JP2002174238A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002174238A5 JP2002174238A5 JP2000373376A JP2000373376A JP2002174238A5 JP 2002174238 A5 JP2002174238 A5 JP 2002174238A5 JP 2000373376 A JP2000373376 A JP 2000373376A JP 2000373376 A JP2000373376 A JP 2000373376A JP 2002174238 A5 JP2002174238 A5 JP 2002174238A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000373376A JP2002174238A (ja) | 2000-12-07 | 2000-12-07 | 磁気軸受制御装置、及び該装置を用いた真空ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000373376A JP2002174238A (ja) | 2000-12-07 | 2000-12-07 | 磁気軸受制御装置、及び該装置を用いた真空ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002174238A JP2002174238A (ja) | 2002-06-21 |
| JP2002174238A5 true JP2002174238A5 (ja) | 2005-11-04 |
Family
ID=18842779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000373376A Pending JP2002174238A (ja) | 2000-12-07 | 2000-12-07 | 磁気軸受制御装置、及び該装置を用いた真空ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002174238A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007009080A1 (de) * | 2007-02-24 | 2008-08-28 | Oerlikon Leybold Vacuum Gmbh | Schnelldrehende Vakuumpumpe |
| US20140145534A1 (en) * | 2012-11-29 | 2014-05-29 | General Electric Company | Magnetic bearing systems and methods of controlling the same |
| CN112815006B (zh) * | 2021-01-20 | 2021-12-03 | 华中科技大学 | 优化桥臂电流应力的磁悬浮轴承串联绕组控制装置及方法 |
-
2000
- 2000-12-07 JP JP2000373376A patent/JP2002174238A/ja active Pending