base 1. 6a may be slightly inserted.

The piezoelectric vibrator piece 3 is accommodated in the metal layer 8 of the through hole 6 in the space between the insulating base 1 and the lid 2.
After the space accommodating the piezoelectric vibrator piece 3 is evacuated to vacuum, the sealing metal member 7 is attached via the brazing material 9.
Thereby, the through-hole 6 is sealed, and the container for the piezoelectric vibrator is hermetically sealed.

The metal layer 8 to which the sealing metal member 7 for sealing the through hole 6 is attached is made of a metallized metal layer using a metal powder such as tungsten, molybdenum, silver or copper. In order to improve the wettability with the brazing material 9, a plating metal layer (not shown) made of nickel, gold, or the like is adhered to the surface as necessary.

Since the metal layer 8 is attached around the opening of the first hole 6a on the side of the second hole 6b in the through hole 6, the sealing metal member 7 will be attached. Since the material 9 is spread only around the opening of the second hole 6b of the first hole 6a to which the metal layer 8 is attached, the sealing metal member 7 is applied to the metal layer 8 via the brazing material 9. Through holes 6
Is not reached when the brazing material 9 reaches the upper and lower surfaces of the insulating base 1.

Further, the sealing metal member 7 is held around the opening of the first hole 6a and the second hole 6b by the surface tension of the molten brazing material 9, so that the brazing material 9 and the sealing metal Member 7
Does not protrude from the upper surface of the insulating substrate 1 and hinder the vibration of the piezoelectric vibrator piece 3 or protrude from the lower surface of the insulating substrate 1 and hinder the mounting when the piezoelectric vibrator is mounted on the external circuit board. .

The through-holes 6 are formed in the ceramic green sheet serving as the insulating substrate 1 by forming holes to serve as the through-holes 6 in a predetermined size and shape in advance.
The first hole on the upper surface side from the bottom surface to the lower surface of the mounting portion 1a
6a and a second hole 6b on the lower surface side larger than the opening of the first hole 6a.

The metal layer 8 is formed by sintering a metal paste obtained by adding a suitable organic binder and a solvent to a metal powder such as tungsten together with a ceramic green sheet serving as the insulating substrate 1. The second hole 6 of the first hole 6a in the through hole 6 formed in
It is attached to the periphery of the opening on the side b, specifically, to the lower surface of the step formed between the first hole 6a and the second hole 6b.

The sealing metal member 7 for sealing the through hole 6 includes
For example, it is a sphere made of metal such as copper. The brazing material 9 for attaching the sealing metal member 7 to the metal layer 8 is a brazing material made of an alloy such as a gold-tin alloy.

The cover 2 is provided on the insulating base 1 with a sealing material 10.
Are joined through. The lid 2 has a function of hermetically housing the piezoelectric vibrator piece 3 inside the container, and is a substantially quadrangular flat plate made of a light-transmitting material such as glass or sapphire. The cover 2 is made of a light-transmitting material because the vibration frequency of the piezoelectric vibrator piece 3 can be adjusted by irradiating a laser beam to the piezoelectric element piece 3 housed in the container through the cover 2. It is. If it is not necessary to adjust the vibration frequency of the piezoelectric vibrator piece 3 by irradiating such a laser beam, the lid 2 does not necessarily need to be made of a translucent material, for example, an iron-nickel-cobalt alloy. Or a ceramic such as a sintered body of aluminum oxide.

If the cover 2 is made of glass or sapphire, a wide area plate made of glass or sapphire having a thickness corresponding to the cover 2 is cut into a predetermined size and shape, or the cross section is made. It is manufactured by cutting a rod made of glass or sapphire having a size and shape corresponding to the lid 2 to a predetermined thickness. In this case, it is preferable that each corner formed on the lid 2 be chamfered so that minute corners or the like of the lid 2 do not occur. By doing so, it is possible to prevent minute chips generated in the lid 2 from entering the container and hindering the vibration of the piezoelectric vibrator piece 3.

The joining of the lid 2 to the insulating substrate 1 via the sealing material 10 is performed, for example, by first applying a sealing material to the outer peripheral portion of the upper surface of the insulating substrate 1.
Before the piezoelectric vibrator piece 3 is bonded and fixed to the insulating base 1 with the conductive adhesive 5 by the conductive adhesive 5, the conductive adhesive for bonding the piezoelectric vibrator is heated in a vacuum. Next, the lid 2 is placed on the upper surface of the insulating base 1 with the sealing material 10 interposed therebetween, and finally, the sealing material 10 is heated and softened and melted, and then cooled and solidified. .

A sealing material is provided on the upper surface of the insulating substrate 1 and on the outer peripheral portion.
In order to apply 10 in advance, a glass paste serving as a sealing material 10 is printed and applied to the outer peripheral portion of the upper surface of the insulating base 1 by using a screen printing method, and the glass paste is heated and softened and melted. A method in which the sealing material 10 is adhered to the upper surface of the insulating base 1 by cooling and solidifying is adopted.

