JP2002174238A5 - - Google Patents

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Publication number
JP2002174238A5
JP2002174238A5 JP2000373376A JP2000373376A JP2002174238A5 JP 2002174238 A5 JP2002174238 A5 JP 2002174238A5 JP 2000373376 A JP2000373376 A JP 2000373376A JP 2000373376 A JP2000373376 A JP 2000373376A JP 2002174238 A5 JP2002174238 A5 JP 2002174238A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000373376A
Other versions
JP2002174238A (ja
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Publication date
Application filed filed Critical
Priority to JP2000373376A priority Critical patent/JP2002174238A/ja
Priority claimed from JP2000373376A external-priority patent/JP2002174238A/ja
Publication of JP2002174238A publication Critical patent/JP2002174238A/ja
Publication of JP2002174238A5 publication Critical patent/JP2002174238A5/ja
Pending legal-status Critical Current

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JP2000373376A 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ Pending JP2002174238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000373376A JP2002174238A (ja) 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000373376A JP2002174238A (ja) 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ

Publications (2)

Publication Number Publication Date
JP2002174238A JP2002174238A (ja) 2002-06-21
JP2002174238A5 true JP2002174238A5 (ja) 2005-11-04

Family

ID=18842779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000373376A Pending JP2002174238A (ja) 2000-12-07 2000-12-07 磁気軸受制御装置、及び該装置を用いた真空ポンプ

Country Status (1)

Country Link
JP (1) JP2002174238A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007009080A1 (de) * 2007-02-24 2008-08-28 Oerlikon Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe
US20140145534A1 (en) * 2012-11-29 2014-05-29 General Electric Company Magnetic bearing systems and methods of controlling the same
CN112815006B (zh) * 2021-01-20 2021-12-03 华中科技大学 优化桥臂电流应力的磁悬浮轴承串联绕组控制装置及方法

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