JP2002174238A - 磁気軸受制御装置、及び該装置を用いた真空ポンプ - Google Patents

磁気軸受制御装置、及び該装置を用いた真空ポンプ

Info

Publication number
JP2002174238A
JP2002174238A JP2000373376A JP2000373376A JP2002174238A JP 2002174238 A JP2002174238 A JP 2002174238A JP 2000373376 A JP2000373376 A JP 2000373376A JP 2000373376 A JP2000373376 A JP 2000373376A JP 2002174238 A JP2002174238 A JP 2002174238A
Authority
JP
Japan
Prior art keywords
circuit
resistor
magnetic bearing
impedance circuit
limiter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000373376A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002174238A5 (enExample
Inventor
Toshiaki Kawashima
敏明 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP2000373376A priority Critical patent/JP2002174238A/ja
Publication of JP2002174238A publication Critical patent/JP2002174238A/ja
Publication of JP2002174238A5 publication Critical patent/JP2002174238A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0451—Details of controllers, i.e. the units determining the power to be supplied, e.g. comparing elements, feedback arrangements with P.I.D. control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Amplifiers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP2000373376A 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ Pending JP2002174238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000373376A JP2002174238A (ja) 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000373376A JP2002174238A (ja) 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ

Publications (2)

Publication Number Publication Date
JP2002174238A true JP2002174238A (ja) 2002-06-21
JP2002174238A5 JP2002174238A5 (enExample) 2005-11-04

Family

ID=18842779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000373376A Pending JP2002174238A (ja) 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ

Country Status (1)

Country Link
JP (1) JP2002174238A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010519453A (ja) * 2007-02-24 2010-06-03 オーリコン レイボルド バキューム ゲーエムベーハー 高速回転式真空ポンプ
EP2738406A1 (en) * 2012-11-29 2014-06-04 General Electric Company Magnetic Bearing Systems and Methods of Controlling the Same
CN112815006A (zh) * 2021-01-20 2021-05-18 华中科技大学 优化桥臂电流应力的磁悬浮轴承串联绕组控制装置及方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010519453A (ja) * 2007-02-24 2010-06-03 オーリコン レイボルド バキューム ゲーエムベーハー 高速回転式真空ポンプ
EP2738406A1 (en) * 2012-11-29 2014-06-04 General Electric Company Magnetic Bearing Systems and Methods of Controlling the Same
CN103851082A (zh) * 2012-11-29 2014-06-11 通用电气公司 磁性轴承系统及其控制方法
CN112815006A (zh) * 2021-01-20 2021-05-18 华中科技大学 优化桥臂电流应力的磁悬浮轴承串联绕组控制装置及方法
CN112815006B (zh) * 2021-01-20 2021-12-03 华中科技大学 优化桥臂电流应力的磁悬浮轴承串联绕组控制装置及方法

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