JP2002174238A5 - - Google Patents

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Publication number
JP2002174238A5
JP2002174238A5 JP2000373376A JP2000373376A JP2002174238A5 JP 2002174238 A5 JP2002174238 A5 JP 2002174238A5 JP 2000373376 A JP2000373376 A JP 2000373376A JP 2000373376 A JP2000373376 A JP 2000373376A JP 2002174238 A5 JP2002174238 A5 JP 2002174238A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000373376A
Other languages
Japanese (ja)
Other versions
JP2002174238A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000373376A priority Critical patent/JP2002174238A/ja
Priority claimed from JP2000373376A external-priority patent/JP2002174238A/ja
Publication of JP2002174238A publication Critical patent/JP2002174238A/ja
Publication of JP2002174238A5 publication Critical patent/JP2002174238A5/ja
Pending legal-status Critical Current

Links

JP2000373376A 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ Pending JP2002174238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000373376A JP2002174238A (ja) 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000373376A JP2002174238A (ja) 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ

Publications (2)

Publication Number Publication Date
JP2002174238A JP2002174238A (ja) 2002-06-21
JP2002174238A5 true JP2002174238A5 (enExample) 2005-11-04

Family

ID=18842779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000373376A Pending JP2002174238A (ja) 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ

Country Status (1)

Country Link
JP (1) JP2002174238A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007009080A1 (de) * 2007-02-24 2008-08-28 Oerlikon Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe
US20140145534A1 (en) * 2012-11-29 2014-05-29 General Electric Company Magnetic bearing systems and methods of controlling the same
CN112815006B (zh) * 2021-01-20 2021-12-03 华中科技大学 优化桥臂电流应力的磁悬浮轴承串联绕组控制装置及方法

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