When a glass paste serving as a sealing material 10 is printed on the outer peripheral portion of the lower surface of the lid 2 by using a screen printing method, a part of the glass paste is printed on the outer peripheral portion of the lower surface of the lid 2 at the time of printing. It may scatter and adhere to the center. If such scattering occurs, a projection made of glass is formed at the center of the lower surface of the lid 2 after the insulating base 1 and the lid 2 are joined, and the lid 2 is attached to the piezoelectric vibrator piece 3 housed inside the container. When the vibration frequency of the piezoelectric vibrator piece 3 is adjusted by irradiating the piezoelectric vibrator piece 3 with a laser beam, the protrusion hinders the accurate transmission of the laser beam passing through the lid 2, and the vibration frequency of the piezoelectric vibrator piece 3 is reduced. Adjustment is difficult. Therefore, if the vibration frequency of the piezoelectric vibrator piece 3 is adjusted by irradiating a laser beam to the piezoelectric vibrator piece 3 housed inside the container through the lid 2, the sealing material 10 is insulated. It is preferable to preliminarily adhere only to the upper surface of the base 1.

In the present invention, the sealing material 10 is composed of 20 to 40% by weight of silver oxide, 5 to 20% by weight of silver iodide, 20 to 30% by weight of phosphorus pentoxide, 5 to 15% by weight of boron oxide and 1 to 5% by weight of zinc oxide. A solid solution of zirconium phosphate, zirconium oxide, and niobium oxide as a filler is added to a glass component composed of 6% by weight by an external addition to form 10 to 10%.
It is preferable to add 30% by weight.

In the present invention, the sealing material 10 is composed of 20 to 40% by weight of silver oxide, 5 to 20% by weight of silver iodide, 20 to 30% by weight of phosphorus pentoxide, 5 to 15% by weight of boron oxide and A solid solution of zirconium phosphate, zirconium oxide, and niobium oxide as a filler is added to a glass component composed of 6% by weight by an external addition to form 10 to 10%.
Since 30% by weight was added, the sealing material 10 did not contain a fluorine component, and the glass component did not volatilize even when the temperature was maintained at a temperature equal to or higher than the softening point in a vacuum. In order to improve the frequency characteristics, even if the piezoelectric vibrator piece 3 is bonded and fixed with a conductive adhesive and then heat-treated in a vacuum, the components in the sealing glass previously applied to the insulating base 1 volatilize. The crystallization of the sealing glass by vacuum heating does not progress, and extremely strong sealing with the lid 2 becomes possible. It is possible to suppress a decrease in the degree of vacuum inside the container, which adversely affects oxidative corrosion of the container. As a result, the piezoelectric vibrator can be hermetically sealed without deteriorating its characteristics, and can be operated stably for a long period of time.

If the amount of silver oxide in the glass component of the sealing material 10 is less than 20% by weight, the softening and melting temperature of the glass tends to be high, making it difficult to hermetically seal the container at a low temperature. On the other hand, if it exceeds 40% by weight, the softening and melting temperature of the glass is lowered, and the heat of mounting the piezoelectric vibrator piece 3 on the external electric circuit board causes the sealing material 10 to soften and melt, so that the inside of the container is melted. The degree of vacuum is greatly reduced, and the vibration frequency characteristics of the piezoelectric vibrator tend to be impaired. Therefore, the amount of silver oxide is 20
Preferably it is in the range of 4040% by weight.

On the other hand, if the amount of silver iodide is less than 5% by weight, the softening and melting temperature of the glass tends to be high, making it difficult to hermetically seal the container at a low temperature. If it exceeds, the chemical resistance of the glass tends to decrease, and the reliability of hermetic sealing of the container tends to greatly decrease. Therefore, the amount of silver iodide is preferably in the range of 5 to 20% by weight.

If the amount of phosphorus pentoxide is less than 20% by weight, the softening and melting temperature of the glass tends to be high, which makes it difficult to hermetically seal the container at a low temperature, whereas if it exceeds 30% by weight. The chemical resistance of the glass tends to decrease, and the reliability of hermetic sealing of the container tends to decrease significantly. Therefore, the amount of phosphorus pentoxide is preferably in the range of 20 to 30% by weight.

If the content of boron oxide is less than 5% by weight, the crystallization of the glass tends to proceed, making it difficult to hermetically seal the container at a low temperature. On the other hand, if the content exceeds 15% by weight, the chemical resistance of the glass decreases. However, the reliability of hermetic sealing of the container tends to be greatly reduced. Therefore, the amount of boron oxide is 5-15
Preferably it is in the range of weight%.

When the content of zinc oxide is less than 1% by weight, the chemical resistance of the glass tends to decrease, and the reliability of hermetic sealing of the container tends to decrease significantly. There is a tendency that crystallization proceeds and it is difficult to hermetically seal the container at a low temperature. Therefore, the amount of zinc oxide is preferably in the range of 1 to 6% by weight.

The filler of zirconium phosphate / zirconium oxide / niobium oxide solid solution adjusts the coefficient of thermal expansion of the sealing material 10, tightly joins the sealing material 10 to the insulating base 1 and the lid 2, and hermetically seals the container. It has the effect of significantly improving the reliability and improving the mechanical strength of the sealing material 10. When the content of the filler is less than 10% by weight, the mechanical strength of the sealing material 10 is reduced, and the thermal expansion coefficient of the sealing material 10 is largely different from the thermal expansion coefficients of the insulating base 1 and the lid 2. As a result, there is a tendency that the sealing material 10 cannot be firmly joined to the insulating base 1 and the lid 2. On the other hand, 30% by weight
If it exceeds, the fluidity of the sealing material 10 tends to decrease, and it becomes difficult to hermetically seal at low temperatures. Therefore, the content of the filler is preferably in the range of 10 to 30% by weight.

In the present invention, the brazing material 9 and the sealing material
No. 10 does not impose a burden on the global environment because none of them contains lead oxide.

Thus, according to the container for a piezoelectric vibrator of the present invention, one end of the piezoelectric vibrator piece 3 is attached to the portion of the insulating base 1 located at the mounting portion 1a of the metallized wiring layer 4 by an adhesive 5 made of silver-polyimide or the like. And the electrodes of the piezoelectric vibrator piece 3 are electrically connected to the metallized wiring layer 4. Thereafter, the lid 2 is sealed with the sealing material 10 so as to cover the mounting portion 1 a of the insulating base 1. The piezoelectric vibrator piece 3 is accommodated in the space between the insulating base 1 and the lid 2 by joining through the intermediary. Further, the space between the insulating base 1 in which the piezoelectric vibrator piece 3 is accommodated and the lid 2 is evacuated to a vacuum so that the gas inside the space does not hinder the vibration of the piezoelectric vibrator piece 3. At the same time, the sealing metal member 7 is attached to the metal layer 8 in the through-hole 6 formed in the insulating base 1 via the brazing material 9, whereby the airtight sealing is performed. At this time, the piezoelectric vibrator can obtain a high Q since the space in the container accommodating the piezoelectric vibrator piece 3 is evacuated to a vacuum.

The present invention is not limited to the above-described embodiment, and various changes and improvements can be made without departing from the scope of the present invention.
In this example, the through hole 6 has two steps, but may have one step.

[0047]

According to the container for a piezoelectric vibrator of the present invention, the sealing material for joining the insulating substrate and the lid is composed of 20 to 40% by weight of silver oxide, 5 to 20% by weight of silver iodide, 20-30% by weight phosphorus,
A solid solution of zirconium phosphate, zirconium oxide and niobium oxide is added as a filler to a glass component comprising 5 to 15% by weight of boron oxide and 1 to 6% by weight of zinc oxide by external addition.
3030% by weight, so that the piezoelectric vibrator piece can be fixed to the insulating substrate even if it is heat-treated in vacuum after it is fixed with a conductive adhesive to improve the characteristics of the piezoelectric vibrator. The components in the sealing glass applied in advance do not volatilize, the crystallization of the sealing glass does not progress, and an extremely strong sealing between the insulating base and the lid is possible, and the piezoelectricity inside the container is reduced. It is possible to suppress a decrease in the degree of vacuum inside the container, which has the adverse effect of lowering the Q value of the vibrator or oxidizing and corroding the surface electrode, and as a result, the piezoelectric vibrator has the characteristics It is possible to hermetically seal without causing deterioration and to operate stably for a long period of time.

Further, according to the container for a piezoelectric vibrator of the present invention, the sealing material for joining the insulating base and the lid is made of glass containing no lead oxide. It does not burden the environment.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an example of an embodiment of a container for a piezoelectric vibrator of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Insulating base 1a ... Mounting part 2 ... Lid 3 ... Piezoelectric vibrator piece 4 ... Metallized wiring layer 6 ... .... Through hole 10 ..... Sealant

Claims (1)

[Claims] 1. A substantially flat insulating substrate having a piezoelectric vibrator piece mounting portion on the upper surface and a through hole provided from the upper surface to the lower surface, and a sealing material previously adhered to the upper surface of the insulating substrate. A lid for housing the piezoelectric vibrator piece in a space between the piezoelectric vibrator and the insulating substrate, wherein the sealing material is 20 to 40% by weight of silver oxide and silver iodide. A solid solution of zirconium phosphate, zirconium oxide and niobium oxide is added as a filler to a glass component consisting of 5 to 20% by weight, 20 to 30% by weight of phosphorus pentoxide, 5 to 15% by weight of boron oxide and 1 to 6% by weight of zinc oxide. 10 by addition
A container for a piezoelectric vibrator, comprising 30% by weight